dec :: dtj :: dtj v04-02 1992

131 Pages·1992·12.7 MB·English

Semiconductor Technologies
DigiTteaclh nJiocuarln al
DigitEaqlu ipmeCnotr poration
VolumeN u4m ber2
Spri1n9g9 2
Editorial
.J:tC.t lBll'a kLE·d.i wr
Helen1 .P.a tn:r,on.. \ S>ociaEtdei tor
K:nhleeMn. t etSson., \s">eiEadtitt·o r
Circulation
C:lllll'.VIr. li'hnicl ilps,A dministrator
Shen·Ly .Go nzalez
P.-oduction
MildreRd. R osenzweiPgr,o ductioEnd itor
Margare1t.B u.r dine'.J )'pographer
Pt:teRr. W oodburyI. llustrator
AdvisoBroya rd
SamuelH .fu ll,eC hrairman
Hichar\Vd Beane
RoberMt. G lorioso
Richard].H uliln gsowrth
Ai:lGn. "' emeth
VictoAr. V 1·ssotsky
Gam B.Wi nters
The /JigilTaif! clllliati'fp ujbullislehdmqa ula rtn'l1 l1D1'ig iatl
EqupimentC orporatioJn-.:\- ila6in S tr ee.\·lll.ll -l.VBI>.H �lanyard.
.\l:l"achu"f·tltl'i 7-'i2 '>��ub1,.cr iptitoon t'h c.fu/1a/r'clSl ilOt.l OO
l<l>irn1i "ru " andm usth e prepaidi n{ I.fSu.n dsl.n ilersiatn\d·
collegper ufc"ora'n dl 'lslt.udDe.nt isnt h<e:l ectriecnagli neering
andc omputesrc ic.:tnicee nl.:-dcsci ,c·otm:pl illlll'ltarys uh:o-.LTiption:-,
uponr equesOt.rd ers.i nquiriaesm.ia ddrccl"t angs"h oulhde
sentt ot ltOcig ilalh ·cbltical:fIottlh etp luh'lli[s{hntl{a- dldwr es,_
Inquiriceasna lsob es ente kctronitco:iJl'lIlu:j<l:ty!.II .>H:.Co.\1.
Singleeo pica,;n db acki ssueasr e: ll·ail"a'h"k1 h$.eOacOh from
DigitParle sosf D igitEaqlu ipmenCto rporation,I 1\urlington
Woocb Dri\'Bcu,r lingto\nL\,O l:\HO-i·�7.lJ
DigitLa'ml ployL'l'Sn w\·s ends uhscriptoirodntTosn theL' 'Wi't o
IU>VA::X.JIORINAI.orh yi nteroflimn:·t itlo m aibtop\ IIl.·<l:l/ ll.( >H
Orderss houlidn cludbea dgeJ lltmhsLitTe.l· o cnioenodc.a mi
addr"s!.\ IeIl llploym<uTsSt a d1·io,fec h:tnge>o fa ddress.
Co!l!lllconnr r.h., eo ntcento fa n�p apera rc\ \'t:konaH.n:ddm ay
heS l'ntt ot iHe:d itoart t hep ub!i 'hcd-ohr)n etw orka ddr· ss.
<:opnigh''t 1 'D)i'gi)tEa2qlu ipmenCto rporatioCno.p ying
\Yitholu'cct i�p ermittepdro \·idvdt h;l...ul. c .hc opi...::Ist mT adfe( n·
usci nc ducttinni;n.sdl itutihn�·nL t�c ultJ�l lC!lllawnr_d.a.,n :n ot
di,u·ihuttcid1 rcommnci:aLth'la nt:gtc.A hstr:Kti1\night credit
oft ligiEtqauli pmC'Cnotr por:Jti:o�nu·t,h oJ·i.s,p Jetrimpi tt.e d
.\ IrIi gllrlc'" n·ecl.
l'ilntlc(>·r matiinot nh c.Jutir''r ulhljerutt old J:utgwci thout
notic:e1 n!'<ldl !ounlodr h tn·HI ,truc:dL .'tc onllnitnuh:�nJ·t> igit;tl
EquipmentC orpor:itoln .D igill:q-tu:li pn1l'tl< .l orp(i1t)1 ;r1 t:�t;t...-. .u nJc
no n.·.. r.o n:-,ihilit� f o;ru1 eyr n'�t"l'l .nlll. ta\p pc:itntr lu.. · . frJ/11"1/0/.
