Semiconductor Device Fundamentals

817 Pages·1996·23.25 MB·English

by  Robert F. Pierret

SEMICONDUCTOR
DEViCE
FUNDAMENTALS
Robert F. Pierret
SchoolofElectricalandComputerEitginecrjttg
PstrducUniversity
A
“V
ADDISONWESLEYPUBLTSmNGCOMPANY
SDydoRnneeayMdiin-llgsS,.inMOgnaatspasoraircoehu--sWTetotoskkyi-on,M,h‘eaMtmtlaedEPriiadsrgkl‘,oeCSdoonl.ifJoAoramnnisatc-n-MijNailreanwn‘Y-BoProkanrnis
—KatherineHarutunian AssociateEditor
HelenWythe Se,oorProdactio,tSopen’isor
HughCrawford ManaafactarisagSupervisor
BarbaraAtkinson AssociateCoverDesignSupervisor
PeterBtaiwas Csverdesign
KennethJ.Wilson Textdesign
JoyceGrandy Copyeditor
SandraRigney Productis,tPackagingServices
0&STypesetters,Inc. Composition ‘TIteitalevoiceinside,tevergroiv.sartyolder-.”
Publishers’DesignandProductionServices,Inc. Illustrations FrankPierret(1906—1994)
LibraryofCongressCataloging-in-PublicationData
Pierret,Robert1°.
Snmicnnductordnvinefundamentals/RobertF.Pierrei.
tentadesusdos.
ISBN0-20t-54393-l
I, Semiconductors I. Title.
TK787l.85.P484 t996
62l.38152—dc2O 95-17387
CIP
Manyofthedesignationsusedbymanufacturersandsellerstndistinguishtheirproductsareclaimed
attrademarks.Wherethesedesignationsappearinthishonk,aridAddison-Wesleywasowaraofa
trademarkclaim,thednsignanonshatebeenprintedisinitialcopsneat!caps.
MortonisaregisteredtrademsrkofTireMathWnrks,tee.,
24PrimaParkWay.Namick.MA01760-1500.
Phone:[phone] Fax:[phone]
E-mail:[email protected]
WWW hctp //wwca.rsatlicsocko.com
AccessthelatestinrfornsationaboutAddisun-WesleybooksfromnutInternetgophersiteornurhh’ortd
WideWebpage:
gopher uw.com
http://sswv.ocr.com/cseeig/
Copyright:©1996byAddison-WesleyPublishingCempany,Inc.
ReprintodwithcorrectionsMarch,1996
Altrightsreserved.Nopartofthispublicationmaybnreprnducnd.sturedinaretrievalsystem,or
transmittedinanyformorbyanyereans,electronic,mechanical,photocopying,encerding.erother
wise,withoutthrwrittenpermissionefthepublisher.
PridedioihnUnitedStatesofAmerica
SEMICONDUCTOR
DEViCE
FUNDAMENTALS
Robert F. Pierret
SchoolofElectricalandComputerEitginecrjttg
PstrducUniversity
A
“V
ADDISONWESLEYPUBLTSmNGCOMPANY
SDydoRnneeayMdiin-llgsS,.inMOgnaatspasoraircoehu--sWTetotoskkyi-on,M,h‘eaMtmtlaedEPriiadsrgkl‘,oeCSdoonl.ifJoAoramnnisatc-n-MijNailreanwn‘Y-BoProkanrnis
—KatherineHarutunian AssociateEditor
HelenWythe Se,oorProdactio,tSopen’isor
HughCrawford ManaafactarisagSupervisor
BarbaraAtkinson AssociateCoverDesignSupervisor
PeterBtaiwas Csverdesign
KennethJ.Wilson Textdesign
JoyceGrandy Copyeditor
SandraRigney Productis,tPackagingServices
0&STypesetters,Inc. Composition ‘TIteitalevoiceinside,tevergroiv.sartyolder-.”
Publishers’DesignandProductionServices,Inc. Illustrations FrankPierret(1906—1994)
LibraryofCongressCataloging-in-PublicationData
Pierret,Robert1°.
Snmicnnductordnvinefundamentals/RobertF.Pierrei.
tentadesusdos.
ISBN0-20t-54393-l
I, Semiconductors I. Title.
TK787l.85.P484 t996
62l.38152—dc2O 95-17387
CIP
Manyofthedesignationsusedbymanufacturersandsellerstndistinguishtheirproductsareclaimed
attrademarks.Wherethesedesignationsappearinthishonk,aridAddison-Wesleywasowaraofa
trademarkclaim,thednsignanonshatebeenprintedisinitialcopsneat!caps.
MortonisaregisteredtrademsrkofTireMathWnrks,tee.,
24PrimaParkWay.Namick.MA01760-1500.
Phone:[phone] Fax:[phone]
E-mail:[email protected]
WWW hctp //wwca.rsatlicsocko.com
AccessthelatestinrfornsationaboutAddisun-WesleybooksfromnutInternetgophersiteornurhh’ortd
WideWebpage:
gopher uw.com
http://sswv.ocr.com/cseeig/
Copyright:©1996byAddison-WesleyPublishingCempany,Inc.
ReprintodwithcorrectionsMarch,1996
Altrightsreserved.Nopartofthispublicationmaybnreprnducnd.sturedinaretrievalsystem,or
transmittedinanyformorbyanyereans,electronic,mechanical,photocopying,encerding.erother
wise,withoutthrwrittenpermissionefthepublisher.
PridedioihnUnitedStatesofAmerica
SEMICONDUCTOR
DEViCE
FUNDAMENTALS
Robert F. Pierret
SchoolofElectricalandComputerEitginecrjttg
PstrducUniversity
A
“V
ADDISONWESLEYPUBLTSmNGCOMPANY
SDydoRnneeayMdiin-llgsS,.inMOgnaatspasoraircoehu--sWTetotoskkyi-on,M,h‘eaMtmtlaedEPriiadsrgkl‘,oeCSdoonl.ifJoAoramnnisatc-n-MijNailreanwn‘Y-BoProkanrnis
—KatherineHarutunian AssociateEditor
HelenWythe Se,oorProdactio,tSopen’isor
HughCrawford ManaafactarisagSupervisor
BarbaraAtkinson AssociateCoverDesignSupervisor
PeterBtaiwas Csverdesign
KennethJ.Wilson Textdesign
JoyceGrandy Copyeditor
SandraRigney Productis,tPackagingServices
0&STypesetters,Inc. Composition ‘TIteitalevoiceinside,tevergroiv.sartyolder-.”
