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250 Pages·2003·2.29 MB·English

Sunday Morning, November 2, 2003
Workshop on Sputtering This D.R.@footnote 3@ model also leads to a poisoning instability without
Room Constellation C, Hyatt Regency - Session WS-SuM any need of wall gettering and also two levels in sputtering speed
depending on the fraction of (RG) i.e. a high sputtering speed for low mole
Workshop on Sputtering (Morning Session) fractions and a low sputtering speed for higher mole fractions. This
Moderator: W.D. Sproul, Advanced Energy Industries, Inc. behaviour has been simulated by means of the TRIDYN code.@footnote
4@. The transition between metallic and compound or poisoned regime
10:00am WS-SuM1 Basic Understanding of Reactive Sputtering Processes,
can be predicted as a function of an experimental parameter which
S. Berg, T. Nyberg, Uppsala University, Sweden INVITED contains quantities such as pumping speed, wall area, discharge current,
Reactive sputtering is a mixed physical and chemical vapour deposition sputter efficiency etc. In this model it is assumed, and shown
process. It is frequently used in a wide variety of industrial applications. It is experimentally, that non bonded RG can be present in a shallow surface
not, however, a simple matter to combine high rate reactive sputter layer. It is also shown that this non bonded RG is a component which can
deposition and process stability. The reactive gas may easily poison the give rise to an increase in ATV upon poisoning. Also chemisorption, if
target causing the deposition rate to decrease sometimes as much as a 5- present, can give rise to an increase in ATV. Reality will probably be best
20 times. In addition the process exhibits a hysteresis behaviour in the modelled by a combination of the gettering model and the D.R.
relations between the primary processing parameters. In a large volume model.@footnote 5@ In metallic mode, the magnetron discharge can be
production situation this may cause serious problems. There must be some described quite accurately and several tools are at our disposal varying
sort of built in control system to force the process to avoid being trapped in from Analytical models over Fluid models, Boltzmann models, Monte Carlo
the hysteresis loop and entering too far into the target poisoned mode. models/Particle in cell (MC-PIC) models to Hybrid models (MC-Fluid). All
Process modeling of the reactive sputtering process may serve to illustrate these models are in some or other way a trade off between speed and
the influence of different processing parameters on the overall behaviour accuracy. However in pure metallic sputtering the accuracy and speed of
of the process. A quite successful model for the basic behaviour of the the analytical approach is surprising.@footnote 6@ Modelling of the
reactive sputtering process have been suggested by Berg and co-workers. It magnetron discharge in poisoned or compound mode requires the correct
is frequently referred to as Berg´s model. This model enables to predict the picture of the poisoning mechanism. This will allow to predict over the full
general shapes of most experimental reactive sputtering processing range of reactive gas flows quantities such as number densities, energy and
observations. It may predict the complex realations between the partial directivity of the different material fluxes towards the substrate. This in
pressure and supply of the reactive gas as well as the fraction of target turn will give an estimate of the expected deposition speeds, coating
poisoning and the composition and deposition rate of the growing film. homogeneity, target consumption and will eventually predict the growth
Knowing the actual relations between these parameters significantly assists mechanism of the coating. The ultimate goal is to develop for every
in designing reliable control systems for reactive sputtering processes. A particular application a stable running magnetron. @FootnoteText@
detailed analysis suggests that there exist several ways of eliminating the @footnote 1@S. Berg et al., J. Vac. Sc. Technol. A5(2), 1987, p. 202.
hysteresis in reactive sputtering processes. Increasing the pumping speed @footnote 2@"Sputter Deposition" by W. Westwood ISBN 0-7354-0105-5.
of the system will ultimately result in elimination of the hysteresis. @footnote 3@D. Depla et al., Vacuum 66 (2002) p. 9. @footnote [email protected].
Decreasing the effective sputter erosion zone at the target may also result Chen et al., Nucl. Instr. Meth. In Physd. Res. B: in press. @footnote 5@D.
in elimination of the hystereis. Hysteresis or no hysteresis depend on a Depla, R. De Gryse, submitted for publication in Surface and Coatings
critical balance between the gettering of the reactive gas by compound Technology. @footnote 6@G. Buyle et al., J. Vac. Sci. Technol., A21(4),
formation of the growing film and the amount of the supplied reactive gas July/August 2003.
eliminated from the processing chamber by the external pump. There
exists several ways of "twisting and turning" this balance. This will be 11:40am WS-SuM5 Modeling of Sputtering Equipment and Processes as
shown in this presentation. Sputtering from more than one target (co- an Engineering Tool: Building a Virtual Sputter Tool, J.C.S. Kools, Veeco
sputtering of different elements) and/or the use of more than one reactive Instruments INVITED
gas in a reactive sputtering process will significantly increase the In recent years, computational modeling has emerged as an attractive
complexity of the process. Reproducing deposition rate and film engineering tool to substantially reduce the development time and cost for
composition under such conditions may be hazardous. Input processing both equipment and process development of industrial thin film deposition
parameters interact with each other in such a way that not only their and etch. Furthermore, due to the dramatic increase in computing power
absolute values are important but also the sequence in wich that they are available, advanced computational techniques such as Molecular Dynamics
varied must be taken into account. This makes process control quite have migrated from the academic community to the engineering
problematic. We will illustrate how such conditions occur and suggest how community, bringing more realistic models within its reach. Our goal is to
to be in full control of the process. @FootnoteText@ 1. Computer build a "virtual sputter tool" that could predict the sputter equipment
modeling as a tool to predict deposition rate and film composition in the behavior and film properties. Fig.1 sketches the outline of a virtual sputter
reactive sputtering process.: S. Berg, T.Nyberg, H-O.Blom and C.Nender; tool. As can be seen, such a Multiscale/Multiphysics model comprises both
J.Vac.Sci.Technol.A16(3)May/June 1998,p1277-85 2. Modeling of the advanced computational techniques, such as Particle-In-Cell Monte-Carlo
reactive sputtering process: S. Berg, T.Nyberg, H-O.Blom and C.Nender (PIC-MC) and conventional continuum descriptions such as Finite Element
Handbook of thin film process technology, Edited by D.A.Glocker and Analysis (FEA). In this talk, we will review the progress that has been made
S.I.Shah, Inst.of Physics, 1998, pp A5.3:1-15 3. Review article to appear in towards building a virtual sputter tool, comparing modeling and
the journal Thin Solid Films in spring 2004. experimental results. We will put most emphasis on the right hand side of
the diagram, namely the modeling of film properties, in the context of
11:00am WS-SuM3 Shallow Implantation as a Mechanism for Target
industrial application. We will discuss the future outlook towards
Poisoning in Reactive Sputtering, R. De Gryse, D. Depla, J. Haemers, G.
completion of the virtual sputter tool.
Buyle, University Ghent, Belgium INVITED
Up to now, reactive sputtering and in particular the target poisoning effect
has been described in terms of gettering and chemisorption. It is modelled
by a set of linear differential equations@footnote 1@ which predict the
non linear poisoning behaviour as a function of the mole fraction of the
reactive gas (RG). From this picture it also follows that a decrease in sputter
rate as well as a decrease in absolute target voltage (ATV) is expected. The
expected decrease in ATV relies on the fact that it is widely accepted that
the ion induced secondary electron emission coefficient (ISEE) of
compounds is larger as compared to the ISEE of the corresponding metal.
However, the experiment shows that several combinations of metal - (R.G.)
give rise to an increase in ATV upon poisoning. In systems such as
Nb/O@sub 2@@footnote 2@; Sn/O@sub 2@@footnote 2@;Si/N@sub
2@; etc. the ATV is reported to increase when poisoning occurs. Recently it
has been suggested that the poisoning instability is not always due to the
chemisorption effect but can also be ascribed to the combined effect of
target etching, preferential sputtering of metal vis a vis compound and
shallow implantation of reaction gas into the target near surface region.