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I
Contents
10 Forewodr
R.].H ollingsworth
SemiconductToerc hnologies
12M icroprocessPoerr formancaen d
ProcesCso mplexityi nC MOS Technologies
BjorZne ttleurndj,a mesA .F arrealnld,T homasF Fox
25 NumericaDle vicaen dP rocesSsi mulatoin Tools
inT ransistDoers gin
MardeHn. S eavejyo,h nV fariceNlaldii,mA .K halil,
GerdN anzL,l andMa. RichardsCohnr,i sti0a.Sn c hiebl,
Hamid SRo.l eimaannid,M artin Thurner
39 CMO S-4Te chnologfyo rF astL ogica nd
DenseO n-chiMpe mory
AndreI .N asGrr,e gorGyr)ul.aA ,n toniCo. B ertain,d
RicharD.dj ones
51C MOS-4B ack-enPdr ocesDse velopmenfto ra
VLSI0 .75 pm Triple-lIenvteelr connecTteicohnn ology
MarioMn. G arvejro,s epMh. B ulegrT,h omasE .C lark,
jamsheHd. D ubashL,o raiMn. R ossa,n dD anielW)e.l ch
73 ImplementatioofnD efecRte ductioSnt rategies
intoV LSIM anufacrtiung
MaryB ethN asra ndE llenM]a.g er
83A YielEdn hanemenc tM ethodologyf or
CustomVL SI Martufactriung
RandaSl.lC ollicXa.j, o sepDhi etriRcuhd,o lLfa mbracJhrt,.
andD aviGd .L au
100 TransistHoort C arrieRre liabilAistsyu arnce
inC MOST echnoolgies
DanieBl.j a cksoDna,v iAd .B ellB,r iaSn.D oyle,
BruceF)i.s hbeiannd,D aviBd. K rakauer
114E /ectromigartioRne liabiliotfyV LS/lnterconnect
].j osepChl ementE,u geniMa. A tako,av ndj ames R. Lloyd
I
EditoIrn'st roduction
jonerse viethwe f ornt-epnrdo ce(sofsr mtaioonf
devicaen dl ocailne trconcnte)f or theC MOS-4
0.7-/L5m technolaongdty h e stteapkset nom eet
desirgenq uiremTehnetaysl .sd oe scrtihbeeef e fcts
ons ubmicdreovni creesl attoet dh sec ainlogf f ea­
tursei zaensde xaimnseo mseo ltuions.
Goalfsor theb ack-epnrdo ce(sfsom ratioonf
globmaelt ailn tceornnewcetr)a el sdori vebny t he
logdiecs irgenq uiremfoerhn itgsh ceirr icdtue nsy.i t
Ina didtiboanc,k -deenvde lopmgeoanltis n cleudd
thec ontinuuseedo fe quipment defvoerl oped
the10 .�L-m CMOS-t3e chngoylM.oa riGoanr vejro,e
JanCe. B lake
BulgeTrom, ClarJka,m shed Dubash, Lorain Ross,
Edtior
andD anW elcrhe altheo wt oowlesr meo dififeord
CMOS-an4d d escrniebweb lantkuentg satnedpn l a­
Thed esigns eomfi conducchtiophrsa sb eetnh e narizaptrioocne ssessu bfmoircd reovni ces.
topiocfs everpaals Dti gitTaeclh nicjaoulr nal To produac sep ecified ofyC iMeOlSdd e vices,
issuWeist.th h ei ntroduocftA ilopnh2 a1 06t4h,e deefcrte ductainodyni eld enhanlckieeom tehnetrs ,
worldf'ass tmeisctr oproc,et shsiiossr sufoec uses processmeuss,tb ei intiactoendc urrewnittlhy
for thefi rstti moen t hed evelopmoefsn te mi­ thed esign MsatraByge et.Nh a sarn dE lelnM ager
conductteocrh noltohgaite smp aokses itbhlheegi h­ revitehwpe r inciopfml iecsr onctoaimnatcioonn­
perofrmancofeD igitaVLSlI' csh ipEsn.g ineienr s troaln do utlidneef ercetd ucttieocnh niqtuoe s
AdvancSeedm iconduDcetvoerl opmpernets enti ncreparsoed uycite ilndt h e aorfep a-gsa tlee agkea
in-depthi nvtCioMe OwSst- e4c hnolwohgiiecsh, p roa­ndm eta2l s horcti rcuTihteps a.p etrh aftolo lws
ducmeic roprocewsistouhrp ts o 1 .m7 iiloltnr ansisa­ddersstehsme etholdoogy yioefel ndh ancement,
torasn do peratfirqneuge ncaiseh si gahs2 00M HZ. inclugd pirnocesspirnogc,e esqsu ipmemnatn,u ­
Thes ignifiicnacnrte apseero frimna nacceh ievedf atcurianngd,d esiagnnd t esRta.n dCyo llciaj,o e
witeha cghe neraotfiC oMnO St echnoliosig npy a rt DietcrhiR,u dyL ambracahntdD, av eL aud escribe
ther esluto fa syngeirisctr elatiobnesthwiepe n theu seo ft escth idpa tyai,e mlodd els,t haen d
microprocedsessoirag nnd p roceesnsg ineIenr s.s eelcteadp proatcoyh i ealnda lyasnidfso re casting.
