Wenjian Yu Xiren Wang Advanced Field-Solver Techniques for RC Extraction of Integrated Circuits Advanced Field-Solver Techniques for RC Extraction of Integrated Circuits Wenjian Yu • Xiren Wang Advanced Field-Solver Techniques for RC Extraction of Integrated Circuits 123 WenjianYu XirenWang DepartmentofComputerScience CadenceDesignSystems andTechnology SanJose,CA,USA TsinghuaUniversity Beijing,China ISBN978-3-642-54297-8 ISBN978-3-642-54298-5(eBook) DOI10.1007/978-3-642-54298-5 SpringerHeidelbergNewYorkDordrechtLondon JointlypublishedwithTsinghuaUniversityPress,Beijing ISBN:978-7-302-35151-1TsinghuaUniversityPress,Beijing LibraryofCongressControlNumber:2014937680 ©TsinghuaUniversityPress,BeijingandSpringer-VerlagBerlinHeidelberg2014 Thisworkissubjecttocopyright.AllrightsarereservedbythePublishers,whetherthewholeorpartof thematerialisconcerned,specificallytherightsoftranslation,reprinting,reuseofillustrations,recitation, broadcasting,reproductiononmicrofilmsorinanyotherphysicalway,andtransmissionorinformation storageandretrieval,electronicadaptation,computersoftware,orbysimilarordissimilarmethodology nowknownorhereafterdeveloped.Exemptedfromthislegalreservationarebriefexcerptsinconnection with reviews or scholarly analysis or material supplied specifically for the purpose of being entered and executed on a computer system, for exclusive use by the purchaser of the work. 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Printedonacid-freepaper SpringerispartofSpringerScience+BusinessMedia(www.springer.com) Foreword Thisbookisaboutthree-dimensionalRCextractiontechniquesformicroelectronic designs.TheauthorsarefromtheParasiticParameterExtractionGroup,Department of Computer Science and Technology, Tsinghua University, which has made many significant contributions to the field since 1991. Some of their approaches, e.g., direct boundary element method (BEM) for C extraction (2001–2006) and hierarchicalblockBEM(2004),havebeenincorporatedinindustrialtools. Resistance and capacitance (RC) extraction is an essential step to model the interconnectwiresandsubstratecouplinginintegratedcircuits.Theparasiticplays asignificantroleinthesystemperformance.Advancesoffabricationprocessesand new materials with various dielectric permittivities call for accurate and efficient extraction tools to handle complex geometries. Although RC extraction has been aresearchtopicintheelectronicdesignautomationcommunityforabout25years, largerdesignsandfasterprojectturnaroundhavekeptpushingthedemandforbetter extractiontools. Theauthorscoverthestate-of-the-arttechniquesofRCfieldsolvers,mainlythe boundaryelementmethod(directorindirect)withacceleratingtechniquesandthe fast floatingrandomwalk methods.These subjectsare relativelynew andof large impacttheoreticallyandpractically.Thecontentalsoreflectstheresearchactivities oftheauthorsinthelast10years. Thisbookpresentsasystematicintroductiontoandtreatmentofthekeyconcepts oftheextraction.Tothebestofmyknowledge,itisthefirsttimeforamonograph dedicatedtotheadvancedRCextractiontechniques.Variousfield-solvertechniques are explained in details, with examples to illustrate the advantages and disadvan- tages of each algorithm. Readers are encouraged to consider the computational complexity, physical theory, numerical stability, robustness of the algorithm for general cases, and applicability for software development and maintenance. The presentationbringsinsightsofsuitablesolversforspecificextractionproblems. SanDiego,CA,USA Chung-KuanCheng v Preface Themaingoalofwritingthisbookwastopresentamethodologicalandalgorithmic perspectiveonthefield-solver-basedparasiticextractionofintegratedcircuits(ICs). Specifically, we present advanced techniques based on three-dimensional (3-D) boundary element method and floating random walk method for the problems of resistanceandcapacitance(RC)calculation.Withthefeaturesizescalingdownand mixed-signal interference in modern ICs, the research of parasitic extraction has gained much concern in recent years and promoted the utilization of field-solver methodsfortacklingthechallengeofaccuracy. Now,thefieldsolverwhichdirectlysolvestheelectrostaticequationsisbecom- ing more and more important for the RC extraction of ICs. It is a necessary supplement, or even a replacer, of the existing parasitic extraction methodology. On accurately capturing the complex interconnect geometry and the substrate coupling in mixed-signalIC, the field-solver method has distinct advantages.The major obstacle for its application is the excessive computational expense. The complexity of interconnect structure and even