Sunday Morning, November 2, 2003 1 10:00 AM
Sunday Afternoon, November 2, 2003
Workshop on Sputtering reason, reactive sputtering using IPVD may produce a high flux of oxygen or
Room Constellation C, Hyatt Regency - Session WS-SuA nitrogen atoms, but IPVD typically does not significantly ionize the reactive
gas flow. Nonetheless, the depositing flux of metal may be as much as 80-
Workshop on Sputtering (Afternoon Session) 90% ionized using IPVD. The physical mechanisms responsible for ionization
Moderator: W.D. Sproul, Advanced Energy Industries, Inc. will be briefly reviewed in the context of reactor design and process
development. A primary user of IPVD is the semiconductor industry. The
1:30pm WS-SuA1 Control of Microstructural Evolution during Film
driving force for adopting IPVD was the need to deposit thin films into the
Growth, I. Petrov, University of Illinois at Urbana-Champaign INVITED high aspect ratio microstructures commonly found on modern integrated
Microstructure is critical for polycrystalline thin film applications and its circuits. Conventional sputtering exhibits a cosine angular distribution of
control during kinetically-limited, low-temperature deposition has been an sputtered atoms that makes deposition of material into the bottom of deep
important goal of materials science in the past decades. In this part of the submicron trenches and vias impossible. By simply applying a negative bias
workshop we will review the fundamental film growth processes - voltage to the wafer, however, ionized sputtered material can be
nucleation, coalescence, competitive growth, and recrystallization - and accelerated perpendicular to the wafer surface such that the depositing
their role in thin film microstructure evolution as a function of substrate flux provides adequate bottom coverage of microstructures. The common
temperature. We discuss, further, atomistic mechanisms through which applications of IPVD include the deposition of copper seed layers used for
reactive deposition and low-energy ion/surface interactions modify growth the subsequent electroplating of copper interconnects, as well as the
kinetics and, thus, allow to controllably manipulate microstructural deposition of adhesion layers and barrier layers using reactively sputtered
evolution. Special attention will paid to in-situ substrate treatment by ion- metal-nitrides. Examples of successful semiconductor processes that use
irradiation and its effect on film microstructure and adhesion. IPVD will be discussed. Because many IPVD process tools require a
complete sputtering system plus additional hardware for producing the
2:30pm WS-SuA3 Advances in Sputtering Power Supply Technology, R.
secondary ionizing plasma, IPVD is a more complex and expensive process
Scholl, Advanced Energy Industries, Inc. INVITED
than conventional PVD. The secondary ionizing plasma may be produced by
Plasma power supplies display a marked interaction with the plasma and
inductively coupled plasma, helicon resonators, or ECR plasma - all of which
other elements of the system, and a clear understanding of the important
add cost and complexity. Recent advances, however, exploit single power
parameters and characteristics of the power supply is a considerable aid in
source sputtering in which the secondary plasma is produced by the
designing and operating a plasma system. In this presentation the basic
sputtering source. These simple techniques may allow for the broader use
characteristics of DC, midfrequency, and high frequency (RF) supplies will
of IPVD in cost-sensitive applications.
be outlined, and the key parameters vis-à-vis plasma interactions
presented. Instrumentation and matching issues in RF systems will be
discussed; in particular a presentation will be made on forward, reflected
and load power and their significance in plasma systems. Finally, special
and emerging power technology will be covered in a special section,
including balancing systems for dual magnetron sputtering, multiple anode
sputtering, and ultrahigh power pulsed DC, among others.
3:30pm WS-SuA6 Cathodic Arcs and High Power Pulsed Magnetron
Sputtering: A Comparison of Plasma Formation and Thin Film Deposition,
A. Anders, Lawrence Berkeley Laboratory INVITED
Film formation by energetic condensation has been shown to lead to well-
adherent, dense films. Films are often under high compressive stress, but
stress control is possible by pulsed high-voltage biasing, for example.
Control of film growth via tuning the kinetic energy of condensing species is
most efficient when the condensing species are ions, and when the degree
of ionization of the plasma is high. Cathodic arc plasmas are fully ionized;
they even contain multiply charged ions. The streaming plasma is
supersonic, with kinetic ion energies in the range 20-150 eV, and additional
energy can be provided via substrate bias. Ion formation at cathode spots
and the dependence of plasma properties on the cathode material will be
discussed. Along with ions, macroparticles are produced at cathode spots.
This highly undesirable feature can be mitigated by plasma filters and other
approaches, however, there is strong motivation to find alternative ways of
producing fully ionized plasmas of condensing species. High power pulsed
magnetron sputtering (HPPMS) may be one possible way of achieving this
goal, at least for some target materials. In HPPMS, the power density at the
magnetron target is pulsed to power levels exceeding the average power
by about two orders of magnitude. Thermalization of sputtered atoms
appears to be needed to accomplish ionization, and self-sputtering during
each power pulse may be an important feature of HPPMS.
4:30pm WS-SuA8 Progress and Prospects for Ionized Physical Vapor
Deposition, J. Hopwood, Northeastern University INVITED
For somewhat more than a decade, the intentional ionization of sputtered
neutral atoms has been exploited to improve the directionality of sputter
deposition. In addition to directional control, once a sputtered atom is
ionized it is relatively easy to control its energy of deposition. Ionized
sputtering is a subclass of the deposition technique commonly known as
ionized physical vapor deposition (IPVD). The common characteristic of the
many various IPVD techniques is that a neutral vapor, created by physical
means including evaporation, sputtering, and ablation, is partially ionized
using an intense secondary plasma. As the neutral vapor traverses this
secondary discharge, the atoms are ionized by collisions with energetic
electrons and metastable atoms. Due to the low ionization potential of
most metals, the ionizing discharge need only have about 10@super 12@
electrons per cm@super 3@ with an electron temperature of ~ 2 eV.
Atoms with high ionization potentials and small ionization cross sections,
however, require significantly more intense secondary discharges. For this
Sunday Afternoon, November 2, 2003 2 1:30 PM
Sunday Afternoon, November 2, 2003
Biomaterials Plenary Session have unique collective properties that are qualitatively different from the
Room 307 - Session BP-SuA properties of their monovalent constituents. Monovalent interactions-
generally small molecules directed towards a single receptor site- are
Biomaterials Plenary clearly fundamental, but understanding them is not necessarily sufficient
Moderator: H.J. Griesser, University of South Australia to understand multivalency and its importance in biology. Our group is
interested in confirming, understanding, and quantifying the importance
3:00pm BP-SuA4 New Perspective on Hydrogen Bonding in Water using X-
of multivalency in biological interactions, defining the range of biological
rays, A. Nilsson, Stanford Synchrotron Radiation Laboratory INVITED systems in which it is important, and moving this fundamental knowledge
Hydrogen bonding (H-bonding) in water and at interfaces provides the towards applications in the design of drugs and materials.
mechanism for many processes of great importance for biological system.
Recent experiments using x-ray and electron spectroscopy have raised the
question whether we really understand the nature of H-bonding and the
structure of liquid water. Using x-ray absorption spectroscopy (XAS)
together with density functional theory (DFT) calculations we have
demonstrated the appearance of specific spectral features that can be
related to asymmetric H-bonding configurations. These can be seen at the
surface of ice and in the liquid phase showing the existence of broken H-
bonded local structures. The surprising result for the liquid phase is the
large number of broken H-bonded species compared with the established
wisdom based on molecular dynamic (MD) simulations. We find that most
molecules in the liquid are in two-hydrogen-bonded configurations with
one donor and one acceptor hydrogen bond compared to the four-
hydrogen-bonded tetrahedral structure in ice. Measuring XAS spectra
through x-ray Raman scattering (XRS), where inelastic scattered x-rays
cause a core excitation, different samples can be studied in air using hard x-
rays. This provides means to study water at various temperatures and
pressures. From x-ray emission spectroscopy (XES) and photoelectron
spectroscopy (PES) studies of ice, providing information of the occupied
orbitals projected onto the oxygen atoms, a deeper insight into molecular
orbital rearrangements upon H-bonding could be obtained. The decrease in
repulsive interaction through charge transfer and rehybridization is
essential for a strong attractive electrostatic interaction. The new
applications of x-ray spectroscopy (both XAS and XES) and PES to water
based systems provides a unique opportunity to obtain new information
that has not been accessible previously. A perspective of implications to
interfaces will be given.
3:40pm BP-SuA6 Synthetic Receptors for Biosensor Surfaces, I. Lundstrom,
Linkoping University, Sweden INVITED
Several biosensor principles are based on biomolecular interactions on
surfaces or in thin sensing layers. One of the most wellknown techniques
for the direct elucidation of biomolecular interactions utilizes optical
changes in a thin hydrogel (dextran) sensing layer occurring upon the
binding of biomolecules to the ligands in the sensing layer. Labelling one of
the molecules in an interaction pair with fluorescent groups leads,
however, to a large sensitivity, and forms therefore the basis for several
detection schemes. Molecular beacons, for example, utilize changes in
fluorescence resonance energy transfer or quenching for the detection of
structural changes in a biomolecule upon binding to a ligand or upon
hybridisation. We are developing synthetic helix-loop-helix polypeptide
scaffolds, which show promise as a vehicle for new biosensor principles.
Their interesting property is that (arbitrary) ligands can be site selectively
introduced in a predetermined order into the scaffold using simple solution
chemistry, based on active esters, and without need of protecting groups.
