Semiconductor Technologies DigiTteaclh nJiocuarln al DigitEaqlu ipmeCnotr poration VolumeN u4m ber2 Spri1n9g9 2 Editorial .J:tC.t lBll'a kLE·d.i wr Helen1 .P.a tn:r,on.. \ S>ociaEtdei tor K:nhleeMn. t etSson., \s">eiEadtitt·o r Circulation C:lllll'.VIr. li'hnicl ilps,A dministrator Shen·Ly .Go nzalez P.-oduction MildreRd. R osenzweiPgr,o ductioEnd itor Margare1t.B u.r dine'.J )'pographer Pt:teRr. W oodburyI. llustrator AdvisoBroya rd SamuelH .fu ll,eC hrairman Hichar\Vd Beane RoberMt. G lorioso Richard].H uliln gsowrth Ai:lGn. "' emeth VictoAr. V 1·ssotsky Gam B.Wi nters The /JigilTaif! clllliati'fp ujbullislehdmqa ula rtn'l1 l1D1'ig iatl EqupimentC orporatioJn-.:\- ila6in S tr ee.\·lll.ll -l.VBI>.H �lanyard. .\l:l"achu"f·tltl'i 7-'i2 '>��ub1,.cr iptitoon t'h c.fu/1a/r'clSl ilOt.l OO lirn1i "ru " andm usth e prepaidi n{ I.fSu.n dsl.n ilersiatn\d· collegper ufc"ora'n dl 'lslt.udDe.nt isnt hH:.Co.\1. Singleeo pica,;n db acki ssueasr e: ll·ail"a'h"k1 h$.eOacOh from DigitParle sosf D igitEaqlu ipmenCto rporation,I 1\urlington Woocb Dri\'Bcu,r lingto\nL\,O l:\HO-i·�7.lJ DigitLa'ml ployL'l'Sn w\·s ends uhscriptoirodntTosn theL' 'Wi't o IU>VA::X.JIORINAI.orh yi nteroflimn:·t itlo m aibtop\ IIl.·H Orderss houlidn cludbea dgeJ lltmhsLitTe.l· o cnioenodc.a mi addr"s!.\ IeIl llploymo fa ddress. Co!l!lllconnr r.h., eo ntcento fa n�p apera rc\ \'t:konaH.n:ddm ay heS l'ntt ot iHe:d itoart t hep ub!i 'hcd-ohr)n etw orka ddr· ss. <:opnigh''t 1 'D)i'gi)tEa2qlu ipmenCto rporatioCno.p ying \Yitholu'cct i�p ermittepdro \·idvdt h;l...ul. c .hc opi...::Ist mT adfe( n· usci nc ducttinni;n.sdl itutihn�·nL t�c ultJ�l lC!lllawnr_d.a.,n :n ot di,u·ihuttcid1 rcommnci:aLth'la nt:gtc.A hstr:Kti1\night credit oft ligiEtqauli pmC'Cnotr por:Jti:o�nu·t,h oJ·i.s,p Jetrimpi tt.e d .\ IrIi gllrlc'" n·ecl. l'ilntlc(>·r matiinot nh c.Jutir''r ulhljerutt old J:utgwci thout notic:e1 n!' igit;tl EquipmentC orpor:itoln .D igill:q-tu:li pn1l'tl< .l orp(i1t)1 ;r1 t:�t;t...-. .u nJc no n.·.. r.o n:-,ihilit� f o;ru1 eyr n'�t"l'l .nlll. ta\p pc:itntr lu.. · . frJ/11"1/0/. I�S.O X'JH-')10" Document:Jli�oulmlh crE Y-1i'..-1'>>12'1 C'fr/Jw(I .DeI..se•\.( jr1f� I0! II 'IICdI!''SSSCCIS' iilIflbJ i![s'. d, (·/:/m'1le/' St!o'f dll lifd TtU'htO:eRCl mI . >iI.\ i J gIaiiI.mnnt tdg: a\h tr e\lcDI·t. irS : lg.li ktlla:ollrthlg so\o ./' l A>\iX:)\.\i(tt">::0 qt(ul1\'Ai !p"1m.cc (!llt.: Uor,p\t>o\l\r aTt,i : �tt nrt:IlJI d'c!nUt:o:\afJI\r r.ctth.i i rlC':oS� mJpcuomtfS:tcI)' t1·rt lI. d:S1t1an1tdo.r Jdu n>irI< nie\r ,1.i t 7beJ I!IIJ/Imlicfm�.rPJiLlT:\i cn1m. I Contents 10 Forewodr R.].H ollingsworth SemiconductToerc hnologies 12M icroprocessPoerr formancaen d ProcesCso mplexityi nC MOS Technologies BjorZne ttleurndj,a mesA .F arrealnld,T homasF Fox 25 NumericaDle vicaen dP rocesSsi mulatoin Tools inT ransistDoers gin MardeHn. S eavejyo,h nV fariceNlaldii,mA .K halil, GerdN