Table Of Content

Sensors and Actuators A, 30 (1992) 260 Author Index of Volume A30 Andreev, A., 215 Gridchin, V. A., 139, 219 Minkova, T., 101 Sarina, M. P., 219 Antonov, S., 63 Groenland, J. P. J., 89 Mironov, V., 63 Scheeper, P. R., 231 Moller, F., 73 Shurman, L. B., 139 Baizar, R., 175 Halg, B., 225 Murakami, K., 193 Smirnov, N., 105 Bajtsar, A., 59 Hess, G., 251 Spassov, L., 67 Barnes, C., 197 Huijsing, J. H., 167 Nagele, M., 241 Stamenov, V., 1 Bergveld, P., 231 Sukharev, Yu., 63 Nebrigi¢, D., 1 Bogdanova, N., 175 Ivanov, I., 63 Nedev, N., 105 Boursas, A., 105 Ivkovic, M., 1 NeSkovié, A., 1 Takayama, S., 193 Buff, W., 117 Tilmans, H. A. C., 35 Nihtianov, S., 101 Tretyakov, Y., 59 Karetnikova, E., 27 Ning, Y. N., 181 Cerven, I., 123 Tvarozek, V., 123 Kebedjiev, A., 215 Novotny, I., 123 Crazzolara, H., 241 Kopystynski, P., 149 Culshaw, B., 203 Vainberg, V. V., 55 Kostur, V. G., 143 Obermeier, E., 149 van Oudheusden, B. W., 5 Kovaé, J., 123 de Ridder, R. M., 89 Olthuis, W., 231 Varshava, S. S., 55 Krasnogenov, E., 175 Diankov, G., 215 Ono, Y., 193 von Miinch, W., 241 Kuhn, J., 73 Druzhinin, A. A., 143 Voorthuyzen, J. A., 231 Kiihnel, W., 251 Kutrakov, A., 27 Palmer, A. W., 129, 181 Voronin, V. A., 27, 143, Eijkel, C. J. M., 89 175 Pankov, Ju. M., 143 Elwenspoek, M., 35 Pelekh, L. N., 55 Lacko, T., 123 Wolffenbuttel, R. F., 109 PeSi¢, Lj., 1 Fluitman, J. H. J., 35, 89 Lubimskyi, V. M., 219 Pucklyakov, Y. A., 139 Fotheringham, G., 157 Yamamoto, T., 193 Maryamova, I. I., 27, 143 Grattan, K. T. V., 129, Mikolajezuk, O., 59 Rao, Y. J., 203 Zafirova, B., 215 181 Minkina, W., 209 Roumenin, Ch. S., 77 Zaganyach, Y., 27 Elsevier Sequoia Sensors and Actuators A, 30 (1992) 261-262 261 Subject Index of Volume A30 Arsenic Microelectronic sensors variband GaAsj,_,»P,; material for pressure sensors, 139 optical-fibre sensor technology; challenge to, 129 Attractive forces Microphones between PECVD Si nitride microstructures and oxidized Si Si condenser, with structured back plate and Si nitride substrate, 231 membrane, 251 Micro resonant force gauses, 35 Bias stabilization Microresonators Si pressure sensor with integrated, and temperature comparison between optically excited vibrations of Si compensation, 241 cantilever and bridge, 203 Microsensor(s) Electrodes parallel-field Hall; overview, 77 a-Si:H position-sensitive detector with striped metal, 193 Microsensor applications polysilicon as material for, 149 Fibre-optic interferometric systems Monocrystal line silicon resonator using low-coherence light sources, 181 operation of, in measuring circuit, 175 Fiber-optic temperature-measurement instrument Multi-chip modules wavelength-demultiplexed, 215 simulation methods for, 157 Force gauges micro resonant, 35 Operational frequency Frequency output some new concepts on factors influencing, of liquid- magnetic-field-sensitive device with, 101 immersed quartz microbalances, 197 Optical-fibre sensor technology Gallium challenge to microelectronic sensors?, 129 variband GaAsy_,P,; material for pressure sensors, 139 Optically excited vibrations Galvanomagnetic effects comparison between, of Si cantilever and bridge’ micro- three-dimensional modelling of, in lateral magnetotransitor resonators, 203 structure, 105 Optical readout Si pressure sensor with low-cost contactless interferometric, Hall microsensors 225 parallel-field; overview, 77 Permalloy Integrated smart sensors, 167 thin-film magnetic sensors, 89 