Particles on surfaces 9 : detection, adhesion and removal

365 Pages·2006·27.91 MB·English

by  Mittal

Particles on Surfaces 9: Detection, Adhesion and Removal
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PARTICLES ON
9:
SURFACES
DETECTION, ADHESION AND
REMOVAL
Editor:
K.L. Mittal
//IVS Pill
LEIDEN • BOSTON 2006
CRC Press
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Contents
Preface Vll
Part 1: Particle Detection/A nalysis/Characterization and General
Cleaning-Related Topics
Recent developments in imaging and analysis of micro- and nanosize
particles and surface features
R. Kohli 3
Photodigital imaging as a means of monitoring particulate
contamination on surfaces
R. Kaiser, J Grilly and A. Kulczyk 63
Determination of residual particles on surfaces. An updated method
for particle extraction using ultrasonics
S. B. Awad 75
Laser inactivation of surfaces and detection of bacteria
I. A. Watson, D. E. S. Stewart-Tull, R. Parton,!. Peden, A. Yeo,
B. K. Tan and G. Ward 83
Laser-assisted nanofabrication on surfaces using
micro- and nanoparticles
Y. F. Lu, L. P. Li, K. K. Mendu, J. Shi, D. W Doerr and
D. R. Alexander 95
Clean-then-assemble versus assemble-then-clean:
Several comparisons
R. W Welker I 07
Development of a non-contact post-CMP cleaning process for copper
D. A. Koos, J Svirchevski, D. J. Vitkavage, D. G. Hansen,
K. A. Reinhardt, F. Huang, M Mitchel and G. Zhang 127
Using ozonated DI water for pre-gate cleaning
L. Liu, I. Kashkoush, A. Walter and R. Novak 145
VI Contents
Decontamination of surrogate Pu-238 legacy wastes
R. Kaiser, J Desrosiers and A. Kulczyk 153
Solar panel obscuration by dust and dust mitigation in the Martian
atmosphere
M K. Mazumder, A. S. Biris, C. E. Johnson, C. U. Yurteri,
R. A. Sims, R. Sharma, K. Pruessner, S. Trigwell and J S. Clements 16 7
Part 2: Particle Adhesion and Removal
Adhesion and friction of single micrometer-sized particles
M Kappl, L. Heim, S. Ecke, M Farshchi and H. J Butt 199
The effect of laser-induced micro-roughness of textile fibers on
adhesion and capture of micrometer-sized particles
T. Bahners, K. Opwis, T. Textor, W Labuda and E. Schollmeyer 211
Advances in wafer cleaning and particle removal technology
K. A. Reinhardt 225
Particle removal challenges and solutions in semiconductor
fabrication CMP processes
M T. Andreas 243
Laser cleaning of model sub-micrometer particulate contaminants
from Si surfaces
S. I. Kudryashov, S. D. Shukla and S. D. Allen 255
Removal of particles using the combined effect oflaser-induced
shock wave and explosive vaporization of liquid
D. Jang and D. Kim 267
Particle removal by attenuated total internal reflection of laser light
G. Dube, A. J Braundmeier, Jr. and J. D. Kelley 277
Removal of sub-1 00-nm particles from structured substrates with
C0 snow
2
J C. J van der Danek, R. Schmits, R. E. van Vliet and
Ton (A.) G. T M Bastein 291
Particle removal by dense-phase fluids using ultrasonics
W T. McDermott, G. Parris, D. V Roth and C. J Mammarella 303
Prediction of particle removal using surfactants
M L. Free 317
Removal of micrometer-size particles from solid surfaces by
an impinging air jet
K. Gotoh 329
Particles on Swfaces 9: Detection, Adhesion and Removal, pp. vii-viii
Ed. K.L. Mittal
((;! VSP 2006
Preface
This volume chronicles the proceedings of the 9th International Symposium on Par
ticles on Surfaces: Detection, Adhesion and Removal held under the aegis of MST
Conferences in Philadelphia, PA, June 17-18, 2004. This event represented a con
tinuation of the series of symposia initiated on this topic in 1986 under the auspices
of the Fine Particle Society. Since 1986 this topic has been covered on a regular bi
ennial basis (except that no symposium was held in 1994) and the proceedings of
these earlier symposia have been properly documented in seven hard-bound books
[ 1-7]. Apropos, because of the interest in and tremendous importance of this topic,
the next (lOth) event in this series is scheduled to be held in Toronto, Canada dur
ing June 19-21, 2006.
This symposium was organized with the following objectives in mind: to provide
an update on this topic since the last symposium, to provide a forum for cross
pollination of ideas, and to identify areas which needed intensified R&D efforts. As
mentioned in the Prefaces to the previous books in this series, the study of particles
on surfaces is crucially important in a legion of diverse technological areas, ranging
