NASA Technical Reports Server (NTRS) 20000005088: Surface Micromachined Silicon Carbide Accelerometers for Gas Turbine Applications

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Author:NASA Technical Reports Server (NTRS)
Language:English
File size:0.49 MB
Number of page:6
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Similar NASA Technical Reports Server (NTRS) 20000005088: Surface Micromachined Silicon Carbide Accelerometers for Gas Turbine Applications

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