Publishers’DesignandProductionServices,Inc. Illustrations FrankPierret(1906—1994)
LibraryofCongressCataloging-in-PublicationData
Pierret,Robert1°.
Snmicnnductordnvinefundamentals/RobertF.Pierrei.
tentadesusdos.
ISBN0-20t-54393-l
I, Semiconductors I. Title.
TK787l.85.P484 t996
62l.38152—dc2O 95-17387
CIP
Manyofthedesignationsusedbymanufacturersandsellerstndistinguishtheirproductsareclaimed
attrademarks.Wherethesedesignationsappearinthishonk,aridAddison-Wesleywasowaraofa
trademarkclaim,thednsignanonshatebeenprintedisinitialcopsneat!caps.
MortonisaregisteredtrademsrkofTireMathWnrks,tee.,
24PrimaParkWay.Namick.MA01760-1500.
Phone:[phone] Fax:[phone]
E-mail:[email protected]
WWW hctp //wwca.rsatlicsocko.com
AccessthelatestinrfornsationaboutAddisun-WesleybooksfromnutInternetgophersiteornurhh’ortd
WideWebpage:
gopher uw.com
http://sswv.ocr.com/cseeig/
Copyright:©1996byAddison-WesleyPublishingCempany,Inc.
ReprintodwithcorrectionsMarch,1996
Altrightsreserved.Nopartofthispublicationmaybnreprnducnd.sturedinaretrievalsystem,or
transmittedinanyformorbyanyereans,electronic,mechanical,photocopying,encerding.erother
wise,withoutthrwrittenpermissionefthepublisher.
PridedioihnUnitedStatesofAmerica
SEMICONDUCTOR
DEViCE
FUNDAMENTALS
Robert F. Pierret
SchoolofElectricalandComputerEitginecrjttg
PstrducUniversity
A
“V
ADDISONWESLEYPUBLTSmNGCOMPANY
SDydoRnneeayMdiin-llgsS,.inMOgnaatspasoraircoehu--sWTetotoskkyi-on,M,h‘eaMtmtlaedEPriiadsrgkl‘,oeCSdoonl.ifJoAoramnnisatc-n-MijNailreanwn‘Y-BoProkanrnis
—KatherineHarutunian AssociateEditor
HelenWythe Se,oorProdactio,tSopen’isor
HughCrawford ManaafactarisagSupervisor
BarbaraAtkinson AssociateCoverDesignSupervisor
PeterBtaiwas Csverdesign
KennethJ.Wilson Textdesign
JoyceGrandy Copyeditor
SandraRigney Productis,tPackagingServices
0&STypesetters,Inc. Composition ‘TIteitalevoiceinside,tevergroiv.sartyolder-.”
Publishers’DesignandProductionServices,Inc. Illustrations FrankPierret(1906—1994)
LibraryofCongressCataloging-in-PublicationData
Pierret,Robert1°.
Snmicnnductordnvinefundamentals/RobertF.Pierrei.
tentadesusdos.
ISBN0-20t-54393-l
I, Semiconductors I. Title.
TK787l.85.P484 t996
62l.38152—dc2O 95-17387
CIP
Manyofthedesignationsusedbymanufacturersandsellerstndistinguishtheirproductsareclaimed
attrademarks.Wherethesedesignationsappearinthishonk,aridAddison-Wesleywasowaraofa
trademarkclaim,thednsignanonshatebeenprintedisinitialcopsneat!caps.
MortonisaregisteredtrademsrkofTireMathWnrks,tee.,
24PrimaParkWay.Namick.MA01760-1500.
Phone:[phone] Fax:[phone]
E-mail:[email protected]
WWW hctp //wwca.rsatlicsocko.com
AccessthelatestinrfornsationaboutAddisun-WesleybooksfromnutInternetgophersiteornurhh’ortd
WideWebpage:
gopher uw.com
http://sswv.ocr.com/cseeig/
Copyright:©1996byAddison-WesleyPublishingCempany,Inc.
ReprintodwithcorrectionsMarch,1996
Altrightsreserved.Nopartofthispublicationmaybnreprnducnd.sturedinaretrievalsystem,or
transmittedinanyformorbyanyereans,electronic,mechanical,photocopying,encerding.erother
wise,withoutthrwrittenpermissionefthepublisher.
PridedioihnUnitedStatesofAmerica
PREFACE
Whyanothertextonsolidslatedevices?Theauthorisawareofatleust 14undergraduate
textspublishedonthesubjectduringthepastdecade.Althoughseveralmotivatingfactors
couldbecited,aveiysiguificantfactorsvasthedesiretowriteahookforthenextmilieu
niom(aBook2000sotospeak)thatsuccessfullyincorporatescomputer-assistedleurnieg.
Inarecentsurvey,membersoftheUndcrgradttateCorricutemCommitteeintheScheetof
ElectricalandComputerEngineeriegatPuedseUniversitylistedintegrationofthecom
palerintothelearningprocessmthenumbereecpriority.Nationally,enisersilycensor
tiumshavehccu forissed wlsichemphasizecomputer-assistedlearning.InJanamy 1992.
distributionbegaisoftheStudentEditionofM.-titoe,essentiallyacopyoftheoriginal
MATI.Aumanualbundledwish uloss-costversionofshemath-lootssoftsrare.Over37.000
copiesofthebootcJsoftsvarcweresoldinthefirstycartTentsandbooksonavarietyof
topicsfroseseveral publishersaxenowavailablethatnsekespecificaseoftheMATLAB
software. Thedirection isclearas socproceed intothe second millennium: Cumpesvr
assistedlearnusgsvillbzcvnieesoreandmoreprevalent.Indealingsvithsolidstatedeviccs,
liecmsspsstcrallosesotttoaddressmorerealisticprohlems,tomorereadilyexperiment
mitts“wtsal-if’ scenarios,andtoconveniretlyahtainagraphicaloutput.Anentiredevice
characteristiccanoftenhecosepulergesseratedwithlesstimeandeffortthanasmallsetof
manuallycalculatedsingle-pointvalues.
