DTIC ADA424908: Deep-Level Transient Spectroscopy Study on Double Implanted N(+)-p and p(+)-n 4H-SiC Diodes

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Fore Apymea
‘OMEN, 17040188

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U.S. deny Research Office
1.0, Bos [2211
Rescarch Triangle Park, NC-27700-2211

sro 3486

lar sexs opinions aor digs contains in thi cpt ato thas ofthe authors and sho atte consturd sn oficial
Deparment age Ara position. poicy at deision ness so designated by ober docuretsiva,

Avo for bi ere; wii aid

TE RISTERCT eT

Sem Ate Rape

(RRS Wa

20040713 018

ae STAT
pera At 298
Deep-level transient spectroscopy study on double impianted
ntap and p*-n 4H-SiC diodes
‘Source iva and ub Veo

1, Papanes0u

KA. Jones ane M. Dareng?

revi, Cage Mean ner,

set 7860

0.W. Holand
Biprmert orb, horn af Souk Ts Dest Ta 72884
RD. Vipul

Depormel ef Bsc Shc af Mastin Calle Par, arn 20782
6.8. Wiser

Reciv 17 Feu 202 econ 1S Sapte 208)

Plans <p aml pr nto inte. lated bv ARSC ail Layers wing 8
Gaubleinpletstiog icin fa sterange scerpt Iliwad by a abaerange donot
‘pls and s2 pve, ached wig pre ey ee? SiN pe FOREN
(DES cde vel whic ay flue deco eh al esr. Fer AL OCB 5
tu the asepon ole Nor Peel aU donc, wal yn. pesord ot TOD*C and
usb ar 600 D650 an AIN protec ep iee aps se observed Kee ates
hogan leh ap bee) ee ie ws deen glyaeetcenplees, A nt -By
PosLeV wn shanti altogstciphinled singles. SB setp= ra a “Ey+ O20
ida dior tnp a= BABY wore observed in ALsnnlanse sep. woul
toronseand Neosat a =-E.-h0 6beV Semen be IETS spot gate ods. In
(Codes ah nlc: php tis bape Bsn, pL OVEY. aed By AOE ae
feon, hie ond sed fo plantar a ter specie. C200 Amarizen dnt a

Phacce, (DAN WOM 1D

Lintaopucrion

Sis estes (SC) fm mise mgatC faa
satig Hgiowoen!™ Ligbdonpconno? "ax ek
ftequency* devices boss Ia ih then eon
igo luge seurtog sett dn web Ral =
akin fe i ascent smal sty om Sie
Taken ging a 7 wh ataclve asked fr ws be
tating pena vies!" a dosblesonkataioe posse,
fining af grag s3ceds9e plan ot ed
bn sallow ge lone gl, te seta fot
slag congloeetary Belts arses aml sens
High-power devises ster bins a ‘OBTs, For he
sie Io wind Mh boeing in Hh pees
devs, te Cg ene sido Us une 9eds too
fe. cgoLng Hgh-songy fom impiiaon te hee
‘yey neering aml nan co dy sad ace te
doops dots crema ty the ipl stueeceaing
{oping psec, el lt times fesse pofoeree
Docplovel uandzor epee (GAS) an oxsTte
seoy a aces det,

‘opt fe wasnt of dhe =p a ote jee
in vets By doh irplntton proces wat
ple ove hing dees areas bea 3
pnts en DLS chance of cnble-Feivel dees
On aIDSNC (> ov snowing Other pa BE td
Sbsecmpioa etal dade ese, les by ele 9
impli nemo ony pe om ng
‘aon in oye pyar bv Urs ou paar
fel pre huctint dogs: were rede une sucozsive
‘Slstisarn, nlp energy ateopie (alc and ene:
Soon 1 nla, sd were escalate ty
omits. ts inptn-depirgyeormeassd 8
Tels cavatonevnid trp od ise tect tas
pesca the ep ager ee ie fe inp
aystons BUTE fr te He deere. offs a
weae,thiesinnd iy tai ntvaioe engl, De
{eel rsa, 96 posse ain

