Silicon science and advanced micro-device engineering I : selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the

284 Pages·2011·35.471 MB·English

by  Osamu Hanaizumi, Masafumi Unno, Gunma Daigaku. International Education and Research Center for Silicon Science., Gunma Daigaku. Advanced Technology Research Center

Advanced
Micro-Device
Engineering
Edited by
Osamu Hanaizumi
Masafumi Unno

Advanced
Micro-Device Engineering
Selected, peer reviewed papers from the 5th International Symposium
on Silicon Science and the 1st International Conference on Advanced
Micro-Device Engineering (ISSS & AMDE 2009), was held by the
International Education and Research Center for Silicon Science and
the Advanced Technology Research Center (ATEC), Gunma University
on 10 and 11 December 2009 in Kiryu, Japan
Edited by
Osamu Hanaizumi and Masafumi Unno
TRANS TECH PUBLICATIONS LTD

Switzerland • UK • USA
Copyright  2011 Trans Tech Publications Ltd, Switzerland

All rights reserved. No part of the contents of this publication may be
reproduced or transmitted in any form or by any means without the
written permission of the publisher.

Trans Tech Publications Ltd
Laubisrutistr. 24
CH-8712 Stafa-Zurich
Switzerland
http://www.ttp.net
Volume 459 of
Key Engineering Materials
ISSN 1013-9826
Full text available online at http://www.scientific.net

Distributed worldwide by and in the Americas by
Trans Tech Publications Ltd. Trans Tech Publications Inc.
Laubisrutistr. 24 PO Box 699, May Street
CH-8712 Stafa-Zurich Enfield, NH 03748
Switzerland USA
Phone: [phone]
Fax: [phone] Fax: [phone]
e-mail: [email protected] e-mail: [email protected]
Preface

A joint symposium of the 5th International Symposium on Silicon Science (ISSS 2009) and the
1st International Conference on Advanced Micro-Device Engineering (AMDE 2009) was held by the
International Education and Research Center for Silicon Science and the Advanced Technology
Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan. The
symposium was attended by 124 researchers, and the number of presentations was 80, including
23 oral presentations (7 invited and 16 regular) and 57 poster presentations.
Gunma University was established more than fifty years ago from an amalgamation of several
educational institutions, including Maebashi Medical College, Kiryu Technical College, Gunma
Normal School, and Gunma Youth Normal School. From these institutions, the Faculty of Medicine,
the Faculty of Engineering, and the Faculty of Education were formed. Since its inception, the
university has striven to foster distinguished physicians, engineers and teachers. Focusing on
science and technology, the university has contributed significantly to the development of postwar
Japan. The postwar industrial and economic growth of Japan has been steadily declining while
neighboring countries appear ready to overtake Japan’s lead position. The effects of these changes
can be seen in various social phenomena. The university must take its position at the head of our
society in order to lead the way toward the construction of a new era. It is imperative that the
university accomplishes its mission to stimulate new energy for a new era. In order to achieve this
goal, we need the participation of students who will bear the burdens of a new age.
Research in silicon science also has a long history comparable to that of the university. Many
professors devoted their energies to study silicon science to develop functional materials. A
research team led by Professors Matsumoto and Hiratsuka proposed an advanced research project
for the establishment of silicon science, leading to the birth of G-ASiST, the Gunma association of
silicon science and technology, in March 2005. This project has been adopted as Co-operative
projects, called Renkei-Yuugou Jigyou, and in March 2008, we established the International
Education and Research Center for Silicon Science (Silicon Center).
The Advanced Technology Research Center (ATEC) was established in 1996 as the Satellite
Venture Business Laboratory (SVBL). After the Japanese National Universities were incorporated in
2006, SVBL was renamed ATEC. ATEC seeks to create fundamental technologies to foster future
advanced industries and to develop human resources having professional skills and venturesome
minds. The main research projects at ATEC are “Applied Materials,” “Nanotechnologies,” “Applied
Optics,” and “Analog Circuit Technologies”. Such projects have been advanced through close
collaboration with the Silicon Center. AMDE was first organized in 2009 to promote the activity of
ATEC, as a joint symposium with ISSS.
This special issue collects the contributions, submitted and accepted by at least two independent
referees for this issue of Key Engineering Materials.
We are greatly thankful to all participants of ISSS & AMDE 2009. We also acknowledge the
authors and referees for their contribution to the present proceedings.