ItshouldbeclarifiedIlsatthepresenttentisnotatotallynewentryinthefield,butis
derivedinpartfromVolumes1—tvoftheAddison-WesleyModularSeriesenSolidState
Devices.Lesttherebeamisunderstanding,thelatestversionsofthevolumesintheModu
larSerieswerenetsiesplygluedtogether.Totheconlrary,morethanhalfoflhcmaterial
coverageinthefeorvatanmeswascompletelyrewritten.Moreover,seseralsappleasental
sectionsandtwoadditionalchapterssnereaddedtotIreVelnnsesI—IVentline.Thenewlent
alsocontainscomputer-basedtentexercisesandend-of-chapterproblems,plusanumber
ofotherspecialfeaturesthatarefollydescribedintheGeneralIntroduction.
Injestabssutanyengineeringendeavortherearetradeoffs.Devicedesignisreplete
withtradeoffs.Tradeoftsalsoenterintothedesignofabook.Forexample,afewtopics
canbecoveredindetail(depth)orlessercoveragecanbegiventoseveraltopicslbreadsh).
Sunilarlyonecanemphasizesheunderstandingofcosscepssoroptissazethetransmissionof
factealiaforniatien. VotamesI—tv in the ModularSeriesoreknown forstreirpedantic
depthofcoverageemphusiniisgconcepts.Whileretainingshesamebasicdepthofcoverage.
four“read-only”chaptershavebeenspecificallyuddedhereintobroadenshecoverageand
enhancethetransesissienoffactoalinformation.Intheread-onlychapterstheemplsesisis
moreondescribingtheenciriugworldofmodern-daydevices.Compoundsemicondocror
devices likesvisereceiveincreasedcoveragethroughout the tent.Thereinalsoanatural
‘I
Vi nEMle0NDttT0RnueteeraNeeMeNTALn raeeeee eli
tradeoffbetsneentheeffortdevotedtodevelopingqaulitativeinsightandsheimplementa anderrors,EricBraggstandsoutasespeciallyperceptiveandhelpful.Theveryeonsciea
tionofaquantitativeaealysis.Carefulaoentianhasbeengiventoavoidslightingthede tioussnanuscriplreviesverssvemProf.KennethA.James,CaliforniaStateUnisersity,Long
velopmentof“insuition”inlightofthegreatlyesshaocedqaautitativecapabilitiesarising Beach:Prof.PeterLanyen, WorcesterPolytechnicInstitute:Prof.Gary’ S.May,Georgia
fromsheintegrateduseofthecomputer.Lastly,svehavenotattemptedsobeall-inclusive tnstmtsseofTeelruology:Prof DieterK.Srhrader,ArizonaStateUniversity:andProf.G.Vs.
inthedepthandbreadthofcoverage—manythingsweleftforlater(anothercoarse,other -Strllman,UniversrmyofIllinoisasUrbana-Champaign.Inrecegvitionofufemmimfatassocia
books).Hopefully,shepropertradeoffshavebeenechievedwhembysItereaderisreosen tion,aspeciolthamskstoDonPawley,theformereditoratAddison-Wesleywhoenlieedthe
ablyknowledgeableaboutthesubjectmatterandacceptablyequippedsoperformdevice aothaeintowrilingthebook.Lastbettrotleast,editorKatherineHamtnnianisIabeered
analysesufsercompletingthetent. iledseithsmoothlyimplesnenliagtheproject,andenecoliveossistantAnitaDevinewith
ThepresenttestisintendedforandcrgraduatejaniOrsorseniorswhohavehadatleant chreerfellyhandlingmmsanyoftheearlydetails.
anintroductoryenposuretoelectricfieldtheory.Chaptersaregronpedintothreemajor
divisionsor“parts,” snithPortIIbeingfurthersubdivided intoIIAand lIE.Withsome ProfRobermFFiercer
deletions,thematerielineachofthethreepartsiscovereddurissgafive-weeksegmentof SchoolofElectricalandComputerEngineering
aane-sementer,three-credit-bane,junior-seniorcourseinElectricalandCempulerEngi PurdueUniversity
neeringatPurdneUniversity.Aday-by-dayratmeteoutlineissuppliedanIheInstsncter’s
DiskarconspanyingtheSelationsManual.Ifnecessarytomeettimecnrstramets,read-only
Chapters4,9. 13,and19couldbedeletedfromthelectureschedule.)Aninstmetormight
preferablyassignthechaptersusindependemstreadingsandrewardcompliantstudentsby
includingentra-creditexaminationquestiestscoveringthematerial.)StandardChapters12,
14,and 15,enceprfeetltegesseralfield-effectintroductioninSectien l5.t,mayottobe
omittedssithlittleor solessincontinuity.
AlthoughacompletelistingofspecialfeataresisgiveninrheGeneralIntroduction,
instructorsshouldtakespecialstoleoftheProblemInformationTablesinsertedpriorInthe
end-of-chapterproblems.Thesetablesshouldproveusefulinassigningproblemsandin
dealingwithhemee’orkgraders.Whenfacedwithconstructingatest,instructorsmayalso
heinterestedinesuminitsgtheReviewProblemSetsfoundinlbsteini-chapters(identified
byadarkenedthnnsbtab)attheesmdofthethreehonkparts.TheReviewProblemSetsare
derivedfromold“open-book”and“closed-book”tests.Concerningthecemgoter-based
enercisesandproblems,sheuseofrilberthestudentorprofessionalversionofMATLAnit
recismmended butnotreqaired.Theits-tenteneecisesolutionsandtheproblemanswers
supplied10theiessrucsar,however,domakeaseofMATLAn.Althoughitwouldbehelpful,
theaseeneednotbefamiliarwiththeMATLARprogeansatthebeginningofthebook.The
MATLAeproblemsinsuccessivechaptersmakeincreasiaglysophisticateduseofthepro
gram. In otluerwords, the early exercises and hosoesverkproblems provide a learning
Mus’t.Anbyrising hulATLAseapnrietsze.isiscritical,however,thattheaseecompletea
largepercentageofthecomputer-basedexercisesandproblemsinthefirstthreechapters.
Theexercisesandpeablenasfoundinlaterchapterssotonlyassumeareasonablycompetent
useofMATLAB.butalsobaildspantheprogramsdevelopedinIheearlierchapters.