The scaffolds are also easily functionalised for covalent binding of them to
different types of surfaces and hydrogels. In the talk the use of these
versatile scaffolds for biosensing purposes will be described after a short
introduction to their chemistry. The coupling of the scaffolds to gold
surfaces and to dextran matrices and their use for non-labelling biospecific
interaction analysis are touched upon. It will furthermore be shown how
the scaffolds can be provided with a binding ligand for a molecule and a
(fluorescent) reporter group, indicating that binding has occurred.. In the
example an inhibitor, benzenesulfonamide, is used as the ligand for an
enzyme, carbonic anhydrase, and dansyl as the fluorescent reporter group.
The use of arrays of scaffolds with ligands with different affinities for
different biomolecules to enable "diagnostic chips" will finally be discussed.
4:20pm BP-SuA8 Polyvalency in Biochemistry, G.M. Whitesides, Harvard
University INVITED
Polyvalent or multivalent interactions are the simultaneous association of
multiple ligands on one entity (a molecule or a surface) to multiple
receptors on another entity. Multivalent interactions are ubiquitous in
biology - in infectious disease, in processes involving antibodies, in blood
clotting, metastasis, platelet activation, inflammation, and in many
conditions in which cells interact with surfaces- and have become a focus
of study in molecular biochemistry. Multiple simultaneous interactions
Sunday Afternoon, November 2, 2003 3 2:00 PM
Monday Morning, November 3, 2003
Applied Surface Science measurement of trace amounts of mercury and non-destructive depth
Room 324/325 - Session AS-MoM distribution information. We have developed a method to quantify buried
Hg layers in glass under intact 1 to 2 µm thick alumina particulate coatings
Practical Surface Science without the need to remove the coating layer. In uncoated lamps RBS can
Moderator: P.M.A. Sherwood, Kansas State University measure Hg uptake in soda lime glass within the first hour of operation. We
have used RBS to characterize the effectiveness of coating layers in
8:20am AS-MoM1 Aqueous-derived Planar Proxies: A Connection
reducing interaction between Hg and the glass lamp envelope. Results from
between Surface Science and Real World Catalysts, C.F. Conrad, Virginia
actual fluorescent lamps will be compared with quartz and soda lime glass
Institute of Marine Science; C.J. Chisholm-Brause, M.J. Kelley, College of
wafers implanted with known amounts of mercury.
William & Mary
Real catalysts typically comprise metal or metal oxide nanoclusters on a 10:00am AS-MoM6 Investigation of the Tribological System of Roller
high-surface area insulator oxide support, prepared by aqueous chemistry. Bearings with TOF-SIMS, U. Gunst, D. Lipinsky, Westfälische Wilhelms-
Researchers seeking to overcome the experimental difficulty of studying Universität Münster, Germany; W.-R. Zabel, G. Poll, Universität Hannover,
such materials with surface science techniques have made model catalysts Germany; H.F. Arlinghaus, Westfälische Wilhelms-Universität Münster,
by physical deposition, akin to microfabrication technology. It has now Germany
become possible to prepare planar proxies by all-aqueous methods, closely Tribology is a term describing an important and often complicated set of
akin to those for real catalysts. After obtaining a hydrous gamma alumina topics involving friction, lubrication, and wear. The surface characterization
layer on a metal foil, established aqueous solution techniques were used to of tribological systems is of high importance to enhance their lifetime and
prepare planar proxy and high surface area materials together. To verify to reduce economical loss. We have used time-of-flight secondary ion mass
their equivalence, both sets of materials were examined by ToF/SIMS, XPS, spectrometry (TOF-SIMS) in order to characterize the composition of
SEM/EDS and EXAFS, and by response to organic probe molecules. tribosurfaces and of tribointerfaces of high speed rolling element bearings.
Different TOF-SIMS methods (static TOF-SIMS, imaging, and depth
8:40am AS-MoM2 The Role of XPS in Materials Characterization in an
profiling) were applied to investigate the elemental and molecular surface
Industrial R&D Setting, M.C. Burrell, GE Global Research INVITED compositions as a result of interacting surfaces, friction, lubrication, and
X-ray photoelectron spectroscopy (XPS) is a widely used method in wear. Using static TOF-SIMS, semi-fluid lubricants, additives, the bearing
fundamental surface science and applied materials characterization. As an steel, and the cage material were analyzed to establish reference
analytical technique, XPS is an integral part of a modern materials research information. The greases and roller bearing steel surfaces were
laboratory. Characterization of complex materials usually requires investigated again after performing tribological test runs with real bearings
combinations of analytical methods to provide an understanding of under almost real application conditions. For these tests the additivation of
structure-property relationships. In this talk, I will review the types of the lubricants was varied using different primary, ashfree antioxidants. We
information provided uniquely by XPS, and illustrate how this information used TOF-SIMS imaging for the characterization of these tribosurfaces
is coupled with data provided from other methods in the characterization within the race way of angular contact ball bearings. The depth
of surfaces and thin films. Some examples will be selected from the composition of tribological boundary layers was analyzed by performing
author's own experience as an XPS expert within a larger materials TOF-SIMS dual beam depth profiling on the top of roller bearing balls, as
characterization group at a major industrial R&D site. In this setting, a wide well as in the bearing race ways. Significant elemental and molecular
variety of sample types and issues are encountered. The variable degrees species were found for lateral and depth distributions of different
of success in the application of XPS to quantitative analysis, determination tribological layer regions - giving correlations to tribological models and
of oxidation states and functional groups, and thin film compositions will interaction mechanisms.
be described. In addition, the current and prospective applications in
emerging fields such as biotechnology and nanotechnology will be 10:20am AS-MoM7 Interfacial Analysis between Amorphous Carbon Films
discussed. and Glass by XPS and Improvement of Adhesion Strength at the Interface
by Plasma Treatment, S. Takeda, S. Suzuki, Asahi Glass Co., Ltd, Japan
9:20am AS-MoM4 Quantitative Depth Distribution Analysis of Hg and Na
Amorphous carbon (a-C) films are widely applied in data storage and
in Glass, T.A. Dang, T.A. Frisk, M.W. Grossman, C.H. Peters, Osram Sylvania
microelectronic industries because of their unique properties such as
Fluorescent lamps use mercury for efficient conversion of electrical power excellent hardness, good wear resistance, low friction coefficient, good
to light. During lamp operation, some Hg is consumed through interaction chemical resistance and high electrical and thermal conductivities etc.
and/or deposition on lamp components. One of the primary sites for However, in case of deposition of the a-C films onto glass, adhesion
interaction is the soda lime glass used as a lamp tube. The association of Hg strength of the films to glass substrate is very poor and the film is easily
and Na from the glass has been observed by XPS mapping.@footnote 1@ It delaminated at the interface between the film and glass. This is a serious
is of particular interest to also evaluate the relationship of these two problem for practical applications. Namely, improvement of the adhesion
elements in deeper layers. A depth distribution analysis of Hg and Na strength is a key issue to apply the a-C films to practical products. In order
would readily provide such information. It has always been a challenge to to overcome this problem, we investigated the effects of plasma treatment
obtain the depth distribution of Na in glass using sputtering techniques. in Ar, N2 and O2 prior to the film deposition on the adhesion strength of
Due to the high mobility of Na, a soft sputtering condition, which minimizes the films to glass substrate. In the presentation, we report a major factor
Na diffusion, is generally required. Unfortunately, this also decreases the governing the adhesion strength based on the interfacial analysis between
sensitivity for Hg, whose intensity is several orders of magnitude lower the a-C films and glass by X-ray photoelectron spectroscopy.
than that of Na. Simultaneous measurement of Na and Hg is strongly
desirable because of the non-uniform nature of the interaction. In this 10:40am AS-MoM8 Determination of SiGe Film Composition and
presentation, we are going to compare the depth distribution analysis of Thickness by Combined AES and Multiple-Voltage X-ray Emission Analysis,
Na and Hg using Secondary Ion Mass Spectrometry (SIMS) and High- J.T. Armstrong, S.A. Wight, R.B. Marinenko, D.S. Simons, E.B. Steel,
Frequency Square-Wave Sputtered Neutral Mass Spectrometry (HFSW- National Institute of Standards and Technology
SNMS). The advantages and disadvantages of each technique will be SiGe epitaxially grown on Si is used for bandgap-engineered devices with
discussed. Samples included in the evaluation are composed of both quartz significant potential in a variety of microelectronic products. The
and soda lime glass wafers implanted with Na and Hg respectively as well composition of SiGe layers is often determined by RBS; however, the
as the real soda lime glass lamp tube subjected to normal lamp operation. analytical accuracy is limited to ~5-10%, in part due to the lack of suitable
@FootnoteText@ @footnote 1@ T. A. Dang, T. A. Frisk and M. G. standards. We are working on development of higher accuracy analytical
Grossman, Anal. Bioanal. Chem., 373, 560 (2002). procedures to characterize SiGe films being considered as NIST reference
materials (50-150 nm, 3-40 atom % Ge, grown on Si substrates). We use a
9:40am AS-MoM5 Rutherford Backscattering Quantification of Mercury
combination of Auger electron spectroscopy, multiple voltage x-ray
Interaction with Fluorescent Lamp Materials, C.H. Peters, M.W. Grossman,
emission analysis, and SIMS to determine their homogeneity, thickness and
T.A. Dang, T.A. Frisk, Osram Sylvania Inc.
