Micro and Nano Fabrication Technology PDF
Preview Micro and Nano Fabrication Technology
Micro/Nano Technologies Series Editors: Zheng You · Xiaohao Wang Jiwang Yan Editor Micro and Nano Fabrication Technology Micro/Nano Technologies SeriesEditors ZhengYou DepartmentofPrecisionInstrument TsinghuaUniversity Beijing,China XiaohaoWang DepartmentofPrecisionInstrument TsinghuaUniversity Beijing,China Theseriesconsistsoffivevolumes:Microandnanofabricationtechnology,MEMS, Nanomaterial, Nanomedicine and Applications of micro-/nanotechnologies in IT. Experienced researchers and experts are invited to contribute in each of these areas.TheseriesispublishedunderSpringerMajorReferenceworks,whichallows continuous online update and publication. These features allow newcomers and other readers to keep in touch with the most up-to-date information in micro-/ nanotechnologies.Itpresentsanoverviewoftheknowledgebase,aswellasselected topics and provides comprehensive and authoritative information on the field for researchers,engineers,scientistsandgraduatestudentswhoareinvolvedindifferent aspects of micro-/nanotechnologies. This publication will provide inspiration for innovativeresearchandapplicationideasforcontinuedgrowthofthefield.Micro-/ nanotechnologies are techniques to fabricate and build systems with dimensions ranging from nanometers to microns. Advances in these technologies have created manyinterdisciplinaryresearchopportunitiesandhavebeenappliedinvariousareas from nanomedicine to space systems. After several decades of development, a knowledgebaseofmicro-/nanotechnologiescoveringallareasofresearchhasnow been created. It includes design and simulation, fabrication and manufacturing, packagingandassembly,deviceandsystemtechnologies,andapplicationindiffer- entareas. Moreinformationaboutthisseriesathttp://www.springer.com/series/13903 Jiwang Yan Editor Micro and Nano Fabrication Technology With817Figuresand72Tables Editor JiwangYan DepartmentofMechanicalEngineering KeioUniversity Yokohama,Japan ISBN978-981-13-0097-4 ISBN978-981-13-0098-1(eBook) ISBN978-981-13-0099-8(printandelectronicbundle) https://doi.org/10.1007/978-981-13-0098-1 LibraryofCongressControlNumber:2018942026 #SpringerNatureSingaporePteLtd.2018 Thisworkissubjecttocopyright.AllrightsarereservedbythePublisher,whetherthewholeorpartofthe materialisconcerned,specificallytherightsoftranslation,reprinting,reuseofillustrations,recitation, broadcasting,reproductiononmicrofilmsorinanyotherphysicalway,andtransmissionorinformation storageandretrieval,electronicadaptation,computersoftware,orbysimilarordissimilarmethodology nowknownorhereafterdeveloped. Theuseofgeneraldescriptivenames,registerednames,trademarks,servicemarks,etc.inthispublication doesnotimply,evenintheabsenceofaspecificstatement,thatsuchnamesareexemptfromtherelevant protectivelawsandregulationsandthereforefreeforgeneraluse. Thepublisher,theauthorsandtheeditorsaresafetoassumethattheadviceandinformationinthisbook arebelievedtobetrueandaccurateatthedateofpublication.Neitherthepublishernortheauthorsorthe editorsgiveawarranty,expressorimplied,withrespecttothematerialcontainedhereinorforanyerrors oromissionsthatmayhavebeenmade.Thepublisherremainsneutralwithregardtojurisdictionalclaims inpublishedmapsandinstitutionalaffiliations. Printedonacid-freepaper ThisSpringerimprintispublishedbySpringerNature TheregisteredcompanyisSpringerNatureSingaporePteLtd. The registered company address is: 152 Beach Road, #21-01/04 Gateway East, Singapore 189721, Singapore Series Preface Micro/nanotechnologiesarethosetechniquestofabricateandbuildsystemswith dimensionsrangingfromnanometertomicron.Theadvancementofthesetechnol- ogieshasbeencreatingmanyinterdisciplinaryresearchopportunitiesandhasbeen applied in various areas from nano-medicine to space systems. After several decades of development, a knowledge base of micro/nano technologies forms. It comesfromeveryachievementofresearchandconsistsofdesignandsimulation, fabrication and manufacturing, packaging and assembly, device and system tech- nologies,andapplicationindifferentareas. Mainstructureoftheknowledgebaseandselectedtopicsareshowninthisseries of books. This work providesa comprehensive andauthoritative knowledge ofthe fieldforresearchers,engineers,scientists,andgraduatestudentswhoareengagedin different aspects of micro/nano technologies. The series consists of five books, which are Micro and nano fabrication, MEMS, Nanomaterial, Nanomedicine, and Applications of Micro/nano technologies in IT/IoT. In the books, the latest researchesof micro-nano technology aresummarized andthe history androadmap of related techniques, devices, and applications are discussed. The authors invited comefromChina,Japan,USA,Germany,GreatBritain,Austria,etc.Theirresearch activities in this area are remarkable and prospective. The readership is not merely specialistsinthisfieldbutalsoabroadrangeofstudentsandresearchersfromother relateddisciplines. The Chinese Society of Micro/Nano Technology (CSMNT) has organized the Micro/Nano Technologies series in cooperation with Springer. This series would be the first systematic series of books in Micro/Nano Technologies and provides a comprehensive and authoritative knowledge system. The series is published under Springer Major Reference, which allows continuous online update and publication. These features allow the new comers and other content users to keep in touch with the most updated information in micro/nano v vi SeriesPreface technologies. It is expected that this publication will provide a new window to