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Optics of Charged Particle Analyzers PDF

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EDITOR-IN-CHIEF PETER W. HAWKES CEMES-CNRS Toulouse,France HONORARY ASSOCIATE EDITOR TOM MULVEY AcademicPressisanimprintofElsevier Radarweg29,POBox211,1000AEAmsterdam,TheNetherlands 32JamestownRoad,LondonNW17BY,UK 30CorporateDrive,Suite400,Burlington,MA01803,USA 525BStreet,Suite1900,SanDiego,CA92101-4495,USA Firstedition2009 Copyright#2009ElsevierInc. Allrightsreserved. Nopartofthispublicationmaybereproduced,storedinaretrievalsystem ortransmittedinanyformorbyanymeanselectronic,mechanical,photocopying, recordingorotherwisewithoutthepriorwrittenpermissionofthepublisher. PermissionsmaybesoughtdirectlyfromElsevier’sScience&Technology RightsDepartmentinOxford,UK:phone(+44)(0)1865843830;fax(+44)(0)1865 853333;email:[email protected] yourrequestonlinebyvisitingtheElsevierwebsiteathttp://elsevier.com/locate/ permissions,andselectingObtainingpermissiontouseElseviermaterial. Notice Noresponsibilityisassumedbythepublisherforanyinjuryand/ordamage topersonsorpropertyasamatterofproductsliability,negligenceorotherwise,or fromanyuseoroperationofanymethods,products,instructionsorideas contained in the material herein. Because of rapid advances in the medical sciences,inparticular,independentverificationofdiagnosesanddrug dosagesshouldbemade. LibraryofCongressCataloging-in-PublicationData AcatalogrecordforthisbookisavailablefromtheLibraryofCongress BritishLibraryCataloguinginPublicationData AcataloguerecordforthisbookisavailablefromtheBritishLibrary ISBN:978-0-12-374768-6 ISSN:1076-5670 ForinformationonallAcademicPresspublications visitourWebsiteatwww.books.elsevier.com PrintedintheUnitedStatesofAmerica 09 10 10 9 8 7 6 5 4 3 2 1 Dedication Dedicated to the memory of my mother, Stella Yakovlevna Yavor, who wasalsomyfirstteacherofchargedparticleoptics. v Preface ItisapleasuretowelcomeMikhailYavorbacktotheseAdvances.In1993, hecontributedalongchapteronparasiticaberrationsinelectronoptics,in 1998heexaminedtheopticsofsystemswithnarrowgapsandnowhehas written anentire volume on energy and mass analyzers. Although there have been long accounts of some of these instruments, this is the only recent text that covers energy analyzers, mass analyzers, time-of-flight devicesandradiofrequencyanalyzers.Thishastheadditionaladvantage that the vocabulary and notation are uniform throughout for all these differentmembersoftheanalyzerfamily.Thechoiceoftopicscoveredis described in the author’s Foreword and hence not repeated here. I will, however, insist that this account is intended to be readable by a wide audience, and in particular by users of these instruments. It is by no meanslimitedtodesignersofanalyzersandthoseinterestedintheiroptics. I am sure that this long and meticulous account of the optics and behaviorofallthesedifferentkindsofenergyandmassanalyzerwillbe heavily used and am delighted to include it in these Advances. The dedicationisapleasantreminderthattheycancreatefamilyallegiances, forthelateStellaYavorwasalsoacontributor,aslongagoas1989,writing onelectrostaticlenseswithL.A.Baranova. When this volume was about to go to press, I learned of the recent deathofone ofour HonoraryAssociateEditors,Ben Kazan.Atribute to him will be included in the Preface to the next volume and meanwhile, Iextendallsympathytohisfamilyonbehalfofthepublishersandmyself. PeterW.Hawkes xiii Foreword Two main reasons encouraged me to write on optics of charged particle analyzers.Thefirstistheobviouslackofgeneralliteratureonthesubject. Despite ever-growing competition in performance of modern analytical devicesusingelectronandionspectrometricmethodsofinvestigationof thestructureofvarioussubstances,theprinciplesandspecificfeaturesof chargedparticle optical designsof these deviceshave not been gathered ingeneral-purposebooksfordecades.Theexceptionsarequadrupoleand ion trap spectrometers, which are well covered by recent publications, alsoconsideringamongothersion-opticalaspects(Ghosh,1995;Dawson, 1997; March and Todd, 2005). Wollnik’s book (1987a) is the only book devotedtotheopticsofothertypesofchargedparticleanalyzers,butitis already more than twenty years old and covers only sector field instru- mentsandmultipoles.Surveysonchargedparticleopticsoftime-of-flight (TOF)massspectrometersorelectrostaticenergyanalyzerscanbefound onlyinrelativelyshort(andolder)articles. Contemporary charged particle spectrometers are, as a rule, compli- cated devices that often include very different types of optical elements. Forexample,aTOFspectrometermayconsistofagas-filled quadrupole for cooling ions,a static focusingchannel,a pulsed ionconverter (some- times followed by an energy filter), and finally, a mirror- or sector-type TOF mass analyzer itself. Tandem mass spectrometers are even more complexandcancombinestaticanddynamicmassanalyzers.Designers of such instruments must have a good knowledge of all these elements. However,norecentliteraturepresentschargedparticleopticalaspectsof differenttypesofelectronandionanalyzersandtheirrelatedtransporting interfaces.Thismonographisintendedtofillthisgap. The second reason is a desire to address this monograph to a larger community.Itisnotasecretthatmostexcellentbookswrittenbyexperts in charged particle optics have been intended, with few exceptions, for expertsinchargedparticleoptics.Myexperienceofcommunicationwith peopleinvolvedinthedesignofanalyticalinstrumentshasrevealedthat manyofthem,thoughnotdesignersofparticularlychargedparticleoptic schemes, still would like to understand the principles of optical design. They are notparticularly interested in complicated expressionsfor aber- rationcoefficientsorothermathematicaldetails,buttheywanttoseehow xv xvi Foreword anopticalelementworks,whyitisdesignedinthisandnotinsomeother way, and what is essential in the optical design. In talking with such people, as well as with many students, I often experienced problems in recommending suitable reading. Finally, I decided to write this mono- graph. My intention was to review the current state of charged particle optical knowledge in the field of electron and ion analyzers and, at the same time, to make the material relatively easy to read. Although it was impossibletoavoidmathematicalformulas,Itriedwheneverpossibleto emphasize the physical principles and qualitative descriptions. Readers willjudgewhetherthisgoalhasbeenachieved. Becauseinanydiscussionofchargedparticlespectrometersitisdiffi- cult to separate functionally pure analyzing optic elements from the elements of particle transporting channels, this monograph presents both.What is left asideis theoptics of electronand ion sources,because surveyingthissubjectrequiresaprofoundknowledgeofsolidstatephys- icsandothersimilartopicsinwhichIdonotconsidermyselfanadequate expert.Themonographcontainstwointroductorysections.Thefirstcon- tains basic reminders of the properties of quasi-static electric and mag- neticfields,aswellasthegenerallawsofchargedparticlemotioninsuch fields.Thesecondsectiondescribesthelanguageofaberrationexpansions used for analysis of charged particle optical properties of all types of analyzers except radiofrequency (RF) analyzers and Penning traps. Sections 3 and 4 are devoted to optics of elements of charged particle transporting channels, both static and RF. Because it is not possible to describeallthenumeroustypesofelectronandionlenses,Iattemptedto survey those most often used in charged particle spectrometers or those that seem promising but undeservedly forgotten (e.g., crossed lenses). Later sections consider the analyzers themselves: magnetostatic, electro- static,combined,TOF,andfinally,RFones.Thelastclassofmassanaly- zersissurveyedmorebrieflysoastonotsimplycopysimilarinformation availablefromotherrecentbooks.Inallcaseswheredetailsofdesignsor effectswereomitted,Ihavetriedtosupplyreferencestotheliteraturein whichthesedetailscanbefound. Unfortunately,onemonographdoesnotallowthespacetoaccommo- datedescriptionsofallkindsofmassanalyzersandalltheirfeatures.My choice of the mass analyzers presented herein was based on either their popularity or the promises they offer, although my own personal taste also contributed a little. As far as the analyzer properties are concerned, the lack ofspacehasforced theomission in most cases thediscussion of spacechargeeffects,manufacturingtolerances,andrequirementsrelated tothestabilityofpowersupplies. Writing this monograph was possible because of my many years of interaction with leading experts in the field. First, I would like to thank two persons: Prof. Dr. H. Wollnik and Dr. A. N. Verentchikov. Working