composition. Results are compared to measurements made on a series of
Understanding mercury interactions with lamp materials is essential to bulk SiGe alloys also being investigated as possible NIST reference
reducing the amount of Hg required for operation of fluorescent lamps as materials. The new generation of field emission scanning Auger
well as improving light output. Rutherford backscattering spectrometry microprobes (FE-SAM) provides superior capabilities for this type of
(RBS) is especially well suited to quantification of heavy elements such as analysis. With our newly installed FE-SAM, we are able to simultaneously
Hg or Ba in a light matrix (e.g. soda lime glass). It provides quantitative perform Auger electron spectroscopy and high precision and accuracy EDS
Monday Morning, November 3, 2003 4 8:20 AM
Monday Morning, November 3, 2003
x-ray analysis at beam energies ranging from <1 to 25 keV. Using low immobilized nitrilotriacetic acid (NTA) onto a self-assembled monolayer
voltage EDS analysis (2-4 keV) (augmented by the lack of contamination (SAM) of oligo(ethylene glycol)-terminated (OEG) thiol on Au. OEG provides
enabled by UHV and incorporating our newly refined correction a low-fouling background and NTA binds nickel ions, leaving two
procedures) we are able to determine the film compositions to better than coordination sites available for interaction with the His-tag of HuLys. SPR
2% relative. By multiple higher voltage x-ray analysis (5-25 keV) on the experiments showed after nickel activation the NTA/OEG surface
FEASAM and electron microprobe, we are able to determine the lateral specifically bound HuLys Fv via the His-tag and that the immobilized HuLys
homogeneity and thickness. By AES and SIMS we are able to determine the Fv had nearly full antigen (lysozyme) binding capacity, suggesting a uniform
in-depth homogeneity of the films and separately estimate their thickness. CDR-exposed orientation of HuLys Fv on the surface. For comparison, we
Preliminary results show good agreement among these measurements. also activated the OEG SAM with carbonyldiimidazole (CDI), which binds
protein via amine/imidazolyl carbamate chemistry and should result in a
11:00am AS-MoM9 Carbon Gold Sulfide by 13.56 MHz Plasma CVD and
random protein orientation. This was supported by the SPR results, which
Sputtering Process, M.A. Kashem, S. Morita, Nagoya University, Japan
showed that only ~50% of HuLys Fv immobilized on the CDI/OEG surface
Co-operation process of plasma CVD and sputtering is a well-known had antigen binding capability. The ToF-SIMS spectra of HuLys Fv
technique to fabricate metal containing carbonaceous film, however the immobilized on NTA/OEG and CDI/OEG surfaces were then compared. It
metal was mixed in the film with polycrystalline structure at content more was found that the peaks at m/z=81, 82 and 110 had lower intensities in
than a few atomic %.@footnote 1@ CH@sub 4@ and SF@sub 6@ mixture the spectra of HuLys Fv immobilized on the NTA/OEG surface. These peaks
gas plasma induced a unique reaction of HF dissociation and carbon sulfide all correspond to the primary mass fragments from the amino acid
could be synthesized.@footnote 2@ A new carbon gold sulfide film was histidine. Since wild-type Hulys Fv has only 2 histidine residues, the ToF-
formed with using CH@sub 4@, SF@sub 6@ and Ar mixture gas plasma SIMS results confirmed that HuLys Fv was immobilized onto the NTA/OEG
CVD and gold plate discharge electrode. The process was observed and substrate via the His-tag, which should be located at the bottom of the
discussed with using a mass spectroscopy. The gold atom was observed to protein layer.
distribute uniformly caused on chemical bond with carbon and sulfur. The
carbon gold sulfide structure was confirmed by x-ray diffraction, XPS 8:40am BI-MoM2 Identification of Proteins in the Presence of
analysis and refractive index measurement on the effect of thermal Topographic Features using TOF-SIMS, S. Rangarajan, B.J. Tyler, University
treatment at 200 °C. The chemically bonded carbon gold sulfide suggested of Utah
to be conductive. Therefore, the density of carbon gold sulfide molecular In an earlier study, we had demonstrated the use of statistical modeling
group was observed to affect on a dielectric and conductive property. using mixture models and Principal Components Analysis (PCA) in
@FootnoteText@@footnote 1@L. Marutinu, Solar Energy Materials 15, characterizing samples having a relatively simple chemistry and coupled
p.21 (1987). @footnote 2@M. Matsushita, Md. Zarid. Bin Harum, Md. Abul with topographical features. This study involves a very important extension
Kashem and S. Morita; J. Photoplolym. Sci. and Tech., 12 (1) (1999) pp.11- to analysis of samples with more complex chemistry, such as with proteins.
14. ToF-SIMS has been extensively used to characterize proteins, in spite of the
inherent difficulties associated with spectral interpretation.@footnote
11:20am AS-MoM10 Thickness, Dose and Distribution Measurements of
1,2@ Multivariate methods have also proved to be invaluable in the
Silicon Oxynitride Ultra-thin Films, R.K. Champaneria, P. Mack, R.G. White,
discrimination of adsorbed proteins on flat substrates.@footnote 3@ In
J. Wolstenholme, Thermo Electron, UK
this study, Polystyrene micro-spheres were adsorbed with different
The continuing requirement for smaller equivalent oxide thickness (EOT) proteins and statistical models as well as discriminant techniques such as
for transistor gate dielectrics has lead to the introduction of new materials PCA were used to analyze the ToF-SIMS images. Discrimination of protein
with higher dielectric constants than silicon dioxide (high-k dielectrics). At spectra from the images was then performed using the afore mentioned
present, silicon oxynitride is an important material for this application. X- techniques, without a priori information about the type of protein
ray photoelectron spectroscopy (XPS) is a well-known surface analytical adsorbed onto the sphere surfaces. Some of the models, such as the
technique. It can provide quantitative information, not only about chemical multinomial mixture model were found to yield more information than
elements but also their chemical state. The information depth of the previously thought. References. @FootnoteText@ @footnote 1@
technique varies with the material under investigation but is in the region M.S.Wagner and D. G. Castner, Langmuir 17, 4649 (2001). @footnote 2@
of 5-10 nm for materials commonly encountered in semiconductor device D. S. Mantus and B. D.Ratner, Analytical Chemistry 65, 1431
fabrication. This information depth can be controlled by means of the angle (1993).@footnote 3@ M.S.Wagner, B.J.Tyler, and D. G. Castner, Analytical
at which the photoelectrons are collected (angle resolved XPS or ARXPS) Chemistry 74, 1824 (2002).
and, by collecting the signal at a number of angles, it is possible to generate
a concentration depth profile. Since no material is removed in the 9:00am BI-MoM3 Immobilized Microarrays of Capture Agents for
generation of the concentration profile, the method is essentially non- Bioassay: A Return to the Past for Protein Surface Stability?, D.W.
destructive. Data will be shown to illustrate how ARXPS can provide Grainger, P. Gong, Colorado State University; M. Lochhead, S. Metzger,
accurate and precise measurements of thickness and nitrogen dose in Accelr8 Technology Corporation INVITED
oxynitrides. It will be shown that XPS measurements at a single angle Microarrays of antibodies, nucleic acids, and antigens all encounter
cannot provide accurate measurements of the dose. Using line scans or problems with prolonged bioactivity and desired capture sensitivity in
maps, the uniformity of thickness and dose across a wafer can be immobilized formats. Surface chemistry is used to produce high target
measured. ARXPS data can also be used to reconstruct concentration depth capture activity (high signal sensitivity) with low non-specific binding
profiles. These profiles reveal both the total dose and the distribution of (noise). These surfaces can exhibit shelf-life problems limited, for example,
nitrogen in each of its chemical states. It will be shown that methods of by intrinsic hydrolysis of amine-reactive coupling chemistry (active esters,
profile generation involving sputtering can produce misleading results. aldehydes) even under protective conditions. Reactive commercial array
surfaces targeting amine-reactive nucleic acids or proteins have been
regenerated in situ using N-hydroxysuccinimide to re-activate amine
Biomaterial Interfaces reactivity, improving functionalization of the commercial surfaces and
improving immobilization of amine-terminated probes above original
Room 307 - Session BI-MoM
capacity. XPS and ToF-SIMS results for surface re-derivatization are
Protein-Surface Interactions correlated with DNA probe immobilization and target capture efficiencies.
