Precision Sensors, Actuators and Systems

477 Pages·1992·15.15 MB·English

by  Toshio Fukuda

PRECISION SENSORS, ACTUATORS AND SYSTEMS
SOLID MECHANICS AND ITS APPLICATIONS
Volume 17
Series Editor:
G.M.L. GLADWELL
Solid Mechanics Division, Faculty 0/ Engineering
University a/Waterloo
Waterloo, Ontario, Canada N2L 3Gl
Aims and Scope of the Series
The fundamental questions arising in mechanics are: Why?, How?, and How much?
The aim of this series is to provide lucid accounts written by authoritative research
ers giving vision and insight in answering these questions on the subject of
mechanics as it relates to solids.
The scope of the series covers the entire spectrum of solid mechanics. Thus it
includes the foundation of mechanics; variational formulations; computational
mechanics; statics, kinematics and dynamics of rigid and elastic bodies; vibrations
of solids and structures; dynamical systems and chaos; the theories of elasticity,
plasticity and viscoelasticity; composite materials; rods, beams, shells and
membranes; structural control and stability; soils, rocks and geomechanics;
fracture; tribology; experimental mechanics; biomechanics and machine design.
The median level of presentation is the first year graduate student. Some texts are
monographs defining the current state of the field; others are accessible to final
year undergraduates; but essentially the emphasis is on readability and clarity.
For a list a/related mechanics titles, see final pages.
Library ofCongress Cataloging-in-Publication Data
PreCIslon sensors. actuators. ard systems / H.S. TZOJ. T. Fukuda.
ed1tors.
p. cm. -- (SolId mechanlcs and Its appllcatlons . v. 17)
ISBN 978-94-010-4802-6 ISBN 978-94-011-1818-7 (eBook)
DOI 10.1007/978-94-011-1818-7
1. Detectors. 2. Actuators. 3. Automatic control. 1. Tzou. H.
S. (Horn S.l II. FJkuda. 7. (Ţoshlol. 1948- III. Serles.
TA165.P676 1992
681 .2--dc20 92-32458
ISBN 978-94-010-4802-6
Printed on acid-free paper
AlI Rights Reserved
© 1992 Springer Science+Business Media Dordrecht
Originally published by Kluwer Academic Publishers in 1992
No part of the material protected by this copyright notice may be reproduced or
utilized in any form or by any means, electronic or mechanical,
including photocopying, recording or by any information storage and
retrieval system, without written permission from the copyright owner.
Precision Sensors,
Actuators and Systems
Edited by
H.S.TZOU
University of Kentucky,
U.SA.
and
T.FUKUDA
Nagoya University,
Japan
Springer Science+Business Media, B.V.
CONTENTS
Preface IX
New actuators for High-Precision Micro Systems
Toshio Fukuda and Fumihito Arai 1
1. Introduction 1
2. Principle of Electrostatic Micro Actuator 3
3. Modeling and Dynamics of 3 DOF Electrostatic Micro Actuator 4
4. Control Method of 3 DOF Electrostatic Micro Actuator 12
5. Position Control Simulation of 3 DOF Electrostatic Micro Actuator 14
6. Structure of Prototype 3 DOF Electrostatic Micro Actuator 15
7. Experimental Results of Controlling 3 DOF Electrostatic Micro Actuator 16
8. Design and Structure of 6 DOF Electrostatic Micro Actuator 16
9. Control of 6 DOF Electrostatic Micro Actuator 18
10. Experimental Results of Controlling 6 DOF Electrostatic Micro Actuator 21
11. Optical Actuator 21
12. Conclusions 22
Micro Structures and Micro Actuators for Implementing Sub-Millimeter Robots
R.S. Fearing 39
1. Introduction 39
2. Three Dimensional Micro-Mechanical Structures 42
3. Electrostatic Actuation 49
4. Fluid Bearings for Platform Levitation 50
5. Mobile Micro Robots in Fluids 53
6. Prototype for a Mobile Micro-Robot in a Liquid 57
7. Summary 57
Design, Modeling, and Control Strategies of a Three Degrees-of-Freedom VR
Spherical Motor
Part I: Reluctance Force Characterization
Kok-Meng Lee 73
1. Introduction 74
2. Description of the VR Spherical Motor 76
3. The Variable Reluctance Model 77
4. Magnetic Flux Prediction Using Finite Element (FE) Method 84
5. Results and Discussions 87
6. Conclusions 92
• Appendix: Overlapping Area Between Two Poles 96
VI
Design, Modeling, and Control Strategies of a Three Degrees-of-Freedom VR
Spherical Motor
Part II: Dynamic Modeling and Control
Kok-Meng Lee 111
1. Introduction 112
2. Dynamic Model 114
3. Motion Control Strategy 120
4. Implementation of Inverse Model 127
5. Conclusions 132
Micromachining of Piezoelectric Microsensors and Microactuators for Robotics
Applications
Dennis L. Polla 139
1. Introduction 140
2. Thin Film Deposition, Processing, and Properties 144
3. Circuit Integration 147
4. Microsensor Applications 149
5. Microactuator Applications 156
6. Conclusions 159
Thin-Layer Distributed Piezoelectric Neurons and Muscles: Electromechanics
and Applications
H.S. Tzou 175
1. Introduction 176
2. Distributed Neural Sensation 177
3. Distributed Muscle Actuation 181
4. Case-I: A Hemispherical Shell 184
5. Case-2: A Cylinder with Distributed Neurons and Muscles 188
6. Case-3: Distributed Convolving Ring Sensors 191
7. Case-4: Segmentation of Distributed Sensors/Actuators 202
8. Summary and Conclusions 213
Appendix: Mechanical Forces and Moments 217
Optical Fiber Sensors and Systems
Janusz A. Marszalec 219
1. Introduction 219
2. Basics Fiber Optics 221
3. Fiber Optics in Industry and Robotics 227
