Nano Optoelectronic Sensors and Devices. Nanophotonics from Design to Manufacturing PDF
Preview Nano Optoelectronic Sensors and Devices. Nanophotonics from Design to Manufacturing
Toprotecttherightsoftheauthor(s)andpublisherweinformyouthatthisPDFisanuncorrectedproofforinternalbusinessuseonlybytheauthor(s),editor(s), reviewer(s),ElsevierandtypesetterdiacriTech.Itisnotallowedtopublishthisproofonlineorinprint.Thisproofcopyisthecopyrightpropertyofthepublisher andisconfidentialuntilformalpublication. XiandLai — FM-9781437734713 — 2011/10/10 — 18:28 — Page 1 — #1 Nano-Optoelectronic Sensors and Devices Toprotecttherightsoftheauthor(s)andpublisherweinformyouthatthisPDFisanuncorrectedproofforinternalbusinessuseonlybytheauthor(s),editor(s), reviewer(s),ElsevierandtypesetterdiacriTech.Itisnotallowedtopublishthisproofonlineorinprint.Thisproofcopyisthecopyrightpropertyofthepublisher andisconfidentialuntilformalpublication. XiandLai — FM-9781437734713 — 2011/10/10 — 18:28 — Page 2 — #2 Micro & Nano Technologies Series FrancoisLeonard PhysicsofCarbonNanotubeDevices(2009) MamadouDiallo,JeremiahDuncan,Nora NanotechnologyApplicationsforCleanWater(2009) Savage,AnitaStreet&RichardSustich RolfWuthrich MicromachiningUsingElectrochemicalDischarge Phenomenon(2009) MatthiasWorgull HotEmbossing(2009) WaqarAhmed&M.J.Jackson EmergingNanotechnologiesforManufacturing(2009) RichardLeach FundamentalPrinciplesofEngineeringNanometrology(2009) JeremyRamsden AppliedNanotechnology(2009) VeikkoLindroos,MarkkuTilli, HandbookofSiliconBasedMEMSMaterials AriLehto&TeruakiMotooka andTechnologies(2010) MatthewHull&DianaBowman NanotechnologyEnvironmentalHealthandSafety(2009) YugangSun&JohnRogers SemiconductorNanomaterialsforFlexible Technologies(2010) VictorZhirnov&RalphK.Cavin MicrosystemsforBioelectronics(2010) ZeevZalevsky&IbrahimAbdulhalim IntegratedNanophotonicDevices(2010) YiQin MicromanufacturingEngineeringandTechnology(2010) JeremyRamsden Nanotechnology:AnIntroduction(2011) ReginaLuttge MicrofabricationforIndustrialApplications(2011) GurumurthyRamachandran AssessingNanoparticleRiskstoHumanHealth(2011) RobertDorey CeramicThickFilmsforMEMSandMicrodevices(2012) Nam-TrungNguyen Micromixers,Secondedition(2012) JaydeepSarkar SputteringMaterialsforVLSIandThinFilmDevices(2012) NingXi&KingWaiChiuLai Nano-OptoelectronicSensorsandDevices(2012) KarthikeyanSubramani&WaqarAhmed EmergingNanotechnologiesinDentistry(2012) Toprotecttherightsoftheauthor(s)andpublisherweinformyouthatthisPDFisanuncorrectedproofforinternalbusinessuseonlybytheauthor(s),editor(s), reviewer(s),ElsevierandtypesetterdiacriTech.Itisnotallowedtopublishthisproofonlineorinprint.Thisproofcopyisthecopyrightpropertyofthepublisher andisconfidentialuntilformalpublication. XiandLai — FM-9781437734713 — 2011/10/10 — 18:28 — Page 3 — #3 Nano-Optoelectronic Sensors and Devices Nanophotonics from Design to Manufacturing Edited by Ning Xi Michigan State University King Wai Chiu Lai Michigan State University Amsterdam•Boston•Heidelberg•London•NewYork•Oxford Paris•SanDiego•SanFrancisco•Singapore•Sydney•Tokyo WilliamAndrewisanimprintofElsevier Toprotecttherightsoftheauthor(s)andpublisherweinformyouthatthisPDFisanuncorrectedproofforinternalbusinessuseonlybytheauthor(s),editor(s), reviewer(s),ElsevierandtypesetterdiacriTech.Itisnotallowedtopublishthisproofonlineorinprint.Thisproofcopyisthecopyrightpropertyofthepublisher andisconfidentialuntilformalpublication. XiandLai — FM-9781437734713 — 2011/10/10 — 18:26 — Page 4 — #1 WilliamAndrewisanimprintofElsevier 225WymanStreet,Waltham,02451,USA TheBoulevard,LangfordLane,Kidlington,OxfordOX51GB,UK Firstedition2012 Copyright(cid:13)c 2012ElsevierInc.Allrightsreserved. Nopartofthispublicationmaybereproducedortransmittedinanyformorbyanymeans,electronicormechanical, includingphotocopying,recording,oranyinformationstorageandretrievalsystem,withoutpermissioninwritingfromthe publisher.Detailsonhowtoseekpermission,furtherinformationaboutthePublisher’spermissionspoliciesandarrangements withorganizations,suchastheCopyrightClearanceCenterandtheCopyrightLicensingAgency,canbefoundatour website:www.elsevier.com/permissions. ThisbookandtheindividualcontributionscontainedinitareprotectedundercopyrightbythePublisher(otherthanasmaybe notedherein). Notice Knowledgeandbestpracticeinthisfieldareconstantlychanging.Asnewresearchandexperiencebroadenourunderstanding, changesinresearchmethods,professionalpractices,ormedicaltreatmentmaybecomenecessary. Practitionersandresearchersmustalwaysrelyontheirownexperienceandknowledgeinevaluatingandusingany information,methods,compounds,orexperimentsdescribedherein.Inusingsuchinformationormethodstheyshouldbe mindfuloftheirownsafetyandthesafetyofothers,includingpartiesforwhomtheyhaveaprofessionalresponsibility. Tothefullestextentofthelaw,neitherthePublishernortheauthors,contributors,oreditors,assumeanyliabilityforanyinjury and/ordamagetopersonsorpropertyasamatterofproductsliability,negligenceorotherwise,orfromanyuseoperationof anymethods,products,instructions,orideascontainedinthematerialherein. LibraryofCongressCataloging-in-PublicationData AcatalogrecordforthisbookisavailablefromtheLibraryofCongress. BritishLibraryCataloguinginPublicationData AcataloguerecordforthisbookisavailablefromtheBritishLibrary. ISBN:978-1-4377-3471-3 ForinformationonallElsevierpublications visitourwebsiteatwww.elsevierdirect.com PrintedandboundinGreatBritain 12 13 10 9 8 7 6 5 4 3 2 1 Toprotecttherightsoftheauthor(s)andpublisherweinformyouthatthisPDFisanuncorrectedproofforinternalbusinessuseonlybytheauthor(s),editor(s), reviewer(s),ElsevierandtypesetterdiacriTech.Itisnotallowedtopublishthisproofonlineorinprint.Thisproofcopyisthecopyrightpropertyofthepublisher andisconfidentialuntilformalpublication. XiandLai — 03-pre-xi-xii-9781437734713 — 2011/10/11 — 0:52 — Page xi — #1 Preface This book presents a comprehensive report on the research on nanosensors and -devices conducted by the researchers in the Robotics and Automation Laboratory at Michigan State University and our collaborators. The Robotics and Automation Laboratory was established after I joined the faculty of Michigan State University in 1997. For the last decade, the research directions of the laboratory havebeenexpandedfromtraditionalindustrialrobotstonanorobots.Afterwesuccessfullytestedour nanoroboticsystemfornanomanipulationsandassembly,wewerelookingforopportunitiestodevelop nanodevicestodemonstratethecapabilityofournewlydevelopednanoroboticsystem.In2004,Imet Dr Harold Szu, US Army Night Vision and Electronic Sensors Directorate (formerly with Office of Naval Research), in a conference. We had a very interesting discussion on nanomanufacturing and nanosensors. He inspired me to consider using nanorobots to manufacture nanowire-based infrared detectors.Thishasledtomanyinterestingprojects.Overtheyears,Haroldhasprovideduswithmuch valuableadvice.Iwishtoexpressmydeepappreciationforhisinspirationandassistance. Dr King Wai Chiu Lai was my first research associate working on the nanodevices. He played important roles in many of the research efforts reported in the book. King, as my coeditor, has put a lot of effort into this book. The completion of this book would have not been possible without his tireless and careful work. In addition, all of the contributors of this book are my former or current PhDstudents,postdoctoralresearchassociates,andcollaborators.Iwishtothankallofthemfortheir contributionstothisbook. Lastbutnotleast,IexpressmysincerethankstoOfficeofNavalResearch,inparticularDrsJames Buss,KeithKrapels,JamesWaterman,andMichaelDuncan,andtheNationalScienceFoundationfor providingfinancialsupportfortheresearcheffortsreportedinthisbook. NingXi xi Toprotecttherightsoftheauthor(s)andpublisherweinformyouthatthisPDFisanuncorrectedproofforinternalbusinessuseonlybytheauthor(s),editor(s), reviewer(s),ElsevierandtypesetterdiacriTech.Itisnotallowedtopublishthisproofonlineorinprint.Thisproofcopyisthecopyrightpropertyofthepublisher andisconfidentialuntilformalpublication. XiandLai — 04-ack-xiii-xiv-9781437734713 — 2011/10/10 — 14:09 — Page xiii — #1 Acknowledgments MaterialcontainedinthisbookhasbeendevelopedoveryearsintheRoboticsandAutomationLabora- toryatMichiganStateUniversity,USA.Manyofcollaborators,studentsandpost-doctoralresearchers have made important contributions to the results. We would like to express our sincere acknowledg- mentsandgratitudetothem,especiallywewouldexpressourappreciationtoGuangyongLi,Jiangbo Zhang, Heping Chen, Wai Keung Fung, Yantao Shen, Uchechukwu Wejinya, Lianqing Liu, Carmen KarmanFung,HongzhiChen,JianyongLou,YilunLuo,RuiguoYang,BoSongandLiangliangChen. ManyresultsdescribedinthebookhavebeenpartiallysupportedbyNationalScienceFoundationand OfficeofNavalResearch. Finally,theoutstandingteamoftheElsevierLimited,especiallyFrankHellwig(EditorialProject Manager),MatthewDeans(SeniorPublisher),WayneYuhaszandMelissaRead,providedustremen- dous help and support. We would also like to thank Dr. Chanmin Su of Bruker Nano Surface InstrumentationGroup(formerlyVeecoInstrumentInc.)forhistechnicaladviceandhelpduringthe developmentoftheatomicforcemicroscopicnanorobot. NingXiandKingWaiChiuLai xiii Toprotecttherightsoftheauthor(s)andpublisherweinformyouthatthisPDFisanuncorrectedproofforinternalbusinessuseonlybytheauthor(s),editor(s), reviewer(s),ElsevierandtypesetterdiacriTech.Itisnotallowedtopublishthisproofonlineorinprint.Thisproofcopyisthecopyrightpropertyofthepublisher andisconfidentialuntilformalpublication. XiandLai — About˙the˙Editors-9781437734713 — 2011/10/12 — 15:07 — Page 15 — #1 About the Editors Dr Ning Xi received his DSc degree in Systems Science and Math- ematics from Washington University in St. Louis, Missouri, USA in December, 1993. He is a University Distinguished Professor and the John D. Ryder Professor of Electrical and Computer Engineering, and DirectoroftheRoboticsandAutomationLaboratoryatMichiganState University. Currently, he serves as the Head and Chair Professor of Department of Mechanical and Biomedical Engineering at the City University of Hong Kong. Dr Xi received the Best Paper Award in IEEE/RSJInternational Conferenceon IntelligentRobots andSystems (IROS) in August, 1995, and the Best Paper Award in the 1998 Japan- USASymposiumonFlexibleAutomation.DrXiwasawardedthefirst Early Academic Career Award by the IEEE Robotics and Automation SocietyinMay,1999.HealsoreceivedTheBestPaperAwardofIEEE