Fabrication of Capacitive Micromachined Ultrasonic Transducers based on Adhesive Wafer Bonding

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Author:Zhenhao Li
Language:English
Release year:2017
File size:6.12 MB
Number of page:119
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Similar Fabrication of Capacitive Micromachined Ultrasonic Transducers based on Adhesive Wafer Bonding

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