V MATERIALS SCIENCE / ELECTRONIC AND MAGNETIC MATERIALS I J A Piezoelectric Y A Piezoelectric Materials and Devices: Applications in Engineering and Medical Sciences provides a complete overview of piezoelectric materials, covering all aspects of the materials starting from fundamental P Materials concepts. The treatment includes physics of piezoelectric materials, their i characteristics, and applications. The author uses simple language to e explain the theory of piezoelectricity and introduce readers to the properties z and Devices and design of different types of piezoelectric materials, such as those used o in engineering and medical device applications. e l This book: e • Introduces various types of dielectrics and their classification c Applications in Engineering based on their characteristics t r • Addresses the mathematical formulation of piezoelectric effects i and Medical Sciences c and the definition of various piezoelectric constants • Describes the structure and properties of practical piezoelectric M materials such as quartz, lead zirconate titanate, barium titanate, zinc oxide, and polyvinylidene fluoride a • Covers the entire gamut of piezoelectric devices used in engineering t e and medical applications • Discusses briefly the use of piezoelectric materials for energy r i harvesting and structural health monitoring a • Explores new developments in biomedical applications of l piezoelectric devices such as drug delivery, blood flow and blood s pressure monitoring, robotic operating tools, etc. a • Elaborates on design and virtual prototyping of piezoelectric n devices through the use of FE software tools ANSYS and PAFEC d Giving design engineers, scientists, and technologists the information and D guidance they will need to adopt piezoelectric materials in the develop- ment of smart devices, this book will also motivate engineering and science e students to initiate new research for developing innovative devices. Its v contents will be invaluable to both students and professionals seeking i c a greater understanding of fundamentals and applications in the evolving e field of piezoelectrics. M . S . V I J A Y A s K14058 ISBN: 978-1-4398-8786-8 90000 9 781439 887868 K14058_Cover_mech.indd 1 7/31/12 12:13 PM Piezoelectric Materials and Devices Applications in Engineering and Medical Sciences Piezoelectric Materials and Devices Applications in Engineering and Medical Sciences M . S . V i j a y a Boca Raton London New York CRC Press is an imprint of the Taylor & Francis Group, an informa business K14058_FM.indd 2 2/29/12 9:22 AM CRC Press Taylor & Francis Group 6000 Broken Sound Parkway NW, Suite 300 Boca Raton, FL 33487-2742 © 2013 by Taylor & Francis Group, LLC CRC Press is an imprint of Taylor & Francis Group, an Informa business No claim to original U.S. Government works Version Date: 20120518 International Standard Book Number-13: 978-1-4398-8788-2 (eBook - PDF) This book contains information obtained from authentic and highly regarded sources. Reasonable efforts have been made to publish reliable data and information, but the author and publisher cannot assume responsibility for the validity of all materials or the consequences of their use. The authors and publishers have attempted to trace the copyright holders of all material reproduced in this publication and apologize to copyright holders if permission to publish in this form has not been obtained. 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Trademark Notice: Product or corporate names may be trademarks or registered trademarks, and are used only for identification and explanation without intent to infringe. Visit the Taylor & Francis Web site at http://www.taylorandfrancis.com and the CRC Press Web site at http://www.crcpress.com Dedicated to My mother who is no more in this world but lives in my heart. Contents Preface.......................................................................................................................xi 1 Introduction......................................................................................................1 1.1. Classification.of.Dielectric.Materials...................................................1 1.2. Important.Dielectric.Parameters.........................................................2 1.2.1. Electric.Dipole.Moment.p........................................................2 1.2.2. Polar.and.Nonpolar.Dielectric.Materials..............................3 1.2.3. Electric.Polarization.P..............................................................3 1.2.4. Dielectric.Displacement.or.Flux.Density.D,.Dielectric. Constant.ε,.and.Electric.Susceptibilty.