thepiarp eorn p rocetsesc hngoylc oontributioAnnsa dvancmeedt hotdh ahte ldpess ignperresd ict
tom icroprocepsefsrororm ancBej,o rZne ttleurnd, cirichtuo cta rrlifieetri maen dt humsa ximeit zran­
JimFa rerlaln,dF ranFko xd escrtihbseeca lgit nhe­ sistpoerro frmanactet her equirreeildba iltiyl evel
oryt hahta sl etdo a douibnlogf g atdee nsiatnyd is tthoep oifca p apebryD anj ackson, BeDlal,v id
ani ncreoaf3s 0ep ercengta tsiepn e eidnf ours uc­ BriaDno ylBer,u cFei shbaenindD, a viKdr akearu.
cessiCvMeO Sg eneratTihoenysd .i scupsrso cessT hea uthordse scrai pbhey sicbaalsleymd e tohd
feateusri mplementCeMdO S-a4n,dc lowsiet ahd is­ ford etermitnhiean cgc eplttaiybo ifb otc arrier­
in
cussioofmn o deltsh aptr edipcrto cess variaitniudocnesdd.e gradaitnit aornns iscthoarr actse.r istic
Modealsn dt oolesss,e ntiinpa rlo viddiensgi gn­ Anothperre dicotfco hri lpfei timiest hre eliabil­
eresa rilnys iignhtttoh ceh aracteorfit shtteri acns­ itoyf t hei ntercecotnIsnn.t hepiarp eorn e lercot­
sisttoobr esf abricaatretedh ,fe o cuso fa p apebry migratrieolni abjioleCi lteym,te £,nu genAitaao kv,
MardeSne avjeoyh,F na rilciNe,al diKmh aliGle,rd andJ imL loypdr oviad hee lpfouvle rvioeftw h e
NanzL,l anRdiac hardCshorni,s Stcihaine Hbalm,i d potenteiraols iionn meitnaetlr conncelcutte o
SoleimaanndMia ,r tTihnu rn.Te hrea uthodress cribee lectcroodnnu cotniT.h eyt hepnr eseans tc ianlg
severpahly simcoadle ltsh aatc curastiemlluya te modedle velotpoec dh aracttehreri elzaeibi ltyio f
transibsethoarv, ia onrdp resennutm erimcaatlh e­ CMOsc-h4i ipn terconnects.
maitcamle thoudsse tdo e nhanecxei stsiinmlgua ­ Thee dittohrasnR ki cHho llnigsworatnhdA rlene
torAns .o vervioefDw i gista anldo' theerfsof'r ttso Delvoyf t heA dvancSeedm iconduDcetvoerl op­
ingtreatsei mluatitoonoc losn clutdhepesa epr. mentG roufpor t hegiuri danacnedu nfaliign sup­
Then eefdo rb othhgi h-denlsoigtgiyac t easn d poritnd evelotphiinisgs sue.
on-chciapc he memionmr iyc roprocesprseo­rs
sentsspe ciaclh allengetsop roceesnsg eienrs.
AndrNea s,rG regG rulaA,n tonBieor tain,dR ich
2
I
Biographies
EugenMi.aA takovA sa p rinceinpgailn iene rtA hdev ancSeedm iconductor
Developm(eAnStDG )r ouEpu,g enAitaa kiosrv e sponsfioebrv lael uaotni-ncgh ip
intercornelnaiebciitytl. S injcoeii nnDgi giitn1a 9l8 s8h,e choasn tribtuost eevd­
eraClM OSVL SIp rojeictnsc,li undgth eA lph2a1 06c4h iPpr.e ivou,sE luygenia
workeadtt hMeo scoIwn sttieot fSu emiconductor ESlheerc etcreoinavi ecds .
B.ES..Ea.n da nM .S.Ef.rEo.mt h eM oscoEwn erIgyn stiatnudta P eh,. .fD rotm he
MoscoIwn steio tfSu tteaenldA lloySsh.eh oldtswo patenatnsdh aspu blished
17p apeornss emicondduecvtioacrne di ntercornenleicat.b ility
DaviAd. B ellD aviBde lalt tenBdaetdCe so lgleea ndr eceiavB e.ddS e.g ree in
physiacnsdm athemaitni c1s9 I8n10 9.8 h4e,c omplehtiePsdh . .D pihny siacts
thMea ssascehtuItnss teio tfTu etchnoloDgayv.iw do rkeadtT exasI nstruments
ons ubmicCrMoOnSa ndB iCMOdSe veloppmernittoo rj oignD iingistA adlv'anced
SemicuocntdoDre velopmGernotu ipn 1 989H.is c urrewnotr ki ncleussd ub­
micron transidsetsoircg hna,r taecrizaatnidmo ond,e liDnagv.ii dsa m em­
CMOS
beorf I EEaEn dP hBie tKaa ppa.
