Nanosources and Manipulation of Atoms Under High Fields and Temperatures: Applications

319 Pages·1993·16.37 MB·English

by  H. Rohrer (auth.)

Nanosources and Manipulation
of Atoms Under High Fields and
Temperatures: Applications
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Series E: Applied Sciences - Vol. 235
Nanosources and Manipulation
of Atoms Under High Fields and
Temperatures: Applications
edited by
Vu Thien Binh
Department of Material Physics,
Universite Claude Bernard Lyon I,
Villeurbanne, France
N. Garcia
Department of Condensed Materials,
Universidad Autonoma de Madrid,
Madrid, Spain
and
K. Dransfeld
Faculty of Physics,
Universität Konstanz,
Konstanz, Germany
Springe r Science+Busines s Media, B.V.
Proceedings of the NATO Advanced Research Workshop on
Manipulations of Atoms Under High Fields and Temperatures: Applications
Lyon, France
6-10 July 1992
Library of Congress Cataloging-in-Publicatio n Data
Nanosources and manipulatio n of atoms under hig h field s and
temperatures : application s / edite d by Vu Thien Binh, N. Garcia ,
and K. Dransfeld .
p. cm. — (NATO ASI series . Serie s E, Applie d science s ; vol .
235)
Inc 1 udes index .
ISBN 978-94-010-4758-6 ISBN 978-94-011-1729-6 (eBook)
DOI 10.1007/978-94-011-1729-6
1. Nanostructur e materials—Congresses . 2. Nanotechno1ogy-
-Congresses. I . Vu, Thien Binh, 1946- . II . Garcia , N.
(Nicolas ) III . Dransfeld , K. (Klaus ) IV . Series : NATO ASI series .
Series E, Applie d science s ; no. 235.
TA418.9.N35N53 1993
620. 1' 1 2—dc20 93-18976
ISBN 978-94-010-4758-6
Printed on acid-free paper
All Rights Reserved
© 1993 Springer Science+Business Media Dordrecht
Originally published by Kluwer Academic Publishers in 1993
Softcover reprint of the hardcover 1st Edition 1993
No part of the material protected by this copyright notice may be reproduced or
utilized in any form or by any means, electronic or mechanical, including photo-
copying, recording or by any information storage and retrieval system, without written
permission from the copyright owner.
This book contains the proceedings of a NATO Advanced Research Workshop held
within the programme of activities of the NATO Special Programme on Nanoscale
Science as part of the activities of the NATO Science Committee.
Other books previously published as a result of the activities of the Special
Programme are:
Nastasi, M., Parking, D.M. and Gleiter, H. (eds.), Mechanical Properties and
Deformation Behavior of Materials Having Ultra-Fine Microstructures. (ASIE
233) 1993 ISBN 0-7923-2195-2
CONTENTS
Preface ix
Introduction
Local Probe Methods and Miniaturization................ ...................... .. .. 1
H.Rohrer
Nanosources and Applications
Low Energy Electron Microscopy. . .. . .. . .. . . . . . . . .. . . . . . . . ... . . . .. . . . . .. . . . . . . . .. . . 13
E.Bauer
Nanotips and Transmission Low Energy Electron Diffraction..... ........ ...... 19
1.CH. Spence
Lensless Low Energy Electron Point Source Microscopy.. . . . .. . .. . .. . .. . . . . .. . . 35
H J. Kreuzer, A. Wierzbicki, M.G.A. Crawford and CB. Roald
Electron Focusing: Computer Simulation....................... ............ ..... ... 45
H. De Raedt and K. Michie/sen
Nanotip Fashioning and Nanosource Characteristics.......... ......... .... ...... 59
Vu Thien Binh, N. Garcia, S.T. Purcell and V. Semet
Electron Emission from Nanometer-Size Metallic Clusters:
Electronic States and Structural Stability of Supported Au Clusters............ 77
M.E. Lin, A. Ramachandra, R.P. Andres and R. Reijenberger
On the Energy Dissipation in Field Emission and Tunneling Microscopy. . .... 89
1. Xu, R. Moller, K. Liiuger, K. Dransfeld and C.C. Williams
Miniaturized Electron Microscope.... ................... ... ......... ...... .......... 101
U. Staufer, L.P. Muray, D.P. Kern and T.H.P. Chang
Direct Observation of the Motion of Individual Surface Atoms
on a Picosecond Timescale............................................................ 111
H. Heinzelmann, G.M. McClelland and Fumiya Watanabe
Single-Electron Manipulation Under High-Field at Room Temperature..... ... 115
H. Nejoh, S. Watanabe, M. Nakamura and M. AOM
Focused Ion Beams and their Applications in Microfabrication.............. ... 121
P.D. Prewett
Miniaturized Liquid Metal Ion Sources (MILMIS)....... ...... .... ..... ... ....... 139
1. Mitterauer
viii
