Table Of Content

Springer Series in Measurement Science and Technology Michael Quinten A Practical Guide to Surface Metrology Springer Series in Measurement Science and Technology SeriesEditors MarkysG.Cain,ElectrosciencesLtd.,Farnham,Surrey,UK Giovanni Battista Rossi, DIMEC Laboratorio di Misure, Universita degli Studi di Genova,Genova,Genova,Italy JiríTesař,CzechMetrologyInstitute,Prague,CzechRepublic MarijnvanVeghel,VSLDutchMetrologyInstitute,DELFT,Zuid-Holland, TheNetherlands Kyung-Young Jhang, School of Mechanical Engineering, Hanyang University, Seoul,Korea(Republicof) The Springer Series in Measurement Science and Technology comprehensively covers the science and technology of measurement, addressing all aspects of the subject from the fundamental principles through to the state-of-the-art in applied andindustrialmetrology,aswellasinthesocialsciences.Volumespublishedinthe series cover theoretical developments, experimental techniques and measurement best practice, devices and technology, data analysis, uncertainty, and standards, with application to physics, chemistry, materials science, engineering and the life andsocialsciences. Moreinformationaboutthisseriesathttp://www.springer.com/series/13337 Michael Quinten A Practical Guide to Surface Metrology MichaelQuinten Aldenhoven,Germany ISSN2198-7807 ISSN2198-7815 (electronic) SpringerSeriesinMeasurementScienceandTechnology ISBN978-3-030-29453-3 ISBN978-3-030-29454-0 (eBook) https://doi.org/10.1007/978-3-030-29454-0 ©SpringerNatureSwitzerlandAG2019 Thisworkissubjecttocopyright.AllrightsarereservedbythePublisher,whetherthewholeorpartofthe materialisconcerned,specificallytherightsoftranslation,reprinting,reuseofillustrations,recitation, broadcasting,reproductiononmicrofilmsorinanyotherphysicalway,andtransmissionorinformation storageandretrieval,electronicadaptation,computersoftware,orbysimilarordissimilarmethodology nowknownorhereafterdeveloped. Theuseofgeneraldescriptivenames,registerednames,trademarks,servicemarks,etc.inthispublication doesnotimply,evenintheabsenceofaspecificstatement,thatsuchnamesareexemptfromtherelevant protectivelawsandregulationsandthereforefreeforgeneraluse. The publisher, the authors, and the editorsare safeto assume that the adviceand informationin this bookarebelievedtobetrueandaccurateatthedateofpublication.Neitherthepublishernortheauthorsor theeditorsgiveawarranty,expressedorimplied,withrespecttothematerialcontainedhereinorforany errorsoromissionsthatmayhavebeenmade.Thepublisherremainsneutralwithregardtojurisdictional claimsinpublishedmapsandinstitutionalaffiliations. ThisSpringerimprintispublishedbytheregisteredcompanySpringerNatureSwitzerlandAG. Theregisteredcompanyaddressis:Gewerbestrasse11,6330Cham,Switzerland To my family Preface Youmustmeasurethethingsthataremeasurable,andmakemeasurablethethingsthatare not. GalileoGalilei(1564–1642) New and improved materials, better machines, and phenomenal progress in manufacturing contribute to technological challenges of today for inspection methods and techniques. In the production of mechanical, electronic, or optical microcomponents, the dimensions are even continuously scaling down, while the surface structures increasingly become more complex. In consequence, development, process control, and quality control must be carried out on these size scales withsophisticatedmeasuringdevices. Only with metrology we are able to check our manufacturing, to describe our product, to establish models for our planning, and to validate the models. The corresponding applied metrology tools must then meet the specific requirements. Hence, to keep pace with the demands from industry for greater accuracy, repeat- ability, reliability, ease of use, and continuous process control, new and improved measuringtechniquesweredeveloped. The purpose of this book is to introduce the commonly used measuring techniques oftoday. Indoing so,thebookdeals with many,althoughbynomeans all, methodsofsurfacemetrology.Someofthemalreadyhavealongtraditionbuthave experienced big progress not only with the progress in the computer capabilities required to handle large amounts