anzL,l andMa. RichardsCohnr,i sti0a.Sn c hiebl, Hamid SRo.l eimaannid,M artin Thurner 39 CMO S-4Te chnologfyo rF astL ogica nd DenseO n-chiMpe mory AndreI .N asGrr,e gorGyr)ul.aA ,n toniCo. B ertain,d RicharD.dj ones 51C MOS-4B ack-enPdr ocesDse velopmenfto ra VLSI0 .75 pm Triple-lIenvteelr connecTteicohnn ology MarioMn. G arvejro,s epMh. B ulegrT,h omasE .C lark, jamsheHd. D ubashL,o raiMn. R ossa,n dD anielW)e.l ch 73 ImplementatioofnD efecRte ductioSnt rategies intoV LSIM anufacrtiung MaryB ethN asra ndE llenM]a.g er 83A YielEdn hanemenc tM ethodologyf or CustomVL SI Martufactriung RandaSl.lC ollicXa.j, o sepDhi etriRcuhd,o lLfa mbracJhrt,. andD aviGd .L au 100 TransistHoort C arrieRre liabilAistsyu arnce inC MOST echnoolgies DanieBl.j a cksoDna,v iAd .B ellB,r iaSn.D oyle, BruceF)i.s hbeiannd,D aviBd. K rakauer 114E /ectromigartioRne liabiliotfyV LS/lnterconnect ].j osepChl ementE,u geniMa. A tako,av ndj ames R. Lloyd I EditoIrn'st roduction jonerse viethwe f ornt-epnrdo ce(sofsr mtaioonf devicaen dl ocailne trconcnte)f or theC MOS-4 0.7-/L5m technolaongdty h e stteapkset nom eet desirgenq uiremTehnetaysl .sd oe scrtihbeeef e fcts ons ubmicdreovni creesl attoet dh sec ainlogf f ea tursei zaensde xaimnseo mseo ltuions. Goalfsor theb ack-epnrdo ce(sfsom ratioonf globmaelt ailn tceornnewcetr)a el sdori vebny t he logdiecs irgenq uiremfoerhn itgsh ceirr icdtue nsy.i t Ina didtiboanc,k -deenvde lopmgeoanltis n cleudd thec ontinuuseedo fe quipment defvoerl oped the10 .�L-m CMOS-t3e chngoylM.oa riGoanr vejro,e JanCe. B lake BulgeTrom, ClarJka,m shed Dubash, Lorain Ross, Edtior andD anW elcrhe altheo wt oowlesr meo dififeord CMOS-an4d d escrniebweb lantkuentg satnedpn l a Thed esigns eomfi conducchtiophrsa sb eetnh e narizaptrioocne ssessu bfmoircd reovni ces. topiocfs everpaals Dti gitTaeclh nicjaoulr nal To produac sep ecified ofyC iMeOlSdd e vices, issuWeist.th h ei ntroduocftA ilopnh2 a1 06t4h,e deefcrte ductainodyni eld enhanlckieeom tehnetrs , worldf'ass tmeisctr oproc,et shsiiossr sufoec uses processmeuss,tb ei intiactoendc urrewnittlhy for thefi rstti moen t hed evelopmoefsn te mi thed esign MsatraByge et.Nh a sarn dE lelnM ager conductteocrh noltohgaite smp aokses itbhlheegi h revitehwpe r inciopfml iecsr onctoaimnatcioonn perofrmancofeD igitaVLSlI' csh ipEsn.g ineienr s troaln do utlidneef ercetd ucttieocnh niqtuoe s AdvancSeedm iconduDcetvoerl opmpernets enti ncreparsoed uycite ilndt h e aorfep a-gsa tlee agkea in-depthi nvtCioMe OwSst- e4c hnolwohgiiecsh, p roandm eta2l s horcti rcuTihteps a.p etrh aftolo lws ducmeic roprocewsistouhrp ts o 1 .m7 iiloltnr ansisaddersstehsme etholdoogy yioefel ndh ancement, torasn do peratfirqneuge ncaiseh si gahs2 00M HZ. inclugd pirnocesspirnogc,e esqsu ipmemnatn,u Thes ignifiicnacnrte apseero frimna nacceh ievedf atcurianngd,d esiagnnd t esRta.n dCyo llciaj,o e witeha cghe