FANUC AC SERVO MOTOR αi/βi series, LINEAR MOTOR LiS, SYNCHRONOUS BUILT-IN SERVO

688 Pages·2008·11.26 MB·English

*
FANUC AC SERVO MOTOR @ series
*
FANUC AC SERVO MOTOR # series
*
FANUC LINEAR MOTOR L S series
FANUC SY NCHRONOUS
*
BUILT-IN SERVO MOTOR D S series
PARAMETER MANUAL
B-65270EN/07
• No part of this manual may be reproduced in any form.
• All specifications and designs are subject to change without notice.

The products in this manual are controlled based on Japan’s “Foreign Exchange and
Foreign Trade Law”. The export from Japan may be subject to an export license by the
government of Japan.
Further, re-export to another country may be subject to the license of the government of
the country from where the product is re-exported. Furthermore, the product may also be
controlled by re-export regulations of the United States government.
Should you wish to export or re-export these products, please contact FANUC for advice.

In this manual we have tried as much as possible to describe all the various matters.
However, we cannot describe all the matters which must not be done, or which cannot be
done, because there are so many possibilities.
Therefore, matters which are not especially described as possible in this manual should be
regarded as ”impossible”.

This manual contains the program names or device names of other companies, some of
which are registered trademarks of respective owners. However, these names are not
followed by  or  in the main body.

■General Safety Precautions
• When an abnormality such as an alarm or a hardware failure occurs, the operations
described in the specifications are not guaranteed unless otherwise specifically noted.
When action corresponding to the abnormality is specifically described, take the action.
When no action is described, please contact FANUC.
• The signals and functions described in the specifications cannot be used separately for
safety functions unless otherwise described as being usable for the safety functions.
Their specifications are not assumed to be used as the safety functions in this case, an
unexpected danger may be caused. For information about the safety functions, please
contact FANUC.
Generally, the safety functions represent functions that protect the operators from
machine danger.
• A wrong device connection or setting can lead to unpredictable operation. When starting
to operate the machine for the first time after assembling the machine, replacing
components, or modifying parameter settings, exercise the greater care by, for
example, reducing the torque limit value, error detection level, or operating speed or by
operating the machine in such a way that an emergency stop can be made quickly.
B-65270EN/07 DEFINITION OF WARNING, CAUTION, AND NOTE
DEFINITION OF WARNING, CAUTION, AND NOTE

This manual includes safety precautions for protecting the user and
preventing damage to the machine. Precautions are classified into
Warning and Caution according to their bearing on safety. Also,
supplementary information is described as a Note. Read the Warning,
Caution, and Note thoroughly before attempting to use the machine.

WARNING
Applied when there is a danger of the user being
injured or when there is a damage of both the user
being injured and the equipment being damaged if
the approved procedure is not observed.

CAUTION
Applied when there is a danger of the equipment
being damaged, if the approved procedure is not
observed.

NOTE
The Note is used to indicate supplementary
information other than Warning and Caution.

- Read this manual carefully, and store it in a safe place.