Chairs of ISSS & AMDE 2009

Osamu Hanaizumi
Masafumi Unno

Gunma University, Japan
Organized by
International Education and Research Center for Silicon Science, Gunma University
Advanced Technology Research Center, Gunma University

Organizing Committee
ISSS AMDE
Chairs: M. Unno O. Hanaizumi

Vice-chairs: H. Matsumoto
M. Hanaya

Secretaries: K. Miura
N. Sakaguchi
(Gunma University)

Supported by
Gunma University
Kiryu City
New Gunma Analog College, MEXT
Foundation for Science and Technology, Gunma University
Chisso Corporation
Shin-Etsu Chemical Co.,Ltd.
Momentive Performance Materials Inc.
Colcoat Co.,Ltd.
Ajinomoto Fine-Techno Co.,Inc.
The Institute of Electronics, Information and Communication Engineers
The Illuminating Engineering Institute of Japan

Editorial Committee
Editor-in-Chief: O. Hanaizumi (Gunma University, Japan)
Vice Editor-in-Chief: M. Unno (Gunma University, Japan)
Editor: M. Ito (Gunma University, Japan)
Editor: H. Sakurai (Gunma University, Japan)
Editor: S. Adachi (Gunma University, Japan)
Editor: S. Hosaka (Gunma University, Japan)
Editor: Y. Yamakoshi (Gunma University, Japan)
Editor: Y. Fujii (Gunma University, Japan)
Editor: N. Takai (Gunma University, Japan)
Assistant Editor: K. Miura (Gunma University, Japan)
Table of Contents
Preface
Organizers
I. Material Science
Spin and Orbital Magnetic Moment of Pd Co Evaluated by X-Ray Magnetic Diffraction
3
Experiment
M. Ito, Y. Oba, A. Sato, K. Suzuki, T. Tadenuma, R. Nagayasu, H. Sakurai and H. Adachi 3
Spin Density Distribution of YTiO Observed by X-Ray Magnetic Diffraction
3
K. Suzuki, M. Ito, N. Tsuji, H. Adachi, H. Nakao, Y. Murakami, Y. Taguchi, Y. Tokura, E.
Nishibori and M. Sakata 7
Magnetic Compton Profile Measurement of Thin Films
H. Nishino, R. Yamaki, M. Itou, Y. Sakurai, H. Sakurai and M. Ito 11
Ferromagnetic Resonance Frequency of Single-Layer Magnetic Metal Films with Lattice
Distortion
N. Shigeno, S. Negishi, K. Hoshi, T. Fukunaga, S. Furusawa and H. Sakurai 15
Effect of Annealing on Sub-Gap Absorption in Amorphous InGaZnO Films
4
T. Gotoh, K. Kawarai, H. Wakabayashi and K. Kaneda 19
Improvement of Crystallization Rate in Post-Annealed Ge Sb Te Films
2 2 5
K. Kawarai and T. Gotoh 23
Ionic Conductivity of Polycrystalline Li Ge Si O (x = 0.0~1.0)
2 x 1-x 3
S. Furusawa and S. Enokida 27
Structural Analysis of Rf Sputtered Er Doped Ta O Films
2 5
J.P. Bange, M.K. Singh, K. Kano, K. Miura and O. Hanaizumi 32
Preparation of CaTiO :Pr Phosphor by Using CaB O as a Flux
3 2 4
T. Kyômen, K. Hirozumi and M. Hanaya 38
II. Chemical Science and Technology
Solvent-Free Synthesis of Siloxanes and their Usage as Potential Cross-Coupling Reagents
M. Unno, R. Tanaka, D. Obinata, M. Endo, T. Sakurai, S. Ojima, T. Katayama and K. Fugami 43
Preparation of Anisotropic Chitosan Hydrogel with Birefringence and Analysis of Gel
Formation Process
N. Tomita, Y. Maki, T. Yamamoto and T. Dobashi 48
Thermosensitive Micelles Composed of Poly(lactide)-g-Poly(NIPAM-co-HEMA) Graft
Copolymers
T.M. Quynh, M. Yoneyama, Y. Maki, N. Nagasawa and T. Dobashi 51
Nano-Platelet Structure of Clay Materials Observed by Atomic Force Microscope
M. Kakiage, R. Takamatsu, H. Uehara, T. Yamanobe and K. Suzuki 57
Synthesis and Properties of Fluorescent Biological Molecules Labeled with Novel Silylated
Perylene Derivative
Y. Sato, A. Ozaki, M. Hosaka, T. Moriguchi and K. Shinozuka 63
Effect of Organometallic Compounds on the Formation of Carbon Nanostructures by
Pulsed Electric Discharge of Fluorine-Containing Organic Liquid between Metal Electrodes
K. Hosoi and S. Kuroda 67
Control of Methanol Crossover Using a Perforated Metal Sheet for DMFC Application
T. Tsujiguchi, N. Masumi, A. Kawakubo and N. Nakagawa 71
A Key Factor for the Actual Application of a Vapor Feed Passive DMFC Operated with
High Concentration of Methanol
M.A. Abdelkareem and N. Nakagawa 78
Relationship between Dielectric Characteristic by DEP Levitation and Differentiation
Activity for Stem Cells
Y. Hirota and M. Hakoda 84
b Silicon Science and Advanced Micro-Device Engineering I