neraotfiC oMnO St echnoliosig npy a rt DietcrhiR,u dyL ambracahntdD, av eL aud escribe ther esluto fa syngeirisctr elatiobnesthwiepe n theu seo ft escth idpa tyai,e mlodd els,t haen d microprocedsessoirag nnd p roceesnsg ineIenr s.s eelcteadp proatcoyh i ealnda lyasnidfso re casting. thepiarp eorn p rocetsesc hngoylc oontributioAnnsa dvancmeedt hotdh ahte ldpess ignperresd ict tom icroprocepsefsrororm ancBej,o rZne ttleurnd, cirichtuo cta rrlifieetri maen dt humsa ximeit zran JimFa rerlaln,dF ranFko xd escrtihbseeca lgit nhe sistpoerro frmanactet her equirreeildba iltiyl evel oryt hahta sl etdo a douibnlogf g atdee nsiatnyd is tthoep oifca p apebryD anj ackson, BeDlal,v id ani ncreoaf3s 0ep ercengta tsiepn e eidnf ours uc BriaDno ylBer,u cFei shbaenindD, a viKdr akearu. cessiCvMeO Sg eneratTihoenysd .i scupsrso cessT hea uthordse scrai pbhey sicbaalsleymd e tohd feateusri mplementCeMdO S-a4n,dc lowsiet ahd is ford etermitnhiean cgc eplttaiybo ifb otc arrier in cussioofmn o deltsh aptr edipcrto cess variaitniudocnesdd.e gradaitnit aornns iscthoarr actse.r istic Modealsn dt oolesss,e ntiinpa rlo viddiensgi gn Anothperre dicotfco hri lpfei timiest hre eliabil eresa rilnys iignhtttoh ceh aracteorfit shtteri acns itoyf t hei ntercecotnIsnn.t hepiarp eorn e lercot sisttoobr esf abricaatretedh ,fe o cuso fa p apebry migratrieolni abjioleCi lteym,te £,nu genAitaao kv, MardeSne avjeoyh,F na rilciNe,al diKmh aliGle,rd andJ imL loypdr oviad hee lpfouvle rvioeftw h e NanzL,l anRdiac hardCshorni,s Stcihaine Hbalm,i d potenteiraols iionn meitnaetlr conncelcutte o SoleimaanndMia ,r tTihnu rn.Te hrea uthodress cribee lectcroodnnu cotniT.h eyt hepnr eseans tc ianlg severpahly simcoadle ltsh aatc curastiemlluya te modedle velotpoec dh aracttehreri elzaeibi ltyio f transibsethoarv, ia onrdp resennutm erimcaatlh e CMOsc-h4i ipn terconnects. maitcamle thoudsse tdo e nhanecxei stsiinmlgua Thee dittohrasnR ki cHho llnigsworatnhdA rlene torAns .o vervioefDw i gista anldo' theerfsof'r ttso Delvoyf t heA dvancSeedm iconduDcetvoerl op ingtreatsei mluatitoonoc losn clutdhepesa epr. mentG roufpor t hegiuri danacnedu nfaliign sup Then eefdo rb othhgi h-denlsoigtgiyac t easn d poritnd evelotphiinisgs sue. on-chciapc he memionmr iyc roprocesprseors sentsspe ciaclh allengetsop roceesnsg eienrs. AndrNea s,rG regG rulaA,n tonBieor tain,dR ich 2 I Biographies EugenMi.aA takovA sa p rinceinpgailn iene rtA hdev ancSeedm iconductor Developm(eAnStDG )r ouEpu,g enAitaa kiosrv e sponsfioebrv lael uaotni-ncgh ip intercornelnaiebciitytl. S injcoeii nnDgi giitn1a 9l8 s8h,e choasn tribtuost eevd eraClM OSVL SIp rojeictnsc,li undgth eA lph2a1 06c4h iPpr.e ivou,sE luygenia workeadtt hMeo scoIwn sttieot fSu emiconductor ESlheerc etcreoinavi ecds . B.ES..Ea.n da nM .S.Ef.rEo.mt h eM oscoEwn erIgyn stiatnudta P eh,. .fD rotm he MoscoIwn steio tfSu tteaenldA lloySsh.eh