Moderator: A. Chilkoti, Duke University In a second effort, contact printed immobilized antibodies against a probe
analyte on commercial polymer microarraying surfaces (70-micron spots)
8:20am BI-MoM1 Time-of-Flight Secondary Ion Mass Spectrometry (ToF- were assayed for model target capture (goat IgG) in sandwich
SIMS) and Surface Plasmon Resonance (SPR) Determination of Surface immunoassay with fluorescently labeled secondary antibodies in full goat
Bound Anti-Lysozyme Orientation, N. Xia, N.T. Samuel, P.S. Stayton, D.G. serum, imaged by fluorescence scanning. Off-array noise and on-array
Castner, University of Washington signal were compared as a function of printed antibody concentration.
Static time-of-flight secondary ion mass spectroscopy (ToF-SIMS) and Despite masking with prescribed protocols (e.g., BSA or polymer masking),
surface plasmon resonance (SPR) were used to analyze the orientation of assay signal:noise was markedly improved on a non-masked three-
immobilized proteins. A model protein with a well-define structure, the Fv dimensional polymer hydrogel commercial chemistry. Last, commercial
fragment of a humanized anti-lysozyme (HuLys), was used. A His-tag linked arraying surfaces were used to exploit nucleic acid amplification (PCR
to the C-terminal of the heavy chain was located opposite to the lysozyme reaction)on-array, capture fluorescently labeled target amplicons with
binding domain (complementarity-determining region, CDR). We printed probes, and rinse away all PCR reaction reagents in a single-step
Monday Morning, November 3, 2003 5 8:20 AM
Monday Morning, November 3, 2003
assay without prior separations or compromise to signal:noise vertically on a gold surface. By using nanografting, the proteins could be
performance. This provides substantial advantages in time and effort patterned into islands about tens of nm wide and their properties could be
should sufficient signal:noise be achieved without costly, tedious PCR measured in a differential way using the surrounding SAM as a reference.
separation steps. The height of these islands measures 3.2nm±0.4nm which, added to the 2.2
nm of the C@sub18@ SAM, corresponds well with the model height of the
9:40am BI-MoM5 Limitations of Molecular Streptavidin/Anti-biotin
proteins. Effectively maximizing the signal-to-noise ratio of biosensors
Antibody Architectures using Micro-contact Printed Biotinylated Thiols,
depends also on the ability to prevent protein nonspecific surface
Ch. Grunwald, Ruhr-University Bochum, Germany; N. Opitz, Max-Planck
adsorption. It has been found that SAMs of thiols containing short
Institute for Molecular Physiology, Germany; S. Herrwerth, W. Eck,
oligomers of the ethylene glycol group prevent the adsorption of most
University of Heidelberg, Germany; J. Kuhlmann, Max-Planck Institute for
proteins under a wide range of conditions. However the mechanism has
Molecular Physiology, Germany; Ch. Woell, Ruhr-University of Bochum,
not been clearly explained. It is observed that both
Germany
SH(CH@sub2@)@sub11@(EO)@sub3@-OH and SH(EO)@sub6@-
Atomic force microscopy (AFM) and confocal fluorescence microscopy have (CH@sub2@)@sub17@-CH@sub3@ reversibly compressed to half of their
been used to study the interaction of streptavidin and anti-biotin height under small imaging forces(0-10nN) in ethanol or 2-butanol. When
antibodies with a patterned, biotinylated organic surface. This system the force is increased to over ~50nN, irreversible compression happened.
presently attracts considerable interest because of its potential for Moreover, when the solution is changed to water mixture, the
molecular architectures employing protein-protein interactions. The SH(EO)@sub6@-(CH@sub2@)@sub17@-CH@sub3@ is found to decrease
substrates were prepared by first using the µCP technique to print a its height significantly, and become much less compressible. By offering a
periodic pattern of an oligoethylenglycol (OEG) self-assembled monolayer model to explain the compressibility changes observed, we hope to offer
(SAM) on clean gold surfaces. The pattern consists of squares (40 µm x 40 some insight into the protein resistant properties of PEG-containing layers.
µm) which are separated from each other in each direction by 10 µm. By
immersing the stamped substrates into a mixture of OH-terminated and 10:40am BI-MoM8 Nanoscale Control of ECM Proteins for Cell Adhesion,
biotinylated organothiols a patterned SAM is obtained. These 2D-SAM H. Wang, L. Liu, S. Chen, T. Barker, H. Sage, B.D. Ratner, S. Jiang, University
patterns have been imaged via contact atomic force and lateral force of Washington
microscopy as well as with tapping-mode AFM. The patterned SAMs were Osteopontin (OPN) is an important extracellular matrix protein shown to
then incubated with two fluorescence-labelled proteins exhibiting a strong function in wound healing, inflammation and foreign body reaction and has
affinity towards biotin, streptavidin and anti-biotin antibody. Incubation been identified as a potential target for engineered biomaterials. The
time, temperature and concentration of the protein solution as well as the secreted protein acidic and rich in cystein (SPARC/osteonectin/BM-40) is
biotin surface concentration were varied systematically. The comparison of associated with events characterized by changes in cell shape and mobility.
the AFM-data with the results of the fluorescence microscopy allows for In the work, we first report control of OPN orientation and conformation
important conclusion on the protein-protein binding, in particular on charged self-assembled monolayers (SAMs) for cell adhesion. Our
concerning reproducibility, unspecific binding and protein resistance. atomic force microscope (AFM) results show that the amount of adsorbed
OPN on -COOH surface is slightly less than that on -NH2 surface. Results
10:00am BI-MoM6 A Comparison of Microcontact Printed and Solution
from in vitro cell adhesion assays show that on NH2 surface BAEC adhesion
Adsorbed Cytochrome c Protein Films on Indium Tin Oxide Electrodes, A.
and spreading are more. By comparing these results, it is suggested that
Runge, S. Saavedra, University of Arizona
the orientation/conformation of OPN on -NH2 positively charged surface is
The immobilization of proteins on a surface in a controlled way that retains more favorable for cell interactions than on -COOH negatively charged
their function is one of the challenges in making a functioning biosensor. surface. Second, AFM is used to image the binding of OPN onto individual
Electrochemical biosensors use redox active proteins to impart selectivity triple-helical collagen I monomer on freshly cleaved mica for the first time.
to the electrode surface on which they are immobilized (either adsorbed or We also use anti-OPN antibody to assist for better visualization. Analysis of
covalently attached). The orientation of proteins on the surface is AFM results clearly shows binding patterns of OPN to collagen I. Finally, the
presumed to be important for proper functioning of the device. We are interactions of SPARC with ECM proteins, such as collagen I and fibronectin,
investigating using microcontact printing as a way of immobilizing are characterized and quantified using AFM and surface plasma resonance
cytochrome c onto indium tin oxide electrodes in order to determine how (SPR). Cell culture and adhesion assays are used to study SPARC as a
the method of immobilization affects the orientation and function of the modulator of the adhesive process of cells seeded on ECM proteins. The
protein. We are presenting the results of three different methods for influence of SPARC-collagen I interaction is studied using smooth muscle
forming protein films on indium tin oxide that have been characterized and cells while the influence of SPARC-fibronectin interaction is studied using
compared using cyclic voltammetry and X-ray photoelectron spectroscopy. endothelial cells.
Preliminary results from surface sensitive polarized spectroscopic studies
will also be discussed. Protein films formed by adsorption of cytochrome c 11:00am BI-MoM9 Activity of the Model Enzyme Urease Adsorbed on
out of solution and by microcontact printing with both hydrophobic and Different Colloidal Oxide Particles, K. Rezwan, J. Voros, M. Textor, L.J.
hydrophilic PDMS are compared in terms of total and electrochemical Gauckler, ETH Zurich, Switzerland
surface coverage, standard reduction potential and rate of electron Whilst metal oxides are directly used for applications where their extreme
transfer with the ITO surface. Plasma treatment of the PDMS stamps, hardness is necessary (e.g. femoral head replacement), most metallic
which makes them hydrophilic, dramatically increases the surface coverage biomaterials are themselves covered by a protective, stable oxide film such
of printed films to the level of solution adsorbed films. We have as titanium oxide on titanium. In these cases proteins only interact with the
demonstrated that a redox active protein can be microcontact printed onto oxide film and not with the underlying metal. Closer investigations of the
an electrode surface with its capability for direct electron transfer with the protein - oxide interface are therefore vital to the biomaterials field as it
surface intact. The total surface coverage of the different films were strives to make the transition from merely bio-inert to fully bioactive
compared using X-ray photoelectron spectroscopy. implant materials. It is assumed, that not only the amount of adsorbed
protein but also its conformation is important for cell proliferation. A
10:20am BI-MoM7 Using Nanografting to Position with Predictable
change of protein structure would hamper the cell receptors (situated
Orientation, De-novo Proteins on Gold, Y Hu, M. Case, G. McLendon, T.K.
