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Physics of Quantum Well Devices PDF

308 Pages·2002·4.604 MB·English
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PHYSICS OF QUANTUM WELL DEVICES SOLID-STATESCIENCE AND TECHNOLOGYLIBRARY VOLUME7 Editorial Advisory Board L. R. Carley,Carnegie Mellon University, Pitsburgh, USA G.Declerck,IMEC, Leuven, Belgium F. M. Klaassen,University of Technology, Eindhoven, The Netherlands AimsandScope of the Series Theaimofthis seriesistopresentmonographs onsemiconductormaterials processinganddevice technology, discussing theory formation and experimental characterization of solid-state devices in relation to their application in electronic systems, their manufacturing, their reliability, and their - limitations (fundamental or technology dependent). This area is highly interdisciplinary and embraces the cross-section of physics of condensed matter, materials science and electrical enginee- ring. Undisputedly during the second half of this century world society is rapidly changing owing to the revolutionary impact of new solid-state based concepts. Underlying this spectacular product developmentis a steady progress in solid-stateelectronics, an area ofapplied physics exploiting basic physical concepts established during the first half of this century. Since their invention, transistors of various types and their corresponding integrated circuits (ICs) have been widely exploited covering progress in such areas as microminiaturization, megabit complexity, gigabit speed, accurate data conversion and/or high power applications. In addition, a growing number of devices are being developed exploiting the interaction between electrons and radiation, heat, pressure, etc., preferably by merging with ICs. , Possible themes are (sub)micron structures and nanostructures (applying thin layers, multi layers and multi-dimensional configurations); micro-optic and micro-(electro)mechanical devices; high- temperature superconducting devices; high-speed and high-frequency electronic devices; sensors and actuators; and integrated opto-electronic devices (glass-fibre communications, optical recording and storage, flat-panel displays). The texts will be of a level suitable for graduate students, researchers in the above fields, practitioners, engineers, consultants, etc., with an emphasis on readability, clarity, relevance and applicability. The titles publislied in this series are listed at the end of this volume. Physics of Quantum Well Devices by B.R.Nag INSASenior Scientist, InstituteofRadio Physics and Electronics, Calcutta University, Calcutta, India KLUWER ACADEMICPUBLISHERS NEW YORK / BOSTON / DORDRECHT / LONDON / MOSCOW eBook ISBN: 0-306-47127-2 Print ISBN: 0-792-36576-3 ©2002 Kluwer Academic Publishers New York, Boston, Dordrecht, London, Moscow Print ©2000 Kluwer Academic Publishers Dordrecht All rights reserved No part of this eBook may be reproduced or transmitted in any form or by any means, electronic, mechanical, recording, or otherwise, without written consent from the Publisher Created in the United States of America Visit Kluwer Online at: http://kluweronline.com and Kluwer's eBookstore at: http://ebooks.kluweronline.com CONTENTS Preface xi Acknowledgments xiii 1. INTRODUCTION 1 1.1. Quantum Well Devices 1 1.2. Scope of the Book 6 2. HETEROSTRUCTURE GROWTH 8 2.1. Molecular Beam Epitaxy 8 2.2. Metalorganic Chemical Vapour Deposition 10 2.3. Chemical Beam Epitaxy 12 2.4. Other Techniques 13 2.4.1.HOT-WALL EPITAXY 13 2.4.2.GS-MBE 14 2.4.3.LASER-ASSISTED MBE 14 2.4.4. ATOMIC LAYER EPITAXY 15 2.4.5. RF-ECR MBE 16 2.5. 