oldtswo patenatnsdh aspu blished 17p apeornss emicondduecvtioacrne di ntercornenleicat.b ility DaviAd. B ellD aviBde lalt tenBdaetdCe so lgleea ndr eceiavB e.ddS e.g ree in physiacnsdm athemaitni c1s9 I8n10 9.8 h4e,c omplehtiePsdh . .D pihny siacts thMea ssascehtuItnss teio tfTu etchnoloDgayv.iw do rkeadtT exasI nstruments ons ubmicCrMoOnSa ndB iCMOdSe veloppmernittoo rj oignD iingistA adlv'anced SemicuocntdoDre velopmGernotu ipn 1 989H.is c urrewnotr ki ncleussd ub micron transidsetsoircg hna,r taecrizaatnidmo ond,e liDnagv.ii dsa m em CMOS beorf I EEaEn dP hBie tKaa ppa. AntoniCo.B ertiAn toniBoe ritsci u rrenctolnyt riinbtguo t twhoer kof t he Fa4be ngineeorriagnngi zaatsia s oenn ieonrg in.e ehradse veloapnedid m lpe I k menteCdM OS-p4r ocesisnme as nuafcturiinngcd,li unmge tadle posiptrioon cessfeorsc obaalltu,m iniunmt erconneTcitNai dohness,li aoyne arnsc,l lToicNa l interconAnnetcotnsai.slo o d eveloap ecdo blats iilcipdreo cetsosd ecrease deefctasn di mplemeTnitNed edp osiiothna rdwaarnedp rocestsore esd upcaer ticlHeegs r.a duaftreodRm e nssePloaleytre chInnisct iitn1u 9t8ew8 i tahB S..i n matereinaglisn eearnidjn ogi nDeigdi tian1l 9 89. JosepMh. B ulgerj oseBpuhl giesarp rinceinpgailn weietrth h Fea b4 manu facturienngg ineeorriagnngi zatHiiomsna i.na reoafsi nvolveamretenh tifi nl m manuafcturcihnegm,i vcaaplo dre posiotfit ounn gstaenndm, e tlailzatJiooen . joinDeidg iitn1a 9l8 a8f t1e0ry ears AwniatlhDo egv icIencs.,w, o rkionngt hin filmd eveloepnmatn dm anuafcturHienr ge.c eihvieBsd. dSe.g reiene lectrical engineefrrionNmgo rtheaUstneirvne rs1i9t8y2 . in ThomaEs. C larkA princeinpgailn ,eT oemr Clariksc urrentmleym beorf a thCeM Os-6t echnoltoegawymi thtihnAe d vancSeedm iconduDcetveolro pment GrouTpo.m hasd evelobpleadn kteutn gsptleunmg o dulefsor C MOS-C4M,O S-), andC MOS-t6e chnoloHgeia elssp.oe rofrmefdea sibiiytl stduieosf Caon dT i sailciidoapntr ocesfsorec so ntascotu,r cdera,i na,n dg ataep plicaitnti hoen s CMOS-t4e chlnoogTyo.m holdaPs h..iD ni norgacnhiecm isftrroytm h Len iver sitoyfM ascsahuseatntds hpausbi lshneudm eropuasp eorns tshueb joecfiIdo ens ihgenh ;a tsw op atents. MarioMn. G arverM ariGoanr vwears t hep rojelceta daenrds upervisor of theC MOSb-a4c k-pernodc edsesv elopmgernotua pn di sc urrenptelryf orming thsea mfeun ctifoornt hCeM OS-t6ec hlnoogMya. rijoonni edD igiitn1a 9l8 s0o on afttehroe p enionftg h Heu dsosni tSeh.ei nitiywa olrlkeidnb ipomlaanru afctru infgab ricaatnidjo non iedt hAed vancSeedm iconduDcetvoerl opmGernotui pn 198t2od evelsoopm oef t hoer igipnlaalse mtac hisnygs tefmors ' MOaSn dC MOS applicaMtairoinhoson.l das B .Ad.e gr(e1e9 37)f roOm berlCionll egaen dw as previoeumspllyo yeAdl pbhyIa n dustarnidOe hsi Moe dicParlo ducts. 