Table Of Content

TRONICS AND ELECTRICAL ineering Laboratory NationalInstituteof StandardsandTechr REpgfJgjl TOELECTRONICS TechnologyAdministra U.S.Departmentof Commerce Division NISTIR6627 January2003 Programs, Activities, and Accomplishments too asb &003 The Electronics and Electrical Engineering Laboratory (EEEL) OneofNIST’ssevenmeasurementandstandardslaboratories, EEELconductsresearch,providesmeasurementservices,and helpssetstandardsinsupportofthefundamentalelectronic technologiesofsemiconductors,magnetics,andsuperconduc- tors;informationandcommunicationstechnologies,suchas fiberoptics,photonics,microwaves,electronicdisplays, electronicsmanufacturingsupplychaincollaboration;forensics andsecuritymeasurementinstrumentation;fundamentaland practicalphysicalstandardsandmeasurementservicesfor electricalquantities;maintainingthequalityandintegrityof electricalpowersystems;andthedevelopmentofnanoscale andmicroelectromechanicaldevices.EEELprovidessupportto lawenforcement,corrections,andcriminaljusticeagencies, includinghomelandsecurity. EEELconsistsofsixprogrammaticdivisionsandtwomatrix- managedoffices: ElectricityDivision SemiconductorElectronicsDivision Radio-FrequencyTechnologyDivision ElectromagneticTechnologyDivision OptoelectronicsDivision MagneticTechnologyDivision OfficeofMicroelectronicPrograms OfficeofLawEnforcementStandards Thispublicationdescribesthetechnicalprogramsofthe OptoelectronicsDivision.Similardocumentsdescribing theotherDivisionsandOfficesareavailable. ContactNIST/EEEL, 100BureauDrive,MS8100, MD Gaithersburg, 20899-8100,telephone301-975-2220, http://www.eeel.nist.gov. Thesepublicationsareupdated biennially. ProductDisclaimer:Certaincommercialproductsandservicesmaybenamedhereintofullydescribe theworkperformed. ThisdoesnotconstitutearecommendationorendorsementbytheNational InstituteofStandardsandTechnology. Covercaption: Abanddiagramdepictingtheoperationofasingle-photonturnstileisoverlaidbya pictureofanopticalfibercable,arepresentationoflaser-basedsurgery,andaPoincaresphereused tographicallydescribeopticalpolarization. Allareexamplesofdiverseoptoelectronicapplications servedbytheDivision. ImageoflasersurgerycourtesyofEyesearch.com. Electronics and Electrical Engineering Laboratory Optoelectronics Division Programs, Activities, and Accomplishments NISTIR6627 January2003 U.S.DEPARTMENTOFCOMMERCE DonaldL.Evans,Secretary TechnologyAdministration PhillipJ. Bond, UnderSecretaryofCommerceforTechnology NationalInstituteofStandardsandTechnology ArdenL.Bement,Jr.,Director Contents FromtheDivisionChief iii AbouttheOptoelectronicsDivision iv PrimaryStandardsforLaserRadiometry v OptoelectronicsDivisionStaff vi W C LaserRadiometry 1 Pulsed-LaserRadiometry 4 High-SpeedMeasurements 7 InterferometryandPolarimetry 10 SpectralandNonlinearProperties 14 OpticalMaterialsMetrology 18 NanostructureFabricationandMetrology 22 SemiconductorGrowthandDevices 25 AppendixA: MajorLaboratoryFacilities 29 AppendixB: NRCPost-DoctoralandOtherResearchOpportunities 30 AppendixC: Conferences and Workshops 32 AppendixD: CalibrationServices 33 AppendixE: Standard Reference Materials 35 5 From the Division Chief Newandbetter-understoodmeasurementtechniques. Instrumentcalibrationsandartifactcali- brationstandardsthataretraceabletoU.S.nationalstandards. Assistanceinthedevelopment ofindustrystandardsforproductspecification. Weareagroupofabout60scientists,engineers,andsupportstaff,andthesearesomeofthe contributionswemaketotheoptoelectronicsindustry. Herein,youwillfindexamplesofour accomplishmentsthroughtheendoffiscalyear2002(September30,2002)andanindicationof ourpresentworkandplans. More currentinformationisavailableonourweb