Exhibition Guide PDF

24 Pages·2017·3.99 MB·English

CONNECTING MINDS.
ADVANCING LIGHT.
2017
ADVANCED
LITHOGRAPHY
MOVING TECHNOLOGY TO MARKET™
EXHIBITION GUIDE
Exhibition: 28 February–1 March 2017
Conferences & Courses: 26 February–2 March 2017
San Jose Marriott and San Jose Convention Center
San Jose, California, USA www.spie.org/al
CONNECTING MINDS.
ADVANCING LIGHT.
ADVANCED
LITHOGRAPHY
2017
THE PREMIER EVENT FOR THE
SEMICONDUCTOR INDUSTRY
Exhibition: 28 February–1 March 2017
Conferences & Courses: 26 February–2 March 2017
San Jose Marriott and San Jose Convention Center
San Jose, California, USA
Five Days
Many Opportunities
CUTTING-EDGE RESEARCH AND COURSES
PLENARY PRESENTATIONS AND EXHIBITION
www.spie.org/al
Welcome to
the Exhibition
Tuesday 28 February · 10:00 AM to 5:00 PM
Wednesday 1 March · 10:00 AM to 4:00 PM
CONTENTS
Sponsors...................................X
Exhibitor Index..............................X
Exhibition Floor Plan.........................X
General Information .........................X
Course Daily Schedule .......................X
Exhibitor Directory ..........................X
Product Categories..........................X
Policies ................................... 1X
Corporate Members .........................X
SPIE would like to express its deepest appreciation to the symposium For information about exhibiting, sponsorship, and
chairs, conference chairs, program committees, session chairs, and advertising opportunities at future Advanced Lithography
authors who have so generously given their time and advice to make events, contact: SPIE Sales at [email protected]
this symposium possible.
The symposium, like our other conferences and activities, would not
Sponsored by
be possible without the dedicated contribution of our participants
and members. This program is based on commitments received up to
the time of publication and is subject to change without notice.
Onsite News: www.spie.org/ALnews · #SPIElitho 1
Thanks to the following sponsors for their
generous support of SPIE Advanced Lithography
TM
General Sponsors:
JSR Micro, Inc.
Hitachi High Technologies
Micro Lithography Inc.
Qoniac GmbH
Solar-Semi
2 SPIE Advanced Lithography 2017 · www.spie.org/al · [phone] · [email protected]
Exhibitor Service Area
and Lounge
SAN JOSE CONVENTION CENTER · EXHIBITION FLOOR
Lunch/Seating
Area
322 324 326 328
300 302 304 306
308 310 312 314 316 318 320
Posters Reception
Tuesday 6:00 to 8:00 pm
301 303 305 307 323 325 327 331
Coffee Area
200 202 206 222 224 226 230
201 205 207 211 213 217 219 221 223 225 227 231
100 104 106 110 116 118 122 126 130
103 105 111 113 115 117 121 123

Main
Entrance Entrance
EXHIBITOR INDEX
Booth# Exhibitor 130 Tokyo Electron 222 Benchmark Technologies 308 Sage Design Automation, Inc.
100 Qoniac GmbH 200 SCREEN SPE USA, LLC 223 MicroChem Corp. 318 INKO Industrial Corp.
103 Solid State Technology 201 JEOL USA Inc. 224 Raith America, Inc. 320 LouwersHanique
104 Heidelberg Instruments Inc. 202 RI Research Instruments 225 micro resist technology 322 GenISys GmbH
GmbH GmbH 323 Pozzetta, Inc.
105 Mitsui Chemicals America,
Inc. 205 Gudeng Precision 226 SAES Pure Gas 324 Canon U.S.A., Inc.
106 JENOPTIK Optical 206 Synopsys, Inc. 227 solar-semi GmbH 325 Cadence Design Systems
Systems, LLC 207 Zygo Corporation 230 Pall Corp. 326 Cyberoptics
110 Brewer Science 211 Tokyo Ohka Kogyo 231 Amuneal Manufacturing 327 Micro Lithography, Inc.
115 DJ DevCorp America, Inc. Corp.
116 PCAS 213 Vistec Electron Beam 300 Integrated Micro Materials
GmbH
117 Energetiq Technology, Inc. 305 Entegris, Inc.
217 Carl Zeiss SMT GmbH
118 Shin-Etsu MicroSi 306 Coventor, Inc.
219 Abeam Technologies, Inc.
122 JSR Micro, Inc. 307 attocube systems Inc.
221 Mentor Graphics
123 Seiwa Optical America Inc.
126 J.A. Woollam
Onsite News: www.spie.org/ALnews · #SPIElitho 3
GENERAL INFORMATION
Exhibition Hours SPIE Hosted Lunches
Tuesday 28 February · 10:00 am to 5:00 pm Exhibition Hall
Tuesday – Wednesday, 11:30 am to 1:00 pm
Wednesday 1 March · 10:00 am to 4:00 pm
Check individual conference listings for exact times.
