Surface Contamination: Genesis, Detection, and Control

529 Pages·1979·15.85 MB·English

by  K. L. Mittal (auth.)

Surface
Contamination
Genesis, Detection, and Control
Volume 1
Surface
Contamination
Genesis, Detection, and Control
Volume 1
Edited by
K. L. Mittal
IBM Corporation
East Fishkill Facility
Hopewell Junction, New York
PLENUM PRESS . NEW YORK AND LONDON
Library of Congress Cataloging in Publication Data
Main entry under title:
Surface contamination.
Proceedings of a symposium on Surface Contamination: Its Genesis, Detection,
and Control held at the fourth International Symposium on Contamination Con
trol in Washington, D.C., on September 10-14,1978, sponsored by the Institute
of Environmental Sciences and the International Committee of Contamination
Control Societies
Includes index.
1. Surface contamination-Congresses I. Mittal K. L., 1945- II. Interna-
tional Symposium on Contamination Control, 4th, Washington, D.C., 1978.
III. Institute of Environmental Sciences. IV. International Committee of Con
tamination Control Societies.
TA418.7.S8 620.1'129 79-15433
ISBN-13: 978-1-4684-3508-5 e-ISBN-13: 978-1-4684-3506-1
001: 10.1007/978-1-4684-3506-1
Proceedings of a Symposium on Surface Contamination: Its Genesis, Detection, and Control,
held at the Fourth International Symposium on Contamination Control in Washington, D.C.,
on September 10-14, 1978, published in two volumes, of which this is volume one.
©1979 Plenum Press, New York
A Division of Plenum Publishing Corporation
227 West 17th Street, New York, N.Y. 10011
Softcover reprint of the hardcover 1s t edition 1979
All rights reserved
No part of this book may be reproduced, stored in a retrieval system, or transmitted,
in any form or by any means electronic, mechanical, photocopying, microfilming,
recording, or otherwise, without written permission from the Publisher
Preface
The present volume and its companion Volume 2 document the
proceedings of the Symposium on Surface Contamination: Its
Genesis, Detection and Control held in Washington, D.C., September
10-13, 1978. This Symposium was a part of the 4th International
Symposium on Contamination Control held under the auspices of the
International Committee of Contamination Control Societies, and
the Institute of Environmental Sciences (U.S.A.) was the official
host.
The ubiquitous nature of surface contamination causes concern
to everyone dealing with surfaces, and the world of surfaces is
wide and open-ended. The technological areas where surface clean
ing is of cardinal importance are too many and very diversified.
To people working in areas such as adhesion, composites, adsorp
tion, friction, lubrication, soldering,device fabrication,
printed circuit boards, etc., surface contamination has always
been a bete noire. In short, people dealing with surfaces are
afflicted with molysmophobiat, and rightfully so.
In the past, the subject of surface contamination had been
discussed in various meetings, but this symposium was hailed as
the most comprehensive symposium ever held on this important topic,
as the technical program comprised 70 papers by more than 100
authors from 10 countries. The symposium was truly international
in scope and spirits and was very well attended. The attendees
represented a broad spectrum of backgrounds, interests, and pro
fessional affiliations, but all had a common interest and concern
about surface contamination and cleaning.
This Symposium was organized with the following objectives in
mind: to bring together scientists, technologists, and engineers
tMolysmophobia means fear of dirt or contamination, from Mrs.
Byrne's Dictionary of Unusual, Obscure, and Preposterous Words,
University Books, Secaucus, N.J. 1974.
v
PREFACE
interested in all aspects of surface contamination, to review and
assess the current state of the knowledge, to provide a forum for
exchange and cross-fertilization of ideas, and to define problem
areas which need intensified efforts; the comments from the aud
ience confirm that these objectives were definitely fulfilled. For
example, there were brisk and enlightening - not exothermic - dis
cussions and information exchanges between the presenters and the
audience. It should be added that the purpose of a symposium is
to present the state of the knowledge of the topic under consider
ation, and this is best accomplished by inviting the leading workers
to present overview papers covering topics of their special inter
est; these should be complemented and augmented by original
research papers. This is exactly what was done for this symposium
as there were 20 invited overviews covering a wide range of sub
topics within the purview of surface contamination. May it be
added that there are three components of the subject of surface
contamination: (i) cleaning of surfaces, (ii) characterization of
the degree of surface cleanliness, and (iii) storage of clean sur
faces or the kinetics of recontamination. All these components
were covered in this symposium.