χ................................4 r 1.2.5. Spontaneous.Polarization.P ...................................................4 S 1.3. Electrostrictive.Effect.............................................................................5 1.4. Piezoelectric.Effect.................................................................................6 1.5. Pyroelectric.Effect..................................................................................8 1.6. Ferroelectric.Materials.........................................................................10 1.6.1. Ferroelectric.Domains............................................................10 1.6.2. Ferroelectric.Hysteresis..........................................................10 1.6.3. Ferroelectric.Transition.Temperature..................................11 1.7. Poling.....................................................................................................12 1.8. Applications.of.Ferroelectric.Materials............................................12 2 Piezoelectric Characteristics.......................................................................15 2.1. Introduction..........................................................................................15 2.2. Piezoelectric.Coefficients....................................................................15 2.3. Tensor.Form.of.Piezoelectric.Equations...........................................21 2.3.1. Piezoelectric.Coefficient.d......................................................22 2.3.2. Mechanical.Parameters:.Elastic.Compliance.Constant. and.Elastic.Stiffness.Constant...............................................25 2.3.3. Dielectric.Parameter:.Permittivity........................................26 2.4. Independent.Components.of.Piezoelectric,.Elastic,.and. Dielectric.Matrices...............................................................................26 2.4.1. Interpretation.of.Piezoelectric.Coefficients.d ,.d ,. 33 31 and.d .......................................................................................28 15 2.5. Generator.and.Motor.Actions.of.Piezoelectric.Materials...............31 2.5.1. Generator.Action.....................................................................31 2.5.2. Motor.Action............................................................................32 2.6. Strain.versus.Electric.Field.in.Piezoelectric.Materials....................32 2.7. Piezoelectric.Coupling.Coefficient.k..................................................33 2.8. Dynamic.Behaviour.of.a.Piezoelectric.Material..............................35 vii viii Contents 3 Piezoelectric Materials.................................................................................39 3.1. Introduction..........................................................................................39 3.2. Quartz....................................................................................................39 3.3. Lead.Zirconate.Titanate.(PZT)...........................................................41 3.3.1. Composition.and.Structure.of.PZT......................................41 3.3.2. Phase.Transitions.in.PZT.......................................................42 3.3.3. Lanthanum-Doped.PZT.(PLZT)...........................................43 3.4. Fabrication.of.PZT................................................................................44 3.4.1. Fabrication.of.PZT.in.Powder.Form.....................................44 3.4.1.1. Solid-.State.Solution.Technique..............................44 3.4.1.2. Coprecipitation.from.Solution...............................45 3.4.1.3. Sol–Gel.Technique...................................................45 3.4.2. Shape.Forming.Techniques.from.PZT.Powder..................45 3.4.2.1. PZT.Discs,.Cylinders,.Plates,.etc...........................45 3.4.2.2. PZT.Thick.Films—Tape.Casting.Technique........46 3.4.3. Fabrication.of.PZT.Thin.Films..............................................47 3.4.3.1. RF.Sputtering.Deposition.Technique...................47 3.4.3.2. Spin.Coating.Technique.........................................47 3.4.3.3. Chemical.Vapour.Deposition.Technique.............47 3.5. Polymer.Piezoelectric.Materials.........................................................48 3.5.1. Polyvinylidene.Fluoride.(PVDF)...........................................48 3.6. Other.Piezoelectric.Materials.............................................................49 3.6.1. Barium.Titanate.......................................................................50 3.6.2. Zinc.Oxide.Thin.Films...........................................................50 3.7. Composite.Piezoelectric.Materials....................................................50 3.7.1. 0-3.PZT–Polymer.Composites...............................................51 3.7.2. 1-3.PZT–Polymer.Composites...............................................52 3.7.3. 