s-1

B-65270EN/07 TABLE OF CONTENTS

TABLE OF CONTENTS
DEFINITION OF WARNING, CAUTION, AND NOTE.................................s-1
1 OVERVIEW .............................................................................................1
1.1 SERVO SOFTWARE AND SERVO CARDS SUPPORTED BY EACH NC
MODEL..........................................................................................................2
1.2 ABBREVIATIONS OF THE NC MODELS COVERED BY THIS MANUAL....5
1.3 RELATED MANUALS....................................................................................6
2 SETTING αiS/αiF/βiS SERIES SERVO PARAMETERS.......................8
2.1 INITIALIZING SERVO PARAMETERS..........................................................9
2.1.1 Before Servo Parameter Initialization......................................................................9
2.1.2 Parameter Initialization Flow.................................................................................10
2.1.3 Servo Parameter Initialization Procedure...............................................................11
2.1.4 Setting Servo Parameters when a Separate Detector for the Serial Interface is
Used........................................................................................................................33
2.1.5 Setting Servo Parameters when an Analog Input Separate Detector Interface
Unit is Used............................................................................................................44
2.1.6 Setting Parameters when an αiCZ Sensor is Used.................................................46
2.1.7 Setting Parameters When an Acceleration Sensor or Temperature Detection
Circuit Is Used........................................................................................................52
2.1.8 Actions for Illegal Servo Parameter Setting Alarms..............................................61
2.1.9 Notes on Using the Control Axis Detach Function................................................77
3 αiS/αiF/βiS SERIES PARAMETER ADJUSTMENT............................78
3.1 SERVO TUNING SCREEN AND DIAGNOSIS INFORMATION..................79
3.1.1 Servo Tuning Screen..............................................................................................79
3.1.2 Diagnosis Information List.....................................................................................82
3.1.3 Actual Current Peak Hold Display.........................................................................85
3.1.4 Acceleration Monitor Function..............................................................................86
3.2 ACTIONS FOR ALARMS ............................................................................87
3.3 ADJUSTING PARAMETERS FOR HIGH-SPEED AND HIGH-PRECISION
MACHINING................................................................................................96
3.3.1 Servo HRV Control Adjustment Procedure...........................................................96
3.3.2 High-speed Positioning Adjustment Procedure....................................................119
3.3.3 Rapid Traverse Positioning Adjustment Procedure..............................................122
3.3.4 Vibration in the Stop State...................................................................................127
3.3.5 Vibration during Travel........................................................................................129
c-1
TABLE OF CONTENTS
B-65270EN/07

3.3.6 Stick Slip..............................................................................................................131
3.3.7 Overshoot.............................................................................................................132
4 SERVO FUNCTION DETAILS ............................................................133
4.1 SERVO HRV CONTROL...........................................................................134
4.1.1 Servo HRV2 Control............................................................................................137
4.2 HIGH-SPEED HRV CURRENT CONTROL...............................................138
4.2.1 Servo HRV3 Control............................................................................................138
4.2.2 Servo HRV4 Control............................................................................................144
4.2.3 High-Speed HRV Current Control.......................................................................149
4.3 CUTTING/RAPID SWITCHING FUNCTION..............................................150
4.4 VIBRATION SUPPRESSION IN THE STOP STATE.................................156
4.4.1 Velocity Loop High Cycle Management Function..............................................156
4.4.2 Acceleration Feedback Function..........................................................................158
4.4.3 Variable Proportional Gain Function in the Stop State........................................160
4.4.4 N Pulses Suppression Function............................................................................164
4.4.5 Current Loop 1/2 PI Control Function.................................................................166
4.5 MACHINE RESONANCE ELIMINATION FUNCTION...............................168
4.5.1 Selecting a Resonance Elimination Function.......................................................168
4.5.2 Torque Command Filter (Middle-Frequency Resonance Elimination Filter)......169
4.5.3 Resonance Elimination Filter Function
(High-Frequency Resonance Elimination Filter).................................................171
4.5.4 Disturbance Elimination Filter Function
(Low-Frequency Resonance Elimination Filter)..................................................176
4.5.5 Resonance Elimination Filter L
(Low-Frequency Resonance Elimination Filter)..................................................180
4.5.6 Observer Function................................................................................................183
4.5.7 Vibration Damping Control Function..................................................................187
4.5.8 Dual Position Feedback Function (Optional Function)........................................189
4.5.9 Machine Speed Feedback Function......................................................................196
4.5.10 Machining Point Control......................................................................................199
4.6 CONTOUR ERROR SUPPRESSION FUNCTION ....................................202
4.6.1 Feed-forward Function.........................................................................................202
4.6.2 Advanced Preview Feed-forward Function..........................................................206
4.6.3 RISC Feed-forward Function...............................................................................209
4.6.4 Cutting/Rapid Feed-forward Switching Function................................................211
4.6.5 Feed-forward Timing Adjustment Function.........................................................213
4.6.6 Backlash Acceleration Function...........................................................................216
c-2
B-65270EN/07 TABLE OF CONTENTS

