Surface Modification and Alloying: by Laser, Ion, and Electron Beams

413 Pages·1983·9.2 MB·English

by  J. M. Poate

SURFACE
MODIFICATION
AND ALLOYING
by Laser, lon, and Electron Beams
NATO CONFERENCE SERIES
I Ecology
II Systems Science
III Human Factors
IV Marine Sciences
V Air-Sea Interactions
VI Materials Science
VI MATERIALS SCIENCE
Volume 1 Molecular Metals
Edited by William E. Hatfield
Volume 2 Materials for Advanced Batteries
Edited by D. W. Murphy, J. Broadhead, and B. C. H. Steele
Volume 3 Adhesion in Cellulosic and Wood-Based CompOSites
Edited by John F. Oliver
Volume 4 Adhesion Problems in the Recycling of Concrete
Edited by Pieter C. Kreijger
Volume 5 Atomistics of Fracture
Edited by R. M. Latanision and J. R. Pickens
Volume 6 Electronic Structure and Properties of Hydrogen in Metals
Edited by P. Jena and C. B. Satterthwaite
Volume 7 Soot in Combustion Systems and Its Toxic Properties
Edited by J. Lahaye and G. Prado
Volume 8 Surface Modification and Alloying by Laser, lon,
and Electron Beams
Edited by J. M. Poate, G. Foti, and D. C. Jacobson
SURFACE
MODIFICATION
AND ALLOYING
by
Laser, Ion, and Electron Beams
Edited by
J.
M. Poate
Bell Laboratories
Murray Hill, New Jersey
G. Foti
University of Catania
Catania, Italy
and
D. c. Jacobson
Bell Laboratories
Murray HiH, New Jersey
Published in cooperation with NATO Scientific Affairs Division
PLENUM PRESS· NEW YORK AND LONDON
Library of Congress Cataloging in Publication Data
Main entry under title:
Surface modification and alloying by laser, ion, and electron beams.
(NATO conference series, series VI, Materials science; v. 8)
Proceedings of a NATO Advanced Study Institute on Surface Modification and Alloy
ing, held Aug. 24-28,1981., in Trevi, Italy.
Includes bibliographical references and index.
1. Metals-Surfaces-Congresses. 2. Metals-Effect of radiation on-Congresses.
3. Alloys-Congresses. 4. Laser beams-Congresses. 5. Ion bombard
ment-Congresses. 6. Electron beams-Congresses. I. Poate, J. M. North Atlantic
Treaty Organization. Scientific Affairs Division. V. NATO Advanced Study Institute on
Surface Modification and Alloying (1981: Trevi, Italy) VI. Series: NATO conference
series. VI. Materials science; v. 8.
TN689.2.S85 1983 671.7 83-9465
ISBN-13: 978-1-4613-3735-5 e-ISBN:13978-1-4613-3733-1
001:10.1007/978-1-4613-3733-1
Proceedings of a NATO Advanced Study Institute on Surface Modification
and Alloying, held August 24-28,1981, in Trevi,ltaly
© 1983 Plenum Press, New York
Softcover reprint of the hardcover 15t edition 1983
A Division of Plenum Publishing Corporation
233 Spring Street, New York, N.Y. 10013
All rights reserved
No part of this book may be reproduced, stored in a retrieval system, or transmitted
in any form or by any means, electronic, mechanical, photocopying, microfilming,
recording, or otherwise, without written permission from the Publisher
PREFACE
This book is an outcome of the NATO institute on surface modification which was held in
Trevi, 1981. Surface modification and alloying by ion, electron or laser beams is proving to
be one of the most burgeoning areas of materials science. The field covers such diverse areas
as integrated circuit processing to fabricating wear and corrosion resistant surfaces on
mechanical components. The common scientific questions of interest are the microstructures
and associated physical properties produced by the different energy deposition techniques.
The chapters constitute a critical review of the various subjects covered at Trevi. Each
chapter author took responsibility for the overall review and used contributions from the
many papers presented at the meeting; each participant gave a presentation. The
contributors are listed at the start of each chapter. We took this approach to get some order
in a large and diverse field.
We are indebted to all the contributors, in particular the chapter authors for working the
many papers into coherent packages; to Jim Mayer for hosting a workshop of chapter authors
at Cornell and to Ian Bubb who did a sterling job in working over some of the manuscripts.
Our special thanks are due to the text processing center at Bell Labs who took on the task of
assembling the book. In particular Karen Lieb and Beverly Heravi typed the whole
manuscript and had the entire book phototypeset using the Bell Laboratories UNIX™
system.