Complimentary tickets for these lunches will be included with full
Registration
conference registrations. Exhibitors and students may purchase
San Jose Convention Center tickets at the Cashier Desk.
Sponsors:
Sunday 26 February · 7:15 am to 5:00 pm
Monday 27 February · 7:15 am to 4:00 pm
Tuesday 28 February · 7:30 am to 5:00 pm
Wednesday 1 March · 7:30 am to 4:00 pm
Desserts
Thursday 2 March · 7:45 am to 4:00 pm
(Thursday is conference registration only) Exhibition Hall 1
Tuesday and Wednesday
Coffee Breaks Complimentary tickets for the dessert snacks will be included in
conference attendee registration packets.
Served daily – 7:30 am, 10:00 am and 3:00 pm
Check individual conference listings for exact times and locations. Internet Options
Sponsors:
Wireless Access – Convention Center Upper Level Concourse
Complimentary wireless access is also available; instructions will
be posted onsite.
West end WiFi sponsored by
East end WiFi sponsored by
Breakfast Breads
TM
Convention Center, Ballroom Concourse
Monday – Thursday, 7:30 am
SPIE Conference and Exhibition App
Wednesday Sponsors:
Search and browse the program, special events, participants,
exhibitors, courses, and more. Free Conference App available
for iPhone and Android phones.
SPIE Bookstore
Food and Refreshments for Purchase
Convention Center Lobby near Registration
Convention Center, Ballroom Concourse
Monday – Thursday, 7:30 am to 3:00 pm Stop by the SPIE Bookstore to browse the latest SPIE Press Books,
proceedings, and educational materials. While there, get a t-shirt
Hot and cold snacks, hot entrees, deli sandwiches, salads, or educational toy to bring home to the family.
and pastries are available for purchase. Cash and credit cards
accepted.
Restaurant Reservations
and Information Desk
Exhibition Hall Concession Stand
Tuesday – Wednesday, 11:00 am to 2:00 pm The San Jose Convention and Visitors Bureau operates a
Restaurant Reservations and Information Desk on the street
Hot and cold snacks, hot entrees, deli sandwiches, salads,
level of the Convention Center near the main entrance. The desk
and pastries are available for purchase. Cash and credit cards
will be open Sunday through Thursday during core hours of the
accepted.
convention. For more information visit their website http://www.
sanjose.org
4 SPIE Advanced Lithography 2017 · www.spie.org/al · [phone] · [email protected]
· 14 ·
ONSITE
COURSES
COURSES
Get training.
Stay competitive.
SUNDAY WEDNESDAY
SC101 Introduction to Microlithography: Theory, SC1187 Understanding Design-Patterning
Materials, and Processing (Willson, Bowden) Interactions for EUV and DSA (Gupta, Torres, Advance your
Sunday 8:30 am to 5:30 pm, $600/$710/$359 Mallik) Wednesday 1:30 pm to 5:30 pm,
SC1099 Chemistry and Lithography $375/$430/$247 career.
(Okoroanyanwu) Sunday 8:30 am to 5:30 pm,
$700/$810/$399
SC1100 Scatterometry in Profile, Overlay and · Direct instruction from
Focus Process Control (Cramer, Turovets) Sunday THURSDAY
legends in the semi/litho
1:30 pm to 5:30 pm, $375/$430/$247
SC616 Practical Photoresist Processing (Dammel) industry, many of whom are
SC1132 Computational Basis for Advanced
Thursday 8:30 am to 12:30 pm, $375/$430/$247
Lithography Techniques (Lai) Sunday 8:30 am to pioneers in their fields
12:30 pm, $375/$430/$247
SC1133 Metrology Toolset Monitoring, Matching, · Course topics are continually
Maintenance and Management (Solecky, Adan)
Sunday 8:30 am to 12:30 pm $375/$430/$247 updated and aligned with
SC1158 Metrology of Image Placement (Starikov) current industry needs and
Sunday 1:30 pm to 5:30 pm, $380/$435/$249 trends
SC1172 Spatial Coherence and Impact on
Lithography Simulation and OPC (Kang) Sunday · Earn CEUs for professional
8:30 am to 12:30 pm, $375/$430/$247
continuing education
SC1173 How and Why: The big ideas in
semiconductor lithography (Mack, Petersen) requirements
Sunday 8:30 am to 5:30 pm, $685/$795/$393
SC1209 Data Analytics and Machine · SPIE offers online courses
N EW Learning in Semiconductor and in-company training,
Manufacturing: Applications for Physical
Design, Process and Yield Optimization www.spie.org/education
(Cain, Capodieci) Sunday 1:30 pm to 5:30 pm,
$375/$430/$247
SC885 Principles and Practical Implementation of
Multiple Patterning (Dusa, Hsu) Sunday 8:30 am to
5:30 pm, $600/$710/$359
SC888 EUV Lithography (Bakshi, Ahn, Naulleau)
Sunday 8:30 am to 5:30 pm, $740/$850/$415 SPIE STUDENT MEMBERS
SC992 Lithography Integration for Semiconductor
RECIEVE DISCOUNTED
FEOL & BEOL Fabrication (Lin, Zhang) Sunday 8:30
am to 5:30 pm, $600/$710/$359 COURSE PRICES.