tighter performance margin for designingnanometer-technologyICshaveurgedtheextensiveusageoffieldsolvers. Therandomprocessvariationsalsoaddsignificancetothisrequest.Allthesehave pushed the related research for 20 years. Various accelerating approaches have been proposed to reduce the computational expense while preserving accuracy. Until recently, the achievementsof these works have been applied successfully in industrialtools.Theyaredailyusedforsettlingthesign-offtimingandverification issuesinvariousICdesigns.Theseachievementsinfield-solver-basedRCextraction aretheobjectofthisbook.Wehopewehavesucceededinprovidingauniqueand comprehensivetreatmentonthem. Theworkspresentedinthisbookaremostlyfromresearchprojectsundertaken by the Parasitic Extraction Group, Tsinghua University, China. Chapter 3 and Chaps. 5, 6, and 7 are contributed by Xiren Wang, mostly from his Ph.D. work at the Parasitic Extraction Group. The remaining chapters are written by Wenjian Yu,basedonhisresearchwork.Manyofthoseoriginalpublicationscanbefoundat http://learn.tsinghua.edu.cn:8080/2003990088/index.htm. vii viii Preface We wanttoemphasizethatthebookisbynomeansintendedtobecomprehen- sive.Theabsenceofcoverageofrelatedworksshouldbynomeansdiminishtheir valueandcontribution.Manyacademicgroupsandexpertsfromindustryhavemade significantcontributionsinthefield,andthereaderisencouragedtoinvestigatetheir works. Key contributors to progress in RC field-solver techniques include: Jacob White(MIT),WeipingShi(TAMU),LawrenceT.Pileggi(CMU),AliNiknejad(UC Berkeley), Dan Jiao (Purdue Univ.), Vikram Jandhyala (Univ. Washington), Luca Daniel(MIT),YannickL.LeCoz(RPI),SheldonX.-D.Tan(UCRiverside),LeiHe (UCLA),RanjitGhapurey(UTAustin),CharlieChung-PingChen(NationalTaiwan Univ.),Wayne Dai (UCSC), Nick van der Meijs (TU Delft), Luis Miguel Silveira (TechnicalUniversityofLisbon),IbrahimElfadel(MasdarInstituteofScienceand Technology),NasserMasoumi(Univ.Waterloo),MadhavP.Desai(IndianInstitute ofTechnology,Bombay),AngeloBrambilla(PolitecnicodiMilano),AlkiviadesA. Hatzopoulos(AristotleUniv.Thessaloniki),RubenSpecogna(Univ.Udine),Xuan Zeng (Fudan Univ.), Zeyi Wang (Tsinghua Univ.), Wei Hong (Southeast Univ.), JunfaMao(ShanghaiJiaotongUniv.),MartinBachtold(SwissFederalInstituteof Technology), Sharad Kapur (Integrand Software Inc.), Joel R. Phillips (Cadence Inc.),XiaoningQi(Intel),andZhuoxiangRen(MentorGraphicsInc.). Beijing,China WenjianYu SanJose,CA,USA XirenWang Acknowledgment ThecontentsofthisbookmainlycomefromtheresearchworksdoneintheParasitic ExtractionGroupattheDepartmentofComputerScienceandTechnology,Tsinghua University. It is a pleasure to record our gratitude to many colleagues and students who have contributed to this book. First of all, the authors would like to thank Prof. ZeyiWangofTsinghuaUniversity.HewasthePh.D.thesisadvisorofbothauthors and had been the leader of the Parasitic Extraction Group until 2006. The quasi- multiple medium approach for accelerating the boundary element method (BEM) originatesfromhisidea,andseveralworksonfastBEMapproacheswerealsounder hisguidance.Manystudentsinthisgrouphaveexcellentcontributionstotheworks inthisbook,includingDeyanLiu,MengshengZhang,LeiZhang,WangyangZhang, Chao Hu, Qingqing Zhang, Hao Zhuang, Zhi Liu, Gang Hu, and Chao Zhang. Special thanks are also given to Prof. Xianlong Hong of Tsinghua University for his great support during these years and Dr. Jiangchun Gu and Dr. Jinsong Hou graduatedfromthegroup,whohadprovidedasolidbasisforourresearchworks. WenjianYuisgratefultoProf.ZhipingYuandProf.ZuochangYeattheInstitute ofMicroelectronicsofTsinghuaUniversityandProf.ZuyingLuoofBeijingNormal Universityformuchhelpfultechnicaldiscussion.ThanksarealsogiventoDr.Jinjun Xiong of IBM Watson Research Center and Dr. Rong Jiang of Cadence Inc. for theirinsightsfromindustry,whichinspiredtheworkonvariation-awareextraction inthisbook.WenjianYuwouldalsoliketothankProf.Chung-KuanChengatthe UniversityofCaliforniaatSanDiegoandProf.SheldonX.-D.TanattheUniversity ofCaliforniaatRiversidefortheirhelpandencouragementofwritingsuchabook. XirenWangisappreciativetothemembersintheParasiticExtractionGroupof TsinghuaUniversity,wherehehadstayedfor5yearsandgotthePh.D.degree.Heis also gratefulto Prof. VikramJandhyalaat the Universityof Washington,who had been his postdocadvisor. Discussion with Dr. Dipanjan Gopeat the Universityof Washington,andnowIndianInstituteofScience,waslargelybeneficialandreally appreciated. The authors would like to thank the National Natural Science Foundation of China and the Beijing Natural Science Foundation for their financial support for ix