Vacuum 2004: Vol 76 Table of Contents

2004·2.1 MB·English

The international journal & abstracting service for Vacuum Sciences & Technology
ACUUM
SURFACE ENGINEERING, SURFACE INSTRUMENTATION
& VACUUM TECHNOLOGY
Volume 76, 2004

VACUUM
SURFACE ENGINEERING, SURFACE INSTRUMENTATION
& VACUUM TECHNOLOGY
ELSEVIER Vacuum 76 (2004) V—XI
www.elsevier.com/locate/vacuum
Contents
Volume 76 Number 1
AUTHORS ARTICLES
Y. Abe, T.H asegawa, M. Kawamura and K. 1 Characterization of Ag oxide thin films prepared by reactive RF sputtering
Sasaki
PY. Liu, J.F. Chen and W.D. Sun 7 Characterizations of SnO» and SnO>2:Sb thin films prepared by PECVD
R.A. Zarate and V.M. Fuenzalida 13‘ Titanium monoxide ultra-thin coatings evaporated onto polycrystalline copper
films
H. Kinoshita,T .M urakami and 19 Chemical vapor deposition of SiO> films byT EOS/O>2 supermagnetron plasma
F. Fukushima
VN. Anashin, RV. Dostovalov, A.A. 23 Molecular cryosorption properties of porous copper, anodised aluminium and
Krasnov, I.R. Collins, O.B. Malyshev, charcoal at temperatures between 10 and 20 K
A.A. NikiforovV.,A . Cherepanov,
Z.A. Korotaeva, A.E. Lapin and
V.A. Poluboyarov
D. Bhattacharyya, A.K. Poswal, 31 Investigation of Mo/Si and W/Si interfaces by phase modulated spectroscopic
G.K. Dey and N.C. Das ellipsometry and cross-sectional transmission electron microscopy
B. Kim, DW. Lee, K-Y. Park, 37 ‘Prediction of plasma etching using a randomized generalized regression neural
S.R. Choi and S. Choi network
E. Gubbini, G. Kommol, M. Schniirer, 45 “On-line” cleaning of optical components in a multi- TW-Ti:Sa laser system
H. Schoénagel, U. Eichmann,
M.P. Kalashnikov, PV. Nickles,
F. Eggenstein, G. Reichardt and
W. Sandner
W. Stepniewski MHD numerical modelling of the plasma focus phenomena
J.R. Sobiecki, P. Mankowski and 57 Improving the performance properties of valve martensitic steel by glow dis-
A. Patejuk charge-assisted nitriding
M.-K. Kwon and Y.-K. Hwang 63 A study on the pumping performance of the disk-type drag pumps for spiral
channel in rarefied gas flow
RW. Barber, Y. Sun, X.J. Gu and D.R. 73 Isothermal slip flow over curved surfaces
Emerson
doi:10.1016/S0042-207X(04)00414- 5
VI Volume Contents | Vacuum 76 (2004) V—XI
P.J. Lobo, F. Becheri and J. Gomez-Gonhi 83 Comparison between Monte Carlo and analytical calculation of Clausing func-
tions of cylindrical and conical tubes
W. Jitschin 89 Gas flow measurement by the thin orifice and the classical Venturi tube
R.G. Livesey 101 Solution methods for gas flow in ducts through the whole pressure regime
VACUUM NEWS
C. Edelmann 109 Scientific workshops on selected fields of vacuum technology in connection
with the International Trade Fair for VacuumTechnology and Vacuum Application
vaQum 2004 in Magdeburg
Volume 76 Numbers 2-3
N. Guerassimov and D. Karpuzov 117 Editorial
Thin Films: Deposition and Growth
C.P. Lungu, K. Iwasaki, K. Kishi, 119 Tribo-ecological coatings prepared by ECR sputtering
M. Yamamoto and R. Tanaka
C.P. Lungu, I. Mustata, G. Musa, 127 Low friction silver-DLC coatings prepared by thermionic vacuum arc method
V. Zaroschi, A. Mihaela Lungu
and K. lwasaki