J. M. Poate
G. Foti
D. C. Jacobson
v
NATO INSTITUTE ON SURFACE
MODIFICATION AND ALLOYING
Trevi, Italy, August 24-28, 1981
The NATO Materials Science Panel recognized early in 1980 that the time was right to
hold a NATO Advanced Research Institute devoted to the subject of surface modification
and alloying and we were invited by Dr. Alan Chynoweth to direct the Institute. The
planning for the meeting was carried out at several committee meetings. Dr. Aquiles Gomes
of the NATO Scientific Affairs Division provided considerable advice on all aspects of the
planning. We are particularly grateful to our Italian colleagues, Nuccio Foti, Paulo Mazzoldi
and Emanuele Rimini for their rigorous scientific input and, moreover, invaluable logistical
support before, during and after the meeting. At the US end Jim Mayer provided extensive
input on the scientific content as well as organizing a US contingent who could not be
directly supported by NATO travel funds. Their participation was made possible by a
generous grant from the Defense Advanced Research Projects Agency (DARPA),
Washin~ton, D.C. We thank Sven Roosild (DARPA) and Larry Cooper (ONR) for their
support and encouragement.
The intent of these Institutes is to assemble a limited number of experts to evaluate and
help guide future progress in the field. The format of the meeting consisted of a series of
keynote lecturers followed by discussion and short contributions by all participants. The
intensive five days of science were balanced by the beautiful Umbrian setting of the Hotel
della Torre, Trevi, and the superb hospitality of our local hosts. In particular we wish to
thank Carla Carbone of Gruppo Nazionale Struttura della Materia, Rome, for her splendid
efforts in helping run the meeting. The efforts of Alfredo Trovato of the Istituto di Struttura
della Materia, Catania, helped ensure an efficiently run meeting.
J. M. Poate
J. K. Hirvonen
vi
CONTENTS
CHAPTER 1 AN OVERVIEW OF SURFACE
MODIFICATION ................................................................... .
by J. M. Poate and G. Foti
I. Introduction .................................................................................................................. 1
II. Surface Heating ........................................................................................................... 2
III. Crystal Growth: Epitaxy .............................................................................................. 6
IV. Metastable Phases ........................................................................................................ 7
V. Ion Beam Effects .......................................................................................................... 7
VI. Applications and Future Directions ............................................................................ 11
CHAPTER 2 ENERGY DEPOSITION AND HEAT
FLOW FOR PULSED LASER, ELECTRON
AND ION BEAM IRRADIATION ............................. 15
by E. Rimini
I. Introduction .................................... .... .......................................................................... 16
II. Interaction of Laser Beams with Semiconductors ...................................................... 17
III. Interaction of Laser Beams with Metals .................................................................... 30
IV. Electron Beam Irradiation of Materials ...................................................... ;.............. 40
V. Ion Beam Irradiation of Materials .............................................................................. 43
VI. Conclusion .................................................................................................................... 46
CHAPTER 3 CRYSTAL GROWTH AND
PHASE FORMATION ....................................................... 51
by K. A. Jackson
I. Introduction. ............ ........................ .... ........ ................................................................. 51
II. Crystal Growth ............................................................................................................. 52
III. Solute Trapping ............................................................................................................ 59
IV. Amorphous Silicon ............................ ............................................. ............... ............... 64
V. Crystallization of Amorphous Silicon ................ ......................................................... 68
VI. Explosive Crystallization ............................................... ,............................................. 69
VII. Heat Flow and Crystallization .................................................................................... 70
VIII. Constitutional Supercooling ......................................................................................... 71
IX. Defects Produced by Laser Irradiation ....................................................................... 73
vii
viii CONTENTS
CHAPTER 4 SEGREGATION
SUPERSATURATED ALLOYS AND
SEMICONDUCTOR SURFACES ..............................
81
by C. W. White, D. M. Zehner,
S. U. Campisano and A. G. Cullis
I. Introduction .................................................................................................................. 82
II. Segregation, Supersaturated Alloys and
Solute Trapping ........................................................................................................ 83
III. Surface Properties ........................................................................................................ 117
CHAPTER 5 SOLID PHASE RECRYSTALLIZATION
PROCESSES IN SILICON .............................................
133
by J. S. Williams
I. Introduction .................................................................................................................. 133
II. Overview of Experimental Observations ..................................................................... 134
III. Regrowth Models ......................................................................................................... 152
IV. Summary and Conclusions .......................................................................................... 159
CHAPTER 6 METASTABLE ALLOYS AND
SUPERCONDUCTIVITY .................................................