AntoniCo.B ertiAn toniBoe ritsci u rrenctolnyt riinbtguo t twhoer kof t he
Fa4be ngineeorriagnngi zaatsia s oenn ieonrg in.e ehradse veloapnedid m lpe­
I k
menteCdM OS-p4r ocesisnme as nuafcturiinngcd,li unmge tadle posiptrioo­n
cessfeorsc obaalltu,m iniunmt erconneTcitNai dohness,li aoyne arnsc,l lToicNa l
interconAnnetcotnsai.slo o d eveloap ecdo blats iilcipdreo cetsosd ecrease
deefctasn di mplemeTnitNed edp osiiothna rdwaarnedp rocestsore esd upcae­r
ticlHeegs r.a duaftreodRm e nssePloaleytre chInnisct iitn1u 9t8ew8 i tahB S..i n
matereinaglisn eearnidjn ogi nDeigdi tian1l 9 89.
JosepMh. B ulgerj oseBpuhl giesarp rinceinpgailn weietrth h Fea b4 manu­
facturienngg ineeorriagnngi zatHiiomsna i.na reoafsi nvolveamretenh tifi nl m
manuafcturcihnegm,i vcaaplo dre posiotfit ounn gstaenndm, e tlailzatJiooen .
joinDeidg iitn1a 9l8 a8f t1e0ry ears AwniatlhDo egv icIencs.,w, o rkionngt hin
filmd eveloepnmatn dm anuafcturHienr ge.c eihvieBsd. dSe.g reiene lectrical
engineefrrionNmgo rtheaUstneirvne rs1i9t8y2 .
in
ThomaEs. C larkA princeinpgailn ,eT oemr Clariksc urrentmleym beorf
a
thCeM Os-6t echnoltoegawymi thtihnAe d vancSeedm iconduDcetveolro pment
GrouTpo.m hasd evelobpleadn kteutn gsptleunmg o dulefsor C MOS-C4M,O S-),
andC MOS-t6e chnoloHgeia elssp.oe rofrmefdea sibiiytl stduieosf Caon dT i
sailciidoapntr ocesfsorec so ntascotu,r cdera,i na,n dg ataep plicaitnti hoen s
CMOS-t4e chlnoogTyo.m holdaPs h..iD ni norgacnhiecm isftrroytm h Len iv­er
sitoyfM ascsahuseatntds hpausbi lshneudm eropuasp eorns tshueb joecf<t : VD
tungstmeent allizHaeht airsoe nc.e iovneepd a tent.
3
BiograjJ!Jies
}.JosepChl ementA priinpcaeln ginoene rt ihntee rconcntpe hysipcrso ject
int hAed vancSeedm iconduDcetvoerl opmGernotu jpo,e C lemewnotr kpsr i­
mariolnmy e tarle liiatbayin ldp erofrmanicses ufeors Befojroei nDiiniggt al
VI.Sl.
in1 98h7e,h elpdo sitiaotFn asi rcSheimlidc onduacntdSo arni daN atioLnaablo ­
ratorJioeers e.c eiavP ehd. iDn.e lectrmoantiecr ainaddl esv icferso Pmr inceton
Univerasnidta yB . S.Ef.rEo.mt heU niverosfiN totyr eD ameH.e h asp ublished
fourp apersi neotrnc onnercetl iabainldsie rtvye sa aemsn torf orS RCr eseairnc h
elcctirgotrmiaoantt hMea ssascehtuItnss tiotfTu etceh noogly.
RandaSl.lC ollkaR andlaClo lclaia,p rinciypieaellnd g inejoeirm·d, D igailt
in1 897. Hipsr imary oafir tneearsea srSteR AfMau latn alyysiiesml,od d elifnaugl,t
toleranceexp,e rainnmdte adlei sgan nda nlaysFiosr. CtMhOeS -t4e chongoylh,e
estasbhletidh e oufsyei emloccllfeorlr se dundaonnca ydv ancperdo cescshoirp s
conatingi onn-boacradc hReAN isT.h esey iemlodd elarseu sefdor l niec onotlr
andp roductoipvtiitmyi zfaort iopnr oductPsr.i otrot hiwso rkR,a ndlawla s
VJ.SI
engagiendf a iluarneal yisst,e scth ip deasnicpglrn o,c eesxsp ereinmtatHieo n.
holdas froNmo rtheArrni zoUnnai verasnidt aym embeorfI EEE.
L\.S.F..E. is
josepDhi etrichJ oeD ietriisacs he nieonrg inweheors weo rki vnolves
X. II
yieelndh ancemfeorn t tecnhologiHiesrs e.s psoinbtiilefiosrt heC MOS--1
C.VIOS
proceisnsc leudwd orokn t hdee sifgornm anuafctaubrilaintdy ie dm odeling.
y l
Hei sc urnrteylp erofrmintgh sea myei ealnda lyfsoret sh CeM OS-pr5o ceJsose.
haasl sdoe veloppheodtl toihograpprhoyc eslsoeersa rlgieenre ratoifCo .n\s' IOS
technoloJgoieje osi.nD eidgt iailn 1 98a3 ftgerra duaftrionRmg e nssePloaleyr­
technIincs tiHteu wtaesa .w ardaeB d. dSe.g rienep hysiicn1s 9 83.