1. Mustata, C.P. Lungu, A.M. Lungu, 131 Giant magneto-resistive granular layers deposited byT VA method
V. Zaroski, M. Blideran and V. Ciupina
L. Pramatarova, E. Pecheva, 135 Porous silicon as a substrate for hydroxyapatite growth
D. Dimova-Malinovska,
R. Pramatarova, U. Bismayer,
T. Petrov and N. Minkovski
F. Hamelmann, A. Aschentrup, 139 Plasma-assisted deposition of thin carbon films from methane and the influence
A. Brechling, U. Heinzmann, of the plasma parameters and additional gases
M. Abrashev, A. Szekeres and
K. Gesheva
M. Beshkova, Z. Zakhariev, 143 Low-pressure sublimation epitaxy of AIN films—growth and characterization
MN. Abrashev, E. Birch, A. Kakanakova
and R. Yakimova
V. Rashkova, S. Kitova, 147 Thin films of cobalt oxides obtained by a reaction during vacuum deposition
L. Litynska and T. Vitanov
D. Dimova-Malinovska, O. Angelov, Polycrystalline silicon thin films obtained by Ni-induced crystallization on glass
M. Sendova-Vassileva, M. Kamenova, substrate
J.C. Pivin and L. Pramatarova
1.S. Atanasov, L.A. Vulkova and 155 Numerical simulation of molecular beam epitaxy in 2 + 1 dimensions
0.1. Yordanov
Thin Films: Properties and Characterization
J. Morales-Hernandez, 161 Structure and mechanical properties of (Ti, Al) (B,N) coatings fabricated by reac-
L. Garcia-Gonzalez, J. Munoz-Saldana tive DC magnetron sputtering
and F.J. Espinoza-Beltran
Volume Contents | Vacuum 76 (2004) V—XI Vil
T. Kado 165 Structural and mechanical properties of tungsten oxycarbide films
synthesized by inductively coupled RF _ plasma-assisted magnetron
sputtering
B. Skorié, D. KakaS, M. Rakita, 169 Structure, hardness and adhesion of thin coatings deposited by PVD, IBAD on
N. Bibi¢ and D. PeruSkob nitrided steels
A. Hurtado Macias, 173 Mechanical characterization of thin amorphous tungsten-carbon (W, Cy)
J. Gonzalez-Hernandez, films prepared by DC-cosputtering
J. Munoz Saldana, P. Herrera-Fierro,
P. Garcia-Jimenez, F.J. Espinoza
Beltran,T . Scholz and
G.A. Schneider
J.J. Valenzuela-Jauregui, 177 ~=— Characterization of SnO>, InzO3, and ITO films prepared by thermal oxidation of
R. Quintero-Gonzalez, J. Hernandez- DC-sputtered Sn, In and In-Sn films
Torres, A. Mendoza-Galvan and
R. Ramirez-Bon
M.B. Ortuno-Lopez, 181 Optical band gap tuning and study of strain in CdS thin films
M. Sotelo-Lerma,
A. Mendoza-Galvan and
R. Ramirez-Bon
P. Gushterova and P. Sharlandjiev 185 Determination of optical constants (n, k, d) of very thin films deposited on
absorbing substrate
T. KohoutT.e Wakgn,er , J. Orava, 191 Amorphous films of Ag-As-S system prepared by spin-coatingtechnique, pre-
M. Frumar, V. Perina, A. Mackova, paration techniques and films physico-chemical properties
V. Hnatowitz, M.Vicek and
S. Kasap
T. lvanova, K. Gesheva, 195 Optical and electrochromic properties of CVD mixed MoO3-W0Os3 thin films
F. Hamelmann, G. Popkirov,
M. Abrashev, M. Ganchev and
E. Tzvetkova
L. Yourukova, K. Kolentsov and 199 Effect of a second protective layer in AC EL display structures on their
E. Radeva characteristics
V. Georgieva, P. Stevchev, Quartz resonator with thinTiO> for NH3 detection
P. Vitanov and L. Spassov
P. Vitanov, K. lvanova and 207 _ _—siInvestigation of thin film of metal oxides on silicon with impedance