site. Please contactusifwecanbeofassistance. Wetakemetrologyseriously. Inoptoelectronics,asinmanyotherfields,itisakeypartofthe industrialinfrastructurethatestablishescompetitiveness. Consistentlyspecifiedproductsare essential infairtrade, andmeasurementsareakeyelementinefficientmanufacturing. The costofmeasurementsoftenrangesbetween10%and30%ofthecostofproducingaproduct. Sowhiletheoptoelectronicsindustry,alongwithmanyotherhigh-technologyfields,continuesto struggle,advancingthefieldofoptoelectronicsmetrologyremainsanimportanttask. WemaintaintheU.S.nationalstandardsforlaserpowerandenergymeasurements(seepage 34)andusethemtoprovidethebroadestrangeoflasercalibrationcapabilitiesavailableany- where. Eachyearweperformover200 calibrations ofpower- orenergy-measuring instru- ments forover50 customers. We alsoprovideartifactcalibration standards, whichwe call StandardReferenceMaterials, foroveradozenparameters, mostofthemrelatedto optical communications (see page 36 for details). These components provide customers with the capabilityofperformingperiodicinstrumentcalibrations,traceabletonationalstandards,intheir ownlaboratories. Wedevelopmeasurementtechniquesthatcanbeused,onlineandinsitu,inthemanufactureof optoelectronicmaterials,andprovidereferencedataontheopticalpropertiesofimportantopto- electronicmaterials. Andweworkcloselywithmajorstandards-developingorganizations,es- peciallytheTelecommunicationsIndustryAssociation(TLA),theInternationalElectrotechnical Commission(IEC),andtheInternationalOrganizationforStandards(ISO),inproducingindus- trystandards. Apersonalnote:IthasbeenmyprivilegetoworkinthisareaatNISTsince1969andtoleadthe OptoelectronicsDivisionsinceitwasformedin 1994. IwillretireinearlyJanuary2003,at aboutthetimethisdocumentisreleased. Dr.KentRochford,whohassubstantialexperiencein optoelectronicsmetrology,bothatNISTandinindustry,hasbeenappointedmysuccessor. I knowthat,underhisleadership,theDivisionwillcontinuetoplayanimportantroleintheindustry. GordonW.Day,DivisionChief OptoelectronicsDivision NationalInstituteofStandardsandTechnology 325Broadway Boulder,CO80305-3328 (303)497-5342 Fax:(303)497-7671 [email protected] http://www.boulder.nist.gov/div81 GordonW.DayandKentRochford About the Optoelectronics Division Mission ThemissionoftheOptoelectronicsDivisionistoprovidetheoptoelectronicsindustryandits suppliersandcustomerswithcomprehensiveandtechnicallyadvancedmeasurementcapabili- ties,standards,andtraceabilitytothosestandards. History TheDivisionislocatedinBoulder,Colorado,asapartoftheNISTBoulderLaboratories.Itwas establishedin1994,succeedinganearlierNISTorganizationalunit,theOpticalElectronicMe- trologyGroupoftheElectromagneticTechno—logyDivision.TheDivision’srootsextendtothe firstNIST(NBS)workonoptoelectronics researchbegun inthe early 1960sto develop techniquesformeasuringtheoutputpower,orenergy,ofalaser. Sincethelate 1960s,NIST researchonmeasurementandstandardstosupportthedevelopmentandapplicationoflasers hasbeen centeredinthe BoulderLaboratories. Researchrelatedto optical communications wasaddedinthemid-1970s,andexpandedsubstantiallyinthelate 1980s; itnowrepresents morethanhalfoftheDivision’seffort. Organization — TheDivisionisorganizedintothreeGroups. T—woGroups theSourcesandDetectorsGroup andtheOpticalFiberandComponentsGroup focusonthecharacterizationofoptoelectronic components. Thethird,theOptoelectronicManufacturingGroup,focusesonmeasurements thatcanleadtomoreefficientmanufacturingofoptoelectronicmaterialsandcomponents. Research and Services MostoftheresearchperformedintheDivisionis conductedeitherwithNIST-appropriated fundsorundercontracttootherU.S.Governmentagencies.Resultsarenormallyplacedinthe