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479 Pages·1998·3.032 MB·English
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ULSl CUSTOM MI CR OELECTR ON ICS DIGITAL, ANALOG, AND MIXED-SIGNAL STANLEY 1. HURST Faculty of Technology (Retired) The Open University Milton Keynes, England MARCEl - MARCELD EKKERI,N C. NEWY ORK BASEL DEKKER Library of Congress Cataloging-in-Publication Data Hurst, S. L. (Stanley Leonard) VLSI custom microelectronics : digital, analog, and mixed-signal / Stanley L. Hurst. p. cm. Includes bibliographical references and index. ISBN 0-8247-0220-4 (alk. paper) 1. Integrated circuits—Very large scale integration—Design and construction—Data processing. 2. Computer-aided design. I. Title TK7874.75.H87 1998 621.39′5—dc21 98-31682 CIP This book is printed on acid-free paper. Headquarters Marcel Dekker, Inc. 270 Madison Avenue, New York, NY 10016 tel: 212-696-9000; fax: 212-685-4540 Eastern Hemisphere Distribution Marcel Dekker AG Hutgasse 4, Postfach 812, CH-4001 Basel, Switzerland tel: 44-61-261-8482; fax: 44-61-261-8896 World Wide Web http://www.dekker.com Thepublisheroffersdiscountsonthisbookwhenorderedinbulkquantities.For moreinformation,writetoSpecialSales/ProfessionalMarketingattheheadquar- ters address above. Copyright  1999 by Marcel Dekker, Inc. All Rights Reserved. Neitherthis booknoranypart maybe reproducedortransmittedin anyformor by any means, electronic or mechanical, including photocopying, microfilming, and recording, or by any information storage and retrieval system, without per- mission in writing from the publisher. Current printing (last digit): 10 9 8 7 6 5 4 3 2 1 PRINTED IN THE UNITED STATES OF AMERICA Preface Initsshortlifespan,microelectronicshasbecomethemostcomplexofourevery- day technologies,embracing asitdoes physics,chemistry, materials,thermody- namics, and micromechanical engineering, as well as electrical and electronic engineering and computer science. No one person can hope to be expert in all these diverse aspects. Yetinspiteofallthiscomplexityandsophistication,weoftentaketheend productsforgranted.Nowadays,ourhomescontaintensofthousandsoftransis- tors in domestic appliances, communications, and entertainment equipment, to addtothevastrangeofapplicationsinindustrial,military,space,andcommercial products. To make all this possible has required the simultaneous evolution of not onlytheability to fabricatethe microelectroniccircuitsthemselves,but also theabilitytodesignthemwithouterrorsinthefirstplaceandtotestthemappro- priately during and after production. Thisisnotatextdetailingsilicondesignandfabricationmethods.Instead, itisprincipallyconcernedwiththeimportantbranchofmicroelectronicsdealing withcustomcircuits,wherebyspecificcircuitdesignsrequiredbyoriginalequip- ment manufacturers can be realized rapidly and economically in possibly small production quantities. Theterm application-specific IC (ASIC)has been widely used up to now, but the more accurate term user-specific IC (USIC) is now in- creasingly used. Custom circuits have only become viable with the maturity of both the circuit fabrication methods and the computer-aided design resources necessary for their design and test, thus releasing the circuit designer from per- sonal involvement in the range and depth of detail involved. However,havingsaidthis,itisthehallmarkofagoodengineertobeaware ofall theaspectsinvolvedeven thoughheorshemay notneed—orindeed,not beable—todoanythingaboutthem.Thistextadoptsthisapproach,andattempts to give a comprehensive overview of all aspects of custom electronics, includ- ing the very important but difficult managerial decisions of when or when not to use it. The concept of custom microelectronic circuits is not new; it has been almostthreedecadessinceitssimpleconception,butitprobablydidnotachieve verygreatprominenceuntiltheearly1980s.Theintroductionofthemicroproces- sor as a readily available standard off-the-shelf part delayed the wider adoption of custom microelectronics and still is a major force in all the initial ‘‘how- shall-we-make-it’’productdesigndecisions.Nevertheless,customICsoffertheir particular technical oreconomic advantages, and everyproduct designer should be aware of the strengths as well as the weaknesses of both custom and other design styles. These are the matters we shall consider in the pages of this text. It is assumedthat the readerwill be familiar with theprinciples ofmicro- electronic devices, semiconductor