A. Harizanova spectroscopy
E. Krumov, V. Mankov and 211 Nanosized columnar microstructure and related properties of electron gun
K. Starbova deposited Al2O3 thin films
P. Vitanov, A. Harizanova, 215 Structure and optical properties of (AloO3),(TiO),_, thin films prepared by
Chr. Angelov, |. Petrov, Z. Alexieva a sol gel processing
and P. Stefanov
P. Vitanov,Tz . Babeva, Z. Alexieva, 219 Optical properties of (AloO3),(TiO2),_, films deposited by the sol-gel method
A. Harizanova and Z. Nenova
Polymer and Superconducting Layers
D. Dimov, E. Spassova, 223 ~_—Electron-assisted deposition of thin organic layers
|. Karamancheva, I. Zhivkov
and G. Danev
VIII Volume Contents | Vacuum 76 (2004) V—XI
G. Dobrikov, K. Kolentsov, 227 Photoluminescent effects in conjugated polymer layers
D. Zhechev, L. Yourukova,
M. Rassovska, C. Yossifov and
N. Parvanova
Y. Sarov, |. Capek, S. Janickova, 231 Properties of nano-scaled disperse media investigated by refractometric
I. Kostic, A. Konecnikova, measurements
L. Matay and V. Sarova
|. Zhivkov, E. Spassova, D. Dimov 237 Oxygen influence on the conductivity of copper phthalocyanine vacuum-de-
and G. Danev posited thin films
E. Mateev, T. Donchev, B. Blagoev, 241 Deposition of YBazCu307_, superconducting films by magnetron sputtering
T. Nurgaliev, V. Tsaneva and and water vapour addition to the sputtering gas
Z.H. Barber
T. Nurgaliev, E. Mateev, T.D onchev, 245 Deposition and characterization of HTS YBCO thin films on tilted NdGaO3z
S. Miteva, P.B. Mozhaev, substrates
IV. Borisenko, G.A. Ovsyannikov
and I|.M. Kotelyanski
E.S. Viakhov, K.A. Nenkov, 249 Ferromagnetic and charge ordering competition in strained thin films of La,_,.
T.G. Donchev, E.S. Mateev and Ca,MnQOz3 system
R.A. Chakalov
V. Pencheva, S. Penchev, V. Naboko, 253 Application of modulated optical reflectance method for high-temperature
S. Naboko andT . Donchev superconducting film characterization
V.N. TsanevaT,. !. Donchev, 257 Optical emission studies of the plasma during high-pressure sputtering of
Tsv.K. Popov, J.H. Durrell, Y-Ba-Cu-0 targets
M.G. Blamire, Z.H. Barber and
J.E. Evetts
T. Donchev,V . Tsaneva, Z.H. Barber, 261 Magnetic and electric properties of magnetron-sputtered YBCO/LSMO and
T. Nurgaliev, L. Gravier, J.Ph. LSMO/YBCO double layers
Ansermet, I. Petrov and V. Petrova
Modification of Materials by lon, Electron and Laser Beams
V.N. Popok, SV. Prasalovich and E.E.B. 265 Surface nanostructuring by implantation of cluster ions
Campbell
M. Marinova, M. Baleva and 273 The optical dielectric function anisotropy in ion beam synthesized B-FeSiz layers
E. Goranova
A. Atanassov, M. Baleva, 277 Grazing incident asymmetric X-ray diffraction of B-FeSi2 layers, produced by ion
V. Darakchieva and E. Goranova beam synthesis
Y. Bohne, N. Shevchenko, F. Prokert, 281 In situ X-ray diffraction investigations during high-energy oxygen ion implanta-
J. von Borany, B. Rauschenbach and tion in transition metals
W. Moller
R. Lopez-Callejas, Plasma immersion ion implantation of AISI 304 stainless steel in toroidal and
R. Valencia-Alvarado, cylindrical geometries
A.E. Munoz-Castro,
0.G. Godoy-Cabrera,