4.6.7 Two-stage Backlash Acceleration Function.........................................................223
4.6.8 Static Friction Compensation Function................................................................238
4.6.9 Torsion Preview Control Function.......................................................................241
4.7 OVERSHOOT COMPENSATION FUNCTION..........................................251
4.8 HIGH-SPEED POSITIONING FUNCTION ................................................257
4.8.1 Position Gain Switching Function........................................................................257
4.8.2 Low-speed Integral Function................................................................................261
4.8.3 Fine Acceleration/Deceleration (FAD) Function.................................................263
4.9 SERIAL FEEDBACK DUMMY FUNCTIONS.............................................272
4.9.1 Serial Feedback Dummy Functions......................................................................272
4.9.2 How to Use the Dummy Feedback Functions for a Multiaxis Servo Amplifiers
when an Axis is not in Use...................................................................................275
4.10 BRAKE CONTROL FUNCTION.................................................................276
4.11 QUICK STOP FUNCTION.........................................................................280
4.11.1 Quick Stop Type 1 at Emergency Stop................................................................280
4.11.2 Quick Stop Type 2 at Emergency Stop................................................................282
4.11.3 Lifting Function Against Gravity at Emergency Stop..........................................283
4.11.3.1 Lifting function against gravity at emergency stop.........................................283
4.11.3.2 Function based on the DI signal for switching the distance to lift...................287
4.11.3.3 Method of setting a distance to lift in µm........................................................290
4.11.4 Quick Stop Function for Hardware Disconnection of Separate Detector.............291
4.11.5 Quick Stop Function for Separate Serial Detector Alarms...................................293
4.11.6 Quick Stop Function at OVL and OVC Alarm....................................................294
4.11.7 Overall Use of the Quick Stop Functions.............................................................295
4.12 UNEXPECTED DISTURBANCE TORQUE DETECTION
FUNCTIONDISTURBANCE TORQUE DETECTION.................................296
4.12.1 Unexpected Disturbance Torque Detection Function..........................................296
4.12.2 Cutting/Rapid Unexpected Disturbance Torque Detection Switching Function..307
4.12.3 Unexpected Disturbance Torque Detection Switching Function Depending on
Acc.......................................................................................................................309
4.13 FUNCTION FOR OBTAINING CURRENT OFFSETS AT EMERGENCY
STOP.........................................................................................................311
4.14 LINEAR MOTOR PARAMETER SETTING................................................312
4.14.1 Procedure for Setting the Initial Parameters of Linear Motors............................312
4.14.2 Detection of an Overheat Alarm by Servo Software when a Linear Motor and
a Synchronous Built-in Servo Motor are Used.....................................................337
4.14.3 Smoothing Compensation for Linear Motor........................................................341
c-3
TABLE OF CONTENTS
B-65270EN/07

4.15 SYNCHRONOUS BUILT-IN SERVO MOTOR PARAMETER SETTING...346
4.15.1 Procedure for Setting the Initial Parameters of Synchronous Built-in Servo
Motors..................................................................................................................346
4.15.2 Detection of an Overheat Alarm by Servo Software when a Synchronous
Built-in Servo Motor are Used.............................................................................382
4.15.3 Smoothing Compensation for Synchronous Built-in Servo Motor......................383
4.16 SETTING PARAMETERS FOR LARGE SERVO MOTORS......................388
4.16.1 Motor Models and System Configurations...........................................................388
4.16.2 Setting Parameters in the Torque Tandem Configuration....................................389
4.16.3 Setting Parameters in the PWM Distribution Module Configuration..................391
4.16.4 Data Measurement and Diagnosis with a PWM Distribution Module (PDM).....394
4.17 INTERACTIVE FORCE COMPENSATION FUNCTION............................398
4.18 TORQUE CONTROL FUNCTION.............................................................415
4.19 TANDEM DISTURBANCE ELIMINATION CONTROL
(POSITION TANDEM) (Optional Function)................................................418
4.20 SYNCHRONOUS AXES AUTOMATIC COMPENSATION........................426
4.21 TORQUE TANDEM CONTROL FUNCTION (Optional Function)..............430
4.21.1 Preload Function..................................................................................................436
4.21.2 Damping Compensation Function........................................................................439
4.21.3 Velocity Feedback Average Function..................................................................441
4.21.4 Servo Alarm 2-axis Simultaneous Monitor Function...........................................442
4.21.5 Motor Feedback Sharing Function.......................................................................444
4.21.6 Full-closed Feedback Sharing Function...............................................................445
4.21.7 Adjustment...........................................................................................................446
4.21.8 Cautions for Controlling One Axis with Two Motors..........................................450
4.21.9 Velocity loop integrator copy function................................................................451
4.21.10 Tandem Speed Difference Alarm Function..........................................................452
4.21.11 Block Diagrams....................................................................................................454
4.22 SERVO TUNING TOOL SERVO GUIDE...................................................455
4.22.1 SERVO GUIDE...................................................................................................455
5 DETAILS OF PARAMETERS .............................................................473
5.1 DETAILS OF THE SERVO PARAMETERS FOR Series 30i, 31i, 32i, 15i,
16i, 18i, 21i, 0i, 20i, Power Mate i (SERIES 90D0, 90E0, 90B0, 90B1,
90B6, 90B5, AND 9096)............................................................................474
c-4
B-65270EN/07 TABLE OF CONTENTS

