Spectroscopic ellipsometry : practical application to thin film characterization PDF
Preview Spectroscopic ellipsometry : practical application to thin film characterization
EBOOKS Spectroscopic Ellipsometry T O MATERIALS CHARACTERIZATION FOR THE M Practical Application to Thin Film P AND ANALYSIS COLLECTION ENGINEERING Characterization K I LIBRARY N C. Richard Brundle, Editor Harland G. Tompkins • James N. Hilfiker S • Create your own H Customized Content I Ellipsometry is an experimental technique for determining the L Bundle — the more F thickness and optical properties of thin films. It is ideally suited I K books you buy, for films ranging in thickness from sub-nanometer to several E R the higher your microns. Spectroscopic measurements have greatly expanded discount! the capabilities of this technique and introduced its use into all areas where thin films are found: semiconductor devices, flat THE CONTENT panel and mobile displays, optical coating stacks, biological and Spectroscopic medical coatings, protective layers, and more. • Manufacturing Engineering While several scholarly books exist on the topic, this book • Mechanical Ellipsometry provides a good introduction to the basic theory of the & Chemical technique and its common applications. The target audience is Engineering S not the ellipsometry scholar, but process engineers and students p • Materials Science of materials science who are experts in their own fields and e Practical Application & Engineering c wish to use ellipsometry to measure thin film properties without t • Civil & r becoming an expert in ellipsometry itself. o to Thin Film Environmental s Engineering c Harland G. Tompkins received his BS in physics from the o Characterization • Electrical University of Missouri and his PhD in physics from the University p Engineering i of Wisconsin–Milwaukee. He is a consultant for the J. A. Woollam c Company in Lincoln, NE, as well as for other companies. He E THE TERMS l has written numerous journal articles in the reviewed technical l i p • Perpetual access for literature, is the author of four books, and has edited two books. s a one time fee o • No subscriptions or James N. Hilfiker graduated from the Electrical Engineering m access fees Department of the University of Nebraska, where he studied e • Unlimited under Professor John Woollam. He joined the J.A. Woollam tr concurrent usage Company upon graduation and has worked in their applications y • Downloadable PDFs lab for 20 years. His research at the J.A. Woollam C ompany • Free MARC records has focused on new applications of ellipsometry, including characterization of anisotropic materials, liquid crystal films, and, Harland G. Tompkins For further information, more recently, thin film photovoltaics. He has authored over a free trial, or to order, 40 technical articles involving ellipsometry. James N. Hilfiker contact: [email protected] ISBN: 978-1-60650-727-8 SPECTROSCOPIC ELLIPSOMETRY SPECTROSCOPIC ELLIPSOMETRY P a ractical PPlication t F c to hin ilm haracterization HARLAND G. TOMPKINS AND JAMES N. HILFIKER MOMENTUM PRESS, LLC, NEW YORK Spectroscopic Ellipsometry: Practical Application to Thin Film Characterization Copyright © Momentum Press®, LLC, 2016. All rights reserved. No part of this publication may be reproduced, stored in a retrieval system, or transmitted in any form or by any means— electronic, mechanical, photocopy, recording, or any other—except for brief quotations, not to exceed 400 words, without the prior permission of the publisher. First published by Momentum Press®, LLC 222 East 46th Street, New York, NY 10017 www.momentumpress.net ISBN-13: 978-1-60650-727-8 (print) ISBN-13: 978-1-60650-728-5 (e-book) Momentum Press Materials Characterization and Analysis Collection Collection ISSN: 2377-4347 (print) Collection ISSN: 2377-4355 (electronic) Cover and interior design by Exeter Premedia Services Private Ltd., Chennai, India 10 9 8 7 6 5 4 3 2 1 Printed in the United States of America To our wives Rose Ann Tompkins Lisa Hilfiker a bstract Ellipsometry is an experimental technique for determining the thickness and optical properties of thin films. It is ideally suited for films ranging in thickness from subnanometer to several microns. Spectroscopic measurements have greatly expanded the capabilities of this technique and introduced its use into all areas where thin films are found: semiconductor devices, flat panel and mobile displays, optical coating stacks, biological and medical coatings, protective layers, and more. While several s cholarly books exist on the topic, this book provides a good introduction to the basic theory of the technique and its common applications. It follows in the footsteps of two previous books written by one of the authors with important updates to emphasize modern instrumentation and applications. The target audience is not the ellipsometry scholar, but process engineers and students of materials science who are experts in their own fields and wish to use ellipsometry to measure thin film properties without becoming an expert in ellipsometry itself. KEYWORDS Cauchy equation, dispersion equations, ellipsometry, optical constants, polarized light, refractive index, thin film thickness c ontents List of figures xiii List of tabLes xxv Preface xxvii acknowLedgments xxix 1 PersPective, Previous works, and PurPose of this voLume 1 1.1 Historical Aspects 1 1.2 Focus of This Book and Target Audience 1 1.3 Overview of Topics 2 2 basic PhysicaL Phenomena 5 2.1 The Electromagnetic Wave 5 2.2 Interactions Between the Electromagnetic Wave and Matter 10 2.3 Laws of Reflection and Refraction 14 2.4 Polarized Light 14 2.5 The Reflection and Transmission of Light 18 2.6 Measurement Quantities 26 3 sPectroscoPic eLLiPsometry comPonents and instrumentation 31 3.1 Components of a Spectroscopic Ellipsometer 31 3.2 Spectroscopic Ellipsometers 45 4 generaL data features 57 4.1 Spectra for Substrates 58 4.2 Spectra for Films on a Substrate 65 5 rePresenting oPticaL functions 71 5.1 Tabulated List 71 5.2 Dispersion Equations 73
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