From MEMS to Bio-MEMS and Bio-NEMS : Manufacturing Techniques and Applications

642 Pages·2011·22.121 MB·English

by  Madou, Marc J.

Mechanical Engineering/Bioengineering/Electrical Engineering/Materials Science/Manufacturing Engineering
Third Edition
Fundamentals of
MICROFABRICATION
NANOTECHNOLOGY
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V O LU M E I I I o
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From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing
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Techniques and Applications u E
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Details the Nanotechnology, Biology, and Manufacturing Techniques Applicable t
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to Bionanotechnology
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From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications
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details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, B
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materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial
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cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, o
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fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS h -
and NEMS applications. Fully illustrated in color, the text contains end-of-chapter problems, worked n M
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examples, extensive references for further reading, and an extensive glossary of terms. q
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Topics include: e
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• Nonlithography manufacturing techniques with lithography-based methods a S
• Nature as an engineering guide and contrasts top-down and bottom-up approaches n
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d
• Packaging, assembly, and self-assembly from ICs to DNA and biological cells
n

• Selected new MEMS and NEMS processes and materials, metrology techniques, and modeling A
d
• Scaling laws, actuators, power generation, and the implementation of brains in miniaturized devices p

• Different strategies for making micromachines smarter p B
• The transition out of the laboratory and into the marketplace li i
c o
a
t -
The third volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three- i N
o
Volume Set, the book discusses top-down and bottom-up manufacturing methods and explains how
n E
to use nature as a guide. It provides a better understanding of how to match different manufacturing
s
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options with a given application that students can use to identify additional killer MEMS and NEMS
applications.
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Other volumes in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume
Set include:
Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology VOLUME III
Manufacturing Techniques for Microfabrication and Nanotechnology
5516X
Madou
ISBN: 978-1-4200-5516-0
90000
9 781420 055160
5516X_COVER_final.indd 1 5/5/11 10:09 AM

Marc J. Madou
Boca Raton London New York
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I dedicate this third edition of Fundamentals of Microfabrication to my family in the US and
in Belgium and to all MEMS and NEMS colleagues in labs in the US, Canada, India, Korea,
Mexico, Malaysia, Switzerland, Sweden and Denmark that I have the pleasure to work with.
The opportunity to carry out international research in MEMS and NEMS and writing a textbook
about it has been rewarding in terms of research productivity but perhaps even more in cultural
enrichment. Scientists have always been at the frontier of globalization because science is the
biggest gift one country can give to another and perhaps the best road to a more peaceful world.

Contents
Roadmap ix
Author xi
Acknowledgments xiii
Part I
From traditional Manufacturing to Nanotechnology
IntroductiontoPartI 2
1 Nonlithography-Based(Traditional)andLithography-Based(Nontraditional)
Manufacturing Compared 3
2 NatureasanEngineeringGuide:Biomimetics 49
3 Nanotechnology:Top-DownandBottom-UpManufacturingApproachesCompared 117
4 Packaging,Assembly,andSelf-Assembly 185
5 SelectedMaterialsandProcessesforMEMSandNEMS 239
6 MetrologyandMEMS/NEMSModeling 285
Part II
Scaling Laws, actuators, and Power and Brains in Miniature Devices
IntroductiontoPartII 358
7 ScalingLaws 359
8 Actuators 387
9 PowerandBrainsinMiniatureDevices 475
vii
viii      Contents
Part III
Miniaturization application
IntroductiontoPartIII 526
10 MEMSandNEMSApplications 527
Roadmap
From MEMS to Bio-MEMS: Manufacturing Techniques and Applicationsconsistsoftenchaptersinthree
parts.InPartI,wecompareavailablemanufacturingoptionsformicroelectromechanicalsystems
(MEMS)andnanoelectromechanicalsystems(NEMS),introduceinspectionoptionsfortheproduced
parts(metrology),andsummarizeavailablemodelingsoftwareforMEMSandNEMS.Nonlithography-
based(traditional)manufacturingtechniquesarecontrastedwithlithography-based(nontraditional)
methodsinChapter1.InChapter2,weinvestigatenatureasanengineeringguide,andwecontrast
top-downandbottom-upapproachesinChapter3.InChapter4welearnaboutpackaging,assembly,
andself-assemblyfromintegratedcircuitstoDNAandbiologicalcells.Inthesechaptersweaimtohelp
thereaderdecideuponanoptimizedmanufacturingoptiontotacklespecificmanufacturingproblems.
WethenintroducesomeselectednewMEMSandNEMSprocessesandmaterialsinChapter5.Finally,
wecovermetrologytechniquesforMEMSandNEMSandsummarizeMEMSandNEMSmodelingin
Chapter6.
OfthethreechaptersinPartII,thefirstdealswithscalinglaws,thesecondwithactuators,and
thethirdwithissuessurroundingpowergenerationandtheimplementationofbrainsinminiaturized
devices.InChapter7,onscalinglaws,welookatscalingfrombothintuitiveandmathematicalpoints
ofview.Weareespeciallyinterestedindeviationsfromlinearscaling,wheredownscalingrevealsnew
unexpectedphysicalandchemicalphenomena.Thescalingchapteralsoconstitutesanintroductionto
thesubsequenttreatisesonactuatorsinChapter8andonpowerandbrainsinChapter9.Anactuator—
likeasensor—isadevicethatconvertsenergyfromoneformtoanother.Inthecaseofanactuator,one
isinterestedintheensuingaction;inthecaseofasensor,oneisinterestedintheinformationgarnered.
Scalingenablesonetocomparevariousactuatormechanisms,suchasthoseproposedtopropelarotor
blade,bendathinsiliconmembrane,ormovefluidsinfluidicchannels.Powergenerationposesquite
achallengeforminiaturizationscience;thesmallerthepowersource,thelessitstotalcapacity.We
willconsiderthepoweringofminiaturizedequipment,aswellastheminiaturizationofpowersources
themselves,inChapter9.Inthesamechapter,wealsodiscussthedifferentstrategiesformakingmicro-
machinessmarter.
InPartIII,Chapter10,wereviewtheMEMSandNEMSmarkets.Today,theMEMSfieldhasmadethe
transitionoutofthelaboratoryandintothemarketplacewithaplethoraofnewproducts,includingastrong
entryintotheconsumerelectronicsfield(mobilephones,cameras,laptopcomputers,games,etc.).IfMEMS
isenteringadolescence,thewordnanostillseemstoderivefromaverbthatmeans“toseekandgetventure
capitalfunding”insteadoffromtheGreeknounfordwarf.Today,themarketdynamicsforMEMSand
NEMScommercialproductsareverydifferent,andwetreatMEMSandNEMSapplicationsseparatelyin
this chapter.
AshighlightedinChapter1,whichcomparesnonlithography-based(traditional)andlithography-based
(nontraditional)manufacturing,wehopethatabetterunderstandingofhowtomatchdifferentmanufactur-
ingoptionswithagivenapplicationwillguidetheidentificationofadditionalkillerapplicationsforMEMS
andNEMSandencouragemorecompaniesandresearchorganizationstoinnovatefasterbasedontheir
in-housemanufacturingtoolsandknow-how.
Note to the Reader: From MEMS to Bio-NEMS: Manufacturing Techniques and Applicationswasoriginallycom-
posedaspartofalargerbookthathassincebeenbrokenupintothreeseparatevolumes.From MEMS to
ix