TheauthoreratefallyacknowledgeslImeassistaveeofassociates,EE3OSstudents.the
cespandeiststoancurlymarketingsurvey,themanusrriptrevtesvers,andAddison-Wesley
personnelienrakingBook2000areality.DesvrvrsgofspeciallhartksisAltKeshavarzifor
arruagiegthe ummthoe’vsabbaticalatlatel Corporationandforprovidingphotographs of
equipmentinsidetheAlbnqtmerqsmefobricatrortfacility. Prof. MarkLundstram alPnrdae
Uoiversityseasalsomosthelpfalinsupplyingkeyieformatienaadfigaresforseveralbook
sections.Oftheundergraduatestudentsaskedtoenaminethemanascriptforreadability
PREFACE
Whyanothertextonsolidslatedevices?Theauthorisawareofatleust 14undergraduate
textspublishedonthesubjectduringthepastdecade.Althoughseveralmotivatingfactors
couldbecited,aveiysiguificantfactorsvasthedesiretowriteahookforthenextmilieu
niom(aBook2000sotospeak)thatsuccessfullyincorporatescomputer-assistedleurnieg.
Inarecentsurvey,membersoftheUndcrgradttateCorricutemCommitteeintheScheetof
ElectricalandComputerEngineeriegatPuedseUniversitylistedintegrationofthecom
palerintothelearningprocessmthenumbereecpriority.Nationally,enisersilycensor
tiumshavehccu forissed wlsichemphasizecomputer-assistedlearning.InJanamy 1992.
distributionbegaisoftheStudentEditionofM.-titoe,essentiallyacopyoftheoriginal
MATI.Aumanualbundledwish uloss-costversionofshemath-lootssoftsrare.Over37.000
copiesofthebootcJsoftsvarcweresoldinthefirstycartTentsandbooksonavarietyof
topicsfroseseveral publishersaxenowavailablethatnsekespecificaseoftheMATLAB
software. Thedirection isclearas socproceed intothe second millennium: Cumpesvr
assistedlearnusgsvillbzcvnieesoreandmoreprevalent.Indealingsvithsolidstatedeviccs,
liecmsspsstcrallosesotttoaddressmorerealisticprohlems,tomorereadilyexperiment
mitts“wtsal-if’ scenarios,andtoconveniretlyahtainagraphicaloutput.Anentiredevice
characteristiccanoftenhecosepulergesseratedwithlesstimeandeffortthanasmallsetof
manuallycalculatedsingle-pointvalues.
ItshouldbeclarifiedIlsatthepresenttentisnotatotallynewentryinthefield,butis
derivedinpartfromVolumes1—tvoftheAddison-WesleyModularSeriesenSolidState
Devices.Lesttherebeamisunderstanding,thelatestversionsofthevolumesintheModu
larSerieswerenetsiesplygluedtogether.Totheconlrary,morethanhalfoflhcmaterial
coverageinthefeorvatanmeswascompletelyrewritten.Moreover,seseralsappleasental
sectionsandtwoadditionalchapterssnereaddedtotIreVelnnsesI—IVentline.Thenewlent
alsocontainscomputer-basedtentexercisesandend-of-chapterproblems,plusanumber
ofotherspecialfeaturesthatarefollydescribedintheGeneralIntroduction.
Injestabssutanyengineeringendeavortherearetradeoffs.Devicedesignisreplete
withtradeoffs.Tradeoftsalsoenterintothedesignofabook.Forexample,afewtopics
canbecoveredindetail(depth)orlessercoveragecanbegiventoseveraltopicslbreadsh).
Sunilarlyonecanemphasizesheunderstandingofcosscepssoroptissazethetransmissionof
factealiaforniatien. VotamesI—tv in the ModularSeriesoreknown forstreirpedantic
depthofcoverageemphusiniisgconcepts.Whileretainingshesamebasicdepthofcoverage.
four“read-only”chaptershavebeenspecificallyuddedhereintobroadenshecoverageand
enhancethetransesissienoffactoalinformation.Intheread-onlychapterstheemplsesisis
moreondescribingtheenciriugworldofmodern-daydevices.Compoundsemicondocror
devices likesvisereceiveincreasedcoveragethroughout the tent.Thereinalsoanatural
‘I
Vi nEMle0NDttT0RnueteeraNeeMeNTALn raeeeee eli
tradeoffbetsneentheeffortdevotedtodevelopingqaulitativeinsightandsheimplementa anderrors,EricBraggstandsoutasespeciallyperceptiveandhelpful.Theveryeonsciea
tionofaquantitativeaealysis.Carefulaoentianhasbeengiventoavoidslightingthede tioussnanuscriplreviesverssvemProf.KennethA.James,CaliforniaStateUnisersity,Long
velopmentof“insuition”inlightofthegreatlyesshaocedqaautitativecapabilitiesarising Beach:Prof.PeterLanyen, WorcesterPolytechnicInstitute:Prof.Gary’ S.May,Georgia
fromsheintegrateduseofthecomputer.Lastly,svehavenotattemptedsobeall-inclusive tnstmtsseofTeelruology:Prof DieterK.Srhrader,ArizonaStateUniversity:andProf.G.Vs.
inthedepthandbreadthofcoverage—manythingsweleftforlater(anothercoarse,other -Strllman,UniversrmyofIllinoisasUrbana-Champaign.Inrecegvitionofufemmimfatassocia
books).Hopefully,shepropertradeoffshavebeenechievedwhembysItereaderisreosen tion,aspeciolthamskstoDonPawley,theformereditoratAddison-Wesleywhoenlieedthe
ablyknowledgeableaboutthesubjectmatterandacceptablyequippedsoperformdevice aothaeintowrilingthebook.Lastbettrotleast,editorKatherineHamtnnianisIabeered
analysesufsercompletingthetent. iledseithsmoothlyimplesnenliagtheproject,andenecoliveossistantAnitaDevinewith
ThepresenttestisintendedforandcrgraduatejaniOrsorseniorswhohavehadatleant chreerfellyhandlingmmsanyoftheearlydetails.
anintroductoryenposuretoelectricfieldtheory.Chaptersaregronpedintothreemajor
divisionsor“parts,” snithPortIIbeingfurthersubdivided intoIIAand lIE.Withsome ProfRobermFFiercer
deletions,thematerielineachofthethreepartsiscovereddurissgafive-weeksegmentof SchoolofElectricalandComputerEngineering
aane-sementer,three-credit-bane,junior-seniorcourseinElectricalandCempulerEngi PurdueUniversity
neeringatPurdneUniversity.Aday-by-dayratmeteoutlineissuppliedanIheInstsncter’s
DiskarconspanyingtheSelationsManual.Ifnecessarytomeettimecnrstramets,read-only
Chapters4,9. 13,and19couldbedeletedfromthelectureschedule.)Aninstmetormight
preferablyassignthechaptersusindependemstreadingsandrewardcompliantstudentsby
includingentra-creditexaminationquestiestscoveringthematerial.)StandardChapters12,
14,and 15,enceprfeetltegesseralfield-effectintroductioninSectien l5.t,mayottobe
omittedssithlittleor solessincontinuity.