within the cell membrane) to recognize the specific protein function. As a
Vanderlick, Princeton University; D. Vanderah, National Institute of
consequence, the cell would not adhere and proliferate on the preliminary
Standards and Technology; B. Nickel, Princeton University; M. Mrksich,
adsorbed protein layer and not accept the adsorbed proteins as body own
University of Chicago; G.Y. Liu, University of California, Davis; G. Scoles,
proteins but rather see them as intruders. This fatal mistake, made by the
Princeton University
cell, is assumed to be one of the reasons which promotes local
An extensive research effort has been trying to make biosensors at the inflammation and tissue mutations. Assessing the conformational changes
nanometer scale, especially selective detection devices with molecular of a protein after adsorption is a delicate matter and can be measured by
recognition sites. We have approached this problem from a unique angle using for instance circular dichroism. In the case of enzymes, one can also
by using nanografting, which is to use an AFM tip to remove thiol measure the activity of the enzyme before and after adsorption. We used
molecules from a designated area of a self-assembled monolayer (SAM) the model enzyme urease for our studies where the catalysis of urea was
while different thiol molecules from a contacting solution will self-assemble monitored by measuring the electrical conductivity as a function of time.
onto the exposed gold sites. By incorporating cysteine residues at the end The aim of this study was to compare the activity (and hence the
of the peptide chains of [Fe(V@suba@L@subd@C- conformational state) of urease after adsorption onto different colloidal
long)@sub3@]@super2+@, the proteins acquire the possibility to stand oxide particles. We found that urease adsorbed onto TiO2 showed the
Monday Morning, November 3, 2003 6 8:20 AM
Monday Morning, November 3, 2003
highest activity and urease on Al2O3 the lowest. The measurements 9:40am DI-MoM5 First Principles Studies of the Electronic and Atomic
showed also an adsorption time dependency, which indicated further Structures of ZrO@sub 2@/Si and ZrSiO@sub 4@/Si Interfaces, R.
conformational changes after adsorption. Puthenkovilakam, Y.-S. Lin, J.P. Chang, University of California, Los Angeles
First principles simulations using density functional theory is employed to
11:20am BI-MoM10 In situ Real-time Atomic Force Microscopy Studies of
investigate the electronic properties of ZrO@sub 2@/Si and ZrSiO@sub
Lysozyme and RR02 Protein Crystal Growth at Surfaces, T.R. Keel, S. Allen,
4@/Si interfaces for their potential applications in metal-oxide-
M.C. Davies, C.J. Roberts, S.J.B. Tendler, P.M. Williams, University of
semiconductor field effect transistors. Tetragonal zirconia and zircon are
Nottingham, UK
used to model ZrO@sub 2@ and ZrSiO@sub 4@, respectively, and the
The successful application of crystallography to fields such as structural
interfaces are formed by lattice matching their (001) surfaces to the Si(100)
biology and rational drug design has been largely due to the availability of
surface. The electronic structure of ZrO@sub 2@/Si interfaces showed
single crystals of the macromolecule of interest. However, relatively little is
partial occupation of zirconium d states at the Fermi level when the
understood about the fundamentals of macromolecular crystal growth.
zirconium coordination is different from its bulk coordination. These
Here, we have utilized the technique of atomic force microscopy (AFM) to
partially occupied states lie within the silicon band gap, forming conductive
study protein growth at surfaces. Two different protein systems, at both
paths under an applied potential field, thus are detrimental to the device
the micro- and nanometre scale have been investigated. The first is a
performance. However, ZrSiO@sub 4@/Si interface showed no partial
model system, lysozyme. We have investigated two polymorphs of the
occupation of zirconium d states at Fermi level. Hydrogen passivation of
lysozyme crystal and present data concerning the effect of supersaturation
zirconium dangling bonds as well as oxygen bridging at the interface are
(@sigma@) on the growth rates and mechanisms of growth of the crystals.
shown to effectively remove the partial occupancy of d orbitals. The
Molecular resolution studies have also been carried out and the observed
calculated band offsets of ZrO@sub 2@/Si interfaces showed asymmetric
periodicities are in good agreement with the known unit cell dimensions.
band alignments, with conduction band offsets between 0.73-0.98 eV and
Also presented are preliminary results from a second protein system, RR02,
valence band offsets between 3.70-3.95 eV for different zirconium and
which is a response regulator protein found in streptococcus pneumoniae.
oxygen coordinations at the ZrO@sub 2@/Si interfaces. The ZrSiO@sub
RR02 is relatively straightforward to crystallize, but unlike lysozyme, many
4@/Si interface resulted in a more symmetric band alignment with a much
of the grown crystals diffract poorly and x-ray studies yield little structural
higher conduction band offset of 1.90 eV and a valence band offset of 2.98
data. We have used the AFM to investigate these crystals and compare the
V. These results suggest that ZrSiO@sub 4@ forms a superior interface
results with the lysozyme studies.
with silicon compared to ZrO@sub 2@ and can be an ideal candidate for
replacing SiO@sub 2@ as a gate insulator in silicon based microelectronics
and additional interface preparation or post-deposition annealing are
High-k Gate Dielectrics and Devices Topical Conference required for ZrO@sub 2@ to yield adequate electronic properties.
Room 317 - Session DI-MoM
10:00am DI-MoM6 X-ray Photoelectron Spectroscopy (XPS) and
Electronic Properties of High-k Dielectrics and their Spectroscopic Ellipsometry (SE) Study of Hafnium Silicate Alloys Prepared
Interfaces by Remote Plasma Assisted Chemical Vapor Deposition: Comparisons
Moderator: R.L. Opila, University of Delaware between Conduction Band Offset Energies and Optical Band Gaps, J.G.
Hong, N.A. Stoute, G. Lucovsky, D.E. Aspnes, North Carolina State University
8:20am DI-MoM1 Attempting the Unthinkable: Replacing SiO@sub 2@ Thin films of hafnium silicate alloys, (HfO@sub 2@)@sub x@(SiO@sub
with High-k Materials as the Gate Dielectric for Scaled Devices, G.D. Wilk, 2@)@sub 1-x@, were prepared by remote plasma enhanced chemical
ASM INVITED vapor deposition (RPECVD) using down-stream injected Hf t-butoxide as
The rapid pace of scaling CMOS technology has led to considerable the Hf source gas and silane as the Si source gas; chemically-active species
attention in the area of high-k gate dielectrics. Since SiO@sub 2@ gate from a remotely excited O@sub 2@/He plasma were used to drive the CVD
dielectrics are expected to have unacceptably high leakage current for reaction. Alloy compositions were determined by Rutherford
most applications, high-k materials are of interest for producing lower backscattering (RBS), and were used to calibrate Hf-to-O spectral ratios
leakage currents while maintaining similar device performance to SiO@sub obtained by on-line Auger electron spectroscopy (AES). XPS spectra were
2@. Various high-k materials have been studied for this purpose recently, then obtained for the O 1s, Si 2p, Hf 4d and Hf 4f core levels, and the core
but it is clear that many important characteristics, which are already well level binding energies of these features were analyzed as a function of the
known for SiO@sub 2@, have yet to be understood for any high-k material. alloy composition x. All core binding energy levels decreased (i.e., became
To date, most high-k materials systems have exhibited the expected gate more positive) as the Hf fraction x increased, paralleling the behaviors
leakage reduction compared to SiO@sub 2@ of the same equivalent oxide previously reported for O 1s, Si 3p, and Zr 3d core level energy shifts in
thickness (EOT), but significant issues remain with respect to mobility zirconium silicate alloys. The Hf silicate alloy shifts are consistent with the
degradation and threshold voltage shifts. Progress toward understanding charge transfer expected on the basis of the relative electronegativities of
these issues has been made over the past few years, yet controlling regions Hf, Si and O. As in case of Zr silicates, the total shift of the O 1s core level in
at both the channel and gate Si interfaces is still of critical importance to Hf silicates, ~3.1 eV, is larger than the average shift of the Hf 4d and Si 2p
the success of any high-k material. Both physical and electrical analysis will core levels, ~ 2 eV. Finally, the XPS results will be compared with on-line
be presented to highlight the key fundamental properties of high-k gate AES, X-ray absorption spectroscopy (XAS), and vacuum ultra-violet
dielectrics, and how processing optimization has improved film quality. spectroscopic ellipsometry (SE) results to determine the compositional
Characterization techniques such as electron energy loss spectroscopy variations of the conduction and valence band offset energies with respect
(EELS) in scanning transmission electron microscopy (STEM), medium to Si, and to compare theses with the compositional variation of the optical
energy ion scattering (MEIS), X-ray Photoelectron Spectroscopy (XPS), band gap.
