Fusion of Optical and Mechatronic Engineering © 2006 by Taylor & Francis Group, LLC Mechanical Engineering Series Frank Kreith & Roop Mahajan - Series Editors Published Titles Distributed Generation: The Power Paradigm for the New Millennium Anne-Marie Borbely & Jan F. Kreider Elastoplasticity Theory Vlado A. Lubarda Energy Audit of Building Systems: An Engineering Approach Moncef Krarti Engineering Experimentation Euan Somerscales Entropy Generation Minimization Adrian Bejan nd Finite Element Method Using MATLAB, 2 Edition Young W. Kwon & Hyochoong Bang Fluid Power Circuits and Controls: Fundamentals and Applications John S. Cundiff Fundamentals of Environmental Discharge Modeling Lorin R. Davis Heat Transfer in Single and Multiphase Systems Greg F. Naterer Introductory Finite Element Method Chandrakant S. 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Lakes © 2006 by Taylor & Francis Group, LLC Fusion of Optical and Mechatronic Engineering Hyungsuck Cho Boca Raton London New York A CRC title, part of the Taylor & Francis imprint, a member of the Taylor & Francis Group, the academic division of T&F Informa plc. © 2006 by Taylor & Francis Group, LLC Published in 2006 by CRC Press Taylor & Francis Group 6000 Broken Sound Parkway NW, Suite 300 Boca Raton, FL 33487-2742 © 2006 by Taylor & Francis Group, LLC CRC Press is an imprint of Taylor & Francis Group No claim to original U.S. Government works Printed in the United States of America on acid-free paper 10 9 8 7 6 5 4 3 2 1 International Standard Book Number-10: 0-8493-1969-2 (Hardcover) International Standard Book Number-13: 978-0-8493-1969-3 (Hardcover) Library of Congress Card Number 2005050570 This book contains information obtained from authentic and highly regarded sources. Reprinted material is quoted with permission, and sources are indicated. A wide variety of references are listed. Reasonable efforts have been made to publish reliable data and information, but the author and the publisher cannot assume responsibility for the validity of all materials or for the consequences of their use. No part of this book may be reprinted, reproduced, transmitted, or utilized in any form by any electronic, mechanical, or other means, now known or hereafter invented, including photocopying, microfilming, and recording, or in any information storage or retrieval system, without written permission from the publishers. For permission to photocopy or use material electronically from this work, please access www.copyright.com (http://www.copyright.com/) or contact the Copyright Clearance Center, Inc. (CCC) 222 Rosewood Drive, Danvers, MA 01923, 978-750-8400. CCC is a not-for-profit organization that provides licenses and registration for a variety of users. For organizations that have been granted a photocopy license by the CCC, a separate system of payment has been arranged. Trademark Notice: Product or corporate names may be trademarks or registered trademarks, and are used only for identification and explanation without intent to infringe. Library of Congress Cataloging-in-Publication Data Cho, Hyungsuck Optomechatronics / by Hyungsuck Cho p. cm. Includes bibliographic references and index. ISBN 0-8493-1969-2 (alk. paper) 1. Mechatronics. 2. Optical detectors. TJ163.12.C44 2005 670.42'7--dc22 2005050570 Visit the Taylor & Francis Web site at http://www.taylorandfrancis.com Taylor & Francis Group and the CRC Press Web site at is the Academic Division of Informa plc. http://www.crcpress.com © 2006 by Taylor & Francis Group, LLC Author HyungsuckChogainedhisB.S.degreeatSeoulNationalUniversity,Korea in 1971, an M.S. degree at Northwestern University, Illinois in 1973, and a Ph.D. atthe University of California atBerkeley,California in 1977. FollowingatermasPostdoctoralFellowintheDepartmentofMechanical Engineering, University of California, Berkeley, he has joined the Korea Advanced InstituteofScienceand Technology (KAIST) in 1978. He was made a Humboldt Fellow in 1984-1985, won Best Paper Award at the International Symposium on Robotics and Manufacturing, USA in 1994,andtheThatcherBrothersAwards,InstituteofMechanicalEngineers, UK in1998. Since 1993, he has been an associate editor or served on the editorial boards of several international journals, including IEEE Transactions on Industrial Electronics, and has been guest editor for three issues, including IEEE Transactions IE Optomechatronicsin 2005. Dr. Cho wrote the handbook Optomechatronic Systems: Technique and Application, has contributed chapters to 10 other books and has published 435 technical papers, primarily in international journals. Hewasthefoundinggeneralchairforfourinternationalconferencesand the general chair or co-chair for 10 others, including the SPIE Optomecha- tronicSystems Conferenceheld in Boston in 2000 and2001. His research interests are focused on optomechatronics, environment perception and recognition for mobile robots, optical vision-based percep- tion, control, and recognition, and application of artificial intelligence/ machineintelligence.Hehassupervised136M.S.thesesand50Ph.D.theses. For