4. Optical Fiber Sensors for Robots 231
5. Fiber Optic Lighting and Imaging Systems in Machine Vision 273
6. Conclusions and Future Trends 296
vii
Design and Dexterous Control of Micromanipulator with Multiple Degrees of
Freedom
Toshio Fukuda, Motohiro Fujiyoshi and Fumihito Arai 299
1. Introduction 300
2. Dexterous Teleoperation Control 302
3. Design of Micromanipulator with Multiple Degrees of Freedom 312
4. Conclusions 326
A Three Degrees of Freedom Micro-Motion In-Parallel Actuated Manipulator
Kok-Meng Lee 345
1. Introduction 346
2. Kinematics 348
3. Prototype Micro-Motion Manipulator 353
4. Special Configuration 360
5. Conclusion 362
A Miniature Mobile Robot Using Piezo Elements
Shin'ichi Aoshima and Tetsuro Yabuta 375
1. Introduction 375
2. A Miniature Mobile Robot Using Piezo Vibration for Mobility in a Thin
Tube 377
3. A Wireless Mobile Robot Driven by Piezo Vibration in a Thin Tube 403
4. A Miniature Mobile Robot for Use on a Wire 408
5. A Miniature Actuator for Plate Movement 415
6. Other Miniature Mobile Robots Using Piezo Elements 418
7. Conclusion 420
Distributed Piezoelectric Transducers Applied to Identification, Control, and
Micro-Isolation
H.S. Tzou 425
1. Introduction 426
2. Piezoelectricity Theory 428
3. Distributed Structural Identification Theory 429
4. Distributed Vibration Control Theory 437
5. Case Studies 447
6. Summary and Conclusions 464
PREFACE
Research and development of high-precision systems, micro electromechanical sy".ems,
distributed sensors/actuators, smart structural systems, high-precision controls, etc. have
drawn much attention in recent years. These new devices and systems could bring a new
technological revolution in modern industries and further impact future human life. This
book is concerned with the most updated new technologies in this general area, such as
silicon based sensors/actuators and control, piezoelectric micro sensors/actuators, micro
actuation and control, micro sensor applications in robot control, optical fiber sen
sors/systems, etc. There are four essential subjects emphasized in this book: 1) surveying
the state-of-the-art research and development, 2) tutoring fundamental theories and tools,
3) demonstrating practical applications, and 4) discussing future research and develop
ment.
The first part of this book was used as teaching materials for a Tutorial on High
Precision Sensors/Actuators and Systems and the second part for a Tutorial on Smart
Piezoelectric Systems at the 1992 and 1991 IEEE International Conferences on Robotics
and Automations, respectively.
The editors would like to express their deepest appreciation to all contributors who made
the above tutorials and thereafter this book successful.
Editors: H.S. Tzou, University of Kentucky, U.S.A.
T. Fukuda, Nagoya University, Japan.
CONTRIBUTORS
1. Prof. T. Fukuda, Nagoya University, Nagoya, Japan.
2. Prof R.S. Fearing, University of California, Berkeley, California, U.S.A.
3. Prof. K.M. Lee, Georgia Institute of Technology, Atlanta, Georgia, U.S.A.
4. Prof. D.L. Polla, University of Minnesota, Minneapolis, Minnesota, U.S.A.
5. Dr. J. Marszalec, Technical Research Center of Finland, Finland.
6. Mr. S. Aoshima, NTT Transmission Systems, Tokai, Japan.
7. Prof. H.S. Tzou, University of Kentucky, Lexington, Kentucky, U.S.A.
New Actuators for High-Precision Micro Systems
Toshio FUKUDA and Fumihito ARAI
Department of Mechanical Engineering
Nagoya University
Fum-cho, Chikusa-ku, Nagoya, 464-01, JAPAN
ABSTRACf
Since micro manipulation is necessary for the handling of the micro order small
objects, actuators suitable for a micro manipulator have long been desired. This paper
proposes a simplified structure of the new electrostatic actuator with multi degrees of
freedom(3 DOF and 6 DOF), which is different from the conventional ones. For the
dexterous manipulation, versatile skillful motions are required and this can be easily
accomplished by using the proposed micro actuator. In this study, a prototype of this micro
electrostatic actuator is produced. In this paper, the nonlinear dynamics of this actuator is
modeled, then the position control simulations are carried out with the proposed nonlinear
feedback control method. Design method and experimental position control results of the
prototype micro actuator are also shown for the discussion. Moreover, we introduce the
optical actuator which has advantages of (i) non-contact control and (ii) control signal
transmission. These advantage will become important for the next actuators for the high
precision micro systems.
1. INTRODUCTION
Many types of small sized manipulators/l,3,4,5,8,15,16/ and micromechanical
systems/2/ have recently been developed in many fields. These manipulators are required
to clamp or to contact with very small objects, such as a living cell of creatures or parts of
the semiconductor electronics. We have studied a bilateral control methods of micro
manipulators and visual recognition method of objects for the micro manipulationl5,6,7/.
There are two different ways to clamp a small objects, i.e.,one is to clamp them by a
H S Tzou and T Fukuda (eds), PreClslOn, Sensors, Actuators and Systems, 1-37
© 1992 Kluwer AcademIC Publzshers