5 Biogrpahies GregorJy.G rulaA consuletnagnitn eien r tAhdev ancSeedm iconodru ct DevelmoepnGtr opu,G reGgr ulhaa wso rkeodnp rocedsesv elopmaenndit n te grtaiofnoC rM OS-,C1 MOS-a2n,d C MOS-t4e chnoloCguirerse.nh teil sy the super visoofrt hCe'l' lOSfo-r5n t-epnrdo cetsesc hnolaongdy hpaersof rmesdi gnificant worki nt hei solaotfit orna nsifsortC oMrOsS -G5r.e jgo inDeidg iitna1 l9 7a8f ter fivey earwsi tRhC AC orpotroianH.e r eceiavB e.dS .fEr.oEWm. i lkUensi versity andb elongtsh Eetl oe ctrochSeomciicaeantldyI EEGEr.e wga sa wardoende u.s. pateanntdh atsh rpeaet enpetnsd ing. DanieBl.j acksonD aniJealc ksroenc eiavB e.dES E... ( 197f8r)o Wmo rcester PolytecIhnnsitcia tnudwt aesa wardMe.d.(S 198a0n)dP h..(D 198d5e)g referso m theU niverosfiI tlyl ifnoro iswo rks eomni cuocntdodre vipchey siHcest .h en joeidnD igitwaolrk,i onnga dvancMeOdSd evicaensdp rocedsesv eloepnmt. Daniheals m angaedt heG atIen sautloarn dT ransiRsetloira bGirloiutipyn AdvancSeedm iconduDcetveoplrmo ent s1i9n8cH9ee. i isn tereisnat devda nced procedsesv leopmeanntd i nM OSd evice phystircasn sairnsedtl oira .b ility A membeorfI EEDEa,n ihealss ervoendt htee chniccomamli ttefeor tIhEeD M. RicharDd.j onesA princiepnagli neientr h eA dvancSeedm iconductor DevelopmGernotu Rpi,c haJrodn edse veloeptecdph r ocesssuecsah sl ocianlt er conneecttc pho,l ysileitccaohnn,d m etaelt cfhor tChMeO S-t4e cohlnogHy.e is currendtelevyl opipnolgy sileitccoahnn ds paceetrc phr ocesfsore01 s0 S-6. Richarjdon iedD igiitna1 l9 84H.er eceiavP ehd. .D( 198a6n)d a nM S( 198i2n) physifcrsoR me nssePloaleyrt ecIhnnsitci atnudit saem embeorft hAmee rican PhysiScoacli aentdyt h Aem ericVaacnu umS oci.eH tehy apsu blisthweopd a pers ont hper operotfsi eemsi condmuactteorri als. NadimA .K haliPlr inciepngailn Neaedri Kmh aliisal m embeorf D igitsa l' AdvancSeedm iconduDcetvoerl opmSeunbtim croSni mautlioGnr oupC.u r rentdleyv oeplinogp timizaatsieotdno -oblfso rp roceasnsd d evicdee sign, Nadiwma si vnolviendg raphaincdns u merical sdoefvtoewplamreena tn da na lytical mofdoreC lMiOnStge chnoloHgeji oenise.dD igitian1l 9 8a5f,t reerc eigv in aB ..SE.(Ew.i tdhi stionnc)ft riotmh Amee ricaUnn iverosfBi etiyr auntd Ma.n.S E.E. fromL ouisiSatnaUatn ei verNsaidtiyim.sp resenptulrysi gun Pah ..Dd egraeet thTeec hniUcnailrv esiotfVy i enna. DaviBd. K rakaueSri ncjeon iign Digi'tAsa dlvanced SemicDoenvdeulctor opmenGtr ouipn1 98D9a,v iKdr akahuaewsro rkeodnt opiicnts h aer eoaft ran sistroerl itaybi,in lciludhiontcg a rriaenrdes l ectrodsitsactghieac( r ESDI)n. parctuilrh,a eh abse einvn olvientd hdee signc haanrda cteroifEz SaDpt riootne c tiofnorD igitsaa ld'vancseedm icondupcrtocoers ses. Davifdr ogtmrh aed uated MasshaucseItntisstt euo tfT echnoloign1y 9 8w9i tShB. .a nd degreienes l ec S.M. triecnagli neering. 