Plasma processing of nanomaterials

416 Pages·2011·15.388 MB·English

by  R Mohan Sankaran

Materials Science
Sankaran
Nanomaterials and Their Applications
Plasma Processing
of Nanomaterials
We are at a critical evolutionary juncture in the research and development of low-
P
temperature plasmas, which have become essential to synthesizing and processing vital Plasma
nanoscale materials. More and more industries are increasingly dependent on plasma l
a
technology to develop integrated small-scale devices, but physical limits to growth, and
other challenges, threaten progress. s
m
Plasma Processing of Nanomaterials is an in-depth guide to the art and science Processing of
of plasma-based chemical processes used to synthesize, process, and modify a
various classes of nanoscale materials such as nanoparticles, carbon nanotubes, and

semiconductor nanowires. Plasma technology enables a wide range of academic and P
industrial applications in fields including electronics, textiles, automotives, aerospace,
r Nanomaterials
and biomedical. A prime example is the semiconductor industry, in which engineers
o
revolutionized microelectronics by using plasmas to deposit and etch thin films and
fabricate integrated circuits. c
e
An overview of progress and future potential in plasma processing, this reference s
illustrates key experimental and theoretical aspects by presenting practical examples of: s
i
• Nanoscale etching/deposition of thin films n
• Catalytic growth of carbon nanotubes and semiconductor nanowires g