sparkleinnovativeresearchandapplicationideasforthecontinuousgrowthofthe field. December,2017 ZhengYou TsinghuaUniversity,Beijing,China PresidentoftheChineseSocietyof Micro/NanoTechnology TsinghuaUniversity,Beijing,China XiaohaoWang Secretary-generaloftheChineseSocietyof Micro/NanoTechnology Volume Preface Smaller is better. Small things can save space, reduce weight and material/energy consumption, and improve portability and ease of system integration. For a long time, researchers and engineers have been attempting to make things as small as possible.Today,newfabricationtechnologieshavealreadyenabledthegenerationof 2Dand3Dstructuresanddevicesonthemicrometer,submicrometer,andevendown tonanometerranges.Thisrepresentsatriumphformodernscienceandtechnology. Despite various revolutionary changes in the past decades that significantly advanced micro/nanofabrication technology, we still face new problems and new taskstocreatenewproductswithhigherprecisionandquality.Thus,understanding thefundamentalsandmasteringthestatusofmicro/nanofabricationtechnologyhas become crucial for engineers and researchers working in this area. This volume focusesonthestate-of-the-artmicroandnanofabricationtechnologiesfor creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybridprocesses,coveringsubtractiveandadditivematerialmanufacturing,aswell as net-shape manufacturing. The materials the volume deals with include metals, alloys, semiconductors, polymers, crystals, glass, ceramics, composites, and nano- materials.Thetargetedproductsincludemicro/nanomachines,sensors,optics,elec- tromechanicalsystems,fluidics,biomedicalparts,andenergystoragedevices. Thevolumeiscomposedof30chapters,whicharegroupedintofiveparts.Part1 isfocused on cutting technology, which isthemost popular method forgenerating micro/nanostructuresonmetalmaterials.Thetopicsincludemicrochiseling,micro- milling, microturning, nanogrooving, elliptical vibration-assisted cutting, roller machining, and tool servo-driven diamond turning. Part 2 presents abrasive/tip- basedmachiningtechnologies,suchasultrasonicvibration-assistedgrinding,micro- structuregrinding,micro-fluid-jetpolishing,bonnetpolishing,chemicalmechanical polishing, and scanning probe lithography. Part 3 deals with high-energy-beam machining technologies, such as femtosecond laser direct writing, laser patterning, ionbeammachining,electronbeammachining,andlaserlithographycombinedwith ionetching.Part4coversmolding,forming,andself-organizationtechnologies.The chapters in this part describe microinjection molding, nanoimprinting, press mold- ing,anisotropicgelation,metalfilmdewetting/patterning,andself-assemblyoffine particles. The subject of Part 5 is physical and chemical machining, where vii viii VolumePreface microelectrical discharge machining, microelectrochemical machining, tip-based localized catalytic etching, photocatalytic reaction, deep reactive ion etching, and localwettabilitymodificationbylaserirradiationarepresented. The chapters in this volume were mostly contributed by authors from the Asia- Pacific region, which is a rapidly growing region with research activities that are attracting attention in the area of micro/nanofabrication. Engaging with the latest research in the field, these chapters provide important perspectives on key topics, from process developments at the shop level to scientific investigations at the academiclevel,offeringbothexperimentalworkandtheoreticalanalysis.Moreover, thecontentofthisvolumeishighlyinterdisciplinaryinnature,withinsightsfromnot only manufacturing technology but also mechanical/material science, optics, phys- ics,chemistry,andmore.Ihopethisvolumecandeliveratimelyintegrationofthe latestachievementsandadvancesinthisarea.Itisintendedtoserveasa“toolbox” formanufacturingengineers,enablingthemtoidentifysuitable“tools”easilyforthe cost-effectiveproductionofdifferenttypesofproducts.Furthermore,itisexpected to stimulate more research interest in this area and help orient young researchers, particularly graduate students, to new research directions in future. Finally, as the volume’seditor,Iwouldliketothankallthechapterauthorsforthetimeandenergy theyspentinpreparingandrevisingtheirmanuscripts.Itistheirgenerousdedication thatmadetheon-schedulepublicationofthevolumepossible. Yokohama,Japan JiwangYan Contents PartI CuttingTechnology ................................. 1 1 MicroChiselingofRetroreflectiveArrays ................... 3 LarsSchönemannandEkkardBrinksmeier 2 MicroMillingforFunctionalSurface ....................... 33 TakashiMatsumura 3 MicroCylindricalTurningofCalciumFluoride .............. 67 YasuhiroKakinumaandYutaMizumoto 4 Nano-groovingbyUsingMulti-tipDiamondTools ............. 97 XichunLuoandZhenTong 5 EllipticalVibrationCuttingforDifficult-to-CutMaterials ....... 139 HongjinJung,TakehiroHayasaka,andEijiShamoto 6 MicromachiningofRollerMoldforRoll-to-Roll Manufacturing ........................................ 183 RuiHuang,XinQuanZhang,andKuiLiu 7 Tool-ServoDrivenDiamondTurningforStructuredSurface .... 215 MaoMukaidaandJiwangYan PartII Abrasive/Tip-BasedMachiningTechnology ............. 245 8 Micro-/Nano-texturingbyUltrasonic-AssistedGrinding ........ 247 MasayoshiMizutani,ShaolinXu,KeitaShimada,and TsunemotoKuriyagawa 9 PrecisionGrindingforFunctionalMicrostructuredSurface ..... 301 JinXie 10 MicroFluidJetPolishing ................................ 333 AnthonyT.Beaucamp 11 BonnetPolishingofMicrostructuredSurface ................. 371 LingbaoKong,ZhongchenCao,andLaitingHo ix
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