6 PARAMETER LIST.............................................................................505
6.1 PARAMETERS FOR HRV1 CONTROL ....................................................506
6.2 PARAMETERS FOR HRV2 CONTROL ....................................................516
6.3 PARAMETERS FOR HRV1 CONTROL (FOR Series 0i-A).......................531
APPENDIX
A ANALOG SERVO INTERFACE SETTING PROCEDURE..................537
B PARAMETERS SET WITH VALUES IN DETECTION UNITS............544
B.1 PARAMETERS FOR Series 15i................................................................545
B.2 PARAMETERS FOR Series 16i, 18i, 21i, AND 0i.....................................547
B.3 PARAMETERS FOR Power Mate i...........................................................549
B.4 PARAMETERS FOR Series 30i, 31i, AND 32i..........................................551
C FUNCTION-SPECIFIC SERVO PARAMETERS.................................553
D PARAMETERS RELATED TO HIGH-SPEED AND HIGH
PRECISION OPERATIONS ................................................................563
D.1 MODEL-SPECIFIC INFORMATION..........................................................564
D.1.1 Series 15i-MB.......................................................................................................564
D.1.2 Series 16i/18i/21i/0i/0i Mate-MB, 0i/0i Mate-MC/20i-FB..................................567
D.1.3 Series 30i/31i/32i-A, 31i-A5................................................................................577
D.2 SERVO PARAMETERS RELATED TO HIGH-SPEED AND HIGH
PRECISION OPERATIONS.......................................................................580
E VELOCITY LIMIT VALUES IN SERVO SOFTWARE .........................587
F SERVO FUNCTIONS ..........................................................................593
G PARAMETERS FOR α AND OTHER SERIES ...................................597
G.1 MOTOR ID NUMBERS OF α SERIES MOTORS......................................598
G.2 MOTOR ID NUMBERS OF β SERIES MOTORS......................................600
G.3 MOTOR ID NUMBERS OF CONVENTIONAL LINEAR MOTORS............601
G.4 PARAMETERS FOR SERVO HRV2 CONTROL.......................................602
G.5 HRV1 CONTROL PARAMETERS FOR α SERIES, β SERIES, AND
CONVENTIONAL LINEAR MOTORS........................................................603
G.6 HRV2 CONTROL PARAMETERS FOR βM SERIES MOTORS................612
H DETAILS OF HIGH-SPEED AND HIGH-PRECISION
ADJUSTMENT....................................................................................614
c-5
TABLE OF CONTENTS
B-65270EN/07

I SERVO CHECK BOARD OPERATING PROCEDURE......................637
I.1 METHOD OF USING THE SERVO CHECK BOARD................................638
I.2 ADJUSTING UNEXPECTED DISTURBANCE TORQUE DETECTION
WITH THE CHECK BOARD......................................................................651
I.3 ADJUSTING LINEAR MOTOR AMR OFFSET WITH THE CHECK
BOARD (INCREMENTAL TYPE)...............................................................652
I.4 ADJUSTING SMOOTHING COMPENSATION FOR A LINEAR MOTOR
WITH THE CHECK BOARD......................................................................655
I.5 MEASURING FREQUENCY CHARACTERISTICS WITH THE CHECK
BOARD......................................................................................................661
J USING THE SERVO CHECK INTERFACE UNIT...............................665

c-6