PRICE KEY: Member / Non Member / Student Member
SEE FULL COURSE
DESCRIPTIONS AND
REGISTER FOR COURSES
MONEY-BACK GUARANTEE ONSITE.
We are confident that once you experience an SPIE course for yourself you will look to us
for your future education needs. However, if for any reason you are dissatisfied, we will
gladly refund your money. We just ask that you tell us what you did not like; suggestions for Course descriptions also available
improvement are always welcome.
online: www.spie.org/ALCourses
CONTINUING EDUCATION UNITS
SPIE is accredited by the International Association for Continuing
Education and Training (IACET) and is authorized to issue the IACET CEU.
Onsite News: www.spie.org/ALnews · #SPIElitho 5
Exhibition Directory
EXHIBITOR DIRECTORY
ADVANCED Exhibitors are listed in alphabetical order with details
about products or services each is exhibiting. Companies
LITHOGRAPHY are additionally cross-indexed by technology areas.
The address of each exhibitor is also listed, making this
Exhibition Guide an excellent reference tool to take back to
Tuesday · 10:00 am to 5:00 pm
your office and share with your colleagues.
Wednesday · 10:00 am to 4:00 pm
Abeam Technologies, Inc. #219 attocube systems Inc. #307
22290 Foothill Blvd Ste 2, Hayward, CA, 94541 United States
[phone]; fax [phone]
2020 Stuart St, Berkeley, CA, 94703 United States
[email protected]; www.abeamtech.com
[phone]
Contact: Sergey Babin, President [email protected]; www.attocube.com
attocube is a well-established premium-quality manufacturer for
Amuneal Manufacturing Corp. #231 high precision piezo positioning devices, optical displacement
sensors and cryogenic measurement systems. The attoDRY800 is
4737 Darrah St, Philadelphia, PA, 19124 United States the world’s first cryo-optical table and the perfect choice for low
[phone] temperature quantum optics experiments. attocube’s renowned
[email protected]; www.amuneal.com piezo stages enable nanometer precise positioning even under
extreme environmental conditions such as cryogenic temperatures,
Featured Product: Magnetic Shielding Design and Fabrication
high magnetic fields and high or ultra-high vacuum.
Since 1965, Amuneal has been serving highly technical markets,
working with leaders in aerospace, electronics, cryogenics,
Benchmark Technologies #222
healthcare, and research to develop cost-effective magnetic
shielding strategies and products that outperform the most 7 Kimball Ln, Lynnfield, MA, 01940-2654 United States
demanding requirements. We offer a number of standard
[phone]; fax [phone]
component shields to our clients, however, our culture and
[email protected]; www.benchmarktech.com
capabilities allow us to manufacture and install unique custom
shields ranging from prototypes and models to full-scale Contact: Andrew Zanzal, Vice President of Sales
assemblies. Contact: Michael Adolf, Director, Technical Products,
[email protected]; Stuart Koch, VP, Technical Products,
[email protected]
6 SPIE Advanced Lithography 2017 · www.spie.org/al · [phone] · [email protected]
EXHIBITOR DIRECTORY
SPONSOR SPONSOR
Brewer Science #110 Carl Zeiss SMT GmbH #217
Carl Zeiss Promenade 10, Jena, 07745 Germany
[phone]; fax [phone]
2401 Brewer Dr, Rolla, MO, 65401-7003 United States
[email protected]; www.zeiss.com/mask-solutions
[phone]; fax [phone]
[email protected]; www.brewerscience.com Featured Product: ZEISS ForTune | High performance Wafer
and Mask Tuning system
Featured Product: OptiStack® multilayer systems are
designed for advanced high-volume manufacturing The ZEISS strategic business unit Semiconductor Metrology
processes. Systems (SMS) specializes in a key process in semiconductor
manufacturing: the photomask. Core expertise in light and
Brewer Science is a global technology leader in developing
electron optics, complemented by a pioneering femto-second
and manufacturing innovative materials and processes, for the
laser technology form the foundation of a product portfolio
fabrication of semiconductors and microelectronic devices. Today,
comprising in-die metrology, actinic qualification, repair, and
we continue to expand our technology portfolio to include products
tuning of photomasks. To increase automation and enhance tool
that enable advanced lithography, 3-D integration, chemical and
capabilities, SMS also offers advanced software applications.