the achievements in his research work, he was made POSCO professor from 1995 to 2002. © 2006 by Taylor & Francis Group, LLC Preface In recent years, optical technology has been increasingly incorporated into mechatronictechnology,andviceversa.Theconsequenceofthetechnology marriage has led to the evolution of most engineered products, machines, and systems towards high precision, downsizing, multifunctionalities and multicomponents embedded characteristics. This integrated engineering field is termed optomechatronic technology. The technology is the synergistic combination of optical, mechanical, electronic, and computer engineering, andthereforeismultidisciplinaryinnature,thusrequiringtheneedtoview this from somewhat different aspects and through an integrated approach. However, not much systematic effort for nurturing students and engineers has been made in the past by stressing the importance of the multitech- nology integration. Thegoalofthisbookisforittoenablethereadertolearnhowthemultiple technologiescanbeintegratedtocreatenewandaddedvalueandfunction fortheengineeringsystemsunderconsideration.Tofacilitatethisobjective, the material brings together the fundamentals and underlying concepts of this optomechatronic field into one text. The book therefore presents the basic elements of the engineering fields ingredient to optomechatronics, while putting emphasis on the integrated approach. It has several distinct features as a text which make it differ somewhat from most textbooks or monographs in that it attempts to provide the background, definition, and characteristics of optomechatronics as a newly defined, important field of engineering, an integrated view of various disciplines, view of system- oriented approach, and a combined view of macro–micro worlds, the combinationofwhichlinkstothecreativedesignandmanufactureofawide rangeofengineering products and systems. To this end a variety of practical system examples adopting optomecha- tronicprinciplesareillustratedandanalyzedwithaviewtoidentifyingthe natureof optomechatronictechnology.The subjectmatter isthereforewide rangingandincludesoptics,machinevision,fundamentalofmechatronics, feedback control, and some application aspects of micro-opto-electro- mechanical system (MOEMs). With the review of these fundamentals, the book shows how the elements of optical, mechanical, electronic, and microprocessors can be effectively put together to create the fundamental functionalities essential for the realization of optomechatronic technology. Emphasizing the interface between the relevant disciplines involving the integration, it derives a number of basic optomechatronic units. The book © 2006 by Taylor & Francis Group, LLC thengoesoninthefinalparttodeal,fromtheintegratedperspectives,with thedetailsofpracticaloptomechatronicsystemscomposedofandoperated by such basic components. The introduction presents some of the motivations and history of the optomechatronic technology by reviewing the technological evolution of optoelectronics and mechatronics. It then describes the definition and fundamentalconceptofthetechnologythatarederivablefromthenatureof practicaloptomechatronicsystems. Chapter 2 reviews the fundamentals of optics in some detail. It covers geometricopticsandwaveopticstoprovidethebasisforthefusionofoptics andmechatronics. Chapter3treatstheoverviewofmachinevisioncoveringfundamentalsof imageacquisition,imageprocessing,edgedetection,andcameracalibration. This technology domain is instrumental to generation of optomechatronic technology. Chapter 4 presents basic mechatronic elements such as sensor, signal conditioning, actuators and the fundamental concepts offeedback control. This chapter along with Chapter 2 outline the essential parts that make optomechatronicspossible. Chapter 5 provides basic considerations for the integration of optical, mechanical, and electrical signals, and the concept of basic functional modules that can create optomechatronic integration and the interface for such integration. In Chapter 6, basic optomechatronic functional units that can be generated by integration aretreated in detail. The units arevery important tothedesignofoptomechatronicdevicesandsystems,sincetheseproducea variety offunctionalities such as actuation, sensing, autofocusing, acoustic- optic modulation, scanning and switchingvisual feedback control. Chapter 7 represents a variety of practical systems of optomechatronic nature that obey the fundamental concept of the optomechatronic integra- tion. Among them are laser printers, atomic force microscopes (AFM), optical storage disks, confocal microscopes, digital micromirror devices (DMD) and visual tracking systems. Themainintendedaudiencesofthisbookarethelowerlevelsofgraduate students,academicandindustrialresearchers.Inthecaseofundergraduate students, it is recommended for the upper level since it covers a variety of disciplines, which, though fundamental, involve various different physical phenomena. On a professional level, this material will be of interest to engineering graduates and research/field