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Microweighing in Vacuum and Controlled Environments PDF

404 Pages·1980·48.51 MB·English
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METHODS AND PHENOMENA THEIR APPLICATIONS IN SCIENCE AND TECHNOLOGY Series Editors S.P. Wolsky Vice President, Research & Development P.R. Mallory & Co., Inc. Burlington, MA 01803, U.S.A. and A.W. Czanderna Editor, Methods and Phenomena P.O. Box 27209 Denver, CO 80227, U.S.A. Volume 1. A.W. Czanderna (Ed.), Methods of Surface Analysis Volume 2. H. Kressel (Ed.), Characterization of Epitaxial Semiconductor Films Volume 3. FJ. Fry (Ed.), Ultrasound: Its Applications in Medicine and Biology Volume 4. A.W. Czanderna and S.P. Wolsky (Eds.), Microweighing in Vacuum and Controlled Environments In preparation R.C. Laible (Ed.), Ballistic Materials and Penetration Mechanics K. Moorjani and J.M.D. Coey, Disordered Solids A.N. Dey, Lithium Batteries Edited by A.W. CZANDERNA Editor, Methods and Phenomena P.O. Box 27209, Denver, CO 80227, U.S.A. S.P.WOLSKY Vice President, Research and Development P.R. Ma/lory and Co., Inc. Burlington, MA 01803, U.S.A. Volume 4 of METHODS AND PHENOMENA THEIR APPLICATIONS IN SCIENCE AND TECHNOLOGY ELSEVIER SCIENTIFIC PUBLISHING COMPANY Amsterdam - Oxford - New York 1980 ELSEVIER SCIENTIFIC PUBLISHING COMPANY 335 Jan van Galenstraat P.O. Box 211, 1000 AE Amsterdam, The Netherlands Distributors for the United States and Canada: ELSEVIER/NORTH-HOLLAND INC. 52, Vanderbilt Avenue New York, N.Y. 10017 Library of Congress Cataloging in Publication Data Main entry under title: Microweighing in vacuum and controlled environments. (Methods and phenomena, their applications in science and technology ; v. k) An expansion of the 1969 ed. entitled, Ultra micro weight determination in controlled environ­ ments entered under S. P. Wolsky. Includes bibliographies and index. 1. Microbalance. I. Czanderna, Alvin Warren, 1950- II. Wolsky, S. P., 1926- Ultra micro weight determination in controlled environments. III. Series. QC107.W6 1980 530».7 80-1062*4- ISBN 0-kkk-kl86Q-7 ISBN 0-444-41868-7 (Vol. 4) ISBN 0-444-41640-4 (Series) © Elsevier Scientific Publishing Company, 1980 All rights reserved. No part of this publication may be reproduced, stored in a retrieval system or transmitted in any form or by any means, electronic, mechanical, photocopying, recording or other­ wise, without the prior written permission of the publisher, Elsevier Scientific Publishing Company, P.O. Box 330, 1000 AH Amsterdam, The Netherlands Printed in The Netherlands V CONTRIBUTORS TO VOLUME 4 C.L. Angell Union Carbide Corporation, Tarrytown Techni­ cal Center, P.O. Box 278, Tarrytown, NY 10591 F.A. Brassart Westinghouse Advanced Reactors Division, P.O. Box 158, Madison, PA 15663 A.W. Czanderna Solar Energy Research Institute, Materials Branch, 1617 Cole Boulevard, Golden, CO 80401 E.L. Fuller, Jr. Oak Ridge National Laboratory, P.O. Box X, Oak Ridge, TN 37830 Th. Gast Technishe Universitat Berlin, Institut fur Me3-u. Regelungstechnik, 1000 Berlin 15, W. Germany E.A. Gulbransen University of Pittsburgh, Department of Metal­ lurgical and Materials Engineering, Pittsburgh, PA 15261 W. Kollen Owens-Illinois Technical Center, P.O. Box 1035, Toledo, OH 43601 C.H. Massen Technische Hogeschool te Eindhoven, Postbus 513, Eindhoven, The Netherlands J.A. Poulis Technische Hogeschool te Eindhoven, Postbus 513, Eindhoven, The Netherlands E. Robens Battelle-Institut e.V., 6 Frankfurt/Main-90, Wiesbadener Strasse, Postfach 900 160, W. Germany R.L. Schwoebel Sandia Laboratories, Research Department 5110, Albuquerque, NM 87115 R. Vasofsky Rome Air Development Center, RBRM, Griffiss AFB, NY 13441 S.P. Wolsky P.R. Mallory and Co., Inc., Northwest Industrial Park, Burlington, MA 01803 VI METHODS AND PHENOMENA Editorial Advisory Board Prof. Dr. J. Block Fritz Haber Institut, Berlin, W. Germany Dr. S. Davison University of Waterloo, Waterloo, Ont., Canada Prof. F.J. Fry Interscience Research Division, Indianapolis, IN, U.S.A. Dr. J.P. Kratohvil Clarkson College of Technology, Potsdam, NY, U.S.A. Dr. R.H. Krock P.R. Mallory and Co., Inc., Burlington, MA, U.S.A. Dr. R. Schwoebel Sandia Laboratories, Albuquerque, NM, U.S.A. Mr. G. Siddall University of