WL EXPERIVENT
A. Deve fbrlation

hats, ciel 97 9 on ame Upeion das we
Tabi mg ee ngpe AHA cn") AEESEC eptnets
own 29 ths Site, 8° obese, 9° on 0! ALESIC sb
oe, spectely Deep orp pe vgn woe aoe
Uy slices, muligleensnry, tox oll etisgen (0
cs or om or ae fe Eh“
posiedy Sbalow pt ere” regis ee Sted ane
fy seseeeaiea, moliplosnsqe: bua pent A

{SR etc Te pl elses tH esi”

Soliman doing destin ar: ec i Tale TTo ebin
Tiss abe contort, afer pat ft 3 sag 2
(sg yildng 2X19" ca Mot 12 Ler A os
formed tor 900 9a fp regia ests i te
tesa nate he pacar ome msl cote wc a
Srl wore pvt TIC ig 2 C1Sk 2 gm)
‘iQ. Tages ata ngnt mas Bser Toe as We a=
deed 9 1600=: 690-4 Tee HD a osng av AIS ems-
Ion. Olaiosuracts te formed by eran expen of
(Shen TWAT enw pp region, vests, a
Feed 200° fr mina vcs jer onc
finn sa od The doe le eds jae i
283 ame pm jtion dovn el we ok seta
Fig Tosantep devin orsinciesiler ta fe. 1
a her in lief p gon aml ier va WS Md
Si, paring fe he ees.

2. 0LTS setup

he dsr of app Hee’ i SiC double inpane
ides a preswe:wing a campore cred ya
fomna2e BETS srs Ines EIQRAD, Pe mea) of the

roge soins vow ofp dovbledmplanin lode

a1? Stl

10" so Sop Pingtotd ote

riwsert ta ane ales
A et Wa i ams sta

VAI double-troptanted

ge
is
oe
Seah *
@

ode

AUN doubteinplanted p

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a4
vag)

oO

Wat pat € ems rH

roe wa paved by comptes aed obeting
saonle eanactanes, apinirg physsteaparivenl p>
nce, end staging» Luge emer sf erperr I
Sent Capaitage DIYS nat pafonsed #3 a"—p cad
F=n doubling odes cae Hing eles
Eve Reg ane darn ab rent severe slags
rede fo sweep he invton Grease fen ee. De
DDETS aysom ood in his snd ens wel a tbe weges
sure range of thu DK Ye peated 3a ease
fn the eecpsmnecange fora 2 co $50 el
oud est sige site! sas wets pf brow 620
‘ht oe syst tations, hr iter dee vl
Js reauited Yo abet | o¥ fiom te bard eyes Wed a
finn nessun blo! 20D K, btsans nog
DLS peake wer there fore erinn see 2
ial are ramasnentIypeal CVs ae owns
Figs, 2 and 20) espoitedy: Fr a7 pam pn
file. Ti Vf on cele Le ap deni

UU, RESULTS AND pIscUSSION
‘A. Binie eecves! enstactertaton

‘A scones lage carl a 830° Aka
soo ver SIP sovse Ue fas the ND. Ai

liplines® n° =p claus SON aeons 133,
S137 Aken? se 280°C. The NISL depts a —p

ode fad x roomtenpetone leakage came! af 64
SADT An a 26 rane bin, of iced ta 17
210 #A.erF ay PONT A phe akage came AL
implatet siks eels do high esa plant
flivage compared fo the Bengt Uides Detaled
Tv concise af =p oon Sie we oped
howl signify less ence up 420 8
evra ed ste conien. Fv fem
oka: ELTS rncreneot ow ep eds in he
(iy A hpher leakage evoere - 89 1? Ao ata
ove ins of 4 or AUB doe bl-mplated at) %
dived cnaphed (the e”p ded fr to se ree
ate ttn NS and ALP dimple pe ae,
This wae be do bight dca of rmge cee ts
Uh AT bapa, ed Hor he per Feaen
fri laln copied the ange pt aon we fo
fos aape toeutan fn Ue ap dd, Ae sown
Sib snes dover usd er Be seen of pe
ins relight "han thoes for ter” mepem of wtp
ds. The i as eo compen fora igh eas
Sat rs The Pe agen (ESD et)
Ser eaupared we donor (er Tacev). In adiiion.
Daher atonal a8 fox p* “ner Roman) ee
fed to ise orn age won rae EE
Jp slanage fy De po des cored Be
<dedey, The” =p od p7~ anes a2 processed Jo -8
Site ure, Sao eng say weet C the
hugh lxings eee