Fourier transform infrared spectroscopy (FTIR) as well as electrical device
10:20am DI-MoM7 Photoemission Study of High-k Gate Dielectric/Si(100)
properties will be presented.
Heterostructures - Chemical Bonding Features and Energy Band
9:00am DI-MoM3 Challenges and Progress on High-K Devices and Alignment, S. Miyazaki, Hiroshima University, Japan INVITED
Materials, H.-H. Tseng, Motorola INVITED The characterization of chemical and electronic structures of high-k
High-K gate dielectric research is critical for advanced technology because dielectrics as well as the quantification of defect state distributions is of
the standby power increases significantly for ultra-thin SiO2 based gate great importance for the implementation of the high-k dielectric gate stack
dielectric. Although progress has been made in the past, there are huge in sub-100nm technology generations. For some high-k dielectrics such as
challenges remained to be solved. This paper presents the challenges and Ta@sub 2@O@sub 5@, Al@sub 2@O@sub 3@, ZrO@sub 2@ and
progress of High-K devices and materials. Issues related to High-K device HfO@sub 2@, we have experimentally determined the energy band
performance such as transconductance and mobility degradation, and high alignments to Si(100) with an thin interfacial Si-oxide or nitride from high-
threshold voltage will be discussed. Challenges of reliability related topics resolution XPS measurements and defect state distributions in the high-k
such as threshold voltage instability, negative bias temperature instability dielectrics and at the interfaces form total photoelectron yield
(NBTI), stress-induced leakage current (SILK) will also be presented. Recent measurements.@footnote 1-3@ We have extended our research to
progress to address these challenges will be discussed. Finally, new characterize the chemical and electronic structures of Y@sub 2@O@sub
research directions of High-K/gate electrode stack to meet the future 3@, Pr-silicates and Hf-aluminates on Si(100) including interfacial SiO@sub
technology requirements will be outlined. x@. In this presentation, recent our results will be review to demonstrate
how the energy bandgaps of practically-thin high-k dielectrics such as
Monday Morning, November 3, 2003 7 8:20 AM
Monday Morning, November 3, 2003
HfO@sub 2@ and Y@sub 2@O@sub 3@ and of an ultrathin Si-nitride 11:40am DI-MoM11 Interface and Materials Properties of High-k Gate
barrier can be determined from the analysis of energy loss spectra of O1s Stack Structures, S. Sayan, X. Zhao, R.A. Bartynski, T. Emge, M. Croft, T.
(or N1s) photoelectrons and, for the system of Y@sub 2@O@sub 3@ Gustafsson, D. Vanderbilt, E.L. Garfunkel, Rutgers University
formed on Si(100), how the energy band alignment can be determined with In this presentation, we describe recent results using soft x-ray
combination of the measured bandgap and the valence band lineup as photoemission (SXPS), inverse photoemission (IPE), and x-ray absorption
obtained from the analysis of XPS valence band spectra of heterostructures spectroscopy (XAS) to examine HfO2 gate dielectrics and their interfaces
with thin dielectrics. Also, we show that total photoelectron yield with silicon and metal layers. In selecting an alternative (high-K) gate
spectroscopy is a useful tool for quantifying the energy distribution of insulator, many parameters in addition to dielectric constant and thermal
electronic defect states for thin high-k dielectric/Si(100) systems. stability must be considered, including the barrier heights for tunneling.
@FootnoteText@@footnote 1@S. Miyazaki, J. Va. Sci. Technol. B19, (2001) The SXPS and IPES results are used to determine the densities of states
2212. @footnote 2@S. Miyazaki, M. Narasaki, M. Ogasawara and M. above and below the Fermi energy, in particular to elicit useful information
Hirose, Microelec. Eng., 59 (2001) 373. @footnote 3@M. Yamaoka, M. on barrier heights. We find that interface dipoles affect the "effective
Narasaki, H. Murakami and S. Miyazaki, Proc. of 2nd Int. Semicond. workfunction" of metals via change in electrostatic potential as well as the
Technol. Conf. (2002, Tokyo) Abst. No. 57. band alignments, where the specific alignment depends on the interface
properties. We have also performed first-principles density functional
11:00am DI-MoM9 Separate and Independent Control of Interfacial Band
calculations to study the properties of the crystalline phases of HfO2 and
Alignments and Dielectric Constants in Transition Metal-rare Earth
ZrO2. The densities of valence and conduction bands are calculated and
Ternary Oxides, D.G. Schlom, Pennsylvania State University; J.L. Freeouf,
compared to experimental measurements. The thickness, layered
Oregon Graduate Institute; G. Lucovsky, North Carolina State University
structure, and crystal phase of the as-deposited and annealed films have
The electronic structure of transition metal, Tm, and trivalent rare earth,
been studied by XRD, XAS, MEIS, RBS and HRTEM. The authors would like
Re, binary (TmO@sub x@ and Re@sub 2@O@sub 3@) and ternary mixed
to acknowledge useful interactions with colleagues at and NCSU (J.P.
oxides (TmRe@sub x@O@sub y@) are qualitatively different from those of
Maria, G. Parsons, G. Lucovsky and A. Kingon), J.Robertson (Cambridge
silicon oxide, silicon nitride, and silicon oxynitride alloys. The lowest
University.UK), R. Tung (CUNY) and K.P. Cheung (ECE, Rutgers University)
conduction band states are associated with localized anti-bonding d*-
We also acknowledge the SRC for financial support.
states of the Tm/Re atoms, rather than extended Si 3s*-states, and/or O/N
2p*-states. Based on quantitative agreement between the Zr silicate anti-
bonding state electronic structure obtained from Zr M@sub 2,3@ and O
Manufacturing Science and Technology
K@sub 1@ XAS spectra, and ab initio calculations on small clusters, the
ordering and overlap of anti-bonding Zr 4d*- and 5s*-states, and Si 3s*- Room 309 - Session MS-MoM
states in the O K@sub 1@ spectra is the same as the features of the Process and Equipment Integration and Development
conduction band electronic structure that determine band-offset energies
Moderator: E.G. Seebauer, University of Illinois at Urbana Champaign
at Si-Zr silicate alloy interfaces. These relationships have been extended to
Re ternary oxide compounds, including LaAlO@sub 3@ and GdScO@sub 8:40am MS-MoM2 Development of Low Resistance Copper Thin Films
3@, through direct comparisons between O K@sub 1@ XAS spectra and Using a Strain Enhanced Grain Growth Technique, M. Moriyama, M.
band edge optical absorption constants obtained from analysis of SE Shimada, H. Masuda, M. Murakami, Kyoto University, Japan
measurements extending to 9 eV. As a result of near-neighbor interactions Copper is attractive as interconnect materials of future Si-ULSI (Ultra-Large
between Tm and Re d-states induced by bonding to a common O atom, Scale Integrated) devices with linewidth of less than 100nm. The advantage
ternary oxide minimum band gaps, and conduction band offset energies of using copper (over conventional Al-alloy) as the interconnect materials is
are increased in oxide phases containing Tm and Re species. This identifies that copper has lower electrical resistivity and higher reliability. However,
new and technologically important opportunities for band gap engineering we have serious concern with resistivity of the ultra-narrow Cu
at the atomic scale. Relative energy shifts of coupled Re and Tm d*-states interconnects, because the resistivity of interconnects was observed to
are important for the ultimate scaling of CMOS devices since they increase increase rapidly by reducing the linewidth of the interconnects. The reason
the effective band gaps/offset energies for ternary oxides containing highly is believed to be due to the relatively long mean free path (~39nm) of the
polarizable Sc, Ti, Nb, and Ta atoms above what had previously been conducting electrons of copper. When the linewidth is less than 100nm,
proposed as a fundamental limitation inferred from the band gaps and/or the electron scattering by the surface (or interface) and grain boundary
band offset energies of their respective binary oxides. becomes dominant, causing significant increase in the resistivity of the
copper interconnects. In order to realize nano-scaled Si-devices,
11:20am DI-MoM10 A Materials and Electronics Properties Study of the
development of low resistance ultra-narrow copper interconnects is
ZrO@sub 2@/Si and SiO@sub 2@ Interfaces, C.M. Lopez, N.A. Suvorova,
essential. The purpose of the present experiment was to explore the
University of North Carolina, Chapel Hill; A.A. Suvorova, M. Saunders,
possibility to prepare low resistivity copper interconnects, which satisfy the
University of Western Australia; E.A. Irene, University of North Carolina,
designer's requirement, by determine the primary factor (film thickness or
Chapel Hill
mean grain size) which controls the electrical resistivities of copper films.