engineers who function in interdisciplinaryworkenvironmentsinthefieldsofdesignandmanufactur- ing ofproducts, devices,and systems. HyungsuckCho © 2006 by Taylor & Francis Group, LLC Acknowledgments I wish to express my sincere appreciation to all who have contributed to the development of this book. The assistance and patience of Acquiring Editor Cindy Renee Carelli, have been greatly appreciated during the writingphase.Herenthusiasmandencouragementhaveprovidedmewitha greatstimulusinthecourseofthisbookwriting.Inaddition,Iwouldliketo thank Jessica Vakili, project coordinator, Fiona Woodman, project manager, and Tao Woolfe, project editor of Taylor and Francis Group, LLC, for ensuringthatallmanuscriptswerereadyforproduction.Iamalsoindebted tomyformerPh.Dstudents,Drs.WonSikPark,MinYoungKimandYoung JunRohfortheirhelpfuldiscussions.SpecialthanksgotoHyunKiLeeand allmylaboratorystudents,XiaodongTao,DeokHwaHong,KangMinPark, Dal Jae Lee and Xingyong Song who have provided valuable help in preparationoftherelevantmaterialsandproofreadingthetypedmaterials. Finally,Iamgratefultomywife,EunSueKim,andmychildren,Janetteand Young Je, who have tolerated me with patience and love and helped make this book happen. © 2006 by Taylor & Francis Group, LLC Contents 1. Introduction: Understanding of Optomechatronic Technology.............1 2. Fundamentals ofOptics................................................................................31 3. Machine Vision:Visual Sensing and Image Processing.....................105 4. Mechatronic Elements forOptomechatronic Interface........................173 5. Optomechatronic Integration....................................................................255 6. Basic Optomechatronic Functional Units...............................................299 7. Optomechatronic Systemsin Practice.....................................................447 Appendix A1 SomeConsiderationsof Kinematics and Homogeneous Transformation......................................565 Appendix A2 Structural BeamDeflection............................................573 Appendix A3 Routh Stability Criterion...............................................577 © 2006 by Taylor & Francis Group, LLC 1 Introduction: Understanding of Optomechatronic Technology CONTENTS Historical Backgroundof Optomechatronic Technology................................4 Optomechatronics: Definitionand FundamentalConcept.............................8 Practical OptomechatronicSystems............................................................9 Basic Roles of Optical and MechatronicTechnologies..........................12 Basic Roles of Optical Technology.....................................................13 Basic Roles of MechatronicElements................................................15 Characteristics of OptomechatronicTechnology....................................16 Fundamental Functions of OptomechatronicSystems..................................20 Fundamental Functions......................................................................................21 IlluminationControl....................................................................................21 Sensing...........................................................................................................24 Actuating.......................................................................................................24 Optical Scanning..........................................................................................24 Visual/OpticalInformation Feedback Control.......................................24 Data Storage..................................................................................................25 Data Transmission/Switching...................................................................25 Data Display.................................................................................................25 Optical PropertyVariation..........................................................................26 SensoryFeedback-Based Optical SystemControl..................................26 Optical Pattern Recognition.......................................................................26 Remote Operation via Optical Data Transmission.................................27 Material Processing......................................................................................27 Summary...............................................................................................................27 References.............................................................................................................28 Most engineered devices, products, machines, processes, or systems have moving parts and require manipulation and control of their mechanical or dynamic constructions to achieve a desired performance. This involves the use of modern technologies such as mechanism, sensor, actuator, control, microprocessor, optics, software, communication, and so on. In the early 1 © 2006 by Taylor & Francis Group, LLC
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