Nanosystems Design and Technology PDF
Preview Nanosystems Design and Technology
Nanosystems Design and Technology Giovanni De Micheli (cid:129) Yusuf Leblebici Martin Gijs (cid:129) Janos Vo¨ro¨s Nanosystems Design and Technology 123 Prof.Dr.GiovanniDeMicheli Prof.Dr.MartinGijs EPFL-SwissFederalInstitute EPFL-SwissFederalInstitute ofTechnology ofTechnology IntegratedSystemsLab MicrosystemsLab 1015Lausanne,Switzerland 1015Lausanne,Switzerland giovanni.demicheli@epfl.ch martin.gijs@epfl.ch Prof.Dr.YusufLeblebici Prof.Dr.JanosVo¨ro¨s EPFL-SwissFederalInstitute ETHZ-SwissFederalInstitute ofTechnology ofTechnology MicroelectronicSystemsLab Inst.BiomedizinischeTechnik 1015Lausanne,Switzerland Gloriastrasse35-8092 YusufLeblebici@epfl.ch Zu¨rich,Switzerland [email protected] ISBN978-1-4419-0254-2 e-ISBN978-1-4419-0255-9 DOI10.1007/978-1-4419-0255-9 SpringerDordrechtHeidelbergLondonNewYork LibraryofCongressControlNumber:2009926034 (cid:2)c SpringerScience+BusinessMedia,LLC2009 Thisworkissubjecttocopyright.Allrightsarereserved,whetherthewholeorpartofthematerialis concerned,specificallytherightsoftranslation,reprinting,reuseofillustrations,recitation,broadcasting, reproductiononmicrofilmorinanyotherway,andstorageindatabanks.Duplicationofthispublication orpartsthereofispermittedonlyundertheprovisionsoftheGermanCopyrightLawofSeptember9, 1965,initscurrentversion,andpermissionforusemustalwaysbeobtainedfromSpringer.Violations areliabletoprosecutionundertheGermanCopyrightLaw. Theuseofgeneral descriptive names,registered names, trademarks, etc. inthis publication does not imply,evenintheabsenceofaspecificstatement,thatsuchnamesareexemptfromtherelevantprotective lawsandregulationsandthereforefreeforgeneraluse. Printedonacid-freepaper SpringerispartofSpringerScience+BusinessMedia(www.springer.com) Foreword Itisagreatpleasuretowriteforthisbook,whichlargelypresentsresearchfunded by the Competence Centre for Materials Science (CCMX) of the Swiss Federal InstitutesofTechnology(ETHdomain).CCMXwascreatedinearly2006withthe aim of networkingresearch groupswithin the ETH domain and interfacing to the researchneedsofSwissindustry.Materialsscienceandtechnologyisatransversal subjectthataddressesthediversematerialsusedinmanydifferentindustrialsectors; thus CCMX focuses on several sectors of present and future economic impor- tance including Materials for Micro- and Nanosystems (MMNS) with Giovanni DeMicheliasdirector. CCMXhasprovidedanewfundingmodelwithseveralresearchteamsworking together on interdisciplinary projects. MMNS took up this model of coopera- tive engineering to initiate three large projects, namely: (a) Materials, Devices, and Design Technologies for Nanoelectronic Systems Beyond Ultimately Scaled CMOS, (b) Laboratory on Chip, and (c) Development and Characterization of Nanowires for Applications in Bioelectronics. In these projects several pre- and postdoctoral researchers worked within different teams with regular meetings for an exchange of ideas and technology. Partners included the Swiss Federal Insti- tutesofTechnologyofLausanne(EPFL)andZurich(ETHZ),theSwissCenterfor ElectronicsandMicrosystemsandMicrotechnology(CSEM),andthePaulSherrer Institute(PSI). Judging by the important and varied results generated in less than 3 years of theproject,thiswayofworkinghasprovedhighlysuccessful,andthispublication provides an excellent opportunity to bring the results to the attention of