Table Of Content

Micro, Nanosystems and Systems on Chips www.it-ebooks.info To Anaïs and Raphaël www.it-ebooks.info Micro, Nanosystems and Systems on Chips Modeling, Control and Estimation Edited by Alina Voda www.it-ebooks.info First published 2010 in Great Britain and the United States by ISTE Ltd and John Wiley & Sons, Inc. Apart from any fair dealing for the purposes of research or private study, or criticism or review, as permitted under the Copyright, Designs and Patents Act 1988, this publication may only be reproduced, stored or transmitted, in any form or by any means, with the prior permission in writing of the publishers, or in the case of reprographic reproduction in accordance with the terms and licenses issued by the CLA. Enquiries concerning reproduction outside these terms should be sent to the publishers at the undermentioned address: ISTE Ltd John Wiley & Sons, Inc. 27-37 St George’s Road 111 River Street London SW19 4EU Hoboken, NJ 07030 UK USA www.iste.co.uk www.wiley.com © ISTE Ltd 2010 The rights of Alina Voda to be identified as the author of this work have been asserted by her in accordance with the Copyright, Designs and Patents Act 1988. Library of Congress Cataloging-in-Publication Data Micro, nanosystems, and systems on chips : modeling, control, and estimation / edited by Alina Voda. p. cm. Includes bibliographical references and index. ISBN 978-1-84821-190-2 1. Microelectromechanical systems. 2. Systems on a chip. I. Voda, Alina. TK7875.M532487 2010 621.381--dc22 2009041386 British Library Cataloguing-in-Publication Data A CIP record for this book is available from the British Library ISBN 978-1-84821-190-2 Printed and bound in Great Britain by CPI Antony Rowe, Chippenham and Eastbourne www.it-ebooks.info Contents Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . xi PARTI.MINIANDMICROSYSTEMS . . . . . . . . . . . . . . . . . . . . . . . 1 Chapter1.ModelingandControlofStick-slipMicropositioningDevices . 3 MickyRAKOTONDRABE,YassineHADDAB,PhilippeLUTZ 1.1.Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 1.2.Generaldescriptionofstick-slipmicropositioningdevices. . . . . . . . 4 1.2.1.Principle. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 1.2.2.Experimentaldevice . . . . . . . . . . . . . . . . . . . . . . . . . . 5 1.3.Modelofthesub-stepmode . . . . . . . . . . . . . . . . . . . . . . . . . 6 1.3.1.Assumptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 1.3.2.Microactuatorequation . . . . . . . . . . . . . . . . . . . . . . . . 8 1.3.3.Theelastoplasticfrictionmodel. . . . . . . . . . . . . . . . . . . . 8 1.3.4.Thestateequation . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 1.3.5.Theoutputequation . . . . . . . . . . . . . . . . . . . . . . . . . . 11 1.3.6.Experimentalandsimulationcurves . . . . . . . . . . . . . . . . . 12 1.4.PIcontrolofthesub-stepmode . . . . . . . . . . . . . . . . . . . . . . . 13 1.5.Modelingthecoarsemode . . . . . . . . . . . . . . . . . . . . . . . . . . 15 1.5.1.Themodel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16 1.5.2.Experimentalresults . . . . . . . . . . . . . . . . . . . . . . . . . . 17 1.5.3.Remarks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17 1.6.Voltage/frequency(U/f)proportionalcontrolofthecoarsemode . . . 18 1.6.1.Principleschemeoftheproposedcontroller . . . . . . . . . . . . . 20 1.6.2.Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20 1.6.3.Stabilityanalysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24 1.6.4.Experiments. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25 1.7.Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26 1.8.Bibliography . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28 v www.it-ebooks.info vi MicroandNanosystems Chapter 2. Microbeam Dynamic Shaping by Closed-loop Electrostatic ActuationusingModalControl . . . . . . . . . . . . . . . . . . . . . . . . . . 31 ChadyKHARRAT,EricCOLINET,AlinaVODA 2.1.Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31 2.2.Systemdescription . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34 2.3.Modalanalysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36 2.4.Mode-basedcontrol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40 2.4.1.PIDcontrol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42 2.4.2.FSF-LTRcontrol . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43 2.5.Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50 2.6.Bibliography . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53 PARTII.NANOSYSTEMSANDNANOWORLD . . . . . . . . . . . . . . . . . 57 Chapter 3. Observer-based Estimation of Weak Forces in a Nanosystem MeasurementDevice . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59 GildasBESANÇON,AlinaVODA,GuillaumeJOURDAN 3.1.Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59 3.2.ObserverapproachinanAFMmeasurementset-up . . . . . . . . . . . 61 3.2.1.ConsideredAFMmodelandforcemeasurementproblem . . . . . 61 3.2.2.Proposedobserverapproach. . . . . . . . . . . . . . . . . . . . . . 63 3.2.3.Experimentalapplicationandvalidation . . . . . . . . . . . . . . . 65 3.3.Extensiontobackactionevasion . . . . . . . . . . . . . . . . . . . . . . 71 3.3.1.Backactionproblemandillustration . . . . . . . . . . . . . . . . . 71 3.3.2.Observer-basedapproach . . . . . . . . . . . . . . . . . . . . . . . 73 3.3.3.Simulationresultsandcomments . . . . . . . . . . . . . . . . . . . 76 3.4.Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79 3.5.Acknowledgements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81 3.6.Bibliography . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81 Chapter 4. Tunnel Current for a Robust, High-bandwidth and Ultra- preciseNanopositioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85 SylvainBLANVILLAIN,AlinaVODA,GildasBESANÇON 4.1.Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85 4.2.Systemdescription . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87 4.2.1.Forcesbetweenthetipandthebeam . . . . . . . . . . . . . . . . . 88 4.3.Systemmodeling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89 4.3.1.Cantilevermodel . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89 4.3.2.Systemactuators . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90 4.3.3.Tunnelcurrent . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92 4.3.4.Systemmodel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93 4.3.5.Systemanalysis. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94 www.it-ebooks.info Contents vii 4.4.Problemstatement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 97 4.4.1.Robustnessandnon-linearities . . . . . . . . . . . . . . . . . . . . 97 4.4.2.Experimentalnoise . . . . . . . . . . . . . . . . . . . . . . . . . . . 98 4.5.Toolstodealwithnoise . . . . . . . . . . . . . . . . . . . . . . . . . . . 100 4.5.1.Kalmanfilter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100 4.5.2.Minimumvariancecontroller . . . . . . . . . . . . . . . . . . . . . 100 4.6.Closed-looprequirements . . . . . . . . . . . . . . . . . . . . . . . . . . 102 4.6.1.Sensitivityfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . 102 4.6.2.Robustnessmargins . . . . . . . . . . . . . . . . . . . . . . . . . . 102 4.6.3.Templatesofthesensibilityfunctions . . . . . . . . . . . . . . . . 103 4.7.Controlstrategy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105 4.7.1.Actuatorlinearization . . . . . . . . . . . . . . . . . . . . . . . . . 106 4.7.2.Sensorapproximation . . . . . . . . . . . . . . . . . . . . . . . . . 106 4.7.3.Kalmanfiltering . . . . . . . . . . . . . . . . . . . . . . . . . . . . 108 4.7.4.RST synthesis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 108 1 4.7.5.zreconstruction . . . . . . . . . . . . . . . . . . . . . . . . . . . . 110 4.7.6.RST synthesis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 110 2 4.8.Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 111 4.8.1.Positioncontrol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 111 4.8.2.Distancedcontrol . . . . . . . . . . . . . . . . . . . . . . . . . . . 113 4.8.3.Robustness . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 114 4.9.Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 115 4.10.Bibliography . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 116 Chapter5.ControllerDesignandAnalysisforHigh-performanceSTM . . 121 IrfanAHMAD,AlinaVODA,GildasBESANÇON 5.1.Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121 5.2.GeneraldescriptionofSTM . . . . . . . . . . . . . . . . . . . . . . . . . 123 5.2.1.STMoperationmodes . . . . . . . . . . . . . . . . . . . . . . . . . 123 5.2.2.Principle. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 124 5.3.Controldesignmodel . . . . . . . . . . . . . . . . . . . . . . . . . . . . 127 5.3.1.Linearapproximationapproach . . . . . . . . . . . . . . . . . . . . 