publicdomainthroughpublicationintheopenliterature. Someresultsbecomethesubjectof patents,andareavailableforlicense.TheDivisionalsoconductsproprietaryresearchincol- laborationwithindustryanduniversitiesthroughCooperativeResearchandDevelopmentAgree- ments (CRADAs). TheDivisionanditspredecessororganizationshavebeenprovidingcalibrationservicesforthe characterizationoflasersanddetectorssince 1967,andeachyearconductsover200calibra- tionsforabout50customers. Italsoprovidestheindustrywithstandardreferencematerials, whichareartifactstandardsthatcanbeusedtocalibrateacustomer’sowninstrumentation. TheDivisionmaintainsclosecontactwiththeoptoelectronicsindustrythroughmajorindustry associations,includingtheOptoelectronicsIndustryDevelopmentAssociation(OIDA),andthe Lasers and Electro-optics Manufacturer’sAssociation (LEOMA). Division staffmembers representNI—STtothemajordomesticandinternationalstandardsorganizationsactiveinopto- electronics the Telecommunications Industries Association (TIA), the International ElectrotechnicalCommission(IEC),theInternationalOr—ganizationforStandardization(ISO), andtheAmericanNationalStandardsInstitute(ANSI) andprovideimpartialtechnicalex- pertiseintheirnegotiations. iv Electronicsand Electrical Engineering Laboratory Primary Standards for Laser Radiometry ASiCabsorbingcavityforthe157nmexcimerlaser TheLaser-OptimizedCryogenicRadiometer,devel- calorimeter. Developedoverthepastfewyears,we opedinthelate1990s,andusedforthehighest nowprovidepowerandenergycalibrationsatthis accuracymeasurementswithlow-levelcwlasers, wavelengthtosupportthesemiconductorphotolithog- 100pWto1mWatwavelengthsfrom0.4pmto raphyindustry. 2pm. TheC-SeriesCalorimeter,originallydevelopedinthe TheK-SeriesCalorimeter,developedinthe1970s,for 1970sforusewithcwlasersintherangefrom50pW high-powercwlasersintherangefrom1Wto1,000W to1Wand0.4pmto2pmwavelength. Improved andwavelengthsfrom0.4pmto20pm. Incurrentuse versionsincurrentuseforcalibrations. forcalibrations. Threeversionsofthisstandardareusedforpulsed- TheBBCalorimeter,developedaround1980forthe lasercalibrations. TheQ-Series,developedinthe U.S.AirForceMetrologyLaboratory,andincurrent 1980sisusedfor1.06pmlasers. TheQUVand useforcwlaserswithpowerlevelsupto100kW. QDUVcalorimeters,developedinthe1990sarein currentuseforcalibrationsat248nmand193nm, respectively. Optoelectronics Division Staff Division Office815.00 Name Extension DAY,GordonW.,Chief (throughJanuary2003) 5204 ROCHFORD,KentB„Chief (startingJanuary2003) 5285 SMITH,AnnieJ., Secretary 5342 BAUER,Beth,Admin.Assist. 5123 McCOLSKEY,KathyS., AdministrativeOfficer 3288 SourcesandDetectors(815.01) OpticalFiberandComponents DOWELL,MarlaL. (GL) 7455 (815.03) MERRILL,SandraL., Secretary 3842 GILBERT,SarahL.(GL)(PL) 3120 CASE,WilliamE.(GS) 3741 NORCROSS,AnnaD., Secretary 4384 CHRISTENSEN,DavidH. 3354 CORWIN,KristanL.(PD) 4217 CLEMENT,Tracy S. (PT) 3052 CRAIG,RexM. 3359 CROMER,ChristopherL.(PL) 5620 DENNIS, Tasshi 3507 ELHELBAWY,MonaA.(S) 4304 DRAPELA,TimothyJ. 5858 HADLER,JoshuaA. 4451 DYER,ShelleeD. 7463 HALE,PaulD.(PL) 5367 ESPEJO, RobertJ. (S) 7630 JONES,RichardD. 3439 ETZEL,ShelleyM.(PT) 3287 KEENAN,DarrylA. 5583 FRANZEN,DouglasL.(GS) 3346 LEHMAN,JohnH.(PL) 3654 KOFLER,JonathanD. 4276 LEONHARDT,RodneyW. 5162 NEWBURY,NathanR. 4227 LI,Xiaoyu 3621 ROWE,MaryA.(PREPPD) 7879 LIVIGNI,DavidJ. 5898 SWANN,WilliamC. 7381 OBARSKI,GregoryE. 5747 WASHBURN,BrianR.(PREPPD) 4447 PHELAN,Jr.,RobertJ. (GS) 3696 WILLIAMS,PaulA.(PL) 3805 SIMPSON,PhilipA.(GS) 3789 TOBIAS,IrisL. 5253 OptoelectronicManufacturing VAYSHENKER,Igor 3394 (815.04) YANQShao 5409 HICKERNELL,RobertK.