3-3.PZT–Polymer.Composite.................................................54 References........................................................................................................54 4 Engineering Applications of Piezoelectric Materials............................57 4.1. Introduction..........................................................................................57 4.2. Gas.Lighter............................................................................................57 4.3. Pressure.Sensor....................................................................................59 4.4. Accelerometer.......................................................................................60 4.4.1. Principle.of.Piezoelectric.Accelerometer.............................60 4.4.2. Operating.Frequency.Range.................................................62 4.4.3. Types.of.Piezoelectric.Accelerometers.................................64 4.5. Piezoelectric.Gyroscope–Angular.Rate.Sensors.............................65 4.5.1. Piezoelectric.Beam.Gyroscope..............................................67 4.5.2. Piezoelectric.Tuning.Fork.Gyroscope..................................68 4.5.3. Piezoelectric.Cylindrical.Gyroscope....................................68 4.5.3.1. Operation.of.the.Steel.Cylinder.Gyroscope.........69 4.6. Piezoelectric.Microphone...................................................................71 Contents ix 4.7. Piezoelectric.Ultrasonic.Transducers.for.Sound.Navigation. and.Ranging.(SONAR)........................................................................71 4.7.1. Tonpilz.Transducer.................................................................73 4.7.2. High-.Frequency.Underwater.Transducers.........................74 4.7.3. Piezoelectric.Hydrophone.Specifications............................74 4.7.4. Piezoelectric.Projector.Specifications...................................76 4.8. Piezoelectric.Tactile.Sensor................................................................76 4.9. Energy.Harvesting...............................................................................77 4.10. Piezoelectric.Electronic.Buzzer.and.Tweeter...................................80 4.11. Piezoelectric.Actuators........................................................................80 4.11.1. Piezoelectric.Stack.Actuator..................................................81 4.11.2. Piezoelectric.Bender.Actuator—Bimorph.and.Unimorph...83 4.11.2.1. Piezoelectric.Bimorph.............................................83 4.11.2.2. Piezoelectric.Unimorph..........................................84 4.11.3. Piezoelectric.Cymbal.Actuator.............................................85 4.12. Piezoelectric.Motor..............................................................................87 4.12.1. Linear.Piezoelectric.Motors...................................................87 4.12.2. Piezoelectric.Ultrasonic.Rotary.Motor................................89 4.13. Piezoelectric.Micro.Pump...................................................................91 4.14. Piezoelectric.Ultrasonic.Drill.............................................................92 4.15. Ultrasonic.Cleaner...............................................................................93 4.16. Quartz.Crystal.Oscillator....................................................................94 4.17. Quartz.Crystal.Balance.......................................................................95 4.18. Quartz.Tuning.Fork.in.Atomic.Force.Microscope..........................96 4.19. Piezoelectric.Transformer...................................................................96 4.19.1. Rosen.Piezoelectric.Transformer..........................................96 4.19.2. Longitudinal.Vibration.Piezoelectric.Transformer............98 4.19.3. Radial.Vibration.Piezoelectric.Transformer........................99 4.20. Nondestructive.Testing.(NDT).of.Materials.Using.Ultrasonics....100 4.21. Noise.and.Vibration.Control............................................................102 4.22. Structural.Health.Monitoring..........................................................104 4.23. Piezoelectric.Sensors.and.Actuators.in.Smart.Systems.and. Robots..................................................................................................105 References......................................................................................................106 5 Medical Applications of Piezoelectric Materials..................................109 5.1. Introduction........................................................................................109 5.2. Blood.Pressure.Monitor....................................................................109 5.3. Piezoelectric.Heartbeat.Monitor......................................................111 5.4. Piezoelectric.Tactile.Sensor—Endoscopic.Grasper.and. Minimal.Invasive.Surgical.Instrument...........................................111 5.5. Piezoelectric.Accelerometer—Monitoring.Patient.Activity. and.Detecting.Tremors......................................................................112 5.6. Piezoelectric.Pump—Drug.Delivery.and.Biomedical.Analyses....112 5.7. Ultrasonic.Imaging............................................................................113