of data but also with the development of intense lightsourcesandmoresensitivedetectors.Thebiggestpartofmeasuringmethodsis related with optical methods and imaging, especially those which are basing on interferometry.Butalsotactile,capacitive,andinductivemethodsareconsidered. Thereareotherbooksondimensionalmetrologythatcovermanyofthemethods presented in this book. While Optical Shop Testing (2007) edited by Daniel Malacara concentrates on almost all optical methods for examination of optical elements and their surface, the book Optical Measurement of Surface Topography (2011)editedbyRichardLeachgivesacomprehensiveoverviewonopticalmethods for dimensional surface topography measurement at that time. The Handbook of vii viii Preface Optical Metrology: Principles and Applications edited by Tōru Yoshizawa and revised in 2015 is quite similar to the book of Richard Leach, with contributions of other experts in the field. The book Characterisation of Areal Surface Texture (2013)editedbyRichardLeachconcentratesoncharacterizationtechniquespartic- ularlyforarealsurfacetexture. Books that emphasize more the scientific aspects of surfaces and interfaces and the corresponding measuring methods are also available. Surface Science Tech- niques (2013) edited by Gianangelo Bracco and Bodil Holst describes the experi- mentaltechniquesemployedtostudysurfacesandinterfacesinwhichtheemphasis is laid on methods and techniques used in surface science. Surface and Interface Science(2012) withsixvolumes editedbyKlausWandeltcovers interface science fromanewsurfacescienceperspectiveandisarathergoodreferenceforscientific peoplebutlessforpractitioners. To write this book finally required reading and valuating many monographs as such mentioned above and a still larger number of publications related to dimensional surface metrology. The total amount of published work is, however, too immensetoconsideritall.Therefore,Ihopetohaveincludedthemostrelevantup todateandapologizeforallthecontributionsnotconsideredhere. Asthebookprovidesaccesstomanyprinciplesandpracticesofmoderndimen- sional measurement on surfaces, I hope that this book will prove of value to developers and practitioners in the field of dimensional surface metrology. Never- theless, also graduated students and lecturers may benefit from the information containedinthisbookonthevariousmeasuringtechniques. In the end, I want to express my thanks to some people. First of all, many reputablemanufacturersofmeasuringinstrumentswerehelpfulinsupplyingphoto- graphic material and measurement results for illustrating. Many thanks for their cooperation!IalsowouldliketoacknowledgethecontinuingsupportofTomSpicer and Hisako Niko from Springer Nature. They were the “helping hand” in all questions concerning publishing this book. Last but not least, I want to thank my familyforthesupportandpatiencewithmeduringwritingthisbook. Aldenhoven,Germany MichaelQuinten June1,2019 Contents 1 IntroductiontoSurfacesandSurfaceMetrology. . . . . . . . . . . . . . . . 1 1.1 MicroscopicViewonaSurface. . . . . . . . . . . . . . . . . . . . . . . . . 3 1.2 MacroscopicViewonaSurface. . . . . . . . . . . . . . . . . . . . . . . . . 5 1.3 MeasurementandValidation. . . . . . . . . . . . . . . . . . . . . . . . . . . 8 1.3.1 ProfileMeasurement. . . . . . . . . . . . . . . . . . . . . . . . . . 16 1.3.2 ArealMeasurement. . . . . . . . . . . . . . . . . . . . . . . . . . . 27 1.3.3 MeasurementModules. . . . . . . . . . . . . . . . . . . . . . . . . 31 1.3.4 TheWaytoReliableSurfaceData. . . . . . . . . . . . . . . . . 39 References. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41 2 TactileSurfaceMetrology. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43 2.1 TactileSurfaceProfiling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43 2.2 AtomicForceMicroscopy. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47 References. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54 3 CapacitiveandInductiveSurfaceMetrology. . . . . . . . . . . . . . . . . . . 57 3.1 CapacitiveSurfaceProfiling. . . . . . . . . . . . . . . . . . . . . . . . . . . 