a wider internationalaudience. We hope that this successful start will be continued in the nano-tera.ch project, which has taken over this area, while CCMX continues to fundinitiativesinotherareas(e.g.,metals,powdersandcoatings,andmaterialsfor life sciences).We are gratefultothe boardofthe SwissInstitutesofTechnologies (CEPF/ETHrat) for providingthis opportunityto demonstrate the effectivenessof cross-teaminterdisciplinaryresearch. KarenSchrivener ProfessorandDirector,CCMX v Acknowledgments The authorswould like to acknowledgethe contributionsof all researcherson the CCMX/MMNS teams that produced the research and results reported here. The authors are indebted to the Board of the Swiss Federal Institutes of Technologies (CEPF/ETHrat)forfundingthisresearchthroughtheCompetenceCenterforMate- rials (CCMX). Additional funding was provided by the Swiss National Science Foundation, the Swiss Federal Office for Professional Education and Technology (OFFT),andtheEuropeanprojectMOBESENSandGoodFood. The authors are also grateful to Stefano Pietrocola and Marta Lombardini for assistance with the experiments reported in Chap. 4, to the technical staff mem- bersatEPFL,ETHZ,CSEM,andPSI,withspecialmentiontoMartinLanzforhis support with microfabrication. The authors would also like to thank the Applied MolecularReceptorsGroup(CSIC,Barcelona,Spain)andUnisensorSA(Wandre, Belgium) for providing the immunoassay reagents, Perstorp Specialty Chemicals (Sweden) for providingthe hyperbranchedpolymers, and Arrayon Biotechnology forthebiofunctionalizationoftheWIOSchips. Last but not least, the authors would like to express their sincere appreciation toAnilLeblebici,whoasCCMXcoordinatorenabledthecollaborativeresearchby supportingtheinfrastructureandinparticularcoordinatedtheeffortsforproducing thisbook. vii Contents 1 Nanosystems................................................................... 1 GiovanniDeMicheli 2 MaterialsandDevicesforNanoelectronic SystemsBeyondUltimatelyScaledCMOS ................................ 23 Didier Bouvet, La´szlo´ Forro´,Adrian M. Ionescu,Yusuf Leblebici,ArnaudMagrez,KirstenE.Moselund, GiovanniA.Salvatore,NavaSetter,andIgorStolitchnov 3 DesignTechnologiesforNanoelectronic SystemsBeyondUltimatelyScaledCMOS ................................ 45 HaykelBenJamaa,BahmanKheradmandBoroujeni, GiovanniDeMicheli,YusufLeblebici,ChristianPiguet, AlexandreSchmid,andMilosStanisavljevic 4 ActuationandDetectionofMagneticMicroparticles inaBioanalyticalMicrosystemwithIntegratedCMOS Chip............................................................................ 85 UlrikeLehmann,MaximilianSergio,EmileP.Dupont, EstelleLabonne,CristianoNiclass,EdoardoCharbon, andMartinA.M.Gijs 5 ThinFilmBulkAcousticWaveResonatorsforGravimetric Sensing......................................................................... 103 EvgenyMilyutinandPaulMuralt 6 Lab-on-a-ChipforAnalysisandDiagnostics: ApplicationtoMultiplexedDetectionofAntibioticsinMilk ............ 117 JankoAuerswald,Stefan Berchtold,Jean-MarcDiserens, MartinA.M.Gijs,Young-HyunJin,HelmutF.Knapp, YvesLeterrier,Jan-AndersE.Ma˚nson,GuillaumeSua´rez, andGuyVoirin ix x Contents 7 NanowireDevelopmentandCharacterization forApplicationsinBiosensing............................................... 143 RobertMacKenzie,VaidaAuzelyte,SvenOlliges, Ralph Spolenak,HarunH.Solak,andJanosVo¨ro¨s Index................................................................................ 