physics, basic electronic circuits, and system designascoveredinmanystandardteachingtexts.Forreadersrequiringamore detailedtreatmentthanisgivenhere,specifictextsdealingsolelywithsuchareas asdevicephysics,computer-aideddesign,orotheraspects,shouldbeconsulted. Regrettably, no one book (and no one author!) can cover all these aspects in depth, but it is hoped that the references contained in these pages will point to such additional in-depth information. Theprinciplesofcustommicroelectronicsarenowwellestablished,butin common with the whole of the microelectronics industry, there is a continual evolutionincomplexityofdevices,inobsolescenceofparticularcomponentsand CADresources,andintheriseandfallofindustrialcompaniesthatmakeupthe customcircuitsfield.Itisthereforeinevitablethatsomeofthecommercialprod- uctsdescribedinthistextwillnolongercontinuetorepresentthestatusquo,but the basic educational points being made using these illustrations should remain valid. It is therefore hoped that this book will enable readers to appreciate the broadspectrumofcustommicroelectronicsandwillserveasanappropriaterefer- ence to whatever newer products and design strategies evolve in this field. Stanley L. Hurst Contents Preface 1 INTRODUCTION: THE MICROELECTRONICS EVOLUTION 1.1 Initial History 1.2 The Continuing Evolution 1.3 CAD Developments 1.4 Why Custom Microelectronics? 1.5 Summary 1.6 References 2 TECHNOLOGIES AND FABRICATION 2.1 Bipolar Silicon Technologies 2.2 Unipolar Silicon Technologies 2.3 Memory Circuits 2.4 BiCMOS Technology 2.5 Gallium-Arsenide Technology 2.6 A Comparison of Available Technologies 2.7 References 3 STANDARD OFF-THE-SHELF ICs 3.1 Nonprogrammable SSI, MSI and LSI Digital ICs 3.2 Standard Analog ICs 3.3 Microprocessors 3.4 Memory 3.5 Programmable Logic Devices 3.6 Logic Cell Arrays (LCAs) 3.7 Specialized Application-Specific Standard Parts (ASSPs) 3.8 Summary 3.9 References 4 CUSTOM MICROELECTRONIC TECHNIQUES 4.1 Full Hand-Crafted Custom Design 4.2 Standard Cell Techniques 4.3 Gate Array Techniques 4.4 Maskless Fabrication Techniques 4.5 Summary and Technical Comparisons 4.6 References 5 COMPUTER-AIDED DESIGN 5.1 IC Design Software 5.2 IC Simulation Software 5.3 Silicon Compilers 5.4 CAD Hardware Availability 5.5 CAD Software Availability 5.6 CAD Costs 5.7 Summary 5.8 References 6 TEST PATTERN GENERATION AND DESIGN-FOR-TESTABILITY 6.1 Introduction 6.2 Basic Testing Concepts 6.3 Digital Test Pattern Generation 6.4 Test Pattern Generation for Memory and Programmable Logic Devices 6.5 Microprocessor Testing 6.6 Design-for-Testability (DFT) Techniques 6.7 PLA Design-for-Testability Techniques 6.8 I/O Testing and Boundary Scan 6.9 Further Testing Concepts 6.10 The Silicon Area Overheads of DFT 6.11 Summary 6.12 References 7 THE CHOICE OF DESIGN STYLE: TECHNICAL AND MANAGERIAL CONSIDERATIONS 7.1 The Microelectronic Choices 7.2 Packaging 7.3 Time to Market 7.4 Financial Considerations 7.5 Summary 7.6 References 8 CONCLUSIONS 8.1 The Present Status 8.2 Future Developments 8.3 Final Summary 8.4 References APPENDIX A: The Elements and Their Properties APPENDIX B: Fabrication and Yield APPENDIX C: The Principal Equations Relating to Bipolar Transistor Performance APPENDIX D: The Principal Equations Relating to Unipolar (MOS) Transistor Performance Symbols and Abbreviations 1 Introduction: The Microelectronics Evolution Thedevelopmentofmicroelectronicsspanslessthanonehalfcentury—lessthan one person’s life expectancy—but during this short period it has become the most pervasive technology that has yet been developed. It touches all aspects of our lives, embracing communications, transportation, entertainment, medical matters,comfortandsafety,andyetmanyprofessionaldesignengineershavestill tobecomeinvolvedinthedesignoforiginalproductsusingthefulladvantagesof microelectronics. In this introductory chapter we will survey the developments which have ledtothepresentlevels ofmicroelectronicexpertise. AsnotedinthePreface,it will be assumedthatthe readerisalready familiar withbasic electronic compo- nents, particularly bipolar and MOS transistors, and also with basic electronic circuit configurations and semiconductor physics. We will not attempt to deal with these important fundamentals in any depth, but instead we will attempt to coverthesubjectinawaythatisrelevanttoadesignengineerwhoincorporates microelectronicsasameansofproducingnewandinnovativecompanyproducts. The commercial hardware and software which may be mentioned in this text must not be taken as representative of what may be available now and in the future,sincebothareinacontinuousdynamicstateofrapidchangeanddevelop- ment,butratherareusedinthefollowingpagesasillustrationsoftheprinciples and practice of the areas being discussed. 