57 3.2 SurfaceProfilingwithEddyCurrents. . . . . . . . . . . . . . . . . . . . . 62 References. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65 4 OpticalSurfaceMetrology–PhysicalBasics. . . . . . . . . . . . . . . . . . . 67 4.1 ElectromagneticWaves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67 4.2 Huygens-FresnelPrincipleofWavePropagation. . . . . . . . . . . . . 70 4.3 Polarization. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71 4.4 Interference. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72 4.5 Coherence. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74 4.6 DielectricFunctionandRefractiveIndex. . . . . . . . . . . . . . . . . . 75 4.7 ReflectionandRefraction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81 4.8 DispersionEffects. . . . . . . . . . . . . . . . . . . . . . . .. . . . . . . . . . . 84 ix x Contents 4.9 Diffraction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86 4.10 Scattering. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88 References. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92 5 OpticalSurfaceMetrology:Methods. . . . . . . . . . .. . . . . . . . . . . .. . 95 5.1 ChromaticConfocalSurfaceProfiling. . . . . . . . . . . . . . . . . . . . 95 5.2 SurfaceProfilingwithanAutofocusSensor. . . . . . . . . . . . . . . . 102 5.3 LightSectionalMethods. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 104 5.3.1 LaserPointTriangulator. . . . . . . . . . . . . . . . . . . . . . . . 104 5.3.2 LineProjection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105 5.3.3 FringeProjection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106 5.4 MicroscopyMethods.. . . .. . . .. . . .. . . .. . . .. . .. . . .. . . .. 108 5.4.1 ClassicalMicroscopy. . . . . . . . . . . . . . . . . . . . . . . . . . 109 5.4.2 ConfocalMicroscopy. . . . . . . . . . . . . . . . . . . . . . . . . . 115 5.4.3 FocalDepthVariation. . . . . . . . . . . . . . . . . . . . . . . . . 124 5.4.4 ScanningNear-FieldOpticalMicroscopy. . . . . . . . . . . . 127 5.5 InterferometricMethods. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 128 5.5.1 InterferometricFormInspection. . . . . . . . . . . . . . . . . . 132 5.5.2 TiltedWaveInterferometry. . . . . . . . . . . . . . . . . . . . . . 134 5.5.3 WhiteLightInterferometry. . . . . . . . . . . . . . . . . . . . . . 136 5.5.4 WavelengthScanningInterferometry. . . . . . . . . . . . . . . 145 5.5.5 Multi-WavelengthInterferometry. . . . . . . . . . . . . . . . . 147 5.5.6 GrazingIncidenceInterferometry. . . . . . . . . . . . . . . . . 150 5.5.7 FrequencyScanningInterferometry. . . . . . . . . . . . . . . . 153 5.5.8 DigitalHolographicMicroscopy. . . . . . . . . . . . . . . . . . 155 5.5.9 Conoscopy. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 159 5.6 WaveFrontSensing(Shack-Hartmann). . . . . . . . . . . . . . . . . . . 160 5.7 Deflectometry. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 163 5.8 MakyohTopographySensor. . . . . . . . . . . . . . . . . . . . . . . . . . . 165 5.9 SurfaceProfilingUsingElasticLightScattering. . . . . . . . . . . . . 167 5.9.1 TotalIntegratedScattering(TIS). . . . . . . . . . . . . . . . . . 168 5.9.2 AngularResolvedScattering(ARS). . . . . . . . . . . . . . . 169 5.9.3 SpeckleBasedRoughnessDetermination. . . . . . . . . . . . 173 5.10 SpectralAnalysisandCharacterization. . . . . . . . . . . . . . . . . . . . 176 5.10.1 Reflectometry. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 177 5.10.2 SpectroscopicEllipsometry. . . . . . . . . . . . . . . . . . . . . . 188 References. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 190 6 ImagingMethods. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 199 6.1 IndustrialImageProcessing. . . . . . . . . . . . . . . . . . . . . . . . . . . . 199 6.1.1 Illumination. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 201 6.1.2 Camera. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 201 6.1.3 ImageProcessingHardware. . . . . . . . . . . . . . . . . . . . . 202 6.1.4 DigitalImageProcessingSoftware. . . . . . . . . . . . . . . . 202 6.1.5 Mechanics. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203