175 Contributors JankoAuerswald CSEM–SwissCenterforElectronicsandMicrotechnology Inc.,Neuchaˆtel,Switzerland VaidaAuzelyte PSI–PaulScherrerInstitute,Villigen,Switzerland StefanBerchtold CSEM –SwissCenterforElectronicsandMicrotechnology Inc.,Neuchaˆtel,Switzerland Didier Bouvet EPFL – Swiss Federal Institute of Technology, Lausanne, Switzerland EdoardoCharbon EPFL – Swiss FederalInstitute ofTechnology,Lausanne, Switzerland GiovanniDeMicheli EPFL–SwissFederalInstituteofTechnology,Lausanne, Switzerland Jean-Marc Diserens Nestle´ Research Center, Nestec Ltd., Lausanne, Switzerland Emile P. Dupont EPFL – Swiss Federal Institute of Technology,Lausanne, Switzerland La´szlo´ Forro´ EPFL – Swiss Federal Institute of Technology, Lausanne, Switzerland MartinA. M. Gijs EPFL - Swiss FederalInstituteof Technology,Lausanne, Switzerland AdrianM. Ionescu EPFL–Swiss FederalInstituteofTechnology,Lausanne, Switzerland HaykelBenJamaa EPFL– SwissFederalInstituteofTechnology,Lausanne, Switzerland Young-HyunJin EPFL – Swiss Federal Institute of Technology,Lausanne, Switzerland xi xii Contributors Bahman Kheradmand Boroujeni EPFL – Swiss Federal Institute of Technology,Lausanne,Switzerland CSEM–SwissCenterforElectronicsandMicrotechnology,Neuchaˆtel,Switzerland HelmutF.Knapp CSEM–SwissCenterforElectronicsandMicrotechnology Inc.,Neuchaˆtel,Switzerland Estelle Labonne EPFL – Swiss Federal Institute of Technology,Lausanne, Switzerland Yusuf Lebelebici EPFL – Swiss Federal Institute of Technology,Lausanne, Switzerland Ulrike Lehmann EPFL – Swiss Federal Institute of Technology,Lausanne, Switzerland Yves Leterrier EPFL – Swiss Federal Institute of Technology, Lausanne, Switzerland Robert MacKenzie ETHZ – Swiss Federal Institute of Technology,Zu¨rich, Switzerland Arnaud Magrez EPFL – Swiss Federal Institute of Technology,Lausanne, Switzerland Jan-Anders E. Ma˚nson EPFL – Swiss Federal Institute of Technology, Lausanne,Switzerland Evgeny Milyutin EPFL – Swiss Federal Institute of Technology,Lausanne, Switzerland Kirsten E. Moselund EPFL – Swiss Federal Institute of Technology, Lausanne,Switzerland Paul Muralt EPFL – Swiss Federal Institute of Technology, Lausanne, Switzerland Cristiano Niclass EPFL – Swiss Federal Institute of Technology,Lausanne, Switzerland SvenOlliges ETHZ–SwissFederalInstituteofTechnology,Zu¨rich,Switzerland ChristianPiguet CSEM –Swiss CenterforElectronicsandMicrotechnology Inc.,Neuchaˆtel,Switzerland GiovanniA.Salvatore EPFL–SwissFederalInstituteofTechnology,Lausanne, Switzerland AlexandreSchmid EPFL –Swiss FederalInstituteofTechnology,Lausanne, Switzerland MaximilianSergio EPFL – SwissFederalInstitute ofTechnology,Lausanne, Switzerland Contributors xiii Nava Setter EPFL – Swiss Federal Institute of Technology, Lausanne, Switzerland HarunH.Solak PSI–PaulScherrerInstitute,Villigen,Switzerland Ralph Spolenak ETHZ – Swiss Federal Institute of Technology, Zu¨rich, Switzerland MilosStanisavljevic EPFL–SwissFederalInstituteofTechnology,Lausanne, Switzerland Igor Stolitchnov EPFL – Swiss Federal Institute of Technology,Lausanne, Switzerland GuillaumeSua´rez CSEM–SwissCenterforElectronicsandMicrotechnology Inc.,Neuchaˆtel,Switzerland GuyVoirin CSEM – Swiss CenterforElectronicsandMicrotechnologyInc., Neuchaˆtel,Switzerland JanosVo¨ro¨s ETHZ-SwissFederalInstituteofTechnology,Zu¨rich,Switzerland
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