1.1 INITIAL HISTORY Thedevelopmentofthefirsttransistorin1948wasthestartofthemicroelectron- ics evolution [1], although it was not until about the mid-1950s that suitable discrete devices became available for use in industrial equipments. Early com- mercial devices were germanium junction transistors, where the collector and emitter regions were diffused from opposite sides into the base region to form thepnpornpnconstruction.Althoughgermaniumhasahigherholeandelectron mobility than silicon—0.39 and 0.19 m2 V(cid:1)1 s(cid:1)1, respectively, for germanium compared with 0.14 and 0.05 m2 V(cid:1)1 s(cid:1)1 for silicon, thus making it easier to achievehigh-frequencyperformance—thepoorertemperaturecharacteristicsand the inability to protect the critical transistor perimeters (the ‘metallurgicaljunc- tions’)ofgermaniummeantthatsiliconwouldbecomethedominantmicroelec- tronic technology from the 1960s onwards. Details of germanium versus silicon and other III/IV compounds may be foundinmanystandardtextbooks[2–5].Thegradualdominanceofsilicontech- nology was principally due to the development of planar fabrication, whereby allthefabricationstepsaremadeononesurface(plane)ofthesiliconwafer(see Chapter2)silicondioxideprovidingthekeytotheprotectionofthemetallurgical junctionsaswellasprovidinggoodisolationbetweenareaswhererequired.Sili- conwasinitiallymoredifficulttoprocessthangermanium[6],whichaccounted in part for germanium being the first commercially used technology. Thefirstpersontoperceivethepossibilityofafullyinterconnectedmono- lithiccircuit,ratherthanthefabricationofdiscretesemiconductordeviceswhich weretheninterconnectedbywiresorotherseparatemeans,wasprobablyG.W.A. Dummerofthe(then) RoyalRadarEstablishment at GreatMalvern,Englandin 1952 [7–9]; however, the bulk of the development work was pioneered in the UnitedStates,particularlybyJackKilbyofTexasInstruments,followedbyother companies such as Fairchild and Sprague. By 1962 small scale integrated (SSI) packages were becoming widely available for industrial use. 1.2 THE CONTINUING EVOLUTION Sincethe1960sthehistoryofsilicontechnologyhasbeenoneofcontinuousand rapidevolutionbaseduponplanartechniques.Duringthefollowingtwodecades chipcomplexityincreasedfromtheinitialsmallscaleintegration(SSI)capability throughmedium scale integration(MSI)andlargescale integration(LSI) tothe present status of very large scale and ultra large scale integration (VLSI and ULSI). This is indicated in the classic illustration shown in Figure 1.1 [10,11]. Sincethesiliconarearequiredfortransistorsislessthanthatrequiredforresistors andcapacitors,theimpactofthisevolutiononelectroniccircuitdesignhasbeen toencouragetheuseofactiveratherthanpassivedevices.Thischangeofempha- sishasinitsturngivenrisetogreatlyimprovedcircuitperformance,sincemuch moreoverallgainisreadilyavailableforcircuitdesignsthanwasthecasewhen separateandrelativelyexpensiveactivedeviceswerenecessary.Theoperational Fig. 1.1 The classic Moore’s Law graph, showing the increase in maximum possible capability per single IC chip over the three decades since 1960. SSI is usually taken as tens of transistors, MSI as hundreds of transistors, LSI as thousands, and VLSI as tens ofthousandsoftransistors upwards. amplifierandthemicroprocessor(seeChapter3)arebothgoodexamplesofthis evolution. The increase in capability shown in Figure 1.1 combines two effects, namely the growth in possible wafer size and chip area and the decrease in on- chip feature size. The improvements in these two parameters together combine to give the overall increase in capability per IC, with over 107 transistors now available on a single chip. At the same time performance and costs have im- proved, as indicated in Figure 1.2. These developments are still continuing, but possibly at a slower rate as device geometries become deep submicron and the limitsofwell-establishedphotolithographictechniquesapproachtheirtheoretical limit.The escalatingcostoffabricationlines tomanufacture state-of-the-artmi- croelectronic circuits may also have a future slow-down effect on the rate of increase of larger and more complex ICs.

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