• Silicon nanoparticle synthesis o
• Functionalization of carbon nanotubes f

• Self-organized nanostructures N
Significant advances are expected in nanoelectronics, photovoltaics, and other emerging a
fields as plasma technology is further optimized to improve the implementation of n
nanomaterials with well-defined size, shape, and composition. Moving away from the
o
usual focus on wet techniques embraced in chemistry and physics, the author sheds
m
light on pivotal breakthroughs being made by the smaller plasma community. Written for
a diverse audience working in fields ranging from nanoelectronics and energy sensors
a
to catalysis and nanomedicine, this resource will help readers improve development and
application of nanomaterials in their own work. t
e
r
About the Author:
i
R. Mohan Sankaran received the American Vacuum Society’s 2011 Peter Mark Memorial a
Award for his outstanding contributions to tandem plasma synthesis. l
s
K12993
Edited by
ISBN: 978-1-4398-6676-4
90000
R. Mohan Sankaran
9 781439866764
K12993_COVER_final.indd 1 11/15/11 2:23 PM
Plasma Processing
of Nanomaterials
Nanomaterials and Their Applications
Series Editor: M. Meyyappan
Carbon Nanotubes: Reinforced Metal Matrix Composites
Arvind Agarwal, Srinivasa Rao Bakshi, Debrupa Lahiri
Inorganic Nanoparticles: Synthesis, Applications, and Perspectives
Edited by Claudia Altavilla, Enrico Ciliberto
Graphene: Synthesis and Applications
Edited by Wonbong Choi, Jo-won Lee
Plasma Processing of Nanomaterials
Edited by R. Mohan Sankaran
Nanorobotics: An Introduction
Lixin Dong, Bradley J. Nelson
Plasma Processing
of Nanomaterials
Edited by
R. Mohan Sankaran
Boca Raton London New York
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Contents
Preface.....................................................................................................................vii
Contributors.............................................................................................................xi
1 Nanoscale Etching and Deposition..............................................................1
Nathan Marchack and Jane P. Chang
2 Extreme Ultraviolet Light Lithography for Producing
Nanofeatures in Next-Generation Semiconductor Processing............35
John Sporre and David N. Ruzic
3 Nonthermal Plasma Synthesis of Semiconductor Nanocrystals.........55
Uwe Kortshagen and Lorenzo Mangolini
4 Microscale Plasmas for Metal and Metal Oxide Nanoparticle
Synthesis.........................................................................................................89
Davide Mariotti and R. Mohan Sankaran
5 Large-Scale, Plasma-Assisted Growth of Nanowires..........................109
Uros Cvelbar and Mahendra K. Sunkara
6 Cathodic Arc Discharge for Synthesis of Carbon Nanoparticles......147
Manish Chhowalla and H. Emrah Unalan
7 Atmospheric Plasmas for Carbon Nanotubes (CNTs).........................165
Jae Beom Park, Se Jin Kyung, and Geun Young Yeom
8 Structural Control of Single-Walled Carbon Nanotubes by
Plasma Chemical Vapor Deposition........................................................219
Rikizo Hatakeyama and Toshiaki Kato
9 Graphene Growth by Plasma-Enhanced Chemical Vapor
Deposition (PECVD)...................................................................................231
M. Meyyappan and Jeong-Soo Lee
10 Modeling Aspects of Plasma-Enhanced Chemical Vapor
Deposition of Carbon-Based Materials..................................................245
Erik Neyts, Ming Mao, Maxie Eckert, and Annemie Bogaerts
v
vi Contents
11 Modeling Catalytic Growth of One-Dimensional
Nanostructures.............................................................................................291
Eugene Tam, Kostya (Ken) Ostrikov, and Tony Murphy
12 Diagnostics of Energy Fluxes in Dusty Plasmas..................................309
Horst R. Maurer and Holger Kersten
13 Selective Functionalization and Modification of Carbon
Nanomaterials by Plasma Techniques....................................................337
Yuhua Xue and Liming Dai
14 Plasma–Liquid Interactions for Fabrication
of Nanobiomaterials...................................................................................359
Toshiro Kaneko and Rikizo Hatakeyama
15 Assembly and Self-Organization of Nanomaterials............................371
Amanda Evelyn Rider and Kostya (Ken) Ostrikov
Preface
Plasma.processing.is.a.well-established.technology.that.is.vital.to.materials.
manufacturing.in.numerous.industries.including.electronics,.textiles,.auto-
mobile,.aerospace,.and.biomedical..The.revolution.in.microelectronics.over.
the.last.30.years.has.been.largely.enabled.by.the.ability.of.plasma-based.tools.
to.etch,.deposit,.and.sculpt.thin.films.of.metal.and.semiconductor.materials.
into.extraordinarily.precise.digital.circuits..Despite.these.achievements,.fun-
damental.research.and.industrial.implementation.of.plasma.technology.now.
sit.at.a.critical.juncture..Because.of.limitations.associated.with.photolithog-
raphy,.the.conventional.approach.to.patterning.materials.from.the.top.down.
is.approaching.a.physical.limit..This.has.serious.consequences.in.the.elec-
tronics.industry.where.the.pattern.resolution.(i.e.,.feature.size).determines.
the.speed.of.a.computer.processor.or.density.of.a.memory.device..However,.
there.are.even.broader.implications:.nanotechnology.(i.e.,.the.preparation.of.
materials.at.the.nanoscale).has.opened.numerous.avenues.for.advancements.
in.optoelectronics,.medicine,.and.renewable.energy..In.order.to.play.a.role.in.
these.rapidly.emerging.areas,.plasma.technology.must.overcome.significant.
challenges.related.to.the.processing.of.nanomaterials.
Fortunately,.there.is.good.news..Although.soft.chemical.methods.have.
made.a.great.deal.of.progress,.plasma.technology.offers.several.advantages.
for.nanomaterials.processing..Low-temperature.plasmas.allow.chemical.pro-
cesses.to.be.performed.near.room.temperature,.an.important.consideration.to.
lower.costs.and.make.processing.compatible.with.device.manufacturing..In.
addition,.plasma-based.processing.is.scalable.because.materials.are.usually.
prepared.continuously.or.over.large.areas..Perhaps.the.most.important.driv-
ing.force.for.using.plasma.technology.is.chemical.purity.that.is.unmatched.
by.any.other.chemical.process.and.the.reason.why.plasmas.have.been.essen-
tial.to.microelectronic.device.fabrication.
The.purpose.of.this.book.is.to.share.the.exciting.and.enormous.progress.
that.has.been.made.over.the.last.few.years.to.develop.plasma.technology.
for.nanomaterials.synthesis.and.processing..This.includes.cutting-edge.
research.from.all.over.the.world,.including.the.United.States,.Belgium,.
Germany,.Slovenia,.Turkey,.Australia,.China,.South.Korea,.and.Japan..The.
diverse.range.of.examples.that.have.been.chosen.are.meant.to.illustrate.the.
versatility.of.plasmas.and.their.great.potential.for.applications..The.book.is.
structured.from.two.perspectives—material.types.and.length.scales,.both.of.
which.are.key.issues.for.plasma.processing.of.nanomaterials.(see.Figure P.1)..
The.book.begins.with.recent.advancements.in.top-down.methods.(Part 1).
including.nanoscale.etching.and.deposition.(Chapter.1).and.the.develop-
ment.of.extreme.ultraviolet.light.sources.as.next-generation.photomasks.
vii
viii Preface
Bottom up Top down
Ar
e–
Ar+
Plasma particles MoO2 nanorod
Graphene
Silicon nanoparticle Carbon nanotube Aligned CNT film
1 Å 1 nm 10 nm 1 µm 1 mm
FIGURE P.1
(See.color.insert.).Plasma.processing.of.materials.at.different.length.scales..(Courtesy.of.Uwe.
Kortshagen,.A. Chandra.Bose,.Davide.Mariotti,.and.Liming.Dai.)
(Chapter.2)..Alternatively,.nanomaterials.must.often.be.prepared.from.
atomic.or.molecular.building.blocks.(i.e.,.bottom-up),.which.requires.control.
at.the.nanometer.scale..Examples.of.zero-dimensional.(0D).nanomaterials,.
including.semiconducting.nanocrystals.(Chapter.3).and.metal.or.metal.oxide.
nanoparticles.(Chapter.4),.and.one-dimensional.(1D).nanomaterials,.such.as.
nanowires.(Chapter.5).are.presented.in.the.subsequent.section.(Part.2)..The.
next.section.(Part.3).focuses.on.carbon-based.nanomaterials.such.as.carbon.
particles.(Chapter.6),.carbon.nanotubes.(Chapters.7.and.8),.and.graphene.
(Chapter.9),.all.of.which.have.potential.to.replace.silicon.in.future.electronic.
devices..The.following.section.(Part.4).introduces.modeling.efforts.(Chapters.
10.and.11).and.diagnostic.methods.(Chapter.12).that.have.paralleled.exper-
imental.research.to.gain.a.basic.understanding.of.plasma.processes.that.
are.utilized.for.nanomaterial.synthesis..The.synthesis.and.modification.of.
nanomaterials.at.slightly.larger.scales.is.discussed.in.the.next.section.(Part.
5),.for.example,.the.fabrication.of.hybrid.structures.of.organic.and.inorganic.
materials.(Chapters.13.and.14)..The.book.concludes.with.a.section.(Part.6).
on.an.emerging.direction.for.plasma.processing,.the.assembly.and.organi-
zation.of.nanomaterials.into.ordered.thin.films.or.other.hierarchical.struc-
tures.that.necessitates.processing.at.macroscopic.length.scales.(Chapter.15)..
As.we.look.ahead,.the.ability.to.process.different.materials.across.a.wide.
Preface ix
range.of.length.scales.will.be.essential.and.determine.if.plasma.technology.
has.a.key.role.in.emerging.technologies.in.the.21st.century.as.it.has.in.the.
past.several.decades.
R. Mohan Sankaran