BriaSn.D oyleB orinn D ubilnI,r danHcrli,aD no yleg raduaftreodTm r iyn it
CollegDeu,b ilni,n1 795a,n dr eceiavne,'v di .Sacnd. P ha. .Df rotmh 1e: neirvsiotfy
LondoHne.h eladp ostdoctpoorsaittaeit to hnUe n iverosfLi otnyd ofnr o1m 890
to1 98.2 then <.:sxityx e arBsr,i waans e mpolyebdy B ul,lF rancaen,dw orked
For
onc ryeognic devicaensdh octa rreifeferc Htesj .o inDeidg iitn1a 9lH a8n di s
MOS
ap rinpcaieln ginienet hreG atIen sautloarm iT ransiRsetloiria tbciy;ol rupB.r ian
is membeorfI EEaEn di so nt het cchni.lccl:o mmiteetf ort he1 99I2n rntaetional
a
Electron eeti.n g
Devices M
JamsheHd. D ubashJ amshO<.u:bda sihsa s eniporro cesesn ginweietrth h e
Fab4 manufacturoirngagn iaztionF.o rt heC MOS-t4e chlnooghye,d evleoped
corrosrieo<mn.e-:tf aetlc hp rocesasnedas s lopveidpa r ocesfsor m etaslt ep
covreagPer.i toort his whoer okn,ti rbuted tot he etpcrho cesdse evlopment
c
ofC VIOSge-n3e ratsieominc onducJtaomrssh.ei dsc urrenrtelsyp onsfiorb le
thep rocedsesev lopmeonftt h ei ntegraotfSi OoGnp lanarizpartoicoens ses
inot manuafctiunrgH.e j oinDeigdi taaflt reerc eivhiinBsg. dSe.g rfereo tmh e
RochesItnesrt eio tfTu ecthnoloign1y 9 88.
I
john FaricelJlohiFn a rilciiesa lp rincmiapnalua fctureinnggi nienet rh e
V.
AdvancSeedm iconduDcetvoerl opmGeronutp S.i ncjeo inngi Digiin1t 9a8l,3
heh asw orkeodn p rojercetlsa ttoed de vipchey siacnsdm odeilngi,n clugd in
cryogeonpiecr atoifMo OnS d evicheoset,l ecterfeofcnt dse,v iicseo laatnido n,
CMOSl ahtucpJ.o hhna sc ontribtuost eevde dreavli acned prosciemslusa tion
prograimnsc,li undgM IINMOSP,SI CES-aIn!dP, RO .\HSH.e holdas B .S.fEr.oEm.
RenssePloaleyrt ecIhnnsitci atnudMt .e.ES, E. .a ndP h.D.Ed.eEg.r eferso Cmo rnell
UniverHseii tsaym .e mbeorfT auB etPaia ndE tKaa ppNau .
JamesA .F arrelJli mF arlrlie sa princiepnagli nienet rh eS emiconductor
Engineering( SGEGrH)oe.uw pa sm osrte cenetnlgya giendt hed evelopment
ofh igh-opremrafncsew itchciincrgu itwsi,t pha rctuilaerm phasoins l ow­
temperaotpuerrea t.Pi rointoor twhoirskJ ,i mw asa s taRAtMi cd esiginnSe ErG ,
witrhe snpsoibiflorid tevye lopthiCen MgO S-pr3o cewsistt hh Aed vancSeedm i­
conducDteovre lopmGernotu apn df ord esignsienvge rmaelm ory chHiep s.
joinDeidig tianl aftreerc eivBi.nSg.a En.dME ..E .Ed.eEg.r eferso Rme nsse­
1985,
laePro lytecIhnnisittceui tn1 98a4n d1 98r5e,s pievcet.l y
BrucJe. F ishbeinB n.�t:c Fishbaettienn deCdo rneUlnli verswihteyrhe,e
receiav Hed. dSe.g reem atienr isaclise nacnede ngineeirni1 n9g8 3l.iae lso
receiMv.eS(d.1 98a5n)dP h..D( 1988) dieneg lreeecst ernigcianle efrrionSmgt a­n
fordU nivetrySs.ii njcoen iintgh Aed vancSeedm iconduDcetvoelro pmGernotu p
atD igiitna1 l9 8B8,r uchea sw orkeodng atien sulaantdot rr ansirseitlaobri lity
forC MOSm icorprocessSopresc.ia firce aosfi nteriensctl utdiem e-dependent
dielecbtrreiaockw dn,p las-miandeuddc eilectdraimca gteh,e rmianls tlatibiies
ing atdei elecatnrdti hcuess ,oe f h igdhei lectcroincs tmaantte rials.
ThomaFs. FoFxr aknF oxa,c onslutienngg inienet rhS ee miconduEcngtio­r
neering Gcroo-ultpeh,die m plemteantiooftn h e microprocaensdcs oonr­
NVAX
sueldtw itthh Aed vancSeedm iconduDecvtleoorp meGnrto uopn t hdee siogfn
thCe\ 10St-e4c hongoyl. joinDeidg iitna1 l9 8a4n dw orkeodnt hiem pleenm­
He
tatiooftn h e microproc.Fe rsasnroker ceiavB e.dEd e.g rfereo Umn ievrsity
CVA..'\.