(GL) 3455 REPETTO, Francesca, Secretary 5187 BERRY,JosephJ.(PD) 5268 BERTNESS,KristineA.(PL) 5069 COBRY,KeithD. (PREPUnderGradCU) 3942 Legend: FU,Chih-Chiang(S) 5572 GL=GroupLeader GRAY,MatthewH.(PREPPD) 7953 GS=GuestScientist HARVEY,Todd 3340 PD=Post-DoctoralAppointment KLEIN,Benjamin(PREPPD) 7460 PREPPD=PREPPostdoctoral LEHMAN,SusanY(PREPPD) 7554 PL=ProjectLeader MIRIN,RichardP. (PL) 7955 PT=PartTime ROSHKO,Alexana 5420 S=Student SANFORD,NormanA.(PL) 5239 SCHLAGER,JohnB. 3542 *Telephonenumbersare:(303)497-XXXX SILVERMAN,KevinL. 7948 (thefour-digitextensionasindicated) SU,Mark(PREPPD) 7368 ElectronicsandElectricalEngineeringLaboratory —— I— —Hi CW Laser Radiometry Project Goals dardsforoptical-fiberandlaserpowermeasure- TechnicalContact: Developmeasurementmethodsandstandardsfor ments;andadvancedlasersystemsforlaserpower John H. Lehman andenergymeasurements. characterizinglasersourcesanddetectorsusedwith Staff-Years(FY2003): continuous-wave(CW)laserradiation. Develop Technical Strategy 4.5 professionals andmaintainmeasurementservicesforlaserpower 1.0 technicians andenergy,optical-fiberpower,andrelatedparam- Meetingtheneedsofthelaserandoptoelectronics eters(spectralresponsivity,linearity,etc.). industriesandanticipatingemergingtechnologies requires investigation and development ofim- provedmeasurementmethodsandinstrumentation forhigh-accuracylasermetrologyoverawiderange ofpowers,energies,andwavelengths. NISThashistoricallyusedelectricallycalibrated lasercalorimeterstoprovidetraceabilitytotheSI units forlaserpowerandenergy. We alsonow have measurement capabilitybased on aLaser OptimizedCryogenicRadiometer(LOCR),which providesimprovementinaccuracybyanorderof magnitudeforlaserpowermeasurements,compared toelectrically-calibratedradiometers. Tomeetthe increasing demands forhigheraccuracy overa TheOptoelectronicsDivisionsnewOpticalFiber largerrangeofopticalpowerandwavelength,itis PowerMetertransferstandardscoveringthe necessarytoimprovetheaccuracyofcalibration wavelengthrange450nmto1800nm.Theseoptical servicesthroughthedevelopmentofbettertrans- detectorshavebeenoptimizedtoprovidehigh- ferstandards,traceabletoLOCR. accuracymeasurementsofopticalfiberpower traceabletothedivisionsLaserOptimizedCryogenic DELIVERABLE:By2004,reducebyatleastafactor Radiometer(LOCR). of2theuncertaintiesforallcalibrationsoflaser energyandpowersuppliedtocustomers. Insome CustomerNeeds cmaesnets,ofthiismpwrilolvebdealacsceormpploiwsehredtrtahnrsofeurghsttahnedadervdeslowipt-h Accuratecharacterizationofoptoelectronicsources greaterrangeinopticalpowerandwavelength. anddetectorsisimportantinthedevelopmentand Thecontinuingdevelopmentoftechnologyinthe use ofindustrialtechnologies such as lightwave telecommunicationsindustryhasledtodemands telecommunications, laser-basedmedical instru- forhigherperformance andhigheraccuracy for mentation,materialsprocessing,photolithography, optical-fiberpowermetercharacterizationandcali- data storage, and laser safety equipment. This bration. Inaddition,theDepartmentofDefense Projectfocusesonselectedcriticalparametersin- (DOD)hasbeguntoacceleratetheuseofoptical trinsictosourcesanddetectors,especiallythecali- fiberinmanyofitsnewweaponssystems.Byde- brationofoptical-fiberpowermetersandlaserpower velopingimprovedstandardsforopticalfiberpower orenergymetersatcommonlyusedwavelengths andbydeveloping instrumentationto accurately andpowersorenergies. Inaddition,specialtest quantify the uncertainties ofthenew standards, measurementsareavailableforlinearity,spectral wecanmeetthesedemandingrequirements. responsivity,andspatialandangularuniformityof laserpowermetersanddetectors. Projectmembers DELIVERABLE:By2003,reducetheuncertaintiesfor