Integrated Microtips: Application to Flat Displays................................. 165
R. Baptist
Tip-Surface Interactions and Applications
Field-Induced Transfer of an Electropositive Atom Between
Two Closely Spaced Electrodes......................... .... ............ ...... ....... 177
ND.Lang
Molecular Dynamics Simulations of Metal Surfaces:
Surface Melting and Non-Melting, and Tip-Surface Interactions............... 185
F. Ercolessi, O. Tomagnini, S. farlori and E. Tosatti
Atomic Manipulation Using Field Evaporation.................................... 207
NM. Miskovsky, Tien T. Tsong and Ching Ming Wei
What is Underneath? Moving Atoms and Molecules to Find Out.......... ..... 213
P.S. Weiss and D.M. Eigler
Local Experiments Using Nanofabricated Structures in STM.................... 219
J K. Gimzewski, R. Berndt and R.R. Schlittler
Quantum Atom Switch: Tunneling of Xe Atoms................................... 229
J J. Saenz and N. Garcia
The Eigler Xe Switch: Its Atomic Structure from Xe Energy Minimization
and STM Image Calculations. ......... . ............... ..... . ......... .. ...... ........ 239
C. Joachim, X. Bouju and C. Girard
Friction and Forces on an Atomic Scale........................................ ..... 253
O. Marti, J. Colchero and J. Mlynek
Atomic-Scale Adhesion............................................................... 271
U. Darig and O. Zager
Local Modification of Langmuir-Blodgett Films by Atomic Force Microscopy 287
L.F. Chi and H. Fuchs
Layered Semiconductors as Materials for (Sub)Nanometer Scale
Surface Modification with the STM................ .... ............ ................. 293
H. Fuchs, Th. Schimmel, S. Akari, L.M. Eng, M. Anders,
M. Lux-Steiner and K. Dransfeld
Micromachined Silicon Tools for Nanometer-Scale Science..................... 311
J. Brugger, V.P. Jaecklin, RA. Buser, C. Linder and N F. De Rooij
List of Participants.................................................................... 319
Index...................................................................................... 323
PREFACE
This volume contains the proceedings of the NATO-Advanced Research Workshop
(ARW) "Manipulation of atoms under high fields and temperatures: Applications",
sponsored by the NATO Scientific Affairs Division, Special Programme on Nanoscale
Science. This ARW took place in Summer '92, in the pleasant surroundings of the
Hotel des Thermes at Charbonnieres les Bains -Lyon, France.
Gathering some fifty experts from different fields, the ARW provided an opportunity
to review the basic principles and to highlight the progress made during the last few
years on the nanosources and the interactions between atomic-scale probes and samples.
The motivation is to use the novel properties attached to the atomic dimensions to
develop nanoscale technologies.
The perception of the atomic-scale world has greatly changed since the discovery and
development, in the early 80's, of Scanning Tunneling Microscopy (STM) by Binnig
and Rohrer. Beyond the observation of individual atoms, which is now routine, the
concept of playing with atoms has become commonplace. This has lead to the
fashioning of tools at the atomic scale, to the deposition, the displacement and the
creation of atomic structures and also to the knowledge of interactions and contacts
between atoms. Nanotips ending with a single atom are sources of ultra-fine charged
beams. They can be unique tools for high resolution observations, for micro
fabrications by micro-machining and deposition at a scale not previously attainable,
with a working distance less stringent than with STM devices. These tips should then
be the starting point for the development of high-performance miniature devices. For
all the subjects mentioned above, new laws have been identified and circumscribed
during the ARW. This meeting marked the shift of emphasis from a passive attitude of
analysis towards a more active role of the scientist in the creation and use of atomic
configurations.
The ARW was also supported by several French scientific and governmental
agencies (CNRS, DRET ... ). I would like to take this opportunity to express my
gratitude to all the participants, coming from some ten countries, for contributing to the
excitement and success of the ARW. I am indebted to my co-organisers and co-editors,
N. Garcia and K. Dransfeld, and to the NATO officials whose help was indispensable in
organising this meeting.