mechanical device protection, nanotechnology, and thin wafer
Contact: Carl Zeiss SMT GmbH , Strategic Business Unit SMS,
handling. Brewer Science is prepared for the next generation. Are
[email protected]
you? Find out at http://www.brewerscience.com. Contact: Alex
Smith, Director of Sales, [email protected]; Brent Scott,
Senior Account Manager, [email protected] Coventor, Inc. #306
1000 Centre Green Way Ste 200, Cary, NC, 27513 United States
Cadence Design Systems #325 [phone]; fax [phone]
2655 Seely Ave, San Jose, CA, 95134-1931 United States [email protected]; www.coventor.com
[phone] Featured Product: SEMulator3D, a process modeling
www.cadence.com platform used for fast and accurate ‘virtual fabrication”
Featured Product: Litho Physical Analyzer, Cadence CMP Coventor® is the leader in solutions for developing semiconductor
Predictor, Litho Electrical Analyzer, Cadence Pattern process technology, as well as MEMS devices. Coventor serves
Analysis LDE a worldwide customer base of IDMs, memory suppliers, fabless
design houses, independent foundries, and R&D organizations.
Cadence enables global electronic design innovation and plays
Its SEMulator3D modeling platform provides fast and accurate
an essential role in the creation of today’s integrated circuits and
‘virtual fabrication’ of advanced manufacturing processes,
electronics. Customers use Cadence software, hardware, IP, and
allowing engineers to understand manufacturing effects early
services to design and verify advanced semiconductors, consumer
in development and reduce time-consuming and costly wafer
electronics, networking and telecommunications equipment, and
fabrication. Contact: Coventor Sales, [email protected]
computer systems. In particular, Cadence® DFM solutions address
both designer and manufacturer challenges resulting in improved
design manufacturability and reduced time to yield. Contact: CyberOptics Corp. #326
Philippe Hurat, Product Marketing, Director
5900 Golden Hills Dr, Minneapolis, MN, 55416 United States
[phone]; fax [phone]
SPONSOR
[email protected]; www.cyberoptics.com
Canon U.S.A., Inc. #324
Featured Product: WaferSense and ReticleSense Auto Multi
Sensor (AMS & AMSR)
Industrial Products Division, 3300 N First St, San Jose, CA, CyberOptics’ WaferSense and ReticleSense Auto Multi Sensors
(AMS/AMSR) measure leveling, vibration, and relative humidity (RH)
95134-1900 United States
in an all-in-one wireless real-time device. The thin and light form
[phone]
factor enables the AMS to travel through virtually any tool. The
[email protected]; usa.canon.com/industrial
AMSR can capture multiple measurements in all locations of the
Featured Product: FPA-1200NZ2C reticle environment – providing yet another way to increase yield
and reduce downtime in semiconductor environments. Contact:
Canon USA Industrial Products Division provides advanced
Allyn Jackson, US & Europe Sales Leader, ajackson@cyberoptics.
