NASA Technical Reports Server (NTRS) 19970005485: Characterization of High Ge Content SiGe Heterostructures and Graded Alloy Layers Using Spectroscopic Ellipsometry

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Author:NASA Technical Reports Server (NTRS)
Language:English
File size:0.29 MB
Number of page:6
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Similar NASA Technical Reports Server (NTRS) 19970005485: Characterization of High Ge Content SiGe Heterostructures and Graded Alloy Layers Using Spectroscopic Ellipsometry

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