Transactions on Automation Science and Engineering in 2007. Dr Xi was awarded the SPIE Nano EngineeringAwardin2007.Inaddition,heisarecipientofUSNationalScienceFoundationCAREER Award.DrXiisafellowofIEEE.HeservesasthePresidentofIEEENanotechnologyCouncil(2010– 2011).Hisresearchinterestsincluderobotics,manufacturingautomation,micro/nanomanufacturing, nanosensorsanddevices,andintelligentcontrolandsystems. Dr King Wai Chiu Lai is currently the postdoctoral research asso- ciate and the lab manager of the Robotics and Automation Labora- tory in the Electrical and Computer Engineering at Michigan State University (MSU), USA. He received his Ph.D. degree in Automation andComputer-AidedEngineeringfromTheChineseUniversityofHong Kongin2005.AfterjoiningtheMSU,hewasdevotedtotheinvestiga- tion of nanomanufacturing technology for nano optoelectronic sensors and devices and the characterization of nano-optoelectronic sensors. He has authored and co-authored more than 80 high-quality journals, patent applications, book chapters, and conference papers including Applied Physics Letters, Nanotechnology, Nanomedicine, The Inter- national Journal of Robotics Research (IJRR), etc. His findings were nominated as the Best Conference Paper and Best Student Paper at the 5thIEEEInternationalConferenceonNano/MicroEngineeredandMolecularSystems(IEEENEMS), International Conference on Intelligent Mechatronics and Automation (ICIMA), and International ConferenceonInformationSocietyinthe21stCentury(IS2000).Hisworkoncarbonnanotube-based infrared sensors has been featured on many information sites for nanoscience and nanotechnology includingPhysOrg,NanowerkLLC,andSPIENewsrooms. 15 Toprotecttherightsoftheauthor(s)andpublisherweinformyouthatthisPDFisanuncorrectedproofforinternalbusinessuseonlybytheauthor(s),editor(s), reviewer(s),ElsevierandtypesetterdiacriTech.Itisnotallowedtopublishthisproofonlineorinprint.Thisproofcopyisthecopyrightpropertyofthepublisher andisconfidentialuntilformalpublication. XiandLai — Loc-9781437734713 — 2011/10/12 — 17:18 — Page xvii — #1 List of Contributors HepingChen IngramSchoolofEngineering,TexasStateUniversity,Texas HongzhiChen DepartmentofElectricalandComputerEngineering,MichiganStateUniversity,Michigan LiangliangChen DepartmentofElectricalandComputerEngineering,MichiganStateUniversity,Michigan CarmenKarManFung HongKongProductivityCouncil,HongKong GuangyongLi DepartmentofElectricalandComputerEngineering,UniversityofPittsburgh,Pittsburg,Pennsylvania LianqingLiu StateKeyLabofRobotics,P.R.China LimingLiu DepartmentofElectricalandComputerEngineering,UniversityofPittsburgh,Pennsylvania JianyongLou The State Key Laboratory of Electrical Insulation and Power Equipment, Xi’an Jiaotong University, China YilunLuo DepartmentofBiosystemsEngineering,MichiganStateUniversity,Michigan MeyyaMeyyappan CenterforNanotechnology,NASAAmesResearchCenter,California BalasubramaniamShanker DepartmentofElectricalandComputerEngineering,MichiganStateUniversity,Michigan BoSong DepartmentofElectricalandComputerEngineering,MichiganStateUniversity,Michigan XuhuiSun InstituteofFunctionalNanoandSoftMaterials(FUNSOM),SoochowUniversity,P.R.China Tzyh-JongTarn DepartmentofElectricalandSystemsEngineering,WashingtonUniversityinSt.Louis,Missouri xvii Toprotecttherightsoftheauthor(s)andpublisherweinformyouthatthisPDFisanuncorrectedproofforinternalbusinessuseonlybytheauthor(s),editor(s), reviewer(s),ElsevierandtypesetterdiacriTech.Itisnotallowedtopublishthisproofonlineorinprint.Thisproofcopyisthecopyrightpropertyofthepublisher