AlthoughacompletelistingofspecialfeataresisgiveninrheGeneralIntroduction,
instructorsshouldtakespecialstoleoftheProblemInformationTablesinsertedpriorInthe
end-of-chapterproblems.Thesetablesshouldproveusefulinassigningproblemsandin
dealingwithhemee’orkgraders.Whenfacedwithconstructingatest,instructorsmayalso
heinterestedinesuminitsgtheReviewProblemSetsfoundinlbsteini-chapters(identified
byadarkenedthnnsbtab)attheesmdofthethreehonkparts.TheReviewProblemSetsare
derivedfromold“open-book”and“closed-book”tests.Concerningthecemgoter-based
enercisesandproblems,sheuseofrilberthestudentorprofessionalversionofMATLAnit
recismmended butnotreqaired.Theits-tenteneecisesolutionsandtheproblemanswers
supplied10theiessrucsar,however,domakeaseofMATLAn.Althoughitwouldbehelpful,
theaseeneednotbefamiliarwiththeMATLARprogeansatthebeginningofthebook.The
MATLAeproblemsinsuccessivechaptersmakeincreasiaglysophisticateduseofthepro
gram. In otluerwords, the early exercises and hosoesverkproblems provide a learning
Mus’t.Anbyrising hulATLAseapnrietsze.isiscritical,however,thattheaseecompletea
largepercentageofthecomputer-basedexercisesandproblemsinthefirstthreechapters.
Theexercisesandpeablenasfoundinlaterchapterssotonlyassumeareasonablycompetent
useofMATLAB.butalsobaildspantheprogramsdevelopedinIheearlierchapters.
TheauthoreratefallyacknowledgeslImeassistaveeofassociates,EE3OSstudents.the
cespandeiststoancurlymarketingsurvey,themanusrriptrevtesvers,andAddison-Wesley
personnelienrakingBook2000areality.DesvrvrsgofspeciallhartksisAltKeshavarzifor
arruagiegthe ummthoe’vsabbaticalatlatel Corporationandforprovidingphotographs of
equipmentinsidetheAlbnqtmerqsmefobricatrortfacility. Prof. MarkLundstram alPnrdae
Uoiversityseasalsomosthelpfalinsupplyingkeyieformatienaadfigaresforseveralbook
sections.Oftheundergraduatestudentsaskedtoenaminethemanascriptforreadability
PREFACE
Whyanothertextonsolidslatedevices?Theauthorisawareofatleust 14undergraduate
textspublishedonthesubjectduringthepastdecade.Althoughseveralmotivatingfactors
couldbecited,aveiysiguificantfactorsvasthedesiretowriteahookforthenextmilieu
niom(aBook2000sotospeak)thatsuccessfullyincorporatescomputer-assistedleurnieg.
Inarecentsurvey,membersoftheUndcrgradttateCorricutemCommitteeintheScheetof
ElectricalandComputerEngineeriegatPuedseUniversitylistedintegrationofthecom
palerintothelearningprocessmthenumbereecpriority.Nationally,enisersilycensor
tiumshavehccu forissed wlsichemphasizecomputer-assistedlearning.InJanamy 1992.
distributionbegaisoftheStudentEditionofM.-titoe,essentiallyacopyoftheoriginal
MATI.Aumanualbundledwish uloss-costversionofshemath-lootssoftsrare.Over37.000
copiesofthebootcJsoftsvarcweresoldinthefirstycartTentsandbooksonavarietyof
topicsfroseseveral publishersaxenowavailablethatnsekespecificaseoftheMATLAB
software. Thedirection isclearas socproceed intothe second millennium: Cumpesvr
assistedlearnusgsvillbzcvnieesoreandmoreprevalent.Indealingsvithsolidstatedeviccs,
liecmsspsstcrallosesotttoaddressmorerealisticprohlems,tomorereadilyexperiment
mitts“wtsal-if’ scenarios,andtoconveniretlyahtainagraphicaloutput.Anentiredevice
characteristiccanoftenhecosepulergesseratedwithlesstimeandeffortthanasmallsetof
manuallycalculatedsingle-pointvalues.
ItshouldbeclarifiedIlsatthepresenttentisnotatotallynewentryinthefield,butis
derivedinpartfromVolumes1—tvoftheAddison-WesleyModularSeriesenSolidState
Devices.Lesttherebeamisunderstanding,thelatestversionsofthevolumesintheModu
larSerieswerenetsiesplygluedtogether.Totheconlrary,morethanhalfoflhcmaterial
coverageinthefeorvatanmeswascompletelyrewritten.Moreover,seseralsappleasental
sectionsandtwoadditionalchapterssnereaddedtotIreVelnnsesI—IVentline.Thenewlent
alsocontainscomputer-basedtentexercisesandend-of-chapterproblems,plusanumber
ofotherspecialfeaturesthatarefollydescribedintheGeneralIntroduction.
Injestabssutanyengineeringendeavortherearetradeoffs.Devicedesignisreplete
withtradeoffs.Tradeoftsalsoenterintothedesignofabook.Forexample,afewtopics
canbecoveredindetail(depth)orlessercoveragecanbegiventoseveraltopicslbreadsh).
