Kevin Zhang Editor Embedded Memories for Nano-Scale VLSIs 123 Editor KevinZhang IntelCorporation 2501NW.229thAve. Hillsboro,OR97124 USA [email protected] ISBN978-0-387-88496-7 e-ISBN978-0-387-88497-4 DOI10.1007/978-0-387-88497-4 LibraryofCongressControlNumber:2008936472 (cid:2)c SpringerScience+BusinessMedia,LLC2009 Allrightsreserved.Thisworkmaynotbetranslatedorcopiedinwholeorinpartwithoutthewritten permission of the publisher (Springer Science+Business Media, LLC, 233 Spring Street, New York, NY10013,USA),exceptforbriefexcerptsinconnectionwithreviewsorscholarlyanalysis.Usein connection with any form of information storage and retrieval, electronic adaptation, computer software,orbysimilarordissimilarmethodologynowknownorhereafterdevelopedisforbidden. The use in this publication of trade names, trademarks, service marks, and similar terms, even if they are not identified as such, is not to be taken as an expression of opinion as to whether or not theyaresubjecttoproprietaryrights. Printedonacid-freepaper springer.com Contents 1 Introduction.................................................... 1 KevinZhang 2 Embedded Memory Architecture for Low-Power Application Processor....................................................... 7 HoiJunYooandDonghyunKim 3 EmbeddedSRAMDesigninNanometer-ScaleTechnologies.......... 39 HiroyukiYamauchi 4 UltraLowVoltageSRAMDesign ................................. 89 NaveenVermaandAnanthaP.Chandrakasan 5 EmbeddedDRAMinNano-scaleTechnologies......................127 JohnBarth 6 EmbeddedFlashMemory........................................177 HidetoHidaka 7 EmbeddedMagneticRAM .......................................241 HidetoHidaka 8 FeRAM ........................................................279 ShoichiroKawashimaandJeffreyS.Cross 9 StatisticalBlockade:EstimatingRareEventStatisticsforMemories ..329 AmithSingheeandRobA.Rutenbar Index .............................................................383 v Contributors JohnBarth IBM,EssexJunction,Vermont,[email protected] AnanthaP.Chandrakasan MassachusettsInstituteofTechnologyCambridge, MA,USA JeffreyS.Cross TokyoInstituteofTechnology,2-12-1Ookayama,Meguro-ku, Tokyo152-8550,Japan,[email protected] HidetoHidaka MCUTechnologyDivision,RenesasTechnologyCorporation, 4-1Mizuhara,Itami,664-0005,Japan,[email protected] Shoichiro Kawashima Fujitsu Microelectronics Limited, System Micro Division,1-1Kamikodanaka4-chome,Nakahara-ku,Kawasaki,211-8588,Japan [email protected] DonghyunKim KAIST Rob A. Rutenbar Electrical and Computer Engineering, Carnegie Mellon University,Pittsburgh,PA,USA,[email protected] AmithSinghee IBM,ThomasJ.WatsonResearchCenter,YorktownHeights,NY, USA NaveenVerma MassachusettsInstituteofTechnology,Cambridge,MA,USA, [email protected] HiroyukiYamauchi FukuokaInstituteofTechnology,Fukuoka,Japan HoiJunYoo KAIST KevinZhang IntelCorporation,Hillsboro,OR,USA vii Chapter 1 Introduction KevinZhang Advancement of semiconductor technology has driven the rapid growth of very large scale integrated (VLSI) systems for increasingly broad applications, includ- ing high-end and mobile computing, consumer electronics such as 3D gaming, multi-function or smart phone, and various set-top players and ubiquitous sensor and medical devices. To meet the increasing demand for higher performance and lowerpowerconsumptioninmanydifferentsystemapplications,itisoftenrequired tohavealargeamountofon-dieorembeddedmemorytosupporttheneedofdata bandwidthinasystem.Thevarietiesofembeddedmemoryinagivensystemhave alsobecomeincreasinglymorecomplex,rangingfromstatictodynamicandvolatile tononvolatile. Among embedded memories, six-transistor (6T)-based static random access memory (SRAM) continues to play a pivotal role in nearly all VLSI systems due toitssuperiorspeedandfullcompatibilitywithlogicprocesstechnology.Butasthe technologyscalingcontinues,SRAMdesignisfacingseverechallengeinmaintain- ing sufficient cell stability margin under relentless area scaling. Meanwhile, rapid expansioninmobileapplication,includingnewemergingapplicationinsensorand medical devices, requires far more aggressive voltage scaling to meet very strin- gentpowerconstraint.Manyinnovativecircuittopologiesandtechniqueshavebeen extensivelyexploredinrecentyearstoaddressthesechallenges. Dynamic random access memory (DRAM) has long been an important semi- conductormemoryforitswell-balancedperformanceanddensity.Withincreasing demand for on-die dense memory, one-transistor and one-capacitor (1T1C)-based DRAM has found varieties of embedded applications in providing the memory bandwidth for system-on-chip (SOC) applications. With increasing amount of on- die cache memory for high-end computing and graphics application, embedded DRAM (eDRAM) is becoming a viable alternative to SRAM for large on-die memory. To meet product