2. DLT mecewrements

(Cine ths DUES apc Hs Aine pos a he
c= canister, we face Steninet @e Beamal ace
Tem enoey lh Sate store aap Aan
Concenuabor {8 wl deo level Ea agp a 8
ck metho BETS spo sry, he near Lang's
1 pip does

fein, asoseieine ola 29 ¥ wae
plik ding ie DLT pesienees. ho dogg ence
trom the geal vetea 2% 1D ae?
dnote den to even gee igh hen he doping
SScecabon ef -be pre gee (1 Ue") Hence
fhe Celeon rep He aston Bode expoms ly
Into Be aceon eginn, th ey le pad one >
Choe ste To ean an opti DES pce ang the
ese pose i signe, hs su sion we winger was
“al refeen 30.8 me pt A pea ULTS spe
true nd soreorcinsng Aen lol fr the WI ol
Uplate ods, biol a ast: an of 20°. a Ge
‘er ing pe 1% and ee osu aN
{Rose io Tis tt alae The es DUIS
Seuss tum he tec ape 2D
TRU RY hich abe forse ty fe pony alee Sep
Saree Mensa dew nth & flere rae indo
{Es tapes vlege (2; tnd poten me
tucson (Da Sly and ome sone Bl FY oY

‘a saponin or! ECON
22 tgp Pre 8, He 1,4 Jove 9904

WAI double-Implanted n-p diode

S04
Bos |
i
bos
oat
A ra
2 a
semper
a

re totems p ace °

IZA dint pot, a somo i th fal ig a
‘Tues pede me heed @ be tied Uy te AL me
ln Fite of an Tillers opal alae ep
ates A-eypled SIC,

he tap heal at Pct AS3Y (CHALE wie 9 capers
roy seam of 8X10" Be, feline Woe ae >
fevniss Sovalbiog kines aad Sevieucod deters We
thaw Scrat a pik wi the Sune ahh orgy aD

erro a8 that 3f NBAL ip kj Nepal
rite Hela cio tad in vik som
£2 te tegen dope in ho ype opal ge fs wich
then op age sd a ogee tee
lye: The tap NAAN lng al B+ 9 So al
SE be Dee nh ot is &

‘shavon To eign ofthe other tee deny NEA ul
Neal) al Neher eis ae denied Ise.

‘Appeal DLTS specera aed conesp-ag, Aman
let ian a vases af 20 a fred eg ek
EN Ycand wine Window of 288 nist np dd
weit 3 deep hoten implanted pegion am Steve
Fig.l elon? colon. ae Jon eps 68 and
{ib wept Tague ap signee 30
IAB, tober, of whieh NOM ie la ain

1N doublodmmpanted ep dlode

ae 7

~ Rampart

@)

eng and cops artim atta of NSA, whieh te

fe deste couse oorerivieg hate As
fhown fe Ti 5, he sersey of the tap KSAONHE e
nich a inotare of renee nae WOIQge. oie

etry unctitaion iorter oe Thee tp ae
ems appeic, tesrg tat s ein as3

Fe 0.51 e¥sapin Al Imptantad tp dod
8

402 ag ods
Blatance

esto hone or sopniyh Ae tne ae-PR 9
higher det sonenttion than sb om fray Fn
ie jston Win sugeets at the wig ocho REAL,
Up faves Somatic delet

‘Renter ton fer ho lowe NSAUNSE tp dems
iste eave visi epson Be: ueleon
‘Bon sto dhe p gin, where Be N dope: coneataton i
fool the backgrovnd 9 voncanf cy the ap epic
Tass ona Tile! ~p peti fin, waves at
lomee reverie vote rly ich ge 2
stains ft aogen plat al of hse ston Sen
Its a ger repent street
Te fat the shape af Fig, 3 sma oF he imp
1a fate pect shootin Fg ht SA hah
ha the sane stain eheigy a8 TAL eg. 3) Dok
‘pore promient tag the AAL up. wy
Mar CM, hin ly ne hs ede
tee prsene of Door ato by I Fam: ipa
Es hy Gog eal! Cansoin te aaa en
sae UAT @8y ant canine ura ecko oS
Soren), we foved ne fhe Dares in IF say
maros wel aie che pana ahs of non D gr
fer ar it Lie D cher has been obeevedsaloe™ in
Timo Cf bd na rp ey
tone D wom at Cte dw oregon lv
faney defect The Hf aaiable fn NALLrpauted dod fs
The oneal ctr emeeneaian 1 3
inthe ge epitnal aye, terns 9 begrsonorie
(Corv"ae7) of B i aaale bn NS lente dies,
fecoing em Reker neni, KAM peck oman the
NAL pede Tho teat of ke DLTS spate sents otra
toss weve peaks al By 11608 INSB! and ~E,
OBE eV NEB) Tes ores of thee 1 peaks eon
ssn, baciney sts als ee nie LTS spoof
Spline 9p ds, shown a i, HE, ems RSA.
‘and NGAI wih a bigher Seay tin ts WD ant NOD
Peake me I hnpitet wu! pei. Wis eaouabe
Eenjetne Che hae 00 Desks re alin A lst oes
elo docp Jv.

