physics of Op toelectronic Devices SHUN LIEN CMUA.NG Professor of Electrical and Computer Engineering t'riiversi ty of Illinois at Urbana-Chazpzizn Wiley Seri~s in Pure and Applied Optics The Wiley Series in Pure and Applied Optics p~iblislies outstanding books in the field of optics. The nature of these books may be basic ("pure" optics) or practical ("applied" optics). T h e books are directed towards one or more of the following nucliences: researchers in universities. govern-. ment, or industrial laboratories; practitioners o f optics in industry; or graduate-level courses in universities. T h e eniphasis is on the quality of the book anti its impol-tance to the discipline of optics. This tc'xt is printed on acid-free paper. Copyright @ 1995 by John Wiley & Sons. In(,. All rights reserved. Published siniultaneously irl Canl~da. Reproduction or translariun of any part of this work heyond that prrnlitted by Section 107 or 108 of the 1976 Unjteii . . Sti1rt.s Copyright Act without the pernlission of the copyright owner is unlawful. Requests for pcrmission or further int'orn~:~tion should be adclrcssrd to the Permissions Departn~znt. Juhn Wilry & Sons, Inc.. 605 Third Ave~luz. New York. NY 10155-0012. Lihraq of Congress Catuloging-in- Publication DU~LI: Chu~lng, S. L. Physics of optoel~atronic devices / S.L. Chunng. p. cm. - (Wiley series in pure ancl applied optics) "Wilzy-Interscience publication." lSHN 0-17 1-10939-8 (~{lk. p i l p ~ ~ . ) I. Elzctrooptics. 2. Elt.ctl.ooplica1 c\evicr.s. 3. Si.~!~iic?ncluctori. I. Title'. I!. Ser~es. C)C673.C4S 19?5 i14-24'70 I 62 1.35 1'(i.15--~lc20 I.'rinteJ i n the IIniteJ Stares ot't~.1!1*:riit: Physics of Optoelectronic Devices Preface This textbook is intended for graduate students and advanced undergraduate students in electrical engineering. physics, and materials science. It also pro- vides an overview of the theoretica1 background for professional researchers in optoelectronic industries and research organizations. The book deals with the fundamental principles in semiconductor electronics, physics, and elec- tromagnetic~, and then systematically presents practical optoelectronic de- vices, including semiconductor lasers, optical waveguides, directional couplers, optical modulators, and photodetectors. Both bulk and quantum- well semico~lductor devices are discussed. Rigorous derivations are presented and the author attempts to make the theories self-contained. Research on optoelectronic devices has been advancing rapidly. To keep up with the progress in optoelectronic devices, it is important to grasp the fun- danle~ltal physical principles. Only through a solid understanding of fun- damental physics are we able to develop new concepts and design novel devices with superior performances. The physics ofoptoelectronic devices is a broad field with interesting applications based on electromagnetics, sen~ico~i- d~lctor physics, and quantum meclianics. I have developed this book fbr a course 011 optoelectronic devices which 1, have taught at the University of Illinois at ' rbana-Champaign for the past ten years. Many of our students are stiin~.~lated by the practical applications of quantum mechanics in sen~iconductor optoelectronic devices because many .# quantum phenomena can be observed directly using artifical materials such as quantum-,well heterostnlctures with absorption or emission wavelengths determined by the quantized energy levels. Scope This book emphasizes the theory of' semiconductor optoelectror~ic devices. Comparisons between theoretical and experimental results are also shown. The book starts with the fundanlentals, including Maxwell's equations, the continuity equation, ar.d the basic semiconductor equations of solidLstate slcctronics. These equations are 'essetltial in learning scn,icond~ictor physics applied to optoclectronics, We then disoass t'r~t.p/*ti,r~lg~ltiolz. yc.rzt*ratiouz, inod~l- Intion, curd rl~~tecriotl ~,J'li,ght. which z.1 re tllr keys to .ii nclerstanding the p11 ysics behind the operation cf optoelect.ronic rlevict:~. Fc~r~xanlpl.ct, knowledge of the ceneration anti propng:;ition