Sunilarlyonecanemphasizesheunderstandingofcosscepssoroptissazethetransmissionof
factealiaforniatien. VotamesI—tv in the ModularSeriesoreknown forstreirpedantic
depthofcoverageemphusiniisgconcepts.Whileretainingshesamebasicdepthofcoverage.
four“read-only”chaptershavebeenspecificallyuddedhereintobroadenshecoverageand
enhancethetransesissienoffactoalinformation.Intheread-onlychapterstheemplsesisis
moreondescribingtheenciriugworldofmodern-daydevices.Compoundsemicondocror
devices likesvisereceiveincreasedcoveragethroughout the tent.Thereinalsoanatural
‘I
Vi nEMle0NDttT0RnueteeraNeeMeNTALn raeeeee eli
tradeoffbetsneentheeffortdevotedtodevelopingqaulitativeinsightandsheimplementa anderrors,EricBraggstandsoutasespeciallyperceptiveandhelpful.Theveryeonsciea
tionofaquantitativeaealysis.Carefulaoentianhasbeengiventoavoidslightingthede tioussnanuscriplreviesverssvemProf.KennethA.James,CaliforniaStateUnisersity,Long
velopmentof“insuition”inlightofthegreatlyesshaocedqaautitativecapabilitiesarising Beach:Prof.PeterLanyen, WorcesterPolytechnicInstitute:Prof.Gary’ S.May,Georgia
fromsheintegrateduseofthecomputer.Lastly,svehavenotattemptedsobeall-inclusive tnstmtsseofTeelruology:Prof DieterK.Srhrader,ArizonaStateUniversity:andProf.G.Vs.
inthedepthandbreadthofcoverage—manythingsweleftforlater(anothercoarse,other -Strllman,UniversrmyofIllinoisasUrbana-Champaign.Inrecegvitionofufemmimfatassocia
books).Hopefully,shepropertradeoffshavebeenechievedwhembysItereaderisreosen tion,aspeciolthamskstoDonPawley,theformereditoratAddison-Wesleywhoenlieedthe
ablyknowledgeableaboutthesubjectmatterandacceptablyequippedsoperformdevice aothaeintowrilingthebook.Lastbettrotleast,editorKatherineHamtnnianisIabeered
analysesufsercompletingthetent. iledseithsmoothlyimplesnenliagtheproject,andenecoliveossistantAnitaDevinewith
ThepresenttestisintendedforandcrgraduatejaniOrsorseniorswhohavehadatleant chreerfellyhandlingmmsanyoftheearlydetails.
anintroductoryenposuretoelectricfieldtheory.Chaptersaregronpedintothreemajor
divisionsor“parts,” snithPortIIbeingfurthersubdivided intoIIAand lIE.Withsome ProfRobermFFiercer
deletions,thematerielineachofthethreepartsiscovereddurissgafive-weeksegmentof SchoolofElectricalandComputerEngineering
aane-sementer,three-credit-bane,junior-seniorcourseinElectricalandCempulerEngi PurdueUniversity
neeringatPurdneUniversity.Aday-by-dayratmeteoutlineissuppliedanIheInstsncter’s
DiskarconspanyingtheSelationsManual.Ifnecessarytomeettimecnrstramets,read-only
Chapters4,9. 13,and19couldbedeletedfromthelectureschedule.)Aninstmetormight
preferablyassignthechaptersusindependemstreadingsandrewardcompliantstudentsby
includingentra-creditexaminationquestiestscoveringthematerial.)StandardChapters12,
14,and 15,enceprfeetltegesseralfield-effectintroductioninSectien l5.t,mayottobe
omittedssithlittleor solessincontinuity.
AlthoughacompletelistingofspecialfeataresisgiveninrheGeneralIntroduction,
instructorsshouldtakespecialstoleoftheProblemInformationTablesinsertedpriorInthe
end-of-chapterproblems.Thesetablesshouldproveusefulinassigningproblemsandin
dealingwithhemee’orkgraders.Whenfacedwithconstructingatest,instructorsmayalso
heinterestedinesuminitsgtheReviewProblemSetsfoundinlbsteini-chapters(identified
byadarkenedthnnsbtab)attheesmdofthethreehonkparts.TheReviewProblemSetsare
derivedfromold“open-book”and“closed-book”tests.Concerningthecemgoter-based
enercisesandproblems,sheuseofrilberthestudentorprofessionalversionofMATLAnit
recismmended butnotreqaired.Theits-tenteneecisesolutionsandtheproblemanswers
supplied10theiessrucsar,however,domakeaseofMATLAn.Althoughitwouldbehelpful,
theaseeneednotbefamiliarwiththeMATLARprogeansatthebeginningofthebook.The
MATLAeproblemsinsuccessivechaptersmakeincreasiaglysophisticateduseofthepro
gram. In otluerwords, the early exercises and hosoesverkproblems provide a learning
Mus’t.Anbyrising hulATLAseapnrietsze.isiscritical,however,thattheaseecompletea
largepercentageofthecomputer-basedexercisesandproblemsinthefirstthreechapters.
Theexercisesandpeablenasfoundinlaterchapterssotonlyassumeareasonablycompetent
useofMATLAB.butalsobaildspantheprogramsdevelopedinIheearlierchapters.
TheauthoreratefallyacknowledgeslImeassistaveeofassociates,EE3OSstudents.the
cespandeiststoancurlymarketingsurvey,themanusrriptrevtesvers,andAddison-Wesley
personnelienrakingBook2000areality.DesvrvrsgofspeciallhartksisAltKeshavarzifor
arruagiegthe ummthoe’vsabbaticalatlatel Corporationandforprovidingphotographs of
equipmentinsidetheAlbnqtmerqsmefobricatrortfacility. Prof. MarkLundstram alPnrdae
Uoiversityseasalsomosthelpfalinsupplyingkeyieformatienaadfigaresforseveralbook
sections.Oftheundergraduatestudentsaskedtoenaminethemanascriptforreadability
PREFACE
Whyanothertextonsolidslatedevices?Theauthorisawareofatleust 14undergraduate
textspublishedonthesubjectduringthepastdecade.Althoughseveralmotivatingfactors
couldbecited,aveiysiguificantfactorsvasthedesiretowriteahookforthenextmilieu
niom(aBook2000sotospeak)thatsuccessfullyincorporatescomputer-assistedleurnieg.