Application of Micro-Metal Textile for Flexible Dye-Sensitized Solar Cell
K. Kakiage, E. Fujimura, M. Abe, H. Shinoda, T. Kyômen and M. Hanaya 92
The Hydrophobicity of Micro Water Pool and the Interfacial Fluidity of PC-Based W/O
Microemulsion Droplet Involved with Reactivity of Phospholipase A
2
K. Yamazaki and M. Imai 100
III. Nano-Science and Technology
Simple Nanoimprint Lithography with 50 nm Resolution Using Vacuum Packing
K. Itoh, H. Hirai, T. Ando, K. Takagi and K. Noguchi 111
Fabrication of Nanometer Sized Si Dot Arrays Using Ar Ion Milling with Calixarene Resist
Dot Arrays
T. Tamura, Y. Tanaka, T. Akahane, Y. Yin and S. Hosaka 116
Self-Assembled Nanodot Fabrication by Using Diblock Copolymer
M. Huda, Y. Yin and S. Hosaka 120
Guide Pattern for Long-Range-Order Nanofabrication of Self-Assembled Block
Copolymers
T. Akahane, M. Huda, Y. Yin and S. Hosaka 124
Prototype of Illumination-Collection Mode Scanning Near-Field Optical Microscopy and
Raman Spectroscopy with Gold Inner-Coated Aperture-Less Pyramidal Probe
S. Hosaka, H. Koyabu, Y. Aramomi, H. Sone, Y. Yin, E. Sato and K. Tochigi 129
Prototype of Frame-Type Cantilever for Biosensor and Femtogram Detection
H. Sone, S. Ichikawa, Y. Matsubara, M. Suzuki, H. Okano, T. Izumi and S. Hosaka 134
Large Resistance Ratio for High Reliability of Multi-Level Storage in Phase-Change
Memory
Y. Yin, T. Noguchi, H. Ohno and S. Hosaka 140
Proposed Phase-Change Memory with a Step-Like Channel for High-Performance Multi-
State Storage
Y. Yin and S. Hosaka 145
IV. Photonics Device and Technology
Mach-Zehnder Type Thermo-Optic Switch with Antenna-Coupled Y-Junction Fabricated
by Selective Photobleaching of Polysilane Films
O. Hanaizumi, K. Miura, Y. Hiratani, Y. Machida and M. Uehara 153
Polarization Control of SOA-Fiber Ring Laser
Y. Takahashi and R. Niida 157
Theoretical Analysis of Photonic Band Gaps and Defect Modes of Novel Photonic Crystal
Waveguides Consisting of Si-Ion Implanted SiO Using the Finite-Difference Time-Domain
2
Method
A.V. Umenyi, S. Kawashiri, K. Miura and O. Hanaizumi 162
Design and Fabrication of Novel Photonic Crystal Waveguide Consisting of Si-Ion
Implanted SiO Layers
2
A.V. Umenyi, M. Honmi, S. Kawashiri, T. Shinagawa, K. Miura, O. Hanaizumi, S. Yamamoto,
A. Inouye and M. Yoshikawa 168
Demonstration of Light-Emitting Two-Dimensional Photonic Crystals Composed of Silicon-
Rich Silicon-Dioxide Thin Films
K. Miura and O. Hanaizumi 173
V. Novel Measurement and System Technology
Tilt Mechanism for Precision Control of Down-Slope Component of Gravitational Force for
Micro Force Generation
K. Maru, W. Khunnam, L. Hu, R.S. Lu, P.P. Yupapin and Y. Fujii 179
Microforce Material Tester Using Small Pendulum
J. Ozawa, K. Maru, K. Kobayashi and Y. Fujii 183
Key Engineering Materials Vol. 459 c
Interdigital Ring Coupler Sensor for Parameter Estimation of Moving Objects
T. Miwa and Y. Yamakoshi 190
A Design Method for Two-Degree-of-Freedom Multi-Period Repetitive Control Systems
K. Yamada, N. Nakazawa, I. Murakami, Y. Ando, T. Hagiwara, S. Yamamoto, N.L.T. Nguyen
and T. Sakanushi 194
A Design Method for Modified PID Control Systems to Attenuate Unknown Disturbances
T. Hagiwara, K. Yamada, I. Murakami, Y. Ando and S. Matsuura 211
A Design Method for Stabilizing Modified Smith Predictors for Multiple-Input/Multiple-
Output Time-Delay Plants
K. Yamada, N.T. Mai, Y. Ando, T. Hagiwara, I. Murakami and T. Hoshikawa 221
A Novel Thermoelectric System with Conductive Metal Rods and its Effective Seebeck
Coefficients
T. Sasaki, Y. Kondoh, O. Hanaizumi and M. Goto 235
VI. Information and Communication Engineering
Architecture of Wideband High-Efficiency Envelope Tracking Power Amplifier for Base
Station
M. Kaneta, A. Kanbe, H. Hirata, T. Shimura, K. Yamagishi and H. Kobayashi 241
High-Speed Data Transmission Techniques Using Raised Cosine Signaling
Y. Yuminaka 252
High-Speed Multiple-Valued Data Transmission Based on Time-Domain Pre-Emphasis
Techniques
Y. Yuminaka and K. Henmi 260
Dynamics Simulation of Microbubbles in Ultrasonic Wave Field Considering the Secondary
Bjerknes Force
T. Miwa and Y. Yamakoshi 271