S.R. Barocio and E. Chavez-Alarcon
R.E. Hurley, S. Suder and Studies of co-implanted helium and hydrogen with an intermediate annealing
H.S. Gamble step for thermal splitting of bonded silicon to oxide-coated wafers
AN. Goncharov, A.G. Guglya, Investigation of nitrogen distribution in samples produced by ion-induced
1.G. Marchenko and I|.M. Neklyudov deposition of Cr films on aluminum under nitrogen ions bombardment
Volume Contents / Vacuum 76 (2004) V—XI
S. Simeonov, A. Gushterov, 303 Defects induced by hydrogen implantation in n-Si/SiO> structures
A. Szekeres and E. Kafedjiiska
S. Kaschieva, Zh. Todorova and 307 ~=Radiation defects induced by 20MeV electrons in MOS structures
S.N. Dmitriev
S. Kaschieva and Zh. Todorova 311 Radiation defects in n- and p-Si MOS structures caused by consecutive ion im-
plantation and gamma irradiation
A. Gushterov and S. Simeonov 315 _—sT rap-assisted tunnelling in ion-implanted n-Si/SiO> structures
K. Velitchkova, K. Krezhov and 319 DC surface transport properties of selenium-implanted polymethyl-
S. Balabanov metacrylate
M. Kalitzova, E. Viakhov, 325 Effect of high-frequency electromagnetic field onTe* - implanted (001) Si
Y. Marinov, K. Gesheva,
V. Ignatova, O. Lebedev,
C. Muntele and R. Gijbels
P. Hrkut, M. Drzik, M. Mozolik, 329 =Theinfluence of ion beam bombardment on the stress of carbon layers prepared
P. Kovac, S. Hascik,W. Piller, by RF magnetron sputtering
E. Platzgumer and H. Loeschner
L. Pramatarova, E. Pecheva, 335 lonbeam patterning of solid surfaces for hydroxyapatite deposition
M.F. Maitz, M.T. Pham and
A. Kondyurin
L. Pramatarova, E. Pecheva, 339 lon beam and laser processing for hydroxyapatite formation
T. Petrov, A. Kondyurin,
R. Pramatarova and N. Minkovski
Plasma Processing and Diagnostics
C.M. Ferreira, E. Tatarova, 343 A large-volume N2—Ar microwave plasma source based on surface waves
J. Henriques and F.M. Dias
C.M. Ferreira, E. Tatarova, 347 ‘Excited species in a large-scale N2—O>2 microwave plasma source
F.M. Dias and A. Ricard
I.M. lvanova-Stanik and M. Scholz 351 = Study of the initial phase in IPD accelerator
A. Szydlowski, A. Banaszak, 357 Measurements of fast ions and neutrons emitted from PF-1000 plasma focus
B. Bienkowska, I|.M. lvanova-Stanik, device
M. Scholz and M.J. Sadowski
M. Scholz, B. Bienkowska, 361 Correlation between pinch dynamics, neutron and X-ray emission from mega-
I.M. lvanova-Stanik, L. Karpinski, joule plasma focus device
M. Paduch, K. Tomaszewski,
E. Zielinska, J. Kravarik, P. Kubes,
A. Banaszak, L. Jakubowski,
M. Sadowski, A. Szydlowski,
H. Schmidt and S. Vitulli
V. Yordanov, D. Genov, 365 _lonization growth in the breakdown of plasma focus discharge
I. lvanova-Stanik and A. Blagoev
K. Makasheva, K. Marinov, 369 __Travelling-wave-sustained discharges
A. Shivarova, L. Stoev and Kh. Tarnev
Ts. Paunska, A. Shivarova and 377 Low-pressure discharges in surface-wave fields
Kh. Tarnev
F.M. Dias, Tsv.K. Popov and 381 Local diagnostics in gas discharges: free electrons, field probes and antennas
M. Dimitrova
X Volume Contents | Vacuum 76 (2004) V—XI
N. Djermanova, O. Ezekiev, 389 Diagnostics ofT rivelpiece-Gould mode produced discharges