Inarecentsurvey,membersoftheUndcrgradttateCorricutemCommitteeintheScheetof
ElectricalandComputerEngineeriegatPuedseUniversitylistedintegrationofthecom
palerintothelearningprocessmthenumbereecpriority.Nationally,enisersilycensor
tiumshavehccu forissed wlsichemphasizecomputer-assistedlearning.InJanamy 1992.
distributionbegaisoftheStudentEditionofM.-titoe,essentiallyacopyoftheoriginal
MATI.Aumanualbundledwish uloss-costversionofshemath-lootssoftsrare.Over37.000
copiesofthebootcJsoftsvarcweresoldinthefirstycartTentsandbooksonavarietyof
topicsfroseseveral publishersaxenowavailablethatnsekespecificaseoftheMATLAB
software. Thedirection isclearas socproceed intothe second millennium: Cumpesvr
assistedlearnusgsvillbzcvnieesoreandmoreprevalent.Indealingsvithsolidstatedeviccs,
liecmsspsstcrallosesotttoaddressmorerealisticprohlems,tomorereadilyexperiment
mitts“wtsal-if’ scenarios,andtoconveniretlyahtainagraphicaloutput.Anentiredevice
characteristiccanoftenhecosepulergesseratedwithlesstimeandeffortthanasmallsetof
manuallycalculatedsingle-pointvalues.
ItshouldbeclarifiedIlsatthepresenttentisnotatotallynewentryinthefield,butis
derivedinpartfromVolumes1—tvoftheAddison-WesleyModularSeriesenSolidState
Devices.Lesttherebeamisunderstanding,thelatestversionsofthevolumesintheModu
larSerieswerenetsiesplygluedtogether.Totheconlrary,morethanhalfoflhcmaterial
coverageinthefeorvatanmeswascompletelyrewritten.Moreover,seseralsappleasental
sectionsandtwoadditionalchapterssnereaddedtotIreVelnnsesI—IVentline.Thenewlent
alsocontainscomputer-basedtentexercisesandend-of-chapterproblems,plusanumber
ofotherspecialfeaturesthatarefollydescribedintheGeneralIntroduction.
Injestabssutanyengineeringendeavortherearetradeoffs.Devicedesignisreplete
withtradeoffs.Tradeoftsalsoenterintothedesignofabook.Forexample,afewtopics
canbecoveredindetail(depth)orlessercoveragecanbegiventoseveraltopicslbreadsh).
Sunilarlyonecanemphasizesheunderstandingofcosscepssoroptissazethetransmissionof
factealiaforniatien. VotamesI—tv in the ModularSeriesoreknown forstreirpedantic
depthofcoverageemphusiniisgconcepts.Whileretainingshesamebasicdepthofcoverage.
four“read-only”chaptershavebeenspecificallyuddedhereintobroadenshecoverageand
enhancethetransesissienoffactoalinformation.Intheread-onlychapterstheemplsesisis
moreondescribingtheenciriugworldofmodern-daydevices.Compoundsemicondocror
devices likesvisereceiveincreasedcoveragethroughout the tent.Thereinalsoanatural
‘I
Vi nEMle0NDttT0RnueteeraNeeMeNTALn raeeeee eli
tradeoffbetsneentheeffortdevotedtodevelopingqaulitativeinsightandsheimplementa anderrors,EricBraggstandsoutasespeciallyperceptiveandhelpful.Theveryeonsciea
tionofaquantitativeaealysis.Carefulaoentianhasbeengiventoavoidslightingthede tioussnanuscriplreviesverssvemProf.KennethA.James,CaliforniaStateUnisersity,Long
velopmentof“insuition”inlightofthegreatlyesshaocedqaautitativecapabilitiesarising Beach:Prof.PeterLanyen, WorcesterPolytechnicInstitute:Prof.Gary’ S.May,Georgia
fromsheintegrateduseofthecomputer.Lastly,svehavenotattemptedsobeall-inclusive tnstmtsseofTeelruology:Prof DieterK.Srhrader,ArizonaStateUniversity:andProf.G.Vs.
inthedepthandbreadthofcoverage—manythingsweleftforlater(anothercoarse,other -Strllman,UniversrmyofIllinoisasUrbana-Champaign.Inrecegvitionofufemmimfatassocia
books).Hopefully,shepropertradeoffshavebeenechievedwhembysItereaderisreosen tion,aspeciolthamskstoDonPawley,theformereditoratAddison-Wesleywhoenlieedthe
ablyknowledgeableaboutthesubjectmatterandacceptablyequippedsoperformdevice aothaeintowrilingthebook.Lastbettrotleast,editorKatherineHamtnnianisIabeered
analysesufsercompletingthetent. iledseithsmoothlyimplesnenliagtheproject,andenecoliveossistantAnitaDevinewith
ThepresenttestisintendedforandcrgraduatejaniOrsorseniorswhohavehadatleant chreerfellyhandlingmmsanyoftheearlydetails.
anintroductoryenposuretoelectricfieldtheory.Chaptersaregronpedintothreemajor
divisionsor“parts,” snithPortIIbeingfurthersubdivided intoIIAand lIE.Withsome ProfRobermFFiercer
deletions,thematerielineachofthethreepartsiscovereddurissgafive-weeksegmentof SchoolofElectricalandComputerEngineering
aane-sementer,three-credit-bane,junior-seniorcourseinElectricalandCempulerEngi PurdueUniversity
neeringatPurdneUniversity.Aday-by-dayratmeteoutlineissuppliedanIheInstsncter’s
DiskarconspanyingtheSelationsManual.Ifnecessarytomeettimecnrstramets,read-only
Chapters4,9. 13,and19couldbedeletedfromthelectureschedule.)Aninstmetormight
preferablyassignthechaptersusindependemstreadingsandrewardcompliantstudentsby
includingentra-creditexaminationquestiestscoveringthematerial.)StandardChapters12,
14,and 15,enceprfeetltegesseralfield-effectintroductioninSectien l5.t,mayottobe
omittedssithlittleor solessincontinuity.