2. pia codes
ortke 97 =n diodes, w remmebiny vik geal = 4 ¥
sone epplicd for BLTS eesarenon, A see aw
ee ia we appli ore pn amg le
2p ids asc Rh ge ce Ts oh an
pues! DLTS asic be ie Ds pois wap sgn
he te nisi ie wil ws var cn 2A
smd 703 5 8 cypeat DUTS spor std corcaponding
Driven play for icdes ade hw tp wo
iplewst “tne weglon end 2 shalow aLinglaniod
-Fszpon, fora forward Log poss of'2 Val ame win
Tho of BO4E a ae sn By. Sah aod El tptoe
tay Tn te sve, the csp cone, ALN sl 88, a
aby Hore aceon Mt) aml Bee EGA.
‘dente em. eapstvaly,ae mes promi al shape
than the repctve eats, NCAT are Rin Oe DOTS
fpsinua of NUM 7p ager shown He
Seip sna 8 al claves igh Ge
‘dst Frage} compared th = sea, ily
ng fe segament ofthe peaks te AI sled doe

AINN double-imptanted p’-n diode:
Ps
on anit
VA
“meng
(a)
‘ aan AoW
“| 6
ge . |
Be WSO
ai aeN am
* an ae
eo gps
(b)
we fotmdacryes gt enn

cenit ckiy KW lea Som Table I Bol oe A
Eenootsarinn inthe p™ gion a te pm dade ease
fier gies as AL eonssoetion the pein a he
peop rnin, & at cous obsored a BeBe
{ALL fa a ile wiedo of 48 sd a lag plo of
SY in tne p'na lod, coud be sites dopant
ef ccm les sao ued to 4 dopa cei |
The la so The dma sop se a AVN, De
il oh Fy | hay ae hang oer oer
af egies higher an Gal ot ep dds. could be
Invi! a dsc cores mar satan
regen dope. eee sonosnkacen in Amp
ppoen sack ead 4 bigh B corsenaan ia ha dopton
top, i eee ea tbe ign ip ame eH,
thay heise fora igh corwentaica of OMS ap 2
the AIR plaid p= ds. Tis ap dd 0 apg os
(Piva pea ithe spect ANP uated
arr ded bora Ue Lack of tpn pin he
Coe, sowed ler Tyo ror wu ap beled
[RIRW an ISN, aay event ho Ee ITS pr
franco 4) ABN ble pw dod With 8 cap
Tseng wei TE Man AISI DADO a. 8
(dae ens, fetes To 4D cle inveeing baron
ackgreset icp. The ese Sante (ABN 21
0 Pm SELIG A amen £0D¢

AUP double-mplanted pn diode

i ae

orn! Capaanee fF)

eee
Tempero

Bean Outlimteeta'cn ete

038 sn be best wraney ee
Feat emiguatins hyo ihe tsp "=n
{ee compara cfr cemespesing pa fen
fe, probaly econ of a higher de! pat dmg
onion the pt dil
"he TTS apni al weerapfing Aches ps
for tho pn dldes th phosphorsmglino! 5 ead 3}
Inpiral 9" zn er er Hp ale 92 and
as dow of 208 mz wes in Tie. 1 ar TH,
Tespestncy Tap tot san 19 ABN a8 ABN Fig
fn) th he ee asin sy ae em. sey
Sec ete ws Any como com, ae 80
fake libeka AP and AIP wily corset o1
SacMon thea ee taps, lbeha AME ABP. aad
(AAD, ate olor inthe species wih cage eos
30°810- ent and a wserisen AU en The
innit ate oa eon t y+ 95158 Ee SR.
Fig 3 5 fn Fe as, aol ALIN tu i. al oct
ety ee ALD implariod pn dee TR che
‘ae m0 nears wii ore i in iz ds Tt
Sys ry lore pre erga
‘elder the AIH peak Ths eal sgn pee athe
AEP dsalesmplacied dad's Di sp bev oeation