of 1ii~Ilt is (:ri!ci;:il for -u~~derstar;ciing how a semi- L. r. . . concl~iciur laser t,pci-ntrs. 1 11;: t h c o r ~ vf' ga.i:.! ~(jzfiicieitl r j f scrujconductor- r . - 1 lvsers shows hotv Iicrl.lt Cc is ii1~1i3jj [ic~;, ; i i k i wi1;'t"giii~1? theory shows how light is . - confincd to the w:~veeuicle in a laser cavi ly. An undel-standing of the modula- tion of light is useful in designing optical switches and nlodulators. The absorption coefficient or bulk and cliianturn-well se~niconcluctors dernon- strates how light is detected and leads to a discussion on the operating prin- ciples of photodetectors. Features lnlportant topics such as semiconductor heterojunctions and band struc- ture calculations near the band edges for both bulk and quantum-well senliconductors are presented. Both Kane's model, assuming parabolic bands and-Luttinger-Kohn's model, with valence-band mixingeffects in quailtun] wells, are presented. Optical dielectric waveguide theo~y is discussed and applied to semicon- ductor lasers, dil-ectional couplers, and electrooptic modulators. Basic optical transitions. absorption, and gain are discussed with the tinle-dependent perturbation theory. The general theory for gain and absorption is then applied to studying interband and intersubband tran- sitions in bulk and quantum-well semicondtictors. Inlportant se~niconductor lasers such as double-heterostructure, stripe- geometry gain-guided sernicond~ictor lasers. quantum-well lasers, dis- tributed feedback lasers, coupled laser arrays, and s~lrfiice-emittinglasers are discussed in great detail. High-speed modulation of semiconductor lasers using both linear and nonlinear gains is investigated systen:atically. The analytical theory for the laser spectral linewidth enhancenlerlt factor is derived. New subjects such as theories on the band structures ofstrained semicon- ductors and strained quantum-well lasers are investigated. The electroabsorptions, in bulk (Franz-Keldysh effccts) and quantum- well sen~iconductors (quantum confined Starkeffects). are discussed sys- ten~aticalty including exciton effects. Both the bound and continuum states of escitons ilsing the hydrogen atom model are disc~~ssed. Intersubband transitions in quantum wells, in addition to conventional interband absorptions for fc.r-infrared photodetector applications, are presented. Courses A few possibie courses for thz use of this book are listed. Some backgl-oiind in unciergruduate electrornagnetics anci ~~~~~~~11 physics is assumed. A back- zrouncl in cluantuln mechanics will be I?tlprt~I but is not required, since all of - the essentials are coverrcl i l l rile chapt-rs on Fundiirnental:;. * Oveniesv of Optoelectronic Devi.crs: Chapter 1. Chapter- 2, Chapter 3 (3.1, ? 3 5 '1.7). Chapter -i (7. ! -7.-?. 7.6). CI-lapt$r 3, Chapter 9 (9. I-9.6), Chap- .3 . -, - . . . .- (-1: .> ,.- r... .- '? t<i- !() (1(;.!-1[>.3*;. .- , , t . k , l - s ! :l:>J C'!~:IJJ!L.I. 14. Optoelectronic Device Physics: Chapters 1-4, Chapter 7 (7.1, 7.5, 7.6), Chapters 9-14. Electrornagnetics and Optical Device Applications: Chapter 2 (2.1-2.4), Chapters 5-8, Chapter 9 (9.1-9.3, 9.5, 9.6), Chapter 10 (10.1-10.3, 10.5- 10.7), Chapter 12, Chapter 14. The entire book (except for some advanced sections) can also be used for a two-semester course. Acknowledgments After receiving a rigorous training in my Pl1.D. work on electromag~letics at Massachusetts Institute of Technology, I became interested in semiconductor optoelectronics because of recent developments in quantum-well devices with many applications in wave mechanics. I thank J. A. Kong, my Ph.D. thesis adviser, and many of my professors for their inspiration and insight. Because of the sigilificant ilun~ber of research results appearing in the literature, it is difiicult to list all ofthe irnport-tant contributions in the field. For a textbook. only the f~lndamental principles are emphasized. I thank those colleagues who granted nle pern~ission to reproduce their figures. I apologize to all of my colleagues whose important corltributions have not been cited. I atn grateful to many colleagues