AlthoughacompletelistingofspecialfeataresisgiveninrheGeneralIntroduction,
instructorsshouldtakespecialstoleoftheProblemInformationTablesinsertedpriorInthe
end-of-chapterproblems.Thesetablesshouldproveusefulinassigningproblemsandin
dealingwithhemee’orkgraders.Whenfacedwithconstructingatest,instructorsmayalso
heinterestedinesuminitsgtheReviewProblemSetsfoundinlbsteini-chapters(identified
byadarkenedthnnsbtab)attheesmdofthethreehonkparts.TheReviewProblemSetsare
derivedfromold“open-book”and“closed-book”tests.Concerningthecemgoter-based
enercisesandproblems,sheuseofrilberthestudentorprofessionalversionofMATLAnit
recismmended butnotreqaired.Theits-tenteneecisesolutionsandtheproblemanswers
supplied10theiessrucsar,however,domakeaseofMATLAn.Althoughitwouldbehelpful,
theaseeneednotbefamiliarwiththeMATLARprogeansatthebeginningofthebook.The
MATLAeproblemsinsuccessivechaptersmakeincreasiaglysophisticateduseofthepro
gram. In otluerwords, the early exercises and hosoesverkproblems provide a learning
Mus’t.Anbyrising hulATLAseapnrietsze.isiscritical,however,thattheaseecompletea
largepercentageofthecomputer-basedexercisesandproblemsinthefirstthreechapters.
Theexercisesandpeablenasfoundinlaterchapterssotonlyassumeareasonablycompetent
useofMATLAB.butalsobaildspantheprogramsdevelopedinIheearlierchapters.
TheauthoreratefallyacknowledgeslImeassistaveeofassociates,EE3OSstudents.the
cespandeiststoancurlymarketingsurvey,themanusrriptrevtesvers,andAddison-Wesley
personnelienrakingBook2000areality.DesvrvrsgofspeciallhartksisAltKeshavarzifor
arruagiegthe ummthoe’vsabbaticalatlatel Corporationandforprovidingphotographs of
equipmentinsidetheAlbnqtmerqsmefobricatrortfacility. Prof. MarkLundstram alPnrdae
Uoiversityseasalsomosthelpfalinsupplyingkeyieformatienaadfigaresforseveralbook
sections.Oftheundergraduatestudentsaskedtoenaminethemanascriptforreadability
CONTENTS
GeneralIntroduction xxi
PartI SemiconductorFundamentals
Chapter1 Sensicundssrtors:AGeneralintroduction
1.1 GeneralMateriall’roperties 3
1.1.1 Composition 3
1.1.2 Parity 5
1.1.3 Strttcture 6
1.2 CrystalStructure 6
1.2.1 TIteUttitCellCotteept 7
1.2.2 Sinspte3-DUnitCells 8
1.2.3 Semicandt,ctorLattices 9
1.2.4 MillerIndices 12
1.3 CrystalGrowth 16
1.3.1 GbtaiaiugUltrapareSi 16
1.3.2 Siagle-CrystalParmation 17
.4 Santmary 19
Problems 19
Chapter2 CarrierModeling 23
2.1 TheQnautizasionConcept 23
2.2 SemiconductorModels 25
2.2.1 EoodingModel 26
2.2.2 EnergyEansiModel 26
2.2.3 Carriers 29
2.2.4 BandGapatsdMaterialCtassifiratioa 31
2.3 CarrierProperties 32
2.3.1 Charge 32
2.3.2 EffectiveMass 32
2.3.3 CarrierNambersinIntrinsicMaterial 34
a neutcoNunceonDEVtCEruouuMuNTALn
CONTENTS ul
2.3.4 MattipalatiatsafCarrierNambers—Daping 35 R—f5CenterRecombitaation 105
2.3.5 Carrier-RelatedTermiavlagy 40 AagerRecombination 107
2.4 StateandCarrierDistributiass 40 GenerationProcesses 107
2.4.1 DetttityafStates 41 3.3.2 MamensamConsiderations 107
2.4.2 ThePertttiPsmctioa 42 3.3.3 R—GStatistics Ito
2.4.3 EquilibriuitsDistributionofCarriers 46 Photogeneration to
2.5 EqailibriateCarrierConcentrations 49 IndirectThermalRecombination—Generation 112
2.5.1 Pormelasforaaedta 49 3.3.4 MinorityCarrierLifetimes 116
2.5.2 AltureativeEepressieesfareandp 52 GeneralInformation 116
2.5.3 a aedthetspPradact 53 ALifetimeMeasurement 116
2.5.4 ChargeNeutralityRelationship 57 3.4 EquationsofSlate t20
2.5.5 CttrrierConcentrationCalcalatians 59 3.4.1 ConlinuityEquations 121
2.5.6 DetermitsationofEr 61 3.4.2 MinorityCarrierDiffusionEquations 122
2.5.7 CarrierConcentrationTemperatureDependence 65 3.4.3 SimptificationsandSolations 124
2.6 SummaryendConcludingComments 67 3.4.4 ProblemSolving 124
Problems 69 SampleProblemNo. I 124
SampleProblemNa.2 128
Chapter3 CarrierAction 75 3.5 SupplementalConcepts 131
3.1 Drift 75 3.5.1 DiffusionLengths 13t
3.1.1 Deheition—Visnaliaation 75 3.5.2 Quasi-PermiLevels 132
3.1.2 DriECarrent 76 3.6 SummaryandConcludingComtoents 136
33..11..34 MReosbisitliivtyity 7859 Problems 138
3.1.5 BandBendiag 89 Chapter4 RasicnofDeviceFabrication 149
3.2 Diffusion 94 4.1 PabricationProcessea 149
3.2.! Dehnitioa—Visoalization 94 4.1.1 Gsidatian 149
3.2.2 Hot-PoitstProbeMeasurement 97 4.1.2 Diffusion 152
3.2.3 DiffasionandTotalCnrrcoLs 98 4.1.3 laoInaplantalian 155
DiffasionCarrent.s 98 4.1.4 Lithography 159
TotalCnrrettts 99 4.1.5 Thin-FilrtrDeposition 162
3.2.4 RelatitsgDiffasionCoeffirients/Mobilisies 99 Evstporation 162
CottstancyoftheFermiLevel 99 Spattering 162
CtsrreutPlowUnderEqailibriamConditions tot ChemicalVaporDeposition(CVD) 164
EinsteinRelationship lot 4.1.6 Epitasy 164
3.3 Recombinatims—Generation 105 4.2 DeviceFabricationExamples 165
3.3.1 Debnitiost—Visnatieation 105 4.2.1 paJunctionDiodeFabrication 166
Band-to-BaadRecombinatiaa 105 4.2.2 ComputerCPUProcessPlow 166
4.3 Sammary 174