6 I RudolLfa mbracJhrt. A sa p ripncayili eelndg in,eR eurodlLfa mbrapcehrt formsa nalytsoii dse inftyyi e-lmldiiitnpgr ocesstse apns dr oocta usfeorsy ield impreomvenHte.i sa lsiotn eresitnte odo florsf aileua rnalysis. Ruodny worked thCeM OSt-e4c hongoyla ndi scu rreinntvloyl ivnte hdCe M 05-t5e chlnoogIyn.h is previpooussi taisos ne niioorni mplaenntg in,eh eewr asr esponsfiorbt lhee implapnrto cefsosMr O S, CMOSa,n da dvancbeidp olar prRoucdeyjs oseiedns . Digitian1l 9 7H8e.h oldasnA .S.dEe.gEr.fe reo Wma terbuSrtya Ctoell egaen d is coautohfoa pr a pecro ncerniioinnmg plantation. David LGa.u Asa s enimoarn uafctureinnggi nfeoetrrh Aed vancSeedm icon ductDoerv elopmGernotu Dpa,v Lea uw asr esponsfiorbd lrei vyiingei lsds ues duriCnMgO Sd-e4v leopmeanntda nalyzyiilnedgfs or t hCeM OSp-r4o ceisncs o n jucntiowni tthh me anuafcturyiineggl rdo uCpu.r relynh,te i sd evelopyiinegl d stratefogrCi MeOs S-In6a .p r ipoors ithieod ne,vl eopeadn di mplemednetveidc e relaibilyic tharactertiezcahtniioaqnnu de s desiagC nMeOdSp rocefsoslrq i uid ntirogteenm peraotpuerreia otnD.a vheo ldBs. aSn.d M .S.d egreferso MmI TH.e hacso auotrhed tpharpeeefr ors IEIEnEt ernaEtelicotnraDolen v icMeesei tgns. jameRs. L loydP rinceinpgailn Jeaemre Lsl oyodft hDee sign Reailnadbi itly AssuraGnrcoeu spp eciizaelisnm etarlela ibiiltpyr oblepmrsi,m areilleryco t migratainodsn t revsosi diHnegi .sa lssot udypihnygs imceaclh anirsemlsa ttoe d thifinl mr elibailiinti ytn egractierdic tuastt heM axP lanIcnks tifutrMu etat ll forschuinngS ttugtar,Gt ermanBye.f ojreon iinDgig itianl1 98J8i,m w orked forI BMH.e h oldfsou rp atenhtassw, r ietntm oret ha5n0 p apefrorsr efereed journaanldis s,a n i nvistpeeda kienhr si fi elJdi.mr eceiav Pehd. .(D 197f8r)o m SteveInnss teio tfTu ecthnoloignmy a terainadml est laulgriceanlg ineering. ElleJn.M agerE lleMna geirsa membeorf t heF ab4 proceesnsg ineering organizwaittihoSinen m iconduMcatnouarfc turAni negn.g ineesruipnegsr ovri, Elelni sc urrenitnlvyo lwvietdth h eo ngoidnegf ercetud ctioof0n 1 0Sm-a4t e riaalsw, e lals p reparfiontrgh e terrao nfts hfnee xtte chnolloegv(eyCl M OS-5). Elelnj oniedD igiitna1 l9 8a7f tweorr kiansga p roceesnsg infeoeNrr: Hional SemiconduCcotroprot riaoSnh.er eceihveeBrd. Sd.e grienec hemiecnagli neer in(gw ithhig dhi stiionncf)tr oCmo loroSa tdaUtnei ver.s ity GerdN anz GerdN anzr eceivheidsD iplommtahematidkeegrr ee from theTe chniclUa niverosfiM tuyn icGhe,r mnay, 1i9n8 5F.ro m1 98t5o 1 986he, remainaetd tUhnevi ersitayna ssistteaancthi enr tDh�:ep ratmeonftC ivil as Engineewrhienrghe,e wiansv olivnet dh dee velopmoefsn et-l afdavpefit niie t elemepnrto graGmesr.dt hejno inPerdoe fssoSre lberr'hgser rouapt tTheceh nicUanli verosfVi iteyn ,nA austrainadc, o mplehtiePsdh . .Dt h<.:soinns u merical methoidnds e visciem utloina 198S9i.n c1e9 9h0e,h awso rkeodnd eviacned in processism autliaotDn i gi'tCsa almpusa-sbeEdn gineeCreinntgie nVr i enna. 7 Biographies Andre NasrA consultatne ngneierw itht heA dvancSeedm iconductor I. DevelpmoentG rouApn,dr eN asirst hper ojectl