and friends in the field, especially D. A. B. Miller, W. H. K~lox, M. C. Nuss, A. F. J. Levi. J. O'Gorman, D. S. Chemla, and the late S. Schmitt-Rink, with whom I had many stimulating discussions on quantum-well physics during and afte;. my sabbatical leave at AT&T Bell Laboratories. I would also like to thank many of my students who provided valuable comments, especially .C. S. Chang and W. Fang, who proofread the ~naiiuscript. I tha~~kmanyofmyresearch assistants, especially D. Ahn, C. Y. P chao, and S. P. Wn, for their interaction on research siibjecb related to this book. The support of my research on quantum-well optoelectronic devices by the Office ofNaval Research during the past years is greatly appreciated. I am ! grateful to L. Beck for reading the whole nlanuscript and K. C. Voyles for typ- ing many revisions of the nlanuscript in the past years. The constant support and encouragement of my wife. Shu-Jung, are deeply appreciated. Teaching and cond~icting research have beell the stimulus for writing this book; it was an enjoyable learning experience. Contents Chapter 1. Introduction 1.1 Basic Concepts 1.2 Overview Problems References Bibliography PART I FUNDAMENTALS -.. Chapter 2. Basic Semiconductor Electronics 21 2.1 Maxwell's Equations and Boundary Conditions 2.2 Semicondilctor Electronics Equations 2.3 Generation and Recombination in Set-niconductors 3.4 Examples and Applications to Optoelectronic Devices 2.5 Semiconductor p-N and 12-P Heteroj~inutions 2.6 Semiconductor n-N Heter0junf:tion.s and Metal-Semiconductor Junctic-. . .s Problems References chapter 3. . Basic Quan turn Mechanics 3.1 Schrodinger Equation ! 3.2 The Square Well 3.3 The Harmonic Oscillator 3.4 The Hydrogen Atom (3D and 2 0 Exciton Bound and Continuum States) 3.5 Time-Independent Perturbation Theory 3.6 Lowdin's Renormalization Method 3.7 Tinle-Dependent Perturbation Theory Problems References Chapter 4. Theory a j f FI:iechrt!!.;ic Band 5trncfures i a ~ Semiconductors 124 4.1 'The Bloch '-Yhec-;lt-c:ni ;~.!:d tl~c, b . p T~,lsthod hi- Simple Bands I24 4.2 Kanc's TvI~dc:! Gir Btir~ii Str~icture: 3r . p Flettlod . - ).i{i tll [I3:t: c; !.> l l 4 . i ~ 1 3 1 1. fi ! :? iSi,icij (1) !,.I. 1 29 xii CONTENTS 4.3 Luttinger-Kohn's Model: The k p Method for Degenerate Bands 137 4.4 The Effective Mass 'Tlleory for a S i n ~ l c Band and Degenerate Bands 141 4.5 Strain Effects on Band Structures 1 44 4.6 Electronic States in an Arbitrary One-Dimensiox~al Potential 157 4.7 Kronig-Penney Model for a Superlattice 166 4.8 Band Stntctures of Sen~iconductor Quantum Wells 175 4.9 Band Structures of Strained Semiconcluctor Quantum Wells 185 Problems 1 90 References 195 Chapter 5. Electromagnetics 200 5.1 General Solutions to Maxwell's Equations and Gauge Transbr~mations -" 200 5.2 Time-Harmonic Fields and Duality Principle 203 5.3 Plane Wave Reflection From a Layered Medium 205 5.4 Radiation and Far-Field Pattern 214 Problems 219 References 220 PART I1 PROPAGATION OF LIGHT Chapter 6. Light Propagation in Various Media 6.1 Plane Wave ~olutiqns for Maxwell's Equations in Homogeneous Media 6.2 Light Propagation in Isotropic Media 6.3 Light Propagation in Uniaxial Media Problems References Chapter 7. Optical Waveguide Theory 7.1 Symmetric Dielectric Slab Wavesuides 7.2 ~ s ~ n ~ l n e t r i c Dielectric Slab Waveguides 7.3 Ray Optics Approach to the Waveguide Problems 7.4 Rectangular Dielectric Waveg~liclcs 7.5 The Effective Index Method 7.6 Wiive Guiclance in a Lossy or- Gain Pvlediurn Problenls Rekrences I."OI\ITENTS xiii Chapter 8. kVaveguidc Couplers and Coup1,ed-Mode Theory 253 8.1 bVaveguidc Couplers 8.2 Coupling of Modes in the Time Domain 8.3 Coupled Optical Waveguides 8.4 Improved Coupled-Mode Theory and Its Applications 8.5 Applications of Optical Waveguide.Coup1ers 8.6 Distributed Feedback Structures Problems References PART 111 GENERATION OF LIGHT Chapter 9. Optical Processes in Semiconductors 337 9.1 Optical Transitions Using Fermi's Golden Rule 9.2 Spontaneous and Stimulated Emissions 9.3 Interband Absorption and Gain 9.4 Interband Absorption and Gain in a Quantum-Well Structure 