RF MEMS circuit design for wireless communications

280 Pages·2002·1.548 MB·English

by  Hector J. De Los Santos, Hector J. De Los Santos

RF MEMS Circuit Design for Wireless
Communications
ForalistingofrecenttitlesintheArtechHouseMicroelectromechanical
Systems(MEMS)Series,turntothebackofthisbook.
RF MEMS Circuit Design for Wireless
Communications
HØctor J. De Los Santos
Artech House
Boston (cid:149) London
www.artechhouse.com
LibraryofCongressCataloging-in-PublicationData
DeLosSantos,HØctorJ.
RFMEMScircuitdesignforwirelesscommunications/HØctorJ.DeLosSantos.
p.cm.(cid:151)(ArtechHousemicroelectromechanicalsystemslibrary)
Includesbibliographicalreferencesandindex.
ISBN1-58053-329-9(alk.paper)
1.Wirelesscommunicationsystems(cid:151)Equipmentandsupplies. 2.Radiocircuits.
3.Microelectromechanicalsystems.
I.Title. II.Series.
TK5103.2.S26 2002
621.382(cid:151)dc21 2002016428
BritishLibraryCataloguinginPublicationData
DeLosSantos,HØctorJ.
RFMEMScircuitdesignforwirelesscommunications.(cid:151)(ArtechHouse
microelectromechanicalsystemsseries)
1.Electroniccircuitdesign. 2.Radiofrequency. 3.Microelectromechanicalsystems.
I.Title
621.3(cid:146)815
ISBN1-58053-329-9
CoverdesignbyIgorValdman
'2002HØctorJ.DeLosSantos
Allrightsreserved.PrintedandboundintheUnitedStatesofAmerica.Nopartofthisbook
may be reproduced or utilized in any form or by any means, electronic or mechanical, in-
cludingphotocopying,recording,orbyanyinformationstorageandretrievalsystem,with-
outpermissioninwritingfromthepublisher.
Alltermsmentionedinthisbookthatareknowntobetrademarksorservicemarkshave
been appropriately capitalized. Artech House cannot attest to the accuracy of this informa-
tion.Useofaterminthisbookshouldnotberegardedasaffectingthevalidityofanytrade-
markorservicemark.
InternationalStandardBookNumber:1-58053-329-9
LibraryofCongressCatalogCardNumber:2002016428
10987654321
Estelibrolodedicoamisqueridospadresyamisqueridos,Violeta,Mara,
Hectorcito,yJoseph.
YsabemosquealosqueamanaDiostodosloscosaslasayudanabien,estoes,a
losqueconformeasuprop(cid:243)sitosonllamados.
Romanos8:28
.
Contents
Preface xiii
Acknowledgments xvii
1 WirelessSystems(cid:151)ACircuitsPerspective 1
1.1 Introduction 1
1.2 SpheresofWirelessActivity(cid:151)TechnicalIssues 3
1.2.1 TheHomeandtheOffice 5
1.2.2 TheGroundFixed/MobilePlatform 7
1.2.3 TheSpacePlatform 7
1.3 WirelessStandards,Systems,andArchitectures 8
1.3.1 WirelessStandards 8
1.3.2 ConceptualWirelessSystems 8
1.3.3 WirelessTransceiverArchitectures 10
1.4 Power-andBandwidth-EfficientWirelessSystems(cid:151)
Challenges 12
vii
viii RFMEMSCircuitDesignforWirelessCommunications
1.5 MEMS-BasedWirelessAppliancesEnableUbiquitous
Connectivity 15
1.6 Summary 16
References 17
2 ElementsofRFCircuitDesign 19
2.1 Introduction 19
2.2 PhysicalAspectsofRFCircuitDesign 19
2.2.1 SkinEffect 20
2.2.2 TransmissionLinesonThinSubstrates 23
2.2.3 Self-ResonanceFrequency 33
2.2.4 QualityFactor 35
2.2.5 Moding(Packaging) 39
2.3 PracticalAspectsofRFCircuitDesign 40
2.3.1 dcBiasing 40
2.3.2 ImpedanceMismatchEffectsinRFMEMS 41
2.4 Problems 43
2.5 Summary 47
References 48
3 RFMEMS(cid:150)EnabledCircuitElementsandModels 51
3.1 Introduction 51
3.2 RF/MicrowaveSubstrateProperties 52
3.3 Micromachined-EnhancedElements 55
3.3.1 Capacitors 55
3.3.2 Inductors 57
3.3.3 Varactors 67
3.4 MEMSwitches 75
3.4.1 ShuntMEMSwitch 75
3.4.2 Low-VoltageHingedMEMSwitchApproaches 78
Contents ix
3.4.3 Push-PullSeriesSwitch 80
3.4.4 Folded-Beam-SpringsSuspensionSeriesSwitch 83
3.5 Resonators 87
3.5.1 TransmissionLinePlanarResonators 87
3.5.2 CavityResonators 87
3.5.3 MicromechanicalResonators 88
3.5.4 FilmBulkAcousticWaveResonators 98
3.6 MEMSModeling 104
3.6.1 MEMSMechanicalModeling 105
3.6.2 MEMSElectromagneticModeling 106
3.7 Summary 109
References 109
4 NovelRFMEMS(cid:150)EnabledCircuits 115
4.1 Introduction 115
4.2 ReconfigurableCircuitElements 116
4.2.1 TheResonantMEMSSwitch 116
4.2.2 Capacitors 118
4.2.3 Inductors 121
4.2.4 TunableCPWResonator 123
4.2.5 MEMSMicroswitchArrays 124
4.3 ReconfigurableCircuits 126
4.3.1 Double-StubTuner 127
4.3.2 Nth-StubTuner 130
4.3.3 Filters 132
4.3.4 ResonatorTuningSystem 133
4.3.5 MassivelyParallelSwitchableRFFrontEnds 136
4.3.6 TrueTime-DelayDigitalPhaseShifters 137
4.4 ReconfigurableAntennas 139
4.4.1 TunableDipoleAntennas 139
4.4.2 TunableMicrostripPatch-ArrayAntennas 140