Phosphorus Laser-recrystallized polysilicon variband GaAs,,_,P,; material for pressure sensors, 139 layers in sensors, 143 Piezoelectric quartz resonators Liquid-immersed quartz microbalances as highly sensitive temperature sensors, 67 some new concepts on factors influencing operational Plasma-enhanced chemical vapour deposition frequency of, 197 investigation of attractive forces between PECVD Si Low-coherence light sources nitride microstructures and oxidized Si substrate, 231 fibre-optic interferometric systems using, 181 Position-sensitive detector Low-temperature sensors a-Si:H, with striped metal electrodes, 193 based on telluride microcrystals, 55 Pressure sensor(s) Si, with integrated bias stabilization and temperature Measuring circuit compensation, 241 operation of monocrystal line Si resonator in, 175 Si, with low-cost contactless interferometric optical Mechanical sensors readout, 225 Si whiskers for, 27 variband GaAsj_,P,; material for, 139 Magnetic-field-sensitive device Pressure transducer with frequency output, 101 Magnetic sensors thick-film resistive, 1 permalloy thin-film, 89 Magnetotransistor structure Radiant sensors three-dimensional modelling of galvanomagnetic effects in Si micromachining for integrated, 109 lateral, 105 Resistance thermometers Manganese thin-film, for use in aggressive surroundings, 59 thin-film ZnS:MnF, temperature sensor with visual R.f. reactive sputtering of Zn oxide films on Si and Si-SiO,-TiN substrates, 123 indication, 63 Microbalances some new concepts on factors influencing operational SAW resonator frequency of liquid-immersed quartz, 197 temperature sensor, 73 Elsevier Sequoia 262 SAW sensors, 117 Strain-gauge transducers Silicon polysilicon, 219 a-Si:H position-sensitive detector with striped metal Telluride microcrystals electrodes, 193 comparison between optically excited vibrations of Si low-temperature sensors based on, 55 Temperature compensation cantilever and bridge microresonators, 203 Si pressure sensor with integrated bias stabilization and, condenser microphone with structured back plate and Si 241 nitride membrane, 251 Temperature-measurement instrument investigation of attractive forces between PECVD Si wavelength-demultiplexed fiber-optic, 215 nitride microstructures and oxidized Si substrate, Temperature sensor(s) 231 piezoelectric quartz resonators as highly sensitive, 67 laser-recrystallized polysilicon layers in sensors, 143 SAW resonator, 73 micromachining for integrated radiant sensors, 109 thin-film ZnS:MnF,, with visual indication, 63 operation of monocrystal line Si resonator in measuring Temperature sensor dynamics a0 t7S , , as non-linear models of, 209 polysilicon as material for microsensor applications, ‘Saceinal tine enianie 149 polysilicon strain-gauge transducers, 219 a pressure sensor with integrated bias stabilization and thin-film resistance, for use in aggressive surroundings, 59 temperature compensation, 241 Titanium pressure sensor with low-cost contactless interferometric r.f. reactive sputtering of Zn oxide films on Si and optical readout, 225 Si-SiO,-TiN substrates, 123 r.f. reactive sputtering of Zn oxide films on Si and Si-SiO,-TiN substrates, 123 Zinc thermal flow sensors, 5 r.f. reactive sputtering of Zn oxide films on Si and whiskers for mechanical sensors, 27 Si-SiO,-TiN substrates, 123 Simulation methods thin-film ZnS:MnF, temperature sensor with visual for multi-chip modules, 157 indication, 63