127 5.3.2.Open-loopanalysis . . . . . . . . . . . . . . . . . . . . . . . . . . . 129 5.3.3.ControlproblemformulationanddesiredperformanceforSTM . 131 5.4.H∞controllerdesign . . . . . . . . . . . . . . . . . . . . . . . . . . . . 131 5.4.1.Generalcontrolproblemformulation . . . . . . . . . . . . . . . . 131 5.4.2.GeneralH∞algorithm. . . . . . . . . . . . . . . . . . . . . . . . . 133 5.4.3.Mixed-sensitivityH∞control . . . . . . . . . . . . . . . . . . . . 134 5.4.4.Controllersynthesisforthescanningtunnelingmicroscope . . . . 135 5.4.5.Controlloopperformanceanalysis . . . . . . . . . . . . . . . . . . 137 5.5.Analysiswithsystemparametricuncertainties . . . . . . . . . . . . . . 139 5.5.1.Uncertaintymodeling . . . . . . . . . . . . . . . . . . . . . . . . . 140 5.5.2.Robuststabilityandperformanceanalysis . . . . . . . . . . . . . . 141 www.it-ebooks.info viii MicroandNanosystems 5.6.Simulationresults . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142 5.7.Conclusions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 143 5.8.Bibliography . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 146 Chapter 6. Modeling, Identification and Control of a Micro-cantilever Array . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 149 Scott COGAN, Hui HUI, Michel LENCZNER, Emmanuel PILLET, Nicolas RATTIER,YoussefYAKOUBI 6.1.Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 150 6.2.Modelingandidentificationofacantileverarray . . . . . . . . . . . . . 151 6.2.1.Geometryoftheproblem . . . . . . . . . . . . . . . . . . . . . . . 151 6.2.2.Two-scaleapproximation . . . . . . . . . . . . . . . . . . . . . . . 151 6.2.3.Modeldescription . . . . . . . . . . . . . . . . . . . . . . . . . . . 153 6.2.4.Structureofeigenmodes . . . . . . . . . . . . . . . . . . . . . . . . 154 6.2.5.Modelvalidation . . . . . . . . . . . . . . . . . . . . . . . . . . . . 155 6.2.6.Modelidentification . . . . . . . . . . . . . . . . . . . . . . . . . . 159 6.3. Semi-decentralized approximation of optimal control applied to a cantileverarray . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 164 6.3.1.Generalnotation . . . . . . . . . . . . . . . . . . . . . . . . . . . . 164 6.3.2.Reformulationofthetwo-scalemodelofcantileverarrays . . . . 164 6.3.3.Modelreformulation . . . . . . . . . . . . . . . . . . . . . . . . . . 166 6.3.4.ClassicalformulationoftheLQRproblem . . . . . . . . . . . . . 167 6.3.5.Semi-decentralizedapproximation . . . . . . . . . . . . . . . . . . 168 6.3.6.Numericalvalidation . . . . . . . . . . . . . . . . . . . . . . . . . . 173 6.4.Simulationoflarge-scaleperiodiccircuitsbyahomogenizationmethod 175 6.4.1.Linearstaticperiodiccircuits . . . . . . . . . . . . . . . . . . . . . 176 6.4.2.Circuitequations . . . . . . . . . . . . . . . . . . . . . . . . . . . . 178 6.4.3.Directtwo-scaletransformTE . . . . . . . . . . . . . . . . . . . . 179 6.4.4.Inversetwo-scaletransformT−1 . . . . . . . . . . . . . . . . . . . 180 E 6.4.5.Two-scaletransformTN . . . . . . . . . . . . . . . . . . . . . . . . 182 6.4.6.Behaviorof‘spread’analogcircuits . . . . . . . . . . . . . . . . . 182 6.4.7.Cellequations(microproblem) . . . . . . . . . . . . . . . . . . . . 184 6.4.8.Reformulationofthemicroproblem . . . . . . . . . . . . . . . . . 187 6.4.9.Homogenizedcircuitequations(macroproblem) . . . . . . . . . . 188 6.4.10.Computationofactualvoltagesandcurrents . . . . . . . . . . . . 189 6.5.Bibliography . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 191 6.6.Appendix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 193 Chapter7.FractionalOrderModelingandIdentificationfor ElectrochemicalNano-biochip . . . . . . . . . . . . . . . . . . . . . . . . . . . 197 AbdelbakiDJOUAMBI,AlinaVODA,PierreGRANGEAT,PascalMAILLEY 7.1.Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 197 7.2.Mathematicalbackground . . . . . . . . . . . . . . . . . . . . . . . . . . 199 www.it-ebooks.info Contents ix 7.2.1.Briefreviewoffractionaldifferentiation . . . . . . . . . . . . . . . 199 7.2.2.Fractionalordersystems . . . . . . . . . . . . . . . . . . . . . . . . 201 7.3.Predictionerroralgorithmforfractionalordersystemidentification . . 202 7.4.Fractionalordermodelingofelectrochemicalprocesses . . . . . . . . . 206 7.5.Identificationofarealelectrochemicalbiochip . . . . . . . . . . . . . . 209 7.5.1.Experimentalset-up . . . . . . . . . . . . . . . . . . . . . . . . . . 