Zh. Kiss‘ovski, St. Kolev and
A. Shivarova
Z. Neichev and E. Benova 393 Optimizing the plasma parameters of a low-pressure Coaxial discharge
K. Makasheva, A. Shivarova and 397 Applied signal-propagation properties in surface-wave-produced discharges
L. Stoev
D. Zhechev, N. Parvanova and 401 Ar’ — Cd Sputtering-atomizing and coherent-galvanic effects in hollow
V. Grigorieva cathode discharge
E. Dimova, G.M. Petrov and 405 Quenching of *He and “He excited states by collisions with N>
K.B. Blagoev
M. Pencheva, G. Petrov,T . Petrova 409 A collisional-radiative model of an argon surface-wave-sustained plasma at
and E. Benova atmospheric pressure
E. lordanova,T . Petrova and 413 Dominant processes for excited atomic states population in argon surface-wave
E. Benova plasma at low and intermediate pressure
Tsv.K. Popov, M. Dimitrova and 417 Determination of the electron density in current-less argon plasma using
F.M. Dias Langmuir probe measurements
I.M. Rusinov and A.B. Blagoev 421 Determination of the diffusion coefficient of Mg atoms in *He at ambient
temperatures
Volume 76 Number 4
R. Hrach,V . Hrachova and M. Vicher 425 Computational study of plasma-solid interaction in mixtures of oxygen with rare
gases
V. Hrachova, O. Kylian and A. Kanka Study of the vacuum purity influence on oxygen and nitrogen spectra properties
in DC glow discharge
O. Bilyk, M. Holik, A. Marek, P. Kudrna, Fluctuations of the magnetically-supported dc discharge in coaxial configura-
M. Tichy and J.F. Behnke tion
A.Velyhan, P. Zilavy, J. Pavid, 447 lon beam effects on dust grains
J. Safrankova and Z. Nemecek
O. Bilyk, M. Holik, A. Pysanenko, Langmuir probe diagnostic for measurement of recombination rates of positive
J. Glosik, P. Kudrna, R. Plasil and M.T ichy ions with electrons in stationary afterglow system
P. Sobotik, |. OSt‘adal and P. Kocan STM observation of Ag adatom interactions on the Si(111)-(7 « 7) surface
V. Matolin, S. Fabik, J. Glosik, 471 Experimental system for GaN thin films growth and in situ characterisation by
L. Bideux, Y.O uld-Metidji and B. Gruzza electron spectroscopic methods
L. Peksa, P. Repa,T . Gronych, J. Tesar 477 Uncertainty analysis of the high vacuum part of the orifice-flow-type pressure
and D. Prazak standard
J. Tesar, P. Repa, D. Prazak, Z. Krajicek The new method of traceability of a force-balanced piston gauge used as pri-
and L. Peksa mary vacuum standard
R.T. Rumianowski and R.S. Dygdata Investigation of plasma plumes obtained by laser ablation of Se and Pb targets
S.-H. Jeong, J.-K. Kim, B.-S. Kim, Characterization of SiOz and TiO> films prepared using rf magnetron sputtering
S.-H. Shim and B.-T. Lee and their application to anti-reflection coating
Volume Contents | Vacuum 76 (2004) V—XI XI
Q.G. Zhou, X.D. Bai, X.Y. Xue, 517 The influence ofY ion implantation on the oxidation behaviour of ZrN coating
Y.H. Ling, XW. Chen, J. Xu and
D.R. Wang
SHORT COMMUNICATION
A. Grzeszczak, S. Kaszczyszyn Dependence of the channel electron multiplier noise spectral functions on the
and S. Klein parameters of its operation
BOOK REVIEW
R. Reid A user's guide to vacuum technology (3rd Edition)
VOLUME CONTENTS AND AUTHOR INDEX