Strathclyde, Glasgow, Gt. Britain Prof. J.N. Zemel University of Pennsylvania, Philadelphia, PA, U.S.A. vii PREFACE The editors are privileged to dedicate this book to the memory of E.J. Zdanuk, who was not only a long time co-worker and colleague, but also carried out superb pioneering work on sputtering phenomena using microgravimetric techniques. As detailed below, a major fraction of this book can be related back to his efforts as a co-editor of the only previous treatise in the field. We are confident those in the microbalanee community who knew Ed Zdanuk as a person, as well as a scientist, will be supportive of our decision. This book is both a consolidation and expansion of the first treatise on micro mass measurements, entitled, MUltra Micro Weight Determination in Controlled Environments," edited by S.P. Wolsky and E.J. Zdanuk, (Wiley, Interscience, 1969), which is now out-of- print. The use of the microbalanee has continued to develop dynamically since then. The concept of micro mass determination has widened markedly with the development of the quartz crystal oscillator. Hence, the subject material of the book by Wolsky and Zdanuk has been divided into two parts. This book deals with beam microbalances; crystal oscillators will be treated in a future vol­ ume. Mass is measured directly with the beam microbalanee and indirectly through its effect on oscillator frequency with the quartz crystal. The two methods possess their own peculiar advantages and problems and do not usually compete with each other for utility, but rather often are used in a complementary fashion. If there is strict environmental control, the oscillator is particularly attractive for its potential sensitivity, which is several orders of magnitude greater than the beam microbalanee. Where temperature dependent measurements are desired on samples of varied configuration and composition, the beam balance is greatly superior. The utilization of microbalances has been very imaginative and varied. Because the microbalanee has been applied so broadly, the details of theory, design and applications are scattered throughout the literature; in the case of applications, it is even rare to find the word microbalanee mentioned in the abstract. It is the prime objec­ tive of this book, therefore, to provide a single effective source on the theory, design, artifacts, and varied applications of the beam microbalanee. Sufficient information is included to allow the reader to practice these techniques in a TTdo-it-yourselfTT manner. viii We are pleased to acknowledge the encouragement and assistance of many of our colleagues in the conception and preparation of this book. We are particularly indebted to the participants of the sixteen Conferences on Vacuum Microbalance Techniques, initiated in 1960, who have helped show this area of activity is broad, vibrant and creative. It is fitting to remember the promotional, organiza­ tional and dedicated zeal of Mr. Lee Cahn, Dr. K.H. Behrndt and Mr. E.J. Zdanuk, now deceased, along with Drs. E.A. Gulbransen, Th. Gast and T.N. Rhodin, who were early pioneers in this field. Dr. Gulbransen and Professor Dr. Gast are still contributing consistently as evidenced by the last two chapters in this book. We are also pleased to acknowledge the contributions of many individuals to our own efforts at applying the microbalance to solve fundamental and technological problems. For A.W. Czanderna, thanks are due to Prof. J.M. Honig, who introduced him to the idea of a pivotal beam microbalance in 1954, along with Drs. P.A. Faeth, A.N. Gerritsen, D.H. Damon, and Mr. J. Richlin at Purdue Univer­ sity and Dr. H. Wieder, Mr. C.W. Nezbeda, Miss L.I. Forrest, Mr. P.A. Given, Dr. F.G. Young, and Dr. H.C. Chitwood of Union Carbide Corporation. Special praises are due my former students, Dr. W. Kollen, Dr. J. Biegen, Dr. E.G. Clarke, Jr., Mr. S.C. Chen, and my current associates, Mr. J. Rodder of Rodder Instrument, and Dr. R. Vasofsky and Mr. E. Prince for their contributions at Clarkson College of Technology. Finally, Mr. D. Shipley and Mr. B. Doran are thanked for their expert glassblowing. For S.P. Wolsky, who started his microbalance efforts at the Raytheon