from microelectronics to biomedical to space. With the burgeoning interest in
nanotechnologies, the need to detect, characterize, analyze and remove particles on
a nanoscale becomes quite patent. Moreover, it is quite obvious that the need to re
move sub-nanometer particles will become more and more intense in the future.
The technical program for this symposium was comprised of 31 papers covering
many different aspects of particles on surfaces. The presentations ranged from criti
cal reviews of particular subtopics to original research contributions, and the pre
senters hailed from academia, industry and other research organizations. There were
spontaneous, lively and illuminating (not exothermic) discussions throughout the
symposmm.
Now coming to this volume, it contains a total of 21 papers covering many rami
fications of particles on surfaces, ranging from detection to removal. Apropos, this
volume also contains a paper which was not listed in the program but is quite rele
vant and an important addition to this book. It must be recorded that all manuscripts
were rigorously peer-reviewed and revised (some twice or thrice) and properly ed
ited before inclusion in this book. Concomitantly, this volume represents an archi
val publication of the highest standard. It should not be considered a proceedings
volume in the usual and ordinary sense, as many proceedings volumes are neither
peer-reviewed nor adequately edited.
This volume is divided into two parts: Part 1: Particle Detection/A nal
ysis/Characterization and General Cleaning-Related Topics; and Part 2: Particle
Vlll Preface
Adhesion and Removal. The topics covered include: imaging and analysis of micro
and nanosize particles and surface features; determination of particles on surfaces;
laser inactivation of surfaces; laser-assisted nanofabrication on surfaces; post-CMP
cleaning process; pre-gate cleaning; solar panel obscuration in the Martian atmos
phere; adhesion and friction of microsized particles; microroughness of textile fi
bers and capture of particles; factors affecting particle adhesion and removal; vari
ous techniques for cleaning or removal of particles from different substrates
including laser, combination of laser-induced shock wave and explosive vaporiza
tion of liquid, attenuated total internal reflection of laser light, C0 snow, use of
2
dense-phase fluids, use of surfactants, and impinging air jet; and removal of sub-
10 0-nm particles.
This volume and its predecessors [ 1-7] containing bountiful information on vari
ous ramifications of particles on surfaces provide a unified and comprehensive ref~
erence source, and yours truly hopes that anyone interested or involved (centrally or
peripherally) in any aspect of particles on surfaces will find these volumes of great
interest and value.
Acknowledgements
Now comes the pleasant task of thanking those who helped in many and different
ways. First, I am thankful to Dr. Robert H. Lacombe, a dear friend and colleague,
for taking care of many details entailed in organizing this symposium. The unsung
heroes (reviewers) must be thanked profusely for their time and efforts in providing
valuable comments which are a sine qua non for maintaining high standard of any
publication. Special thanks are extended to the authors for their interest, cooperation
and for providing written accounts of their presentations without which this book
could not be materialized. Finally, my sincere appreciation goes to the staff of Brill
Academic Publishers for giving this book a body form.
K. L. Mittal
P.O. Box 1280
Hopewell Jet., NY 12533
I. K. L. Mittal (Ed.), Particles on Surfaces 1: Detection. Adhesion and Removal, Plenum Press,
New York (1988).
2. K. L. Mittal (Ed.). Particles on Swfaces 2: Detection, Adhesion and Removal, Plenum Press.
New York (1989).
3. K. L. Mittal (Ed.), Particles on Surfaces 3: Detection, Adhesion and Removal, Plenum Press,
New York (1991).
4. K. L. Mittal (Ed.), Particles on Surfaces: Detection, Adhesion and Removal. Marcel Dekker,
New York ( 1995). (Proceedings of the 4th Symposium.)
5. K. L. Mittal (Ed.), Particles on Surfaces 5&6: Detection, Adhesion and Removal, VSP, Utrecht
(1999). (Proceedings of the 5th & 6th Symposia.)
6. K. L. Mittal (Ed.), Particles on Swfaces 7: Detection, Adhesion and Removal, VSP. Utrecht
(2002).
7. K. L. Mittal (Ed.), Particles on Smfaces 8: Detection, Adhesion and Removal, VSP, Utrecht
(2003).
Part 1
Particle Detection/A nalysis/
Characterization and General
Cleaning-Related Topics