CollegCeo rkN,a tional Unofi[vlreaerns(di17 t94y)a ,n daP h.dDe grfereo Tmr in­
itCyo lleDguebi,ln U nievrsi(t1y9 7b8o)t,ih ne lecternigcianle eHreih nagps. u ­b
lsihepda peornsu tlarsoniincs trumenatnadVLt '>iIdo ens ihgenh ;a tsw op atents.
MarioMn. G arverM ariGoanr vwears t hep rojelceta daenrds upervisor of
theC MOSb-a4c k-pernodc edsesv elopmgernotua pn di sc urrenptelryf orming
thsea mfeun ctifoornt hCeM OS-t6ec hlnoogMya. rijoonni edD igiitn1a 9l8 s0o on
afttehroe p enionftg h Heu dsosni tSeh.ei nitiywa olrlkeidnb ipomlaanru afctru­
infgab ricaatnidjo non iedt hAed vancSeedm iconduDcetvoerl opmGernotui pn
198t2od evelsoopm oef t hoer igipnlaalse mtac hisnygs tefmors ' MOaSn dC MOS
applicaMtairoinhoson.l das B .Ad.e gr(e1e9 37)f roOm berlCionll egaen dw as
previoeumspllyo yeAdl pbhyIa n dustarnidOe hsi Moe dicParlo ducts.
5
Biogrpahies
GregorJy.G rulaA consuletnagnitn eien r tAhdev ancSeedm iconodru ct
DevelmoepnGtr opu,G reGgr ulhaa wso rkeodnp rocedsesv elopmaenndit n te­
grtaiofnoC rM OS-,C1 MOS-a2n,d C MOS-t4e chnoloCguirerse.nh teil sy the­ super
visoofrt hCe'l' lOSfo-r5n t-epnrdo cetsesc hnolaongdy hpaersof rmesdi gnificant
worki nt hei solaotfit orna nsifsortC oMrOsS -G5r.e jgo inDeidg iitna1 l9 7a8f ter
fivey earwsi tRhC AC orpotroianH.e r eceiavB e.dS .fEr.oEWm. i lkUensi versity
andb elongtsh Eetl oe ctrochSeomciicaeantldyI EEGEr.e wga sa wardoende
u.s.
pateanntdh atsh rpeaet enpetnsd ing.
DanieBl.j acksonD aniJealc ksroenc eiavB e.dES E... ( 197f8r)o Wmo rcester
PolytecIhnnsitcia tnudwt aesa wardMe.d.(S 198a0n)dP h..(D 198d5e)g referso m
theU niverosfiI tlyl ifnoro iswo rks eomni cuocntdodre vipchey siHcest .h en
joeidnD igitwaolrk,i onnga dvancMeOdSd evicaensdp rocedsesv eloepnmt.
Daniheals m angaedt heG atIen sautloarn dT ransiRsetloira bGirloiutipyn
AdvancSeedm iconduDcetveoplrmo ent s1i9n8cH9ee. i isn tereisnat devda nced
procedsesv leopmeanntd i nM OSd evice phystircasn sairnsedtl oira .b ility
A membeorfI EEDEa,n ihealss ervoendt htee chniccomamli ttefeor tIhEeD M.
RicharDd.j onesA princiepnagli neientr h eA dvancSeedm iconductor
DevelopmGernotu Rpi,c haJrodn edse veloeptecdph r ocesssuecsah sl ocianlt­ er
conneecttc pho,l ysileitccaohnn,d m etaelt cfhor tChMeO S-t4e cohlnogHy.e is
currendtelevyl opipnolgy sileitccoahnn ds paceetrc phr ocesfsore01 s0 S-6.
Richarjdon iedD igiitna1 l9 84H.er eceiavP ehd. .D( 198a6n)d a nM S( 198i2n)
physifcrsoR me nssePloaleyrt ecIhnnsitci atnudit saem embeorft hAmee rican
PhysiScoacli aentdyt h Aem ericVaacnu umS oci.eH tehy apsu blisthweopd a pers
ont hper operotfsi eemsi condmuactteorri als.
NadimA .K haliPlr inciepngailn Neaedri Kmh aliisal m embeorf D igitsa l'
AdvancSeedm iconduDcetvoerl opmSeunbtim croSni mautlioGnr oupC.u ­r
rentdleyv oeplinogp timizaatsieotdno -oblfso rp roceasnsd d evicdee sign,
Nadiwma si vnolviendg raphaincdns u merical sdoefvtoewplamreena tn da na­
lytical mofdoreC lMiOnStge chnoloHgeji oenise.dD igitian1l 9 8a5f,t reerc eigv in
aB ..SE.(Ew.i tdhi stionnc)ft riotmh Amee ricaUnn iverosfBi etiyr auntd Ma.n.S E.E.
fromL ouisiSatnaUatn ei verNsaidtiyim.sp resenptulrysi gun Pah ..Dd egraeet
thTeec hniUcnailrv esiotfVy i enna.
