Fundamentals and applications of microfluidics

567 Pages·2019·11.982 MB·English

by  Seyed Ali Mousavi Shaegh, Nam-Trung Nguyen, Steven T. Wereley

Fundamentals and Applications
of Microfl uidics
Third Edition
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Fundamentals and Applications
of Microfl uidics
Third Edition
Nam-Trung Nguyen
Steven Wereley
Seyed Ali Mousavi Shaegh
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Library of Congress Cataloging-in-Publication Data
A catalog record for this book is available from the U.S. Library of Congress.
British Library Cataloguing in Publication Data
A catalog record for this book is available from the British Library.
ISBN-13: 978-1-63081-364-2
Cover design by John Gomes
© 2019 Artech House
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All rights reserved. Printed and bound in the United States of America. No part
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To my wife, Jill—my friend, my companion, and the love of my life
—Nam-Trung Nguyen
To my wife Kristina Bross and daughters Katie and Gracie, who have been so under-
standing and patient with the demands of academic pursuits
—Steve Wereley
To my mother and my father, Alliyeh and Seyed Jafar, my fi rst teachers,
who nourished my soul to never stop learning
—Seyed Ali Mousavi Shaegh
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Contents
PrefacetotheThirdEdition xiii
Acknowledgments xv
Chapter1 Introduction 1
1.1 WhatIsMicrofluidics? 1
1.1.1 RelationshipsAmongMEMS,Nanotechnology,andMicrofluidics 1
1.1.2 CommercialAspects 4
1.1.3 ScientificAspects 5
1.2 MilestonesofMicrofluidics 6
1.2.1 MicroscaleFluidicPhenomena 6
1.2.2 DeviceDevelopment 7
1.2.3 TechnologyDevelopment 8
1.3 OrganizationoftheBook 8
References 9
Chapter2 FluidMechanicsTheory 11
2.1 Introduction 11
2.1.1 IntermolecularForces 12
2.1.2 TheThreeStatesofMatter 14
2.1.3 ContinuumAssumption 14
2.2 ContinuumFluidMechanicsatSmallScales 18
2.2.1 GasFlows 18
2.2.2 LiquidFlows 23
2.2.3 BoundaryConditions 24
2.2.4 ParallelFlows 29
2.2.5 LowReynoldsNumberFlows 34
2.2.6 EntranceEffects 35
2.2.7 SurfaceTension 37
2.3 MolecularApproaches 39
2.3.1 MD 40
2.3.2 DSMCTechnique 41
2.4 Electrokinetics 43
2.4.1 Electro-Osmosis 44
2.4.2 Electrophoresis 47
2.4.3 Dielectrophoresis 49
vii
viii FundamentalsandApplicationsofMicrofluidics
2.5 Micromagnetofluidics 50
2.5.1 Ferrohydrodynamics 51
2.5.2 Magnetorheology 52
2.5.3 Magnetophoresis 52
2.6 Optofluidics 52
2.6.1 OptofluidicLenses 53
2.7 Microacoustofluidics 56
2.8 Conclusion 57
Problems 59
References 60
Chapter3 FabricationTechniquesforMicrofluidics 63
3.1 BasicMicrotechniques 63
3.1.1 Photolithography 63
3.1.2 AdditiveTechniques 65
3.1.3 SubtractiveTechniques 67
3.1.4 PatternTransferTechniques 69
3.2 FunctionalMaterials 70
3.2.1 MaterialsRelatedtoSiliconTechnology 70
3.2.2 Polymers 74
3.3 Silicon-BasedMicromachiningTechniques 77
3.3.1 SiliconBulkMicromachining 77
3.3.2 SiliconSurfaceMicromachining 84
3.4 Polymer-BasedMicromachiningTechniques 89
3.4.1 ThickResistLithography 89
3.4.2 PolymericBulkMicromachining 94
3.4.3 PolymericSurfaceMicromachining 94
3.4.4 MicrostereoLithography(MSL) 99
3.4.5 Micromolding 103
3.5 FabricationTechniquesforPaper-BasedMicrofluidics 108
3.5.1 WaxPrinting 108
3.5.2 InkjetPrinting 109
3.5.3 PaperPhotolithography 109
3.5.4 FlexographicPrinting 109
3.6 OtherMicromachiningTechniques 110
3.6.1 SubtractiveTechniques 110
3.6.2 AdditiveTechniques 114
3.7 AssemblyandPackagingofMicrofluidicDevices 115
3.7.1 Wafer-LevelAssemblyandPackaging 116
3.7.2 Device-LevelPackaging 118
3.8 Biocompatibility 121
3.8.1 MaterialResponse 121
3.8.2 TissueandCellularResponse 121
3.8.3 BiocompatibilityTests 122
Problems 122
References 122
Chapter4 ExperimentalFlowCharacterization 129
4.1 Introduction 129
4.1.1 PointwiseMethods 129
Contents ix
4.1.2 Full-FieldMethods 130
4.2 OverviewofµPIV 135
4.2.1 FundamentalPhysicsConsiderationsofµPIV 135
4.2.2 SpecialProcessingMethodsforµPIVRecordings 150
4.2.3 AdvancedProcessingMethodsSuitableforBothMicro/Macro-PIV
Recordings 153
4.3 µPIVExamples 155
4.3.1 FlowinaMicrochannel 155
4.3.2 FlowinaMicronozzle 158
4.3.3 FlowAroundaBloodCell 160
4.3.4 FlowinMicrofluidicBiochip 163
4.3.5 Conclusions 164
4.4 ExtensionsoftheµPIVTechnique 164
4.4.1 MicrofluidicNanoscope 165
4.4.2 MicroparticleImageThermometry 170
4.4.3 InfraredµPIV 179
4.4.4 Particle-TrackingVelocimetry 181
Problems 183
References 184
Chapter5 MicrofluidicsforExternalFlowControl 189
5.1 VelocityandTurbulenceMeasurement 189
5.1.1 VelocitySensors 189
5.1.2 ShearStressSensors 192
5.2 TurbulenceControl 201
5.2.1 Microflaps 201
5.2.2 Microballoon 203
5.2.3 MicrosyntheticJet 203
5.3 MicroairVehicles 205
5.3.1 Fixed-WingMAV 206
5.3.2 Flapping-WingMAV 207
5.3.3 Microrotorcraft 209
5.3.4 Microrockets 211
Problems 218
References 220
Chapter6 MicrofluidicsforInternalFlowControl:Microvalves 223
6.1 DesignConsiderations 226
6.1.1 Actuators 226
6.1.2 ValveSpring 246
6.1.3 ValveSeat 250
6.1.4 PressureCompensationDesign 250
6.2 DesignExamples 251
6.2.1 MethodsofValveIntegration 251
6.2.2 PneumaticValves 252
6.2.3 PinchValves 254
6.2.4 ThermopneumaticValves 254
6.2.5 ThermomechanicalValves 257
6.2.6 PiezoelectricValves 259
6.2.7 ElectrostaticValves 261