Measuring Current, Voltage and Power HANDBOOK OF SENSORS AND ACTUATORS Series Editor: S. Middelhoek, Delft University of Technology, The Netherlands "\-..i ~'" Volume 1 Thick Film Sensors (edited by M. Prudenziati) Volume 2 Solid State Magnetic Sensors (by C.S. Roumenin) Volume 3 Intelligent Sensors (edited by FI. Yamasaki) Volume 4 Semiconductor Sensors in Physico-Chemical Studies (edited by L. Yu. Kupriyanov) Volume 5 Mercury Cadmium Telluride Imagers (by A. Onshage) Volume 6 Micro Mechanical Systems (edited by T. Fukucia and W. Menz) Volume 7 Measuring Current, Voltage and Power (by K. Iwansson, G. Sinapius and W. Hoornaert) HANDBOOK OF SENSORS AND ACTUATORS 7 . . . . . . . . . Measuring Current, Voltage and Power Kaj Iwansson European Patent Office Rijswijk, The Netherlands GiJnther Sinapius Europfiisches Patentamt MOnchen, Germany Winfried Hoornaert European Patent Office Rijswijk, The Netherlands 1999 ELSEVIER Amsterdam - Lausanne - New York - Oxford - Shannon - Singapore - Tokyo ELSEVIER SCIENCE B.V. Sara Burgerhartstraat 25 P.O. Box 211, 1000 AE Amsterdam, The Netherlands (cid:14)91 999 Elsevier Science B.V. All rights reserved. This work is protected under copyright by Elsevier Science, and the following terms and conditions apply to its use" Photocopying Single photocopies of single chapters may be made for personal use as allowed by national copyright laws. Permission of the publisher and payment of a fee is required for all other photocopying, including multiple or systematic copying, copying for advertising or promotional purposes, resale, and all forms of document delivery. 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Printed & bound by Antony Rowe Ltd, Eastbourne Transferred to digital printing, 2005 The need for a Handbook of Sensors and Actuators series The arrival of integrated circuits, like microprocessors and memories with extremely good performance/price ratios has had a profound influence on many areas of technical encleavour. In the measurement and control field, modern electronic circuits have been introduced on a large scale leading to very sophisticated systems and novel solutions. However, in these measurements and control systems, sensors and actuators are frequently applied that were conceived many decades ago. Consequently, it has become necessary to improve these devices in such a way that their performance/price ratios would be in more agreement with that of modern electronic circuits. The demand for these new devices initiated worldwide research and development programs in the field of sensors and actuators. Many generic sensor technologies have been examined, from which the thin- and thick-film, glass fibre, metal oxides, polymers, quartz and silicon technologies are the most important. A growing number of publications on this topic started to appear in a wide variety of scientific journals until, in 1981, Elsevier Science started the publication of the scientific journal Sensors and Actuators. It has since become one of the leading journals in this field, publishing papers on sensors and actuators made in various technologies. When the development of a scientific field expands, the need for handbooks arises, wherein the information that appeared earlier in journals and conference proceedings is systematically and selectively presented. The sensors and actuators field is now in this position. For this reason, Elsevier Science took the initiative to develop a series called Handbook of Sensors and Actuators which contains the most meaningful background material that is important for the sensors and actuators field. Titles on thick film sensors, magnetic sensors, intelligent sensors, semi- conductor sensors, mercury cadmium telluride imagers and micro mechanical systems have been published. Coverage of subjects such as pressure sensors, radiation sensors, microsystems technology, piezoelectric sensors, robot sensors and accelerometers will soon follow. The series comprises one- and multi-author handbooks. Great care is given to the selection of the authors and editors. They are all well-known scientists in the field of sensors and actuators and have impressive international reputations. Elsevier Science and I, as editor of the series, are delighted that these handbooks have already received such a positive response from the sensors and actuators community. We hope that the series will be of great use to many scientists and engineers working in this exciting field. Simon Middelhoek Handbook of Sensors and Actuators Series Editor This Page Intentionally Left Blank vii SUMMARY This authoritative new book focuses on recent developments in the instrumentation for sensing voltages and currents. It covers new trends and challenges in the field, such as measurements of biocurrents, the increased speed of the components for data taking, testing of computers and integrated circuits where the measurement of rapid voltage and current variations on a very small geometrical scale is necessary. The first chapter concentrates on recent methods to sense voltages and currents, while the rest of the book investigates tL.z applied side, covering for instance electrical power and energy measurements. The main purpose of this volume is to illustrate commonly employed techniques rather than track the scientific evolution and merits and therefore mainly covers patent literature aimed at industrial applications. It is an exciting addition, justifying the series' claim to cover state-of-the-art developments in both the applied and theoretical fields of sensors and actuators. This Page Intentionally Left Blank Preface The measurement of voltages and currents is a common task in the field of electricity and electronics. From a technical point of view it is useful to identify schematically different steps of such a measure- ment. In a first step a voltage or a current is sensed, intermediate steps such as amplification, transmis- sion and further treatment may follow to yield the result in the final step. Today in most cases micro- processors perform the final steps of such measurements. Analog-to digital converters digitise a volt- age that is proportional to the value to be measured and a processor performs further computations and handles the storage and the display of the results. The prerequisite for such measurements are sensors or transducers that respond in a known way to the voltage or current to be measured. The emphasis of this book is put on recent developments of the instrumentation for sensing voltages and currents. Aside from the general trend towards smaller, cheaper and more reliable instrumentation, new de- mands have arisen. New applications, like measurements of biocurrents, ask for higher sensitivities. Computers and integrated circuits pose new challenges. To exploit the increased speed of the compo- nents for data taking, suitable sensors are required. The accuracy that can be achieved depends more than ever on the first step, the acquisition of the raw data. The influence of the measurement process on the results becomes more crucial. Testing of integrated circuits themselves is a completely new application. For such tests one has to measure rapid voltage and current variations on very small geometrical scales. Here, as well as in the traditional high voltage applications, contactless measure- ments play an important role. The organisation of this book is as follows: In the first chapter different methods to sense voltages and currents are described. For the sake of completeness most commonly used methods are mentioned, we concentrate, however, on those developed recently. The following chapters address the subject from the side of different applications in which voltages and currents are sensed. This publication mainly covers patent literature ~. The reason for the emphasis on patent literature is, aside from our professional bias as patent examiners at the EPO, that patents, as opposed to scientific publications, are aimed at industrial application, i.e. at instruments that can be built. Since the main purpose of this publication is to illustrate commonly employed techniques rather than to track the scientific evolution and merits in particular fields, in general those publications that illustrate a par- ticular measurement principle best have been cited. The citation of a particular reference does there- fore not imply that this is the first or most pertinent publication in the respective field. We want to dedicate this book to the late Dieter Kuschbert, a very friendly, generous and competent person in whose directorate in the DG 1 of the EPO in The Hague the project of this text evolved, and to our families who patiently let us spend many evenings and weekends on the project. Finally, we would like to thank our employer, the European Patent Office for giving us support and time, and Myriam Torbitzky, who did the desktop publishing part with great dedication. The Hague and Munich August 1998 ~Except for the US ntunbers, which refer to published patents, most of the other patent publication numbers refer to patent applications, which may differ from the granted patents.
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