DaviBd. K rakaueSri ncjeon iign Digi'tAsa dlvanced SemicDoenvdeulc­tor
opmenGtr ouipn1 98D9a,v iKdr akahuaewsro rkeodnt opiicnts h aer eoaft ran­
sistroerl itaybi,in lciludhiontcg a rriaenrdes l ectrodsitsactghieac( r ESDI)n.
parctuilrh,a eh abse einvn olvientd hdee signc haanrda cteroifEz SaDpt riootne c­
tiofnorD igitsaa ld'vancseedm icondupcrtocoers ses. Davifdr ogtmrh aed uated
MasshaucseItntisstt euo tfT echnoloign1y 9 8w9i tShB. .a nd degreienes l ec­
S.M.
triecnagli neering.
6
I
RudolLfa mbracJhrt. A sa p ripncayili eelndg in,eR eurodlLfa mbrapceh­rt
formsa nalytsoii dse inftyyi e-lmldiiitnpgr ocesstse apns dr oocta usfeorsy ield
impreomvenHte.i sa lsiotn eresitnte odo florsf aileua rnalysis. Ruodny worked
thCeM OSt-e4c hongoyla ndi scu rreinntvloyl ivnte hdCe M 05-t5e chlnoogIyn.h is
previpooussi taisos ne niioorni mplaenntg in,eh eewr asr esponsfiorbt lhee
implapnrto cefsosMr O S, CMOSa,n da dvancbeidp olar prRoucdeyjs oseiedns .
Digitian1l 9 7H8e.h oldasnA .S.dEe.gEr.fe reo Wma terbuSrtya Ctoell egaen d is
coautohfoa pr a pecro ncerniioinnmg plantation.
David LGa.u Asa s enimoarn uafctureinnggi nfeoetrrh Aed vancSeedm icon­
ductDoerv elopmGernotu Dpa,v Lea uw asr esponsfiorbd lrei vyiingei lsds ues
duriCnMgO Sd-e4v leopmeanntda nalyzyiilnedgfs or t hCeM OSp-r4o ceisncs o n­
jucntiowni tthh me anuafcturyiineggl rdo uCpu.r relynh,te i sd evelopyiinegl d
stratefogrCi MeOs S-In6a .p r ipoors ithieod ne,vl eopeadn di mplemednetveidc e
relaibilyic tharactertiezcahtniioaqnnu de s desiagC nMeOdSp rocefsoslrq i uid
ntirogteenm peraotpuerreia otnD.a vheo ldBs. aSn.d M .S.d egreferso MmI TH.e
hacso auotrhed tpharpeeefr ors IEIEnEt ernaEtelicotnraDolen v icMeesei tgns.
jameRs. L loydP rinceinpgailn Jeaemre Lsl oyodft hDee sign Reailnadbi itly
AssuraGnrcoeu spp eciizaelisnm etarlela ibiiltpyr oblepmrsi,m areilleryco t­
migratainodsn t revsosi diHnegi .sa lssot udypihnygs imceaclh anirsemlsa ttoe d
thifinl mr elibailiinti ytn egractierdic tuastt heM axP lanIcnks tifutrMu etat ll­
forschuinngS ttugtar,Gt ermanBye.f ojreon iinDgig itianl1 98J8i,m w orked
forI BMH.e h oldfsou rp atenhtassw, r ietntm oret ha5n0 p apefrorsr efereed
journaanldis s,a n i nvistpeeda kienhr si fi elJdi.mr eceiav Pehd. .(D 197f8r)o m
SteveInnss teio tfTu ecthnoloignmy a terainadml est laulgriceanlg ineering.
ElleJn.M agerE lleMna geirsa membeorf t heF ab4 proceesnsg ineering
organizwaittihoSinen m iconduMcatnouarfc turAni negn.g ineesruipnegsr ovri,
Elelni sc urrenitnlvyo lwvietdth h eo ngoidnegf ercetud ctioof0n 1 0Sm-a4t e­
riaalsw, e lals p reparfiontrgh e terrao nfts hfnee xtte chnolloegv(eyCl M OS-5).
Elelnj oniedD igiitna1 l9 8a7f tweorr kiansga p roceesnsg infeoeNrr: Hional
SemiconduCcotroprot riaoSnh.er eceihveeBrd. Sd.e grienec hemiecnagli n­eer
in(gw ithhig dhi stiionncf)tr oCmo loroSa tdaUtnei ver.s ity
GerdN anz GerdN anzr eceivheidsD iplommtahematidkeegrr ee from
theTe chniclUa niverosfiM tuyn icGhe,r mnay, 1i9n8 5F.ro m1 98t5o 1 986he,
remainaetd tUhnevi ersitayna ssistteaancthi enr tDh�:ep ratmeonftC ivil
as
Engineewrhienrghe,e wiansv olivnet dh dee velopmoefsn et-l afdavpefit niie t
elemepnrto graGmesr.dt hejno inPerdoe fssoSre lberr'hgser rouapt tTheceh ­
nicUanli verosfVi iteyn ,nA austrainadc, o mplehtiePsdh . .Dt h<.:soinns u merical
methoidnds e visciem utloina 198S9i.n c1e9 9h0e,h awso rkeodnd eviacned
in
processism autliaotDn i gi'tCsa almpusa-sbeEdn gineeCreinntgie nVr i enna.