Zirconia, ZrO@sub 2@, thin films were grown on single crystal MgO(100),
The film microstructures were observed by atomic force microscopy and
Si(100) and on amorphous SiO@sub 2@ by ion beam sputter deposition of
scanning ion microscopy. The film resistance was measured by a DC four-
Zr metal at room temperature and subsequent oxidation both in-situ and
point probe method. Our experimental result concluded that the grain
ex-situ at 250°C and 600°C, respectively. The optical properties of MgO,
boundary scattering primarily increased the resistivity of the Cu thin films,
sputter-deposited Zr, and ZrO@sub 2@ were determined by in-situ
indicating that large grained films were essential for low resistivity ultra-
spectroscopic ellipsometry in the photon energy range of 1.5-4.5 eV. Based
narrow copper interconnects. We succeeded to prepare the copper thin
upon ellipsometric thicknesses obtained, a volume expansion of 1.28 Zr to
films with giant grains by the strain enhanced grain growth technique. This
ZrO@sub 2@ was observed. This value is in contrast to the value assuming
technique will be promising to develop the low resistance copper
bulk densities, 1.54. Refractive index values for ZrO@sub 2@ ranged from
interconnects for the future Si-ULSI devices.
2.18 to 2.52 for the given spectral range. Time of flight mass spectrometry
of recoiled ions (TOF-MSRI), analytical electron microscopy, and 9:00am MS-MoM3 Processing and Characterization of PMSSQ Based
spectroscopic ellipsometry were used to investigate the material properties Materials for Nanoporous Low-K Dielectrics, P. Lazzeri, ITC-IRST, Italy; J.J.
of all samples with special attention to the composition and extent of the Park, Z. Lin, R.M. Briber, University of Maryland; L. Vanzetti, M. Anderle, M.
interface formed between ZrO@sub 2@ and the Si substrate. To Bersani, ITC-IRST, Italy; R.D. Miller, IBM Almaden Research Center; G.W.
compliment these techniques, electrical measurements were performed on Rubloff, University of Maryland
fabricated Pt/ZrO@sub 2@/Si capacitors also prepared in vacuo to Nanoporous low-K dielectrics are an essential component in future
determine the interface trap state density, fixed charge, and dielectric interconnect technology. We have investigated the thermal
constant for the overall film stack. The nature of the interface is correlated transformations by which nanoporous polymethylsilsesquioxane (PMSSQ)-
with the resultant electronic properties of the interface. based low-K dielectrics are formed through spin-casting and curing in a
mixture of PMSSQ with a poly(methylmethacrylate-co-
dimethylaminoethylmethacrylate) random copolymer (PMMA-co-
DMAEMA) as the porogen. ToF-SIMS shows a sequence of PMSSQ
fragments which change with curing, as well as the evolution of porogen
related species. Over the range 200-450C, both crosslinking to form the
Monday Morning, November 3, 2003 8 8:20 AM
Monday Morning, November 3, 2003
SiO@sub 1.5@CH@sub 3@ matrix and decomposition/volatilization of the film is much less damaged by this novel technology than conventional clean
porogen occur. To understand the influence of PMSSQ precursor chemistry process.
on the final low-K structure, we have compared two precursors with
10:20am MS-MoM7 Two-Gas Reactive Sputtering, W.D. Sproul, D.J.
different initial SiOH content. ToF-SIMS shows the crosslinking kinetics to
Christie, D.C. Carter, Advanced Energy Industries, Inc.
be faster for the high SiOH than for the low SiOH content material. The
distribution of the porogen species also varies with the nature of the Reactive sputtering with two reactive gases and one target material
PMSSQ precursor: XPS reveals substantial surface depletion of porogen for presents special problems. Both reactive gases affect the state of the target
the low SiOH but not for the high SiOH content material, and ToF-SIMS surface and the plasma conditions, which means that both affect common
images indicate the formation of large porogen aggregates, but only for the feedback control signals such as the cathode voltage and optical emission
low SiOH material. Thermal desorption mass spectrometry during curing signals. Modeling has shown that the way to control the two-gas reactive
shows the evolution of volatile byproducts, as expected for both the sputtering process is to produce individual control signals for each gas.
crosslinking reactions and the porogen degradation and desorption. These Experiments have confirmed the model. The reactive sputtering of titanium
chemical analysis techniques yield information crucial to understanding the or silicon in a combined oxygen/nitrogen atmosphere is shown. In this
complex chemical and transport phenomena which determine the study, individual partial pressure signals for each of the oxygen and
microscale and nanoscale properties of these nanoporous low-K dielectrics nitrogen reactive gases were available from a mass spectrometer. A
and their role in future interconnect technology. combination where one of the gases is controlled in the partial pressure
mode and the other in a flow mode can lead to unstable operating
9:20am MS-MoM4 Multi-scale Modeling of Chemical Mechanical conditions under certain process conditions. The gas operating in flow
Planarization, L. Jiang, H. Simka, S. Skokov, D. Thakurta, S. Shankar, Intel control can trap the target in a poisoned state, and the target cannot
Corp. return to the unpoisoned state until both gases are removed. Both target
A coherent modeling approach is presented for mechanics and transport voltage and mass spectrometer data show the existence of a high partial
effects in CMP process. Different regimes of material removal are identified pressure of the flow controlled reactive gas that traps the target in the
based on first-principle analysis on slurry transport, stress, and slurry flow. poisoned mode even when the partial pressure controlled reactive gas is
Important effects of pad, glazing, conditioning, and polisher design are removed from the system. To have a fully stable process when two reactive
demonstrated with oxide polish model results. We review multiple-scale gases are used requires that the partial pressure of each gas be controlled
model linking with an emphasis on the innovative methods to combine individually. When the individual partial pressures are controlled, the
flow and stress analysis from feature to wafer scale. Micron-scale models target does not get trapped in a poisoned state, and there is complete
developed at Intel are presented to illustrate the complexity of particle- freedom to adjust the reactive gas partial pressures to achieve the desired
level dynamics in CMP and the physical processes involved in patterned film composition.
wafer planarization.
10:40am MS-MoM8 Hydrogen Pressure Dependence of Trench Corner
9:40am MS-MoM5 Thermal Characterization of Stacked 3D System-in- Rounding during Hydrogen Annealing, H. Kuribayashi, R. Shimizu, Fuji
Package, J. Valtanen, J. Miettinen, E.O. Ristolainen, Tampere University of Electric Corporate Research and Development, Ltd., Japan; K. Sudoh, H.
Technology, Finland Iwasaki, Osaka University, Japan
Electronics development has been driven mainly by IC technology progress. Hydrogen annealing has become increasingly important for silicon device
Cell and line width have been continuously shrunk proving development processes. Especially for trench gate MOSFETs, both trench corner
trend called Moore's law. This has created increasing pressure to the first rounding and sidewall surface smoothing are quite essential for the
level interconnection. In future, traditional 2-dimensional (2D) packaging ruggedness and reliability of gate oxide. Though the evolution of crystal
will limit product miniaturization. Therefore, components must be also shape through surface self-diffusion during heating in vacuum has been
joined to third dimension. A solution to this problem is a stacked System- extensively investigated, it has not been sufficiently studied in specific
in-Package (SiP). With this technology, great improvements over 2D ambients, which are applicable to semiconductor processes. At the
packaging are achieved, such as greater packaging density, smaller size, preceding meeting we studied shape transformation of silicon trenches
and shorter interconnection length. The next evolution step comes in with sidewall surface of (110) and (-110) during annealing in hydrogen
through following ways: to grind extra sand away from active ICs, to use ambient at 1000°C, and showed that the observed shape transformation
flexible substrates and interposers. However, this technology has some can be simulated well with Mullin's continuum surface model@footnote
problems that must be solved. For higher density of 3D package, increased 1@ with surface self-diffusion. In this work, to study the roll of hydrogen
power density brings new challenges to heat management. In this work, a gas on the Si surface self-diffusion in more detail, we investigated both the
stacked SiP structure has been studied. The package consists of three hydrogen pressure dependence and the temperature dependence of the
layers. In every layer, a silicon die of 3.7 mm x 8.3 mm has been joined with trench corner rounding for wider range of pressure (10-760Torr) and
flip chip method onto an aramid-epoxy interposer of 6 mm x 10 mm. The temperature (1000-1100°C), respectively. We found a remarkable effect of
silicon chips has been thinned down to 90 µm and the thickness of the hydrogen on trench corner rounding. The curvature of a trench corner for a
interposer is 150 µm. The interposers are joined together using solder certain annealing time increases linearly with increasing hydrogen
covered polymer spheres with diameter of 250 µm. So, the dimensions of pressure. The diffusion coefficient at 1000°C deduced by the Mullin's
whole package are 0.9 mm x 6 mm x 10 mm resulting in the total silicon formula decreased from 2x10@super 5@nm@super 2@/sec at 100Torr to
efficiency of 150 %. Transient thermal responses have been measured by 3x10@super 3@nm@super 2@/sec at 500Torr, which are much smaller
experