Handbook of optical metrology: principles and applications

729 Pages·2009·23.6 MB·English

by  Toru Yoshizawa (editor)

Handbook of
OPTICAL
METROLOGY
Principles and
Applications
(cid:1)2008byTaylor&FrancisGroup,LLC.
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(cid:1)2008byTaylor&FrancisGroup,LLC.
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Handbook of
OPTICAL
METROLOGY
Principles and
Applications
Edited by
Toru Yoshizawa
Boca Raton London New York
CRC Press is an imprint of the
Taylor & Francis Group, an informa business
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Library of Congress Cataloging-in-Publication Data
Handbook of optical metrology : principles and applications / Toru Yoshizawa, editor.
p. cm.
Includes bibliographical references and index.
ISBN 978-0-8493-3760-4 (alk. paper)
1. Optical measurements--Handbooks, manuals, etc. 2. Metrology--Handbooks, manuals, etc. I.
Yoshizawa, Toru, 1939- II. Title.
QC367.H36 2008
681’.25--dc22 2008037129
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Contents
Preface
Contributors
PART I Fundamentals of Optical Elements and Devices
Chapter 1 Light Sources
Natalia Dushkina
Chapter 2 Lenses, Prisms, and Mirrors
Peter R. Hall
Chapter 3 Optoelectronic Sensors
Motohiro Suyama
Chapter 4 Optical Devices and Optomechanical Elements
Akihiko Chaki and Kenji Magara
PART II Fundamentals of Principles and Techniques
for Metrology
Chapter 5 Propagation of Light
Natalia Dushkina
Chapter 6 Interferometry
David A. Page
Chapter 7 Holography
Giancarlo Pedrini
Chapter 8 Speckle Methods and Applications
Nandigana Krishna Mohan
Chapter 9 Moire Metrology
Lianhua Jin
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Chapter 10 Optical Heterodyne Measurement Method
Masao Hirano
Chapter 11 Diffraction
Toru Yoshizawa
Chapter 12 Light Scattering
Lev T. Perelman
Chapter 13 Polarization
Michael Shribak
Chapter 14 Near-Field Optics
Wenhao Huang, Xi Li, and Guoyong Zhang
Chapter 15 Length and Size
René Schödel
PART III Practical Applications
Chapter 16 Displacement
Akiko Hirai, Mariko Kajima, and Souichi Telada
Chapter 17 Straightness and Alignment
Ruedi Thalmann
Chapter 18 Flatness
Toshiyuki Takatsuji and Youichi Bitou
Chapter 19 Surface Profi lometry
Toru Yoshizawa and Toshitaka Wakayama
Chapter 20 Three-Dimensional Shape Measurement
Frank Chen, Gordon M. Brown, and Mumin Song
Chapter 21 Fringe Analysis
Jun-ichi Kato
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Chapter 22 Photogrammetry
Nobuo Kochi
Chapter 23 Optical Methods in Solid Mechanics
Anand Asundi
Chapter 24 Optical Methods in Flow Measurement
Sang Joon Lee
Chapter 25 Polarimetry
Baoliang Wang
Chapter 26 Birefringence Measurement
Yukitoshi Otani
Chapter 27 Ellipsometry
Hiroyuki Fujiwara
Chapter 28 Optical Thin Film and Coatings
Cheng-Chung Lee and Shigetaro Ogura
Chapter 29 Film Surface and Thickness Profi lometry
Katsuichi Kitagawa
Chapter 30 On-Machine Measurements
Takashi Nomura and Kazuhide Kamiya
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Preface
Many optical principles have been found that can potentially be applied to the fi eld of metrology,
and the related techniques and devices have also been invented. On the basis of these principles and
techniques, numerous interesting applications have been reported in the academic communities. In
addition, a number of optical equipment and systems were commercialized in the past.
What are featured by optical metrology? First of all, “noncontact approach” in metrological
applications should be cited. This feature causes neither deformation nor damage to the specimen
due to the measuring force. Flexibility in setting up measuring systems is also brought about by
this noncontact arrangement. Moreover, “full-field measurement,” not limited to “point-wise
measurement,” is realized. This feature essentially inherent to such optical methods as photographic
recording is currently summarized as “imaging.” These full-fi eld data with abundant information
can be captured by imaging devices at one moment and analyzed by computational processing in
a short time.
Furthermore, compatibility of light with electricity is another important factor for incorporat-
ing optical techniques to practical applications. “Light” is easily converted into “electrical quantity
(electric current, voltage, etc.)” using various detectors and sensing devices, and this means that the
computational analysis of captured data is easily attainable due to recent remarkable development of
devices and computer technology. More amazing features may be found in optical metrology.
Because of these superior and attractive features of light and/or optical methods, a large number
of research papers and technical reports and wide-ranging applications have appeared. However,
compiling these results in a book on optical metrology is never easy. The title of this book,
Handbook of Optical Metrology: Principles and Applications, was decided after considering the
recent trends in optical metrology. The editor’s fundamental concept was inspired by the following
phrase found in the book Zen of Vegetable Roots by Zicheng Hong published around 1600: “An
academic learning is just like a daily meal necessary for our life. However, at the same time, it
should be practically useful in case of necessity.” When the editorial work for this book started,
some people suggested solicitously that a few similar books might have already been published.
However, to the best of my knowledge, there exist no books that have been compiled with the same
intention as ours. Surely there must exist some books entitled “optical metrology,” but most of them
are focused on a specifi ed area or restricted topics. In view of these facts, applications using optical
methods are widely included besides the fundamental principles and techniques.
This book is meant basically for beginners, but, in addition to the introductory matter, suggestive
descriptions have also been included in every chapter. The contributors have put a lot of effort into
their chapters to meet a certain standard expected by scholars.
I am relieved I could accomplish this goal through the collaboration of many people. I would like
to extend my sincere thanks to the contributors and all the others who supported the publication of
this book, especially Dr. Michael Shribak with whom the fundamental concept was discussed at a
restaurant in Boston; Dr. Natalia Dushkina who made tremendous efforts to cover two fundamental
chapters; and Dr. Peter Hall who was very encouraging and kept me entertained by his British sense
of humor. Kind suggestions by Dr. Toshiyuki Takatsuji, editorial secretary, were helpful for editing
chapters relating to dimensional metrology. Dr. Toshitaka Wakayama, research associate, and Ms.
Megumi Asano, private secretary, also deserve to be appreciated for their assistance in editorial works.
This handbook will be useful for researchers and engineers in industrial fi elds as well as for
academicians and students.
Toru Yoshizawa
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