The present proceedings volumes contain a total of 64 papers
(some papers from the original program are not included for a
variety of reasons, and a few papers which were not presented but
are included) which were reviewed by at least two qualified re
viewers, and most of these were modified and revised in light of
the reviewers' comments before inclusion in these volumes. Only
about half of these papers (unreviewed) in their abbreviated form
(long abstract) were included in the document distributed to the
registrants at the time of the meeting. So the present volumes
contain a great deal more material. The papers included are
in their full form and are divided into four sections as follows:
General Papers; Cleaning of Surfaces; Surface Contamination Detec
tion, Identification, Characterization, and Control; and Implica
tions of Surface Contamination. Sections I & II are embodied in
Volume 1, and Volume 2 contains Sections III & IV. Broadly speak
ing, all kinds of surfaces (metal, oxide, ceramic, glass, alloy,
polymer,and liquid) and contaminants (organic film, inorganic,
particulate, microbial"and radioactive) are covered in these vol
umes as the intent of the Symposium was to cover the topic of sur
face contamination in general and broad terms rather than to con
centrate on a particular surface/contamination combination.
The topics covered include: sources, forms, and mechanism(s)
of surface contamination; various techniques (including solvent,
plasma, UV/ozone, chemical, mechanical, ion milling, and surface
chemical) for cleaning surfaces; radioactive and microbial con
tamination of surfaces; atomically-clean surfaces; preparation of
clean mineral surfaces; particle adhesion; preparation of clean
PREFACE ~i
water surfaces; cleaning of polymeric surfaces; various techniques
[including contact angle or wettability, evaporative rate analysis,
indium adhesion test, surface potential difference, spectroscopy
(Auger, ESCA, ISS, SIMS), ellipsometry, plasma chromatography, ion
chromatography, and microfluorescence] for characterizing the degree
of surface cleanliness; ionic contamination detection and charac
terization; and implications of surface contamination.
It should be added that the availability of sophisticated
surface analytical tools has been a boon in the area of surface
contamination and a series of papers deal with the utility of such
techniques for monitoring and characterizing microamounts of sur
face contaminants. The papers dealing with implications. of surface
contamination cover topics ranging from microelectronics to the
public health sector.
In essence, these proceedings volumes present a very compre
hensive coverage of the latest state of the knowledge relative to
the important subject of surface contamination. A special feature
of these volumes is the inclusion of 20 invited overviews which
should provide a veritable gold mine of valuable information, and
these overviews coupled with the 44 contributed research papers
should serve as a vade ~ for anyone interested in surface con
tamination and cleaning. It should be added that originally it was
intended to include a Discussion at the end of each section, but in
spite of the continuous exhortation, the number of questions re
ceived in written form (although there was a brisk verbal discus
sion at the end of each paper) did not warrant inclusion of written
Discussions in these volumes.
Acknowledgements: First of all, I am thankful to the manage
ment of IBM Corporation for permitting me to organize this sympo
sium and to edit these volumes. Particularly, I would like to
acknowledge the understanding and patience of my manager, Dr. H. R.
Anderson, Jr., during this activity. Special thanks are due to
Mr. R. W. Martin for his help and cooperation during the various
stages of putting together the technical program, to Mrs. Betty
Peterson of the Institute of Environmental Sciences for her ready
and willing help whenever it was needed. The reviewers should be
thanked for their sacrifice of time and many valuable comments.
The cooperation and enthusiasm of the authors is a must for any
proceedings volume and I would like to thank them for their efforts
and cooperation in submitting the manuscripts. Thanks are due to
all the secretaries who helped with the correspondence typing. I
am thankful to my wife, Usha, for letting me work late hours during
the tenure of editing these volumes and also for helping with the
subject index; to my daughter, Anita, and son, Rajesh, for letting
me spend those hours which rightfully belonged to them.
vili PREFACE
Last, but not least, I would like to express my thanks to Mrs.
Edith Oakley (Forbes Services) for meeting, without complaint, var
ious deadlines for typing of the manuscripts.