andisconfidentialuntilformalpublication. XiandLai — Loc-9781437734713 — 2011/10/12 — 17:18 — Page xviii — #2 xviii List of Contributors UchechukwuC.Wejinya DepartmentofMechanicalEngineering,UniversityofArkansas,Arkansas ZhengfangZhou DepartmentofMathematics,MichiganStateUniversity,Michigan Toprotecttherightsoftheauthor(s)andpublisherweinformyouthatthisPDFisanuncorrectedproofforinternalbusinessuseonlybytheauthor(s),editor(s), reviewer(s),ElsevierandtypesetterdiacriTech.Itisnotallowedtopublishthisproofonlineorinprint.Thisproofcopyisthecopyrightpropertyofthepublisher andisconfidentialuntilformalpublication. XiandLai — Ch01-9781437734713 — 2011/10/11 — 0:40 — Page 1 — #1 CHAPTER 1 Introduction KingWaiChiuLaiandNingXi DepartmentofElectricalandComputerEngineering, MichiganStateUniversity,Michigan CHAPTER OUTLINE 1.1 Overview...................................................................................................... 1 1.2 ImpactofNanomaterials .................................................................................... 2 1.3 ChallengesandDifficultiesinManufacturingNanomaterials-BasedDevices............................ 4 1.3.1 RoleofMicrofluidics...................................................................... 5 1.3.2 RoleofRoboticNanoassembly............................................................ 6 1.4 Summary...................................................................................................... 6 References......................................................................................................... 7 1.1 OVERVIEW Nanomaterialscanbeusedasnovelsensingelementsandtheyallowustobuilddevicesmuchsmaller thanbefore.Researchintonanomaterialsandnanomanufacturingistremendouslyimportant,because mostnanoscalematerialsandsystemsaredifferentfromcurrentmacro-andmicrosystems.Thisbook coversarangeofmattersregardingthedevelopmentofnano-optoelectronicdevices. Optoelectronicsplaysasignificantroleinthesemiconductorindustry,andsilicon-basedoptoelec- tronic devices are now so ubiquitous in modern society. The range of applications for optoelectronic devices like light-emitting diodes (LEDs), laser, optical sensors, and solar cells continues to grow, resultinginanewgenerationofelectronicsproductssuchascomputerdisplays,flatscreenTVs,high- speedcommunicationdevices,etc.Whilesilicon-baseddevicesandelectronicshavebeendeveloped for 30 years, scaling down and further improving the performance of current silicon-based devices are still very challenging. Therefore, new technologies and materials have to be developed to meet these challenges. In 1971, the feature widths of semiconductor manufacturing processes were about 10µm. Nowadays the smallest feature size of silicon-based devices is about 32nm. Highly special- ized techniques, facilities, and equipment are essential to further reduce the size of conventional optoelectronicdevices.Withtherecentadvanceinnanotechnology,variouskindsofnovelnanomate- rialshavebeenintroduced.Thesematerialsoffersuperiorquantumoptical,electrical,andmechanical effects due to their sizes (nanometer scale), which opens up the possibility to replace silicon for NingXi&KingWaiChiuLai(eds):Nano-OptoelectronicSensorsandDevices.DOI:10.1016/B978-1-4377-3471-3.00001-0 1 Copyright(cid:13)c 2012ElsevierInc.Allrightsreserved.
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