MEMS for Automotive and Aerospace Applications

355 Pages·2016·14.69 MB·English

by  Michael Kraft

MEMS for automotive and aerospace applications
© Woodhead Publishing Limited, 2013
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© Woodhead Publishing Limited, 2013
Woodhead Publishing Series in Electronic and Optical Materials:
Number 32
MEMS for automotive
and aerospace
applications
Edited by

Michael Kraft and
Neil M. White
© Woodhead Publishing Limited, 2013
Published by Woodhead Publishing Limited,
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© Woodhead Publishing Limited, 2013
Contents
Contributor contact details ix
Woodhead Publishing Series in Electronic
and Optical Materials xiii
Part I MEMS for automotive applications 1
1 MEMS for passenger safety in automotive vehicles 3
J. S WINGLER , Heriot-Watt University, UK
1.1 Introduction 3
1.2 Passenger safety systems 4
1.3 Accelerometers for crash sensing systems 8
1.4 Angular rate sensors for rollover detection systems 13
1.5 Strain gauges for occupant sensing systems 19
1.6 Future trends in safety sensing systems 23
1.7 Conclusion 25
1.8 References 26
2 MEMS sensors for automotive vehicle stability
control applications 29
M. R EZE and M. O SAJDA , Freescale Halbleiter
Deutschland GmbH, Germany
2.1 Introduction to vehicle stability control (VSC) 29
2.2 What is vehicle stability control? 30
2.3 MEMS accelerometers in electronic stability
control (ESC) 35
2.4 MEMS angular rate sensors 39
2.5 Vehicle architecture challenges and sensor fusion 46
2.6 MEMS accelerometers used in active suspension 51
2.7 Conclusion 52
2.8 References 53
v
© Woodhead Publishing Limited, 2013
vi Contents
3 MEMS for automotive tire pressure
monitoring systems 54
M. L ÖHNDORF and T. LA NGE , Infi neon Technologies AG, Germany
3.1 Introduction 54
3.2 Tire pressure monitoring systems (TPMS) applications
and solutions 55
3.3 MEMS-based pressure sensors and technologies 59
3.4 TPMS requirements 65
3.5 Power management 67
3.6 Future TPMS applications 74
3.7 Conclusion 76
3.8 References 76
4 MEMS pressure and fl ow sensors for automotive
engine management and aerospace applications 78
D. S PARKS , Hanking Electronics Ltd, China
4.1 Sensors used in system and engine management 78
4.2 The MEMS design process 81
4.3 Pressure sensors 86
4.4 Flow sensors 89
4.5 Concentration, density and fuel quality sensors 95
4.6 Sensor signal conditioning 97
4.7 Packaging MEMS sensors for harsh environments 99
4.8 Conclusion and future trends 103
4.9 References 103
5 RF MEMS for automotive radar sensors 106
J. O BERHAMMER , N. S OMJIT , U. S HAH and Z. BA GHCHEHSARAEI ,
KTH Royal Institute of Technology, Sweden
5.1 Introduction 106
5.2 Radio-frequency (RF) MEMS components for
automotive radar 110
5.3 Examples of RF MEMS-based automotive radar
front-e nd technology 121
5.4 Unconventional MEMS radar beam steering technologies 126
5.5 Conclusion 133
5.6 References 134
6 MEMS for passenger comfort in vehicles 137
S. J. LEE, San Jose State University, USA
6.1 Introduction 137
6.2 Seating 140
6.3 Climate control 142
6.4 Visual comfort 144
© Woodhead Publishing Limited, 2013
Contents vii
6.5 Auditory comfort 145
6.6 Conclusion and future trends 146
6.7 References 146
Part II MEMS for aerospace applications 151
7 MEMS devices for active drag reduction in
aerospace applications 153
J. F. M ORRISON , Imperial College, London UK
7.1 Introduction 153
7.2 Surface sensors 160
7.3 Actuators 166
7.4 Conclusion and future trends 172
7.5 Acknowledgements 173
7.6 References 173
8 MEMS inertial navigation systems for aircraft 177
Y. D ONG , Colibrys SA, Switzerland
8.1 Introduction 177
8.2 Microfabrication 189
8.3 Integrated inertial navigation systems (INS) with
global positioning system (GPS) 207
8.4 Conclusion and future trends 216
8.5 References 217
9 MEMS for structural health monitoring
in aircraft 220
M. G IGLIO , A. M ANES and C. S BARUFATTI ,
Politecnico di Milano, Italy
9.1 Introduction 220
9.2 State- of-the- art structural health monitoring (SHM)
for aerospace structures 223
9.3 MEMS devices for embedded SHM 228
9.4 Conclusion and future trends 240
9.5 References 242
10 MEMS for harsh environment sensors in aerospace
applications: selected case studies 245
N. TI LIAKOS , Alliant Techsystems Operations, LLC, USA
10.1 Micro-electromechanical systems (MEMS) 245
10.2 Examples of MEMS harsh environment sensors in
aerospace applications 251
10.3 Conclusion and future trends 277
10.4 Sources of further information 279
10.5 References 280
© Woodhead Publishing Limited, 2013
viii Contents
11 MEMS thrusters for nano- and pico-s atellites 283
P. L OZANO , Massachusetts Institute of Technology, USA
11.1 Introduction 283
11.2 Propulsion requirements 285
11.3 Propulsion technologies 287
11.4 Miniaturizing propulsion systems 293
11.5 MEMS thrusters 298
11.6 Design considerations of MEMS thrusters 299
11.7 Future trends 308
11.8 References 309
12 MEMS enabling space exploration and exploitation 311
R. O SIANDER and A. DA RRIN , The Johns Hopkins University
Applied Physics Laboratory, USA
12.1 Introduction 311
12.2 Future trends in spacecraft – small satellites 312
12.3 MEMS in spacecraft subsystems 313
12.4 MEMS in space science instrumentation 320
12.5 Reliability concerns in the space environment 325
12.6 Conclusion 328
12.7 References 329
Index 331
© Woodhead Publishing Limited, 2013
Contributor contact details
(* = main contact)
Editors Schatzbogen 7
81829 Munich
Professor Michael Kraft* and
Germany
Professor Neil M. White
School of Electronics and Computer
E-mail: [email protected]
Science
Southampton University
Southampton Chapter 3
SO17 1BJ
Dr Markus Löhndorf* and Thomas
UK
Lange
Business Line Sense and Control
E-mail: [email protected]; nmw@
Infi neon Technologies AG
ecs.soton.ac.uk
81726 Munich
Germany
Chapter 1
Dr Jonathan Swingler E-mail: markus.loehndorf@infi neon.com
School of Engineering and Physical
Sciences
Chapter 4
Heriot-Watt University
Edinburgh Dr Douglas Sparks
EH14 4AS Executive Vice President
UK Hanking Electronics Ltd
227 Qingnian Ave.
E-mail: [email protected] Shenyang
Liaoning
Chapter 2 110016
PR China
Matthieu Reze* and Marc Osajda
Freescale Halbleiter Deutschland
E-mail: [email protected]
GmbH
ix
© Woodhead Publishing Limited, 2013