requirements for eDRAM while addressing continuous technologyscaling,manynewmemorycircuitdesigntechnologies,whichareoften K.Zhang( ) B IntelCorporation, 2501NE229thAve,Hillsboro,OR97124,USA e-mail:[email protected] K.Zhang(ed.),EmbeddedMemoriesforNano-ScaleVLSIs,SeriesonIntegrated 1 CircuitsandSystems,DOI10.1007/978-0-387-88497-4 1, (cid:2)C SpringerScience+BusinessMedia,LLC2009 2 K.Zhang drasticallydifferentfromcommodityDRAMdesign,havetobedevelopedtosub- stantiallyimprove the eDRAMperformance whilekeeping theoverall power con- sumptionatminimum. Solid-statenonvolatilememory(NVM)hasplayedanincreasinglyimportantrole inbothcomputingandconsumerelectronics.Manynewapplicationsinmostrecent consumerelectronicsandautomobileshavefurtherbroadenedtheembeddedappli- cationforNVM.AmongvariousNVMtechnologies,floating-gate-basedNORflash has been the early technology choice for embedded logic applications. With tech- nologyscalingchallengesinthefloating-gatetechnologies,includingtheincreasing needforintegratingNVMalongwithmoreadvancedlogictransistors,varietiesof NVM technologies have been extensively explored, including alternative technol- ogy based on charge-trapping mechanism (Fig. 1.1). More efficient circuit design techniquesforembeddedflashalsohavetobeexploredtoachieveoptimalproduct goals. With increasing demand of NVM for further scaling of the semiconductor technology, several emerging memory technologies have drawn increasingly more attention, including magnetic RAM (MRAM), phase-change RAM (PRAM), and ferroelectric RAM (FeRAM). These new technologies not only address some of the fundamental scaling limits in the traditional solid-state memories, but also have brought new electrical characteristics in the nonvolatile memories on top of the random accessing capability. For example, MRAM can offer significant speed improvement over traditional floating-gate memory, which could open up whole new applications. FeRAM can operate at lower voltage and consume ultra low power,whichhasalreadymadeitinto“smart-card”marketplacetoday.Thesenew memorytechnologiesalsorequireanewsetofcircuittopologiesandsensingtech- niquestomaximizethetechnologybenefits,incomparisontothetraditionalNVM design. With rapid downward scaling of the feature size of memory device by tech- nology and drastic upward scaling of number of storage elements per unit area, process-induced variation in memory has become increasingly important for both memory technology and circuit design. Statistical design methodology has now 75 65 NMOS σVTN 55 (one device) V) 45 Minimum device m ( VT35 σ 25 Nominal device 15 Fig.1.1 Transistorvariation trendwithtechnology 5 scaling[1] 113300nnmm 9900nnmm 6655nnmm 4455nnmm 1 Introduction 3 Fig.1.2 Relative performanceamongdifferent typesofembeddedmemories become essential in developing reliable memory for high-volume manufacturing. Therequiredstatisticalmodelingandoptimizationcapabilityhasgrownfarbeyond thememorycelltocomprehendmanysensitiveperipheralcircuitsintheentiremem- ory block, such as critical signal development paths. Advanced statistical design techniquesareclearlyrequiredintoday’smemorydesign. In traditional memory field, there is often a clear technical boundary between different kinds of memory technology, e.g., SRAM and DRAM, volatile and non- volatile.Withgrowingdemandforon-diememorytomeettheneedoffutureVLSI systemdesign,itisveryimportanttotakeabroaderviewofoverallmemoryoptions in order to make the best design tradeoff in achieving optimal system-level power andperformance.Figure1.2illustratesthepotentialtradeoffamongthesedifferent memories.Withthisinmind,thisbookintendstoprovideastate-of-the-artviewon mostrecentadvancementsofmemorytechnologiesacrossdifferenttechnicaldisci- plines.Bycombiningthesedifferentmemoriestogetherinoneplace,itshouldhelp readerstogainamuchbroadenedviewonembeddedmemorytechnologyforfuture applications. Each chapter of the book is written by a set of leading experts from bothindustryandacademiatocoverawidespectrumofkeymemorytechnologies alongwithmostsignificanttechnicaltopicsineacharea,rangingfromkeytechnical challengestotechnologyanddesignsolutions.Thebookisorganizedasfollows: 1.1 Chapter2:EmbeddedMemoryArchitectureforLow-Power ApplicationProcessor,byHoiJunYoo In this chapter, an overview on embedded memory architecture for varieties of mobile applications is provided. Several real product examples from advanced application processors are analyzed with focus on how to optimize the memory 4 K.Zhang architecturetoachievelow-powerandhigh-performancegoal.Thechapterintends toprovidereadersanarchitecturalviewontheroleofembeddedmemoryinmobile applications. 