1D Structures 16 2.5.1. ETCHING AND REGROWTH 16 2.5.2. GROWTH ON VICINAL SUBSTRATES 17 2.5.3. INTERDIFFUSION OF GROUP-III ELEMENTS 18 2.5.4 GROWTH ON PATTERNED NON-PLANAR SUBSTRATES 18 2.6. 0D Structures 20 2.6.1. ETCHING OR ION MILLING 20 2.6.2. SELECTIVE ETCH TECHNIQUE 20 2.6.3. SELF-ORGANIZED GROWTH 20 2.7. Conclusion 21 3. BAND OFFSET 22 3.1. Types of Heterostructures 24 3.2. Empirical rules 26 V vi CONTENTS 3.2.1. ELECTRON AFFINITY RULE 26 3.2.2. COMMON-ANION RULE 26 3.3. Theoretical Methods 27 3.3.1. TERSOFF METHOD 27 3.3.2. VAN DE WALLE-MARTIN METHOD 27 3.4. Experimental Methods 29 3.4.1.ABSORPTION MEASUREMENT 29 3.4.2.PHOTOLUMINESCENCE MEASUREMENT 30 3.4.3.X-RAY CORE LEVEL PHOTOEMISSION SPECTROSCOPY (XPS) 32 3.5. Values of Band Offset 33 3.6. Conclusion 34 4. ELECTRON STATES 36 4.1. Effective-mass Approximation 37 4.1.1. EFFECTIVE-MASS APPROXIMATION FOR DEGENERATE EXTREMA 38 4.1.2. ENVELOPE-FUNCTION EQUATION FOR ELECTRONS 39 4.1.3. ENVELOPE'-FUNCTION EQUATION FOR HOLES 41 4.1.4. ENVELOPE-FUNCTION EQUATION FOR HIGH-ENERGY ELECTRONS 44 4.1.5. BOUNDARY CONDITIONS 47 4.2. Energy Levels of Electrons 49 4.2.1. QUANTUM WELL 50 4.2.2. SUPERLATTICE 53 4.2.3. SINGLE HETEROJUNCTION 57 4.2.4. QUANTUM WIRES AND QUANTUM DOTS 63 4.3. Energy Levels of Holes 67 4.4. Energy Levels in Strained-layer Wells 71 4.4.1.EFFECT OF STRAIN ON THE CONDUCTION BAND 73 4.4.2. EFFECT OF STRAIN ON THE VALENCE BAND 73 4.5. Conclusion 76 5.OPTICAL INTERACTOION PHENOMENA 77 5.1. Optical Interaction in Bulk Materials 77 5.2. Interaction in Quantum Wells 86 5.2.1. INTERBAND TRANSITIONS 86 5.2.2. INTERSUBBAND ABSORPTION 87 5.3.Excitons 89 5.3.1. EXCITED-STATE WAVE FUNCTION 90 5.3.2. EXCITONIC WAVE FUNCTIONS 93 5.3.3. EXCITONIC OPTICAL INTERACTION MATRIX ELEMENT 96 CONTENTS vii 5.3.4. EXCITONS IN QUANTUM WELLS 97 5.3.5. EXCITONIC OPTICAL MATRIX ELEMENT FOR QUANTUM WELLS 99 5.4. Bound and Localized Excitons 101 5.5. Absorption 102 5.5.1. INTERBAND ADSORPTION 104 5.5.2. EXCITONIC ABSORPTION 107 5.5.3. ABSORPTION SPECTRUM 109 5.5.4. INTERSUBBAND ABSORPTION 112 5.6. Quantum-Confined Stark Effect 114 5.7. Nonlinear Effects 122 5.7.1.NONRESONANT NONLINEARITY 123 5.7.2. RESONANT NONLINEARITY 125 5.8. Photoluminescence 131 5.9. Photoluminescence Spectrum 136 5.10. Conclusion 138 6. TRANSPORT PROPERTIES 139 6.1. Scattering Processes for 2DEG 140 6.2. Matrix Elements for 2DEG 141 6.3. Form Factor 145 6.4. Screening by 2DEG 146 6.5. Collision Integral for 2DEG 148 6.6. Scattering Rate for 2DEG 149 6.7. Solution of the Transport Equation for 2DEG 152 6.8. Mobility 155 6.8.1. ELECTRON MOBILITY IN AlGaAs/GaAs AND AlGaAs/InGaAs SINGLE HETEROJUNCTION AND InP/GaInAs QW’s 158 6.8.2. ELECTRON MOBILITY IN InGaP/GaAs QW’s 159 6.8.3. ELECTRON MOBILITY IN AlGaN/GaN QW’s 160 6.8.4. GENERALIZED EXPRESSION FOR MOBILITY 160 6.9. High-field Velocity OF 2DEG 160 6.9.1. THEORY 162 6.9.2. EXPERIMENTAL RESULTS 165 6.10. Scattering-induced Broadening of Photoluminescence Spectrum 166 6.11. Ballistic Transport 171 7. HIGH ELECTRON MOBILITY TRANSISTOR 173 7.1. Structure and Principle of Operation 173 viii CONTENTS 7.2. Potential Distribution and Accumulated Charge Density 175 7.3. Current-Voltage Characteristic 178 7.4. Experimental Results 182 7.5. Current Researches on HEMT’s 