Co., Mr. E.J. Zdanuk, Mr. R. Chase, Dr. W.C. Dunlap, Dr. A.B. Fowler, Mr. G. Freedman, Dr. L. Guildner, Dr. T.H. Johnson, Dr. J. Hawkes and Dr. H.A. Papazian, all have contributed, along with the special technical assistance of Mr. L. Rubin, Mr. J. Gage, Mr. J. Silva and Mrs. P. Rodriguez. Finally, we are grateful to those who have assisted us in the preparation of this book. First and foremost, we appreciate the enthusiastic and cooperative efforts of the authors of the various chapters, and especially Mrs. Lucile D. Czanderna who prepared the camera-ready copy for this volume. Lakewood, Colorado A.W. Czanderna Burlington, Massachusetts S.P. Wolsky August, 1979 Chapter 1 INTRODUCTION AND MICROBALANCE REVIEW A.W. Czanderna and S.P. Wolsky I. INTRODUCTION The subject matter of this book and this chapter will be discussed briefly to provide an overview. The progress of many important physical processes can be followed through observation of associated mass changes. Adsorption, desorption, oxidation, reduction, and evaporation are only a few of the more common phenomena that fall into this category. Although the phenomena can be studied by measuring other physical and/or chemical changes, the simple, direct, and absolute nature of gravimetric measurements is very attractive. The increased interest in the mierobalance has resulted, in part, from the recent rapid progress in scientific instrumentation. From a current view, it is difficult to realize that as recently as 1960 the ranks of mierobalance experts were limited to those few with the resources and ability to fabricate their own instruments. Today, highly sophisticated automatic recording devices adequate to satisfy most requirements are available commercially. Parallel progress in vacuum science and technology has provided a means for careful environmental control required for many microgravimetric experi­ ments. Access to the literature on applications of the mierobalance was relatively simple until the last few years. In the last two decades, studies with microgravimetric techniques graduated from using custom-made apparatus, designed and constructed by pioneers in the field to solve specific problems, to wide use of commercially available microbalances. As summarized in the only treatise in the field [1], usage of commercially available units dominated applica­ tions of the mierobalance by 1969 [2]. Until 1971, the bulk of the development of mierobalance technology has been tidily covered in ref. 1, the reviews cited in ref. 2, and in the proceedings of the first eight conferences under the title Vacuum Mierobalance Techniques [3-10]. In recent years, the mierobalance has been increasingly employed as a routine analytical instrument. As a result, abstracts 2 A. W. CZANDERNA AND S. P. WOLSKY only infrequently mention using a microbalance, and even in the experimental section it may be referenced as a gravimetric method. Considerable access to the recent literature on microbalance tech­ nology and applications can still be gained from the proceedings of the ninth, tenth, and twelfth conferences on microbalance tech­ niques under the title Progress in Vacuum Microbalance Techniques [11-13], of the fourteenth and sixteenth conferences in Thermo- chimica Ada [14], and of the eleventh, thirteenth, and fifteenth conferences in The Journal of Vacuum Science and Technology [15-17]. However, coverage in these three sources now needs to be supplemented by direct contact with appropriate journals because of the difficulty in finding pertinent articles from citation indices which are based on abstracts in the various journals. It is the prime purpose of this book to provide a single reference source for detailed and critical discussions of the important features, limita­ tions, and applications of the beam microbalance. The contributors to this volume are recognized internationally for specific contribu­ tions, and many have pioneered some aspect of the development and application of the microbalance. This book has been designed to be practical. Detailed discussions are deliberately included on classifications, auxiliary equipment, design, fabrication, artifacts, theory, operation, and applications of beam microbalances. This information is sufficient to allow the reader to evaluate the microbalance before