9.5 Momentum Matrix Elements o.f Bulk and Quantum-Well Semiconductors 9.6 Intersubband Absorption 9.7 Gain Spectrum in a Quantum-Well LAaser with Valence-Band-Mixing Effects Problems References Chapter 10. Semiconductor Lasers 10.1 Double Hcterojunction Semiconductor Lasers 3 95 10.2 Gain-Guided and Index-Guided Semiconductor Lasers 412 10.3 Quantu m-Well Lasers 42i 10.4 Strained Quantum-Well Lasers 437 10.5 Co~lpled Laser Arrays 449 10.6 Distributed Feedback Lasers ; 457 10.7 Surface-Emitting Lasers 444 Problems ,: 47 1 References 4'7 3 Chapter I I. Direct Wlodnla ti:,!] of Semicond~etor Lasers 1 1.1 Rate Equatict~s :incl Linear G;rin Analysis A. TIlc Hydrogen Atom (3D and 2D Exciton Bound and Continuum States) B. Proof of the Effective Mass Theory C. Derivations of the Pikus-Bir Harniltonian for a Strained Semiconductor D. Semiconductor Heterojunction Band Lineups in the Model-Solid Theory E. Kramers-Mronig Relations F. Poynting's Theorem and Reciprocity Theorem G . Light Yn~pagation in Gyro tropic Media-Magnetoop tic -,.. Effects W. Formulation of the Improved Coupled-Mode Theory ]I. Density-Matrix Formulation of Optical Susceptibility J. Optical Constants of GaAs and InP K. Electronic Properties of Si, Ge, and a Few 'Binary, Ternary, and Quarternary Compounds Introduction Semiconductor optoelectronic devices, such as laser diodes, light-emitting diodes, optical waveguides, directional couplers, electrooptic modulators, and photodetectors, have important applications in optical communication sys- tems. To understand the physics and the operational characteristics of these optoeIectronic devices, we have to understand the fundamental principIes. In this chapter, we discuss some of the basic concepts of optoelectronic devices, then present the overview of this book. I BASIC CONCEPTS ?'he basic idea is that for a semiconductor, such as GaA.s or InP, many interesting optical properties occur near the band edges. For example, Table 1.1 shows part of the periodic tabIe with many of the elements that are important for semiconductors [I, 21, including group IV, 111-V, and 11-VI compounds. For a 111-V compound semicon 'rlctor mlch as GaAs, the gal- lium (Ga) and arsenic (As) atoms form a zinc-biei;de structure, which consisls of two interpenetrating face-centered cubic Iattices, one made of gallium atoms and the other made of arsenic atoms (Fig. 1.1). The Ga atom h+"an atomic nun-tber 31, which has an [Ar] 3d1"s'-tp1 configuration, i.e., three valence electrons on the outermost shell. (Here [Ar] denotes the configbra- tion of Ar, which has an atomic nu~nber 18, and the 15 electrons are clistribrlted as ls22s22p63s23p6.) The As atom has an atomic number 33 with an [Ar] 3d104s24p3 configuration or five valence electrons in the outermost shell. For a simplified view, we show a planar bonding diagram [3, 41 in Fig. 1.2a, where each bond between two nearby atoms is indicated rvith two dots representing two valence electrons. These valence electrons are contributed by either Ga or As atoms. The bonding diagram shows that each atom, such as Ga, is connected to four nearby As atoms by four valence bonds. If we assume that none of the bonds is broken, tve have all of the electrons in the valence band and no free electrons in the concf~.rction band. 'The energy band diagram as a function of positiog is shown in Fig. 1.2b, where E, is the band edge of the cor~cluc:irjn b:in.(:i 3.11~1 I?!, is the band edge of the valerrcc band. When a light with an, optic;~i entcgv hrj abirve theh;~ndgap E , is inciderrt on the semicvnductor. c;ptical nbsorptior: is significmt. Here / I Is tl~e. Planck Table 1.1 Part of the Periodic Table Containing Group I1 to VI Elements I [Ne] 3 ~ ~ 3 ~ ' I [Ne] 3s'?p3 [ [Ne] 3 ~ ~ 3 ~ ' I - 32 Ge [Ar] 3d1' 4s24p' 33 As [Ar] 3d1" 3 ~ ~ 4 ~ " Group VI A B 1 34 Se [Ar] 36'" 4s'4p4 Group V A B Group I I A B I 48 Cd 49 In 1 50 ~n 51 Sb 52 Te [Kr] 46''' [l<r] 4d"' 1 [KT] 4d1(' [Kr] 4d " [k] 4d1? 56 Ba [Xe] 6s' Group I11 A B - 80 Hg [Xe] 4f I" 5dI06s2 Group IV A B Note: [Ne] = 1 ~ ~ 2 ~ ~ 2 ~ ~ [Ar] = [Ne] 3s'3ph [Kr] = [Ar] 3d'04s'4p6 [Xe] = [Kr] 4d'05s25p6