eadientr h0e. 3-5�-t-mC MOSte ch nologyf or ron-tend procedsevsel ompenta ndo n-chmiepm oriym plementa f tio.H new as tphreoje ctl eadfeortr h CeM OSd-e4vi ecg ropu,r esponsfiorbt hel e 07.5--m�-tp rcoesas ndd eviaccreh tiecrte.uA ndrein trdouced andi mplemented thed raienng inerignc oncepitn D igitCaMlO'spS ro cesseHse.a lspoi oneered the e high-opremrnafceB iCMOpSr ocedsesv elopmAnednrte.h aso ne paetnti ssued andt wop endignHeh oldasnM .Si.np hysifrcosm he U tnivst:tiryo fM assaucshetts. . MaryB eth Na,s\1.ra Brey tNha sirsa m embeorft hAed vancSeedm iconductor Develmoepn(t1 rpo.uS he,i sc urretnltyh een ginerenigs upervoifst oheMr e trlo ogya ndM icorcotnamiantinoG rouwpi,th dirter cesponibsilityf or deifnescpte c tion tPorooirlt soj .oi ningD iigtlai n1 98M7a,r Bye twha sa imcroocntaminatoin contrloe ngienefror M itsubSiesmhiic ondCuocrtpoaortr iionJna p anf oro nea nd one-hyaelafrI sn1. 9 8M5a rBye trhe ceiavB e.dSi .nc hemiecnaigln eernigf rom ColumibaU niverasnidatB y. Si.nm athemaftriocPmsro vdienceC olleeg. LlandMa.R ichardsonC onsuletnagnitn Lealenrd Raic hardsmoanng aetsh e SubmicPrhoyncs isa ndC hemisGtrryo uwpi tnh tihAed vanced Semiconductor DevloepmentG roupS.h ee stabltishDheee vdi acnedP roceSsism autliono uGpr andi sre sponsiblfoerA SD'psa rtiipcaotnii nt heC ampu-sbasEengdi eneinrgC en teirn V inen,aA ustrLial.a nidsaam embeorft hCe MOSD evelopmCeonmmtit ete andD igitaallet'rnsat er erpesentavteio n tShReBC o ardo fD irectSohrejso i.ne d Digiitan1l 9 7a9tf erre civeinga P h.D.in physcisf romth Uen iversiyt oVfe rmotn. LoraiMn.R ossL oraRions jso niedD igiitna1 l9 8a4ft ert woy earwsi tNhC R CorpraotionSheh asw orkepdr imartoiwlayrd t hep hotolithographyp rocess . enhancemoefsn etv egreanle ratoifbo inposla ra ndC MOSd evcies.Lo rainp artici patd asa m embeorf t hoe ringaitla sfkor cte oi notdrucSeP Cm ethodsf orc on e torllignc ritailcp arameetrso fs emicondmucatnouarfc turaittn hgHe u dsosni te. Asa p rnicipaplro cesesn ginfeoret rhe F ab4 organizatoinshei sre sponsibflore , thie negtraotnoi fn ewldye veloppheotdo p rcossesi ntmoa nuafcturLionrgai.n e holdasB .dS.g erei nc hemiecnagli neefrrionYmga l Uen iversity. e ChristianS chiebClh ristScihaienb lr eceiavD eidp lomingdeengireieuner 0. physicsf rmo theTe chncialU nivresiotfyV ienn,Aa ustriian1 ,9 8T6h.e s ubjecto f himsa stetrh'ess isq uwaantsi taet elicevtornp robmeic roaanlysi(sE PMAu) sing charcatreisc�t 1il-iensH.e s tduidea tt hIen stiuttf uArn gweantdeu ndTe clmichse Physaitkt hTee chnicalU nivrsietyo fV ienannadr eceiavP ehd. iDn1. 9 8H9i.sd is sertoant wiaso nc haratcerisct fliuoerscenc correcitniq ouannt iattiev EPMA. e Chriisatnt hejno inedt heCa mpus-abseEdn ginreiegn CentienrV ienna,w here hec urrenwotrlksyi nt hfiee ldo fs emicondpurcotcoeras nsdd evcies iumlaotni. 8

dec :: dtj :: dtj v04-02 1992

Similar dec :: dtj :: dtj v04-02 1992