Foreword xvii withthematdifferentperiodsallowedmetoreachalevelatwhichIcould startwritingthismonograph.MyspecialthanksgoestoDr.A.Berdnikov, whoseexperienceinmathematicsingeneralandinnumericalmethodsof computing charge particle optics systems in particular rendered me a great service. I am very grateful to the scientific leader of the Flerov Laboratory of Nuclear Reactions in JINR (Dubna), academician Yu.Ts. Oganessian, the laboratory and group leaders at GSI (Darmstadt), Prof. Dr. C. Scheidenberger and Prof. Dr. H. Geissel, the group leader at the Second Physical Institute of the Justus-Liebig University in Giessen, Dr. W. R. Plass, and the members of their teams: Dr. A. G. Popeko, Dr. H.Weick,Dr.M.Winklerandothersforfruitfulcollaboration.Mysincere thankstomycolleaguesintheInstituteforAnalyticalInstrumentationin St.Petersburg:Prof.L.N.Gall,Prof.Yu.K.Golikov,Dr.Yu.I.Hasin,Dr. V.D.Belov,Dr.N.V.Krasnov,Dr.A.P.Shcherbakov,M.Z.Muradymov, and many others for communications affording me invaluable experi- ence.Finally,Iamgratefultotheexpertsinchargedparticleopticdesign with whom my destiny intersected and from whom I gained a profes- sionalexperience:Dr.A.J.H.Boerboom,Dr.D.Ioanoviciu,andDr.E.de Chambost. Manyoftheillustrationsinthebookwerecreated withtheaidofthe computer programs SIMION 8.0 (Manura and Dahl, 2006) and GICOSY (Wollnik,Hartmann,andBerz,1988). Future Contributions S.Ando Gradientoperatorsandedgeandcornerdetection K.Asakura Energy-filteringx-rayPEEM W.Bacsa Opticalinterferencenearsurfaces,sub-wavelengthmicroscopy andspectroscopicsensors C.Beeli Structureandmicroscopyofquasicrystals C.BobischandR.Mo¨ller Ballisticelectronmicroscopy G.Borgefors Distancetransforms Z.Bouchal Non-diffractingopticalbeams A.Buchau Boundaryelementorintegralequationmethodsforstaticandtime-dependent problems B.Buchberger Gro¨bnerbases E.Cosgriff,P.D.Nellist,L.J.Allen,A.J.d’Alfonso,S.D.FindlayandA.I.Kirkland Three-dimensionalimagingusingaberration-correctedscanningconfocal electronmicroscopy T.Cremer Neutronmicroscopy A.V.Crewe(specialvolumeonSTEM,159) EarlySTEM xix xx FutureContributions P.Dombi(vol.158) Ultra-fastmonoenergeticelectronsources A.Engel(specialvolumeonSTEM,159) STEMinthelifesciences A.N.Evans Areamorphologyscale-spacesforcolourimages A.X.Falca˜o Theimageforestingtransform R.G.Forbes Liquidmetalionsources B.J.Ford(vol.158) Theearliestmicroscopicalresearch C.Fredembach Eigenregionsforimageclassification J.Giesen,Z.Baranczuk,K.SimonandP.Zolliker Gamutmapping J.Gilles(vol.158) Noisyimagedecomposition A.Go¨lzha¨user Recentadvancesinelectronholographywithpointsources M.Haschke Micro-XRFexcitationinthescanningelectronmicroscope P.W.Hawkes(specialvolumeonSTEM,159) TheSiemensandAEISTEMs L.Hermi,M.A.KhabouandM.B.H.Rhouma ShaperecognitionbasedoneigenvaluesoftheLaplacian M.I.Herrera ThedevelopmentofelectronmicroscopyinSpain H.Inada(specialvolumeonSTEM,159) Developmentofcoldfield-emissionSTEMatHitachi M.S.Isaacson(specialvolumeonSTEM,159) EarlySTEMdevelopment J.Isenberg ImagingIR-techniquesforthecharacterizationofsolarcells FutureContributions xxi K.Ishizuka Contrasttransferandcrystalimages A.Jacobo IntracavitytypeIIsecond-harmonicgenerationforimageprocessing B.Jouffrey(specialvolumeonSTEM,159) TheToulousehigh-voltageSTEMproject L.Kipp Photonsieves G.Ko¨gel Positronmicroscopy T.Kohashi Spin-polarizedscanningelectronmicroscopy O.L.Krivanek(specialvolumeonSTEM,159) Aberration-correctedSTEM R.Leitgeb Fourierdomainandtimedomainopticalcoherencetomography B.Lencova´ Moderndevelopmentsinelectronopticalcalculations H.Lichte Newdevelopmentsinelectronholography M.Mankos High-throughputLEEM M.Matsuya CalculationofaberrationcoefficientsusingLiealgebra S.McVitie Microscopyofmagneticspecimens I.MorenoSorianoandC.Ferreira FractionalFouriertransformsandgeometricaloptics M.A.O’Keefe Electronimagesimulation D.OultonandH.Owens Colorimetricimaging N.PapamarkosandA.Kesidis TheinverseHoughtransform

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Advances in Imaging and Electron Physics merges two long-running serials--Advances in Electronics and Electron Physics and Advances in Optical and Electron Microscopy. This series features extended articles on the physics of electron devices (especially semiconductor devices), particle optics at hig
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