participateinnationalandinternationalstandards optical-fiberpowermetercalibrationssuppliedto committeesdevelopingstandardsforlasersafety, cduesvteolmoeprmse.ntThoifshwiilglhebre-aaccccuormapclyisthreandsftehrrosutgahndtahreds laserradiationmeasurements(suchasbeamprofile and instrumentationtocharacterizethesedevicesand andpointingstability),andoptical-power-related accuratelyassessuncertaintybudgets. measurements. Theyextendandimprovesource anddetectorcharacterizations,includingdevelop- mentoflow-noise,spectrallyflat,highlyuniform pyroelectricdetectors;high-accuracytransferstan- OptoelectronicsDivision Accomplishments Completedrefurbishmentofthecalibrationfa- cilitiesforCWlaserpowerandenergycalibrations. ThisincludedthelowpowerCW,high-accuracy LOCR,opticalfiberpower,andlasersourcelabora- tories. TheheartofanewtunableTi:Sapphirelaserthatwill expandthecapabilitiesoftheOptoelectronics Doiptviicsailofnisbecraploibwreart.ioSnhsoewrnviicsesthienllaasseerrcproywstearlabenidng SsuhpopwlinesisltahseernerwadliyarteiofnurfboirshCeWdllaasseerrlpaobowreartoaryn,dwhich pumpedbyadoubledNd:YAGlaserbeam.Thenew opticalfiberpowermetercalibrations.Therefurbish- lasersystemwillprovidemanymorewavelengthsand mentincludedcompletelyrefinishingtheroom,allnew higherpowercapabilities. facilities(temperature,lighting,electricalsupply,and coolingwater),andnewlasertables. Manynewsystemsbeingdevelopedforthetele- communicationsindustrydemandhigherpowerfor CompletedthedocumentationoftheDivision’s optical-fiberpowermeter(OFPM)characterization LaserOptimizedCryogenicRadiometer,andhave andcalibration. Asmuchasseveralwattsinfiber obtainedapprovalto begin acalibration service isbeingusedinsystemstopumplasersourcesfor basedontheLOCR. Thisradiometerservesasthe newapplications. Bydevelopingthecapabilityto basisfortraceabilityofopticalpowermeasurements pcraonvmiedeetcatlhiibsrnaeteiodn.sforOFPMupto10watts,we fsioorns,evienrcalludcailnigbrCatWionlasseerrvipcoewseorffaenreddobpytitchaelDfiivbie-r powermeasurements. cDaEpLabIiVliEtRyAuBpLtEo:1B0yW20f0o4r,opptriocvaildfeibheirghpopwoewrermeter Modeledtheerrorsassociatedwithopticalfi- calibrations. bertransfer standards using angularuniformity dataobtainedwiththeangularresponsecharacter- Advances in lasertechnology are continuously izationsystem.Thenewestdesignsforopticalfi- producinglaserswithnewwavelengthsandpower bertransferstandardsshowanerroroflessthan levels. Weare involvedinan ongoingeffortto 0.1 %usingfiberuptoNAof0.26.Whencom- expandwavelengthandpower-rangecapabilities pletelyimplementedintoourcalibrationsystems, throughimplementationofnewtunablesolid-state thenewtransferstandardwillbecapableofmea- lasertechnologytokeepupwithcustomerneeds surementswith atotal expandeduncertainty of forcalibrationservicesatNIST.Thesenewlaser 0.4%. systemswillbecapableofprovidinganewwave- lengthrequestedbyacustomerwithaminimumof DeliveredbothSiandGeversionsofthelatest developmenttimeandcostbyhavingaflexiblesuite opticalfibertransferstandardstoNavyandArmy oflasersystemsavailableinthelaboratory. sponsors. Thesedetectorswillimprovetheaccu- racyoftheiropticalfiberpowercalibrationandre- DELIVERABLE:By2005,developasuiteoftunable duceinter-servicevariation. solid-statelaserstocovertheentirespectral range fromthedeepUVtothethermalIR. Thislasersystem Builtandtested atunableTi:Sapphire laser willcontinuetoevolveasnewtechnologybecomes withatuningrangeof700nmto900nm.Alsoin- availabletoprovidenewcalibrationservicesasneeds stalledadyelasertoextendthisrangeto550nm. arise. This enables the calibration ofdetectors overa widerangeofvisiblewavelengths. 2 ElectronicsandElectricalEngineeringLaboratory