(ewer) setrveional bekgisand xinsgre te
Pr eriisal layer wed foe paling the pn 8s
Urscrce the be hen srance USED 5 aes af
Vac platen netone ein ot the me <p
toa yor The a pak at Bt G63 in Fg 7

fies ea of 10H ee apse
fF TO em a em sips tat do wot Ba
Bross ila fn tem phospnvedtet omnes
nse may Se eeprsible Ir eps Th Rg ita
(ESP yeah als dar AED po ace abe AEs
Goer ak -+0.Fo¥ wed Ayes? spool, [Pp
He or sew eel oer ode af Ui a's
Wisish do oo Bose w pspaume tpl in sa, Phos
vas oy he ioled i fhe dr erm css Ma
fut veaponile fr tg pokes as wel. A deta at 3
filed pee agliade of the DLTS gsi, i
arotcg co Ie prot ASD (By 1 2.764, ashisved & con
Sow value tthe Sag plge Pr fy a chal
Cope cen milao p defo as ein i
eee T shod 9 conan incom Nap concentration
Isrts fenton wera, Tra raps a ae esc a
igh coneremtone a te june irae sent ah
fies Ihe dies FF chomteritiee Mw of tase apa
faints ac real i el 9: ice mae oo
Inglett semen,

v, sumaaRY

cep Tech the doubles augated n7—p INCA)
snd gn (ALN Sodee mate STCIC. we add
‘ringtkespaange DLTS olaiqe The igh age
veer bolavies ofthe 7p etien dines as ane
ting tie DL'S ca, whieh ely ve 4 Wighe ag
fiw of ap sswewrns i there dios comp to
then pede 3 high degra sult? damage crn
Fe bigeele Al plnains (en fe pepe) ae
Pres ends eons inlay lew does and bier
Ninlnckons fied fern” coo ofthe t= dado
‘ena ne etna fo Higher mp ees ad
Sigher esos lay caret Hata ia opr Anes,
Biot ths ursegeermplomel dito shed a pocint
Tekin ha "she eV alors By Uhh rnb! a 9
Treated iy a marseedec Gomples soot Cancentaton
Blaha es Bighoe ees ner steal onda of
The dices, hich shsly eae th le of fm nen
‘vgs te Fesmatign of Bsa
fot all Alvan emp ea ptm alae, we
imine gsebe at =e" O22 aed By=0ADEY,
tien Ti Tae compl set, we nha
Festhe 2 —p dives, where fcanion as wd 1
fiom the Sep pit ue aps ae ited im he
‘Seen irge of (on. shoes fr the pe
Janston totes shee Alesana sw or hs at
Ung rcgionforeip, dri es ez sre co
etme. hb, 4 Belted cei wap a= By
"poe seni he DETS crc of 3 des, cep
fete ry does age Sh 8 phospnde-l mpd
aap esi

spy. sce los ov ap oratantsopsihee
Disslaat

Howe itn! pas “By 4M, Ep OTN, and
Et 9268 ayo obser popliteal,
‘hs dep cote at By G-7O¥ oan be mtd 194 oi
fc Soin re Sere ti work athe oot
‘pas ae sminavned i Tabls ,gtor ele ce
feet cameron (10% 105m #) J ourd a om
device ompardts then? ~p Boe The give sce
te ange ane thei iefcoss en devine poearmaney ama
liye a sp gh ag eta
the pln diodes compet te fe 17 =P cde: El 3
pho ooase leakage saranda ep "on dda

ACKNOWLEDGHENT

Tw enki supe ep ARO ID
Ns PAANIBAN- eID

1 endes Grok

Ce Oy
Suc Se a op he aaa,

Aes oe ug ABM sce tp sie=inarvcoemane ay