wafer & panel process equipment for applications including
com
semiconductor, Advanced Packaging & display. Canon provides
cost-effective wafer processing solutions including i-line & KrF
optical lithography, nanoimprint lithography & Canon Anelva
deposition equipment. Canon also has a variety of panel based
lithography & deposition solutions that can be extended to a
variety of applications. Contact [email protected] for
more info. Contact: Doug Shelton, Marketing Manager, sshelton@
cusa.canon.com
Onsite News: www.spie.org/ALnews · #SPIElitho 7
EXHIBITOR DIRECTORY
DJ DevCorp #115 Gudeng Precision #205
490 Boston Post Rd, Sudbury, MA, 01776-3367 United States 9F., No.2, Sec.4, Zhongyang Rd., Tucheng Dist., New Taipei City,
[phone] 23678 Taiwan
[email protected]; www.djdevcorp.com [phone]; fax [phone]
[email protected]; www.gudeng.com
Featured Product: Epoxy Dry Film Sheets
Featured Product: EUV POD, RSP150, RSP200, Photomask
DJ DevCorp develops, manufactures and markets innovative dry
Compact, Reticle Case, MRSP, Reticle SMIF POD, TFT-LCD
film resist materials multiple WLP, Advance Passive, Multilayer
Case
Microfluidic and MEMS applications. We provide precut sheets
or rolls of ready to use epoxy based dry films with highly uniform Gudeng Precision is a global photomask handling solution
thickness. These sheets are quickly laminated and are ready for provider. The core competence of Gudeng is our material,
exposure in minutes. The films exhibit excellent resolution, high manufacturing and service integration experiences in the
aspect ratios, outstanding planarization or tenting over topography, Semiconductor, Solar, LCD and LED industry. Gudeng has
and excellent adhesion. Contact: Don Johnson, President/CTO, contributed to developing innovative technology and has been a
[email protected]; Sabina Terrades, Office Mgr, djdc@djdevcorp. technological leader of Extreme Ultraviolet Lithography (EUV) mask
com handling. Gudeng makes customer’s requirements its first priority
and aims to provide customers with advanced solutions to improve
their yields. Contact: David Tai, Sales Executive, david.tai@gudeng.
Energetiq Technology, Inc. #117
com; Ellen Wu, Sr. Sales Executive, [email protected]
7 Constitution Way, Woburn, MA, 01801-1024 United States Heidelberg Instruments Inc. #104
[phone]; fax [phone]
[email protected]; www.energetiq.com
2807 Oregon Ct Unit E2, Torrance, CA, 90503-2635 United States
Featured Product: 5th Generation Laser Driven Light Sources
[phone]; fax [phone]
Energetiq Technology is the world’s leading developer and [email protected]; www.himt.us
manufacturer of ultra-bright broadband light sources for a wide
Featured Product: MLA150 Maskless Aligner, VPG200 ULTRA
variety of advanced applications in life and materials sciences,
Semiconductor Photomask Lithography System
semiconductor manufacturing, and R&D. Energetiq’s Laser-Driven
Light Sources (LDLS) are based on a revolutionary technology Heidelberg Instruments Mikrotechnik GmbH is the world leader
that generates high brightness across the spectrum, with high in the production of high precision photolithography systems and
reliability and long life. Contact: Paul Blackborow, Co-Chairman, Maskless Aligners. Heidelberg Instruments has an installation base
[email protected]; Karen Scammell, VP of Sales, of over 700 systems in more than 50 countries. Our optical direct
[email protected] write lithography systems are installed in academic and industrial
sites and are used in research, development and production.
Applications Include Photomask Manufacturing, MEMS, MOEMS,
Entegris, Inc. #305
Micro-fluidics, CMOS, LED and Display Technologies.
129 Concord Rd, Billerica, MA, 01821-4600 United States
[phone]; fax [phone] INKO Industrial Corp. #318
[email protected]; www.entegris.com
695 Vaqueros Ave, Sunnyvale, CA, 94085-3524 United States
For 50 years, Entegris has been a provider of critical products and
[phone]; fax [phone]
materials used in advanced high-technology manufacturing. These
products and materials are often used to make the building blocks [email protected]; www.pellicle-inko.com
of many of the world’s most complex microelectronic products, Featured Product: Pellicle, ArF pellicle
such as computers, mobile devices and phones, data storage
components, televisions and monitors, and automobiles. INKO, a U.S. based company, manufactures a complete line of
pellicles for applications ranging from ASIC production to high
volume memory production. From 248nm/193nm DUV lithography
GenISys GmbH #322 to I/G line lithography, we have the right pellicles for your needs.
Contact Joe Mac, sales and customer service, joemac@pellicle-
PO Box 410956, San Francisco, CA, 94141-0956 United States
inko.com, or Feng Ye, [email protected].
[phone]
[email protected]; www.genisys-gmbh.com
Integrated Micro Materials #300
Contact: Roger McCay, Sales Director North Am.
8141 Gateway Dr Ste 240, Argyle, TX, 76226 United States
[phone]; fax [phone]
[email protected]; www.imicromaterials.com
Featured Product: Lithography Materials and Process
Chemicals
Provider of lithography materials, process chemicals, and
manufacturing consulting services. Contact: Brad Williams, GM,
[email protected]; Ron Eakin, Business Development
Manager, [email protected]
8 SPIE Advanced Lithography 2017 · www.spie.org/al · [phone] · [email protected]