Vu Thien Binh
December 1992.
ix
LOCAL PROBE METHODS AND MINIATURIZATION
H.ROHRER
IBM Research Division
Zurich Research Laboratory
CH-8803 Rusch/ikon
Switzerland
1. Introduction
Miniaturization was one of the key elements for the tremendous development and
wide dissemination of microtechnology. Miniaturization is at present mainly seen in
the context with data processing, communication and consumer electronics. There
fore, microtechnology predominately means microelectronics. Micromechanics on the
other hand still burns on a modest flame and does not receive the same attention,
neither in science nor in technology circles. There is not yet a vast hungry industry
pressing for progress. Nevertheless, there are very promising beginnings. The overall
importance of mechanics, especially nanomechanics, might eventually very well match
that of nanoelectronics.
Miniaturization naturally carries us far beyond microtechnology, it carries us to
science and technology on the nanometer scale - into the nanometer world. In the
following I would like to discuss some aspects of the next big step of miniaturization,
the one from the micrometer to the nanometer, in which local probe methods will
play a most important role. I am not going to make predictions, I am not going to
make evaluations and I am also not really concerned with "realities". I cannot give
you any reasonable business case for the nanometer world, I just can give possibilities.
Business cases lie in recognizing and realizing possibilities by those who want to do
business. Remember, nobody could have made and did make a business case for the
micrometer age fifty years ago. New developments happen on the basis of possibil
ities and not vice versa.
The motivation for continuing miniaturization is manifold: in science to study phe
nomena and effects below characteristic length or time scales, to learn about processes
such as melting, corrosion, nucleation, etc. etc., down to atomic scales, to analyze and
understand properties of composite materials of ever finer granularity;' in technology
to fabricate smaller, faster and less expensive components for microelectronics and
quite generally to create new possibilities with miniaturized sensors, tools and instru
mentation. Ten years ago nanoscience and technology were not yet commonly used
terms. But it was foreseeable already at that time that in advancing into the world of
the ever smaller, miniaturization would not stop at the micrometer, the measure of
today's microelectronics and micromechanics. In those times, nanotechnology mostly
meant something of the order of one tenth of a micrometer although selected struc-
V. T. Binh et al. (eds.),
Nanosources and Manipulation ofA toms Under High Fields and Temperatures: Applications, 1-12.
© 1993 Kluwer Academic Publishers.
2
tures of nanometer size were accessible to electron microscopy nearly down to the
atomic level. But no wide basis existed to work on a nanometer scale. With work l
mean observing an individual, specially selected object of nanometer size, e.g., an
atom or a molecule or an aggregate of atoms and molecules, together with its imme
diate surrounding, to be able to measure and understand its properties, to manipulate
and change it, and finally to control its possible functions and processes related to
them.
2. Progress of Miniaturization
Figure 1 gives some examples of the progress of miniaturization taken from the data
processing industry where miniaturization has achieved the most impressive overall
level [1]. It progressed steadily and exponentially during the past few decades and
there is no reason to believe that it should not continue to do so in the near future.
The step from the millimeter to the micrometer was technologically undoubtedly a
great achievement. However, it was scientifically straight forward in the sense that
the major important scientific knowledge, methods and techniques, and instrumenta
tion were developed by and in science well in advance. Quantum mechanics existed
long before, electron microscopy dates also back to the twenties, and the properties of
semiconductors, the basic material for microelectronics, had already been widely
studied for decades before scientists invented the transistor.
The material properties and effects are essentially the same on the micrometer and
on the millimeter scale. The micrometer, therefore, appears in many ways as simply
down scaling the millimeter. This will continue for a while, say to somewhere around
STORAGE: ONE BIT OF INFORMATION
108 10'1
(I)
2
N !.0.c . NUMBER OF ATOMS
E
:::1.
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ac~: '1- awC2D: 1011 ,r--/.- -.-- NOW
GBIT :z:; ) , , NEW
103 END
1950 1970 1990 2010 1950 1970 1990 2010
LOGIC:
10'
~
10'0 BASE OF BIPOLAR ENERGY DISSIPATION
~
TRANSISTOR PER OPERATION
.0. .
Q
o d- ".
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wa: lOS , ,
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1950 1970 1990 2010 1950 1970 1990 2010
Fig. l. Progress of miniaturization in information processing. Adapted from Ref. 1.