initiating his own effort. The first three chapters deal with an overview, theory, design, and artifacts. The last seven chapters consider various applications. Each chapter is a separate entity and can be read by a knowledge­ able worker. Cross referencing has also been used to integrate the entire treatise. In this chapter, a review of the microbalance literature provides a current assessment of the field. Details of microbalance theory, design, and fabrication in the second chapter will assist those willing to build their own or to modify commercially available apparatus. The third chapter provides insight into instrumental and environ­ mental factors affecting the sensitivity of beam balances. The applications considered in the last seven chapters were chosen from the mainstream of problems being addressed with the vacuum microbalance. The physical and chemical adsorption and desorption of gases, the study of oxidation and catalytic reactions, the simultaneous measurement of mass and infrared or residual gases present covers the vast bulk of current applications of microgravimetry in controlled environments. Using beam micro- balances for studying reduction reactions, decomposition, dehydra­ tion, evaporation, condensation, surface pressure, surface tension, and magnetic susceptibility was addressed in a recent noncritical MICROBALANCE REVIEW 3 review [18]. The readers imagination should be stimulated by the various applications cited, especially those presented in the final chapter. Thermogravimetry has not been considered in this book, as a deliberate omission. Using balances for thermogravimetric studies has been well covered in other texts starting with the treatise by Wendlandt [19], successor books, and related journals such as J. Thermal Analysis and Thermochimica Ada. The subject matter in this chapter provides a broad introductory review for this volume. The intent of this chapter is to summarize the historical development of the various types of balances, to cite references to the significant complexities that may be introduced in the measurements, and to reference the most important groups of microbalance applications. It is hoped that this discussion will aid the new host of microbalance experimentalists in avoiding needless repetitious studies of the undesirable mass and force changes that accompany the application categories. The detection of changes in mass (or weight) is one of the fundamental measurements in the physical sciences. As a result, considerable effort has been expended in the design, construction, and use of ultrasensitive weighing apparatus. The advent of the simple precision microbalance is generally attributed to Warburg and Ihmori in 1886 [20]. The steady progress in this field has been discussed in review articles [21-34] and the published proceedings of a series of conferences on vacuum microbalance techniques [3-17]. Since extensive references are available in these articles and volumes, no attempt will be made to produce a complete bibliogra­ phy of the microbalance literature in this chapter. Rather, refer­ ences will be used for illustrative purposes and to provide a more detailed account of some important topics that were left somewhat incomplete in the most recent reviews [29,31-34]. These topics will include classification of microbalances based on the response to an applied force, on the method used for monitoring the response, and on the method of automatic operation. Then, an account of various types of auxiliary equipment required to operate a microbalance will be presented. This will be followed by a discussion of the undesir­ able disturbances encountered in vacuum microgravimetry. Here, the radiometric forces that result from the thermomolecular flow of gases will be reviewed in some detail because they represent the greatest constraint to precise measurement of mass changes uncov­ ered in the last two decades. Finally, the use of different types of microbalances for various applications will be cited. Only brief mention will be made of the materials used for the construction of microbalances and of the techniques of calibration since these will be covered in detail by Schwoebel in Chapter 2.

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