7
Biographies
Andre NasrA consultatne ngneierw itht heA dvancSeedm iconductor
I.
DevelpmoentG rouApn,dr eN asirst hper ojectl eadientr h0e. 3-5�-t-mC MOSte ch­
nologyf or ron-tend procedsevsel ompenta ndo n-chmiepm oriym plementa­
f
tio.H new as tphreoje ctl eadfeortr h CeM OSd-e4vi ecg ropu,r esponsfiorbt hel e
07.5--m�-tp rcoesas ndd eviaccreh tiecrte.uA ndrein trdouced andi mplemented
thed raienng inerignc oncepitn D igitCaMlO'spS ro cesseHse.a lspoi oneered the
e
high-opremrnafceB iCMOpSr ocedsesv elopmAnednrte.h aso ne paetnti ssued
andt wop endignHeh oldasnM .Si.np hysifrcosm he U tnivst:tiryo fM assaucshetts.
.
MaryB eth Na,s\1.ra Brey tNha sirsa m embeorft hAed vancSeedm iconductor
Develmoepn(t1 rpo.uS he,i sc urretnltyh een ginerenigs upervoifst oheMr e trlo­
ogya ndM icorcotnamiantinoG rouwpi,th dirter cesponibsilityf or deifnescpte c­
tion tPorooirlt soj .oi ningD iigtlai n1 98M7a,r Bye twha sa imcroocntaminatoin
contrloe ngienefror M itsubSiesmhiic ondCuocrtpoaortr iionJna p anf oro nea nd
one-hyaelafrI sn1. 9 8M5a rBye trhe ceiavB e.dSi .nc hemiecnaigln eernigf rom
ColumibaU niverasnidatB y. Si.nm athemaftriocPmsro vdienceC olleeg.
LlandMa.R ichardsonC onsuletnagnitn Lealenrd Raic hardsmoanng aetsh e
SubmicPrhoyncs isa ndC hemisGtrryo uwpi tnh tihAed vanced Semiconductor
DevloepmentG roupS.h ee stabltishDheee vdi acnedP roceSsism autliono uGpr
andi sre sponsiblfoerA SD'psa rtiipcaotnii nt heC ampu-sbasEengdi eneinrgC en­
teirn V inen,aA ustrLial.a nidsaam embeorft hCe MOSD evelopmCeonmmtit ete
andD igitaallet'rnsat er erpesentavteio n tShReBC o ardo fD irectSohrejso i.ne d
Digiitan1l 9 7a9tf erre civeinga P h.D.in physcisf romth Uen iversiyt oVfe rmotn.
LoraiMn.R ossL oraRions jso niedD igiitna1 l9 8a4ft ert woy earwsi tNhC R
CorpraotionSheh asw orkepdr imartoiwlayrd t hep hotolithographyp rocess
.
enhancemoefsn etv egreanle ratoifbo inposla ra ndC MOSd evcies.Lo rainp artici­
patd asa m embeorf t hoe ringaitla sfkor cte oi notdrucSeP Cm ethodsf orc on­
e
torllignc ritailcp arameetrso fs emicondmucatnouarfc turaittn hgHe u dsosni te.
Asa p rnicipaplro cesesn ginfeoret rhe F ab4 organizatoinshei sre sponsibflore
,
thie negtraotnoi fn ewldye veloppheotdo p rcossesi ntmoa nuafcturLionrgai.n
e
holdasB .dS.g erei nc hemiecnagli neefrrionYmga l Uen iversity.
e
ChristianS chiebClh ristScihaienb lr eceiavD eidp lomingdeengireieuner
0.
physicsf rmo theTe chncialU nivresiotfyV ienn,Aa ustriian1 ,9 8T6h.e s ubjecto f
himsa stetrh'ess isq uwaantsi taet elicevtornp robmeic roaanlysi(sE PMAu) sing
charcatreisc�t 1il-iensH.e s tduidea tt hIen stiuttf uArn gweantdeu ndTe clmichse
Physaitkt hTee chnicalU nivrsietyo fV ienannadr eceiavP ehd. iDn1. 9 8H9i.sd is­
sertoant wiaso nc haratcerisct fliuoerscenc correcitniq ouannt iattiev EPMA.
e
Chriisatnt hejno inedt heCa mpus-abseEdn ginreiegn CentienrV ienna,w here
hec urrenwotrlksyi nt hfiee ldo fs emicondpurcotcoeras nsdd evcies iumlaotni.
8