K. L. Mittal
Symposium Organizer and Chairman
IBM Corporation
East Fishkill Facility
Hopewell Junction, N.Y. 12533
Contents of Volume 1
PART I. GENERAL PAPERS
Surface Contamination: An Overview . . . . . 3
K. L. Mittal
Relationship Between Surface Energy and
Surface Contamination . . . • 47
T. Matsunaga
Investigation of the Interaction of Certain
Low Energy Liquids with Polytetrafluoroethylene
and Its Implications. in the Contamination
of Polymeric Surfaces . . • . • . . • . . • 57
F. Galembeck, S. E. Galembeck, H. Vargas,
C. A. Ribeiro, L. C. M. Miranda, and C. C. Ghizoni
A Study of the Effects of Relative Humidity
on Small Particle Adhesion to
Surfaces 73
W. J. Whitfield
Particulate Removal in Microelectronics
Manufacturing • . • • .. •••••...• 83
D. A. Brandreth and R. E. Johnson, Jr.
Electrostatic Effects in the Adhesion of
Powder Layers 89
J. A. Cross
Causes and Cures of Dirty Windows . . . • . • • • . . • .• 103
P. B. Adams
Surface Contamination by Ion Bombardment 113
K. Shimizu and H. Kawakatsu
ix
x CONTENTS OF VOLUME 1
Surface Contamination and Corrosion in Pyrotechnic
Actuators •• • . . • . • • 129
R. G. Jungst, R. K. Quinn, T. M. Massis,
R. N. Roberts, and R. E. Whan
Decomposition of Hydrogen Peroxide Cleaning
Solutions by Selectively Plated Leadframes
and Its Implications with Respect to
Circuit Yield • • • • • • • • • • • 149
R. G. Fekula, W. J. Flood, and D. L. Rehrig
Ellipsometric Observations of Aluminum
Hydroxide Films Grown in Water Vapor . . • . . •• 165
W. E. J. Neal and A. S. Rehal
Contamination on Zinc and Aluminum Surfaces
After Extended Urban Exposures • . 183
G. B. Munier, L. A. Psota, B. T. Reagor, B. Russiello,
and J. D. Sinclair
238pu02 Surface Contamination of Radioisotopic
Heat Sources • • • • 195
D. R. Schaeffer and C. O. Brewer
Microbial Contamination of Surfaces 211
J. W. Costerton and G. G. Geesey
Surface Cleaning in Thin Film Technology 223
D. M. Mattox
PART II. CLEANING OF SURFACES
UV/'Ozone Cleaning of Surfaces: A Review •••• 235
J. R. Vig
Plasma Cleaning of Surfaces 255
W. W. Balwanz
Surface Contamination Removal from Solid State
Devices by Dry Chemical Processing 271
H. B. Bonham and P. V. Plunkett
Surface Cleaning by Low-Temperature Bombardment
with Hydrogen Particles: An AES
Investigation on Copper and Fe-Cr-Ni
Steel Surfaces • . . . . 287
R. Bouwman, J. B. van Mechelen, and A. A. Holscher
CONTENTS OF VOLUME 1 xi
Some Promising Applications of Ion Milling
in Surface Cleaning 297
S. I. Petvai and R. H. Schnitzel
Glass Cleaning and Characterization of Cleanliness • • • •• 313
L. L. Hench and E. C. Ethridge
A Systematic Approach to Glass Cleaning 327
P. B. Adams
Techniques for Removing Contaminants from
Optical Surfaces • • • • • • • • 341
I. F. Stowers and H. G. Patton
Cleaning of Polymer Surfaces • • • 351
J. A. Koutsky
Removal of Fluid Contaminants by
Surface Chemical Displacement 359
R. N. Bolster
Cleaning Issues Related to Soldering • • • • • • • • • • •• 369
H. H. Manko
Nonionic Contamination Prevention -- The Next
Step Toward Guaranteed Printed Wiring
Assembly Reliability • • • • • • • • • 377
W. G. Kenyon
Techniques for Removing Surface Contaminants
in Thin Film Depositon • • • • • • 393
B. Bhushan
Cleaning and Surface Preparation Technology and
Other Factors Related to Coatings
Produced by Flame Spraying • • • • • • 407
Y. A. Kharlamov, M. S. Hassan, and R. N. Anderson
Contaminated Concrete Surface Layer Removal 443
J. M. Halter and R. G. Sullivan
Preparation and Characterization of
Clean Mineral Surfaces • • 457
P. Somasundaran and B.M. Moudgil
The Preparation of Clean Water Surfaces for
Fluid Mechanics • • • • • • • 477
J. C. Scott