165
by B. Stritzker
I. Introduction ............................................. , .... ... .... .... .... ... .... ... ....... .... .... ... .... ... .... .... ...... 166
II. Non-Equilibrium Methods .......................................................................................... 169
III. Internal Energy Considerations ................................................................................... 171
IV. Vapor Quenching, Comparison
with Other Non-Equilibrium Techniques ............................................................... 173
V. Liquid Quenching; Comparison
with Other Non-Equilibrium Techniques ............................................................... 178
VI. Ion Irradiation and Implantation; Methods
to Produce Amorphous Metals ................................................................................ 181
VII. Te-Au; A Comparison of the Different
Non-Equilibrium Techniques .................................................................................. 182
VIII. Conclusion .................................................................................................................... 184
CHAPTER 7 COLLISION CASCADES AND
SPIKE EFFECTS ...................................................................
189
by J. A. Davies
I. Introduction .................................................................................................................. 189
II. Collision Cascade Concepts ......................................................................................... 191
III. Deposited Energy Density, 8 ....................................................................................... 193
IV. Ion-Beam Mixing ......................................................................................................... 198
V. Experimental Examples of Spike Effects .................................................................... 201
VI. Thermal Spike Concepts -and Complications ........................................................... 205
VII. Conclusions ................................................................................................................... 208
CONTENTS ix
CHAPTER 8 SOLUTE REDISTRIBUTION AND
PRECIPITATE STABILITY: POINT-DEFECT
MEDIATED EFFECTS ......................................................
211
by A. D. Marwiek
I. Introduction .................................................................................................................. 211
II. Mechanisms .................................................................................................................. 212
III. Redistribution Effects .................................................................................................. 223
IV. Phase Stability Under Irradiation ............................................................................... 232
V. Conclusions and Future Trends for
Surface Processing ................................................................................................... 237
CHAPTER 9 ION BEAM MIXING ..........................................................
241
by J. W. Mayer and S. S. Lau
I. Introduction .................................................................................................................. 242
II. Mixing Effects in Compound Forming
Systems; Pt-Silicide ................................................................................................. 244
III. Mixing Effects in Silicide Forming Systems .............................................................. 251
IV. Metal/Metal Bilayer Systems ..................................................................................... 252
V. Multi-Layer Metal/Metal Systems ............................................................................. 255
VI. Eutectic Systems .......................................................................................................... 256
VII. Conclusions and Speculations ...................................................................................... 258
CHAPTER 10 SPU'ITERING AND COMPOSITIONAL
CHANGES ...................................................................................
261
by H. Wiedersieh
I. Introduction .................................................................................................................. 261
II. Processes Involved in Surface Compositional Changes .............................................. 262
III. Model Calculations ...........................................................................................•.......... 275
IV. Summary and Conclusions .......................................................................................... 281
CHAPTER 11 SURFACE MODIFICATION AND
ALLOYING: ALUMINUM .............................................
287
by S. T. Pieraux and D. M. FoUstaedt
I. Introduction .................................................................................................................. 288
II. Electron, Laser and Ion Beam Heating ...................................................................... 289
III. Ion Implantation and Pulsed Heating ......................................................................... 291
IV. Summary of Pulsed Melting Microstructures ............................................................ 313
V. Ion Beam Mixing and Pulsed Melting of Layers ....................................................... 318
VI. Conclusions ................................................................................................................... 320
x CONTENTS
CHAPTER 12 MATERIALS MODIFICATION BY
ION IMPLANTATION ...................................................... 323
by J. K. Hirvonen and C. R. Oayton
I. Introduction .................................................................................................................. 324
II. Ion Implantation -Advantages and
Limitations of the Technique .................................................................................. 324
III. Tribological and Mechanical Property Changes ........................................................ 326
IV. Mechanisms of Friction and Wear ............................................................................. 337
V. Fatigue .......................................................................................................................... 341
VI. Applications of Ion Implantation to
Corrosion Science and Engineering ........................................................................ 349
VII. Chemical Applications of Ion Implantation -
Catalysts and Hydrogen Migration ........................................................................ 361
VIII. Radiation Damage and Pulsed Annealing
of Superconductors with A15 Structure ................................................................. 365
IX. Ion Implantation as a Tool in Fundamental
Alloy Research - Interstitials in Metals ................................................................. 372
CHAPTER 13 LASER SURFACE ALLOYING .................................. 385
by C. W. Draper and J. M. Poate
I. Introduction .................................................................................................................. 385
II. Metallurgy .................................................................................................................... 386
III. Ferrous Based Systems ................................................................................................ 394
IV. Nonferrous Based Systems .......................................................................................... 396
V. Metal Silicides .............................................................................................................. 400
VI. Conclusions ................................................................................................................... 401
TREVI INSTITUTE: PARTICIPANTS AND CONTRIBUTORS ................. 405
INDEX .................................................................................................................................... 409