184 7.5.1. TEMPERATURE DEPENDENCE OF CHARACTERISTICS 184 7.5.2. THEORETICAL MODELS AND SIMULATORS 185 7.5.3. HIGH-POWER MICROWAVE HEMT’S 185 7.5.4. CONTROL OF HEMT’s BY LIGHT 187 7.6. Conclusion 187 8. RESONANT TUNNELING DIODE 188 8.1. Introduction 188 8.2. Tunneling Characteristic 191 8.3. Current-Voltage Characteristic 194 8.4. Experiments 198 8.5. Applications 199 9. QUANTUM WELL LASER 202 9.1. Operating Principle 202 9.2. Laser Equation 204 9.3. Operating Characteristics 205 9.4. Threshold Current 207 9.4.1. CONFINEMENT FACTOR 208 9.4.2. GAIN 210 9.4.3. ESTIMATION OF THRESHOLD CURRENT 213 9.4.4. EQUIVALENT CIRCUIT MODEL 214 9.5. Experimental Results 215 9.5.1. GaAs/AlGaAs QWL 215 9.5.2. InGaAsP QWL 215 9.5.3. STRAINED-LAYER LASERS 216 9.5.4. VISIBLE MQWL 217 9.5.5. SURFACE-EMITTING LASERS 218 9.5.6. QUANTUM WIRE LASER 219 9.5.7. QUANTUM DOT LASER 221 9.6. Conclusion 222 10. QUANTUM WELL DETECTOR, MODULATOR AND SWITCH 223 10.1. Quantum Well Detector 223 10.1.1. PRINCIPLE OF OPERATION 223 10.1.2. EXPERIMENTAL RESULTS 233 CONTENTS ix 10.1.3. QUANTUM DETECTOR SYSTEMS UNDER EXPERIMENTATION 235 10.2. Quantum Well Modulator 236 10.2.1. TRANSVERSE TRANSMISSION MODULATOR 239 10.2.2. WAVEGUIDE MODULATOR 240 10.2.3. FABRY-PEROT MODULATOR 241 10.3. Quantum Well Switch 243 10.3.1. R-SEED 243 10.3.2. D-SEED 245 10.3.3. S-SEED 246 10.4. Optical Bistable Device(OBD) 247 10.4.1. ABSORPTION-BASED OBD 249 10.4.2. DISPERSION-BASED 249 10.5. Waveguide all-optic switch 251 10.6. Conclusion 253 References 255 Appendix 287 Index 289 PREFACE Quantum well devices have been the objects of intensive research during the last two decades. Some of the devices have matured into commercially useful products and form part of modern electronic circuits. Some others require further devel- opment, but have the promise of being useful commercially in the near future. Study of the devices is, therefore, gradually becoming compulsory for electronics specialists. The functioning of the devices, however, involve aspects of physics which are not dealt with in the available text books on the physics of semiconduc- tor devices. There is, therefore, a need for a book to cover all these aspects at an introductory level. The present book has been written with the aim of meeting this need. In fact, the book grew out of introductory lectures given by the author to graduate students and researchers interested in this rapidly developing area of electron devices. The book covers the subjects of heterostructure growth techniques, band-offset theory and experiments, electron states, electron-photon interaction and related phenomena, electron transport and the operation of electronic, opto-electronic and photonic quantum well devices. The theory as well as the practical aspects of the devices are discussed at length. The aim of the book is to provide a comprehensive treatment of the physics underlying the various devices. A reader after going through the book should find himself equipped to deal with all kinds of quantum well devices. The book may serve as a text-book for advanced level graduate courses. New entrants into researches or developments in the area should also find the book useful. Indian National Science Academy helped the author to complete the book by awarding him the position of INSA Senior Scientist for three years (1998-2000). B. R. Nag Calcutta June, 2000 xi

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