209 7.5.2.Fractionalordermodelidentificationoftheconsideredbiochip . . 213 7.6.Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 215 7.7.Bibliography . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 217 PARTIII.FROMNANOWORLDTOMACROANDHUMANINTERFACES . 221 Chapter8.Human-in-the-loopTelemicromanipulationSystemAssistedby MultisensoryFeedback . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 223 MehdiAMMI,AntoineFERREIRA 8.1.Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 224 8.2.Haptic-basedmultimodaltelemicromanipulationsystem. . . . . . . . . 225 8.2.1.Globalapproach . . . . . . . . . . . . . . . . . . . . . . . . . . . . 225 8.2.2.Telemicromanipulationplatformandmanipulationprotocol. . . . 226 8.3.3Dvisualperceptionusingvirtualreality . . . . . . . . . . . . . . . . . 228 8.3.1.Limitationsofmicroscopyvisualperception . . . . . . . . . . . . 228 8.3.2.Coarselocalizationofmicrospheres . . . . . . . . . . . . . . . . . 229 8.3.3.Finelocalizationusingimagecorrelationtechniques . . . . . . . . 229 8.3.4.Subpixellocalization . . . . . . . . . . . . . . . . . . . . . . . . . . 230 8.3.5.Localizationofdustandimpurities . . . . . . . . . . . . . . . . . . 233 8.3.6.Calibrationofthemicroscope . . . . . . . . . . . . . . . . . . . . . 234 8.3.7.3Dreconstructionofthemicroworld . . . . . . . . . . . . . . . . . 234 8.4.Hapticrenderingforintuitiveandefficientinteractionwiththemicro- environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 237 8.4.1.Haptic-basedbilateralteleoperationcontrol . . . . . . . . . . . . . 237 8.4.2.Activeoperatorguidanceusingpotentialfields . . . . . . . . . . . 239 8.4.3.Model-basedlocalmotionplanning . . . . . . . . . . . . . . . . . 243 8.4.4.Forcefeedbackstabilizationbyvirtualcoupling . . . . . . . . . . 243 8.5. Evaluating manipulation tasks through multimodal feedback and assistancemetaphors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 246 8.5.1.Approachphase . . . . . . . . . . . . . . . . . . . . . . . . . . . . 246 8.6.Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 253 8.7.Bibliography . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 254 Chapter9.Six-dofTeleoperationPlatform:ApplicationtoFlexible MolecularDocking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 257 BrunoDAUNAY,StéphaneRÉGNIER 9.1.Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 258 www.it-ebooks.info x MicroandNanosystems 9.2.Proposedapproach . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 261 9.2.1.Molecularmodelingandsimulation . . . . . . . . . . . . . . . . . 261 9.2.2.Flexibleligandandflexibleprotein . . . . . . . . . . . . . . . . . . 262 9.2.3.Forcefeedback . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 263 9.2.4.Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 265 9.3.Force-positioncontrolscheme . . . . . . . . . . . . . . . . . . . . . . . 266 9.3.1.Idealcontrolschemewithoutdelays . . . . . . . . . . . . . . . . . 266 9.3.2.Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 268 9.3.3.Transparency . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 269 9.3.4.Descriptionofadockingtask . . . . . . . . . . . . . . . . . . . . . 270 9.3.5.Influenceoftheeffortscalingfactor . . . . . . . . . . . . . . . . . 272 9.3.6.Influenceofthedisplacementscaling . . . . . . . . . . . . . . . . 274 9.3.7.Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 276 9.4.Controlschemeforhighdynamicalanddelayedsystems . . . . . . . . 277 9.4.1.Wavetransformation . . . . . . . . . . . . . . . . . . . . . . . . . . 277 9.4.2.Virtualdamperusingwavevariables . . . . . . . . . . . . . . . . . 278 9.4.3.Wavevariableswithoutdamping . . . . . . . . . . . . . . . . . . . 282 9.4.4.Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 286 9.5.Fromenergydescriptionofaforcefieldtoforcefeeling . . . . . . . . . 287 9.5.1.Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 287 9.5.2.Energymodelingoftheinteraction . . . . . . . . . . . . . . . . . . 287 9.5.3.Theinteractionwrenchcalculation . . . . . . . . . . . . . . . . . . 291 9.5.4.Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 293 9.6.Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 295 9.7.Bibliography . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 297 ListofAuthors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 301 Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 305 www.it-ebooks.info

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