1.2 Chapter3:EmbeddedSRAMDesigninNanometer-Scale Technologies,byHiroyukiYamauchi Thischapterdiscusseskeydesignchallengesfacingtoday’sSRAMdesigninnano- scale CMOS technologies. It provides a broad coverage on latest technology and design solutions to address SRAM scaling challenges in meeting power, density, andperformancegoalforproductapplications.Atradeoffforeachtechnologyand designsolutionisthoroughlydiscussed. 1.3 Chapter4:UltraLowVoltageSRAMDesign,byNaveen VermaandAnanthaP.Chandrakasan In this chapter, an emerging family of SRAM design is introduced for ultra-low- voltage operation in highly energy-constrained applications such as sensor and medicaldevices.Manystate-of-the-artcircuittechnologiesarediscussedforachiev- ing very aggressive voltage-scaling target. Several advanced design implementa- tionsforreliablesub-thresholdoperationareprovided. 1.4 Chapter5:EmbeddedDRAMinNano-ScaleTechnologies, byJohnBarth Thischapterdescribesthestate-of-the-arteDRAMdesigntechnologiesforvarieties of applications, including both consumer electronics and high-performance com- puting in microprocessors. Array architecture and circuit techniques are explored to achieve a balanced and robust design based on high-performance logic process technologies. 1.5 Chapter6:EmbeddedFlashMemory,byHidetoHidaka This chapter provides a very comprehensive view on the state of embedded flash memory technology in today’s industry, including process technology, product application,andfuturetrend.Severalkeytechnologyoptionsandtheirtradeoffsare discussed. Product design examples for micro-controller unit (MCU) are analyzed downtocircuitimplementationlevel. 1 Introduction 5 1.6 Chapter7:EmbeddedMagneticRAM,byHidetoHidaka Magnetic RAM has become a key candidate for new applications in nonvolatile applications. This chapter introduces both key technology and circuit design ele- mentsassociatedwiththisnewtechnology.Thefutureapplicationandmarkettrend forMRAMarealsodiscussed. 1.7 Chapter8:FeRAM,byShoichiroKawashima andJeffreyS.Cross Thischapterintroducesthelatestmaterial,device,andcircuitadvancementinfer- roelectricRAM(FeRAM).Withexcellentwrite-time,randomaccessingcapability, andcompatibilitywithlogicprocess,FeRAMhaspenetratedintoseveralapplication areas.Realproductexamplesareprovidedalongwithfuturetrendofthetechnology. 1.8 Chapter9:StatisticalBlockade:EstimatingRareEvent StatisticsforMemories,byAmithSinghee andRobA.Rutenbar This chapter introduces a comprehensive statistical design methodology that is essential in today’s memory design. The core of this methodology is called sta- tistical blockade and it combines Monte Carlo simulation, machine learning, and extreme value theory in effectively predicting rare failure (> 5 sigma) event. Real design examples are used to illustrate the benefit of the methodology in memory designandoptimization. Reference 1. K.Kuhn,“ReducingVariationinAdvancedLogicTechnologies:ApproachestoProcessand DesignforManufacturabilityofNanoscaleCMOS,”IEEEIEDMTechDigest,pp.471–474, Dec.2007. Chapter 2 Embedded Memory Architecture for Low-Power Application Processor HoiJunYooandDonghyunKim 2.1 MemoryHierarchy 2.1.1 Introduction Currently, the state-of-the-art high-end processors operate at 3–4 GHz frequency whereas even the fastest off-chip memory operates at justaround 600 MHz [1–6]. In decades, along with advances in processor technology, the speed gap between processorsandmemorieshasbecomeintolerablylarge[7],andthisspeedgaphas driventheprocessordesignerstointroduceamemoryhierarchyintotheprocessor architecture. For processors, it is ideal to have indefinitely large memory with no accesslatencies[8].However,implementinglarge-capacitymemorywithfastoper- ation speed is infeasible due to the physical limitations of the electrical circuits. Thus,thecapacityisusuallytradedoffwiththeoperationspeedinmemorydesigns. For example, on-chip L1 caches are able to operate as fast as the state-of-the-art processorcoresbuthaveatmostfewkilobytescapacity.Ontheotherhand,off-chip DRAMsarecapableofstoringfewgigabytesthoughtheiroperationfrequenciesare justaroundhundredsofmegahertz. The memory hierarchy is an arrangement of different types of memories with different capacities and operation speeds to approximate the ideal memory behav- ior in a cost-efficient way. The idea of memory hierarchy comes from observing twocommoncharacteristicsofthememoryaccessesinthewiderangeofprograms, namely temporal locality and spatial locality. When a program accesses a certain data address repeatedly for a while, it is temporal locality. Spatial locality means thatthememoryaccessesoccurwithinasmallregionofmemoryforashortdura- tion.Duetotheselocalities,embeddingasmallbutfastmemoryissufficienttopro- videaprocessorwithfrequentlyrequireddataforashortperiodoftime.However, H.J.Yoo( ) B KAIST K.Zhang(ed.),EmbeddedMemoriesforNano-ScaleVLSIs,SeriesonIntegrated 7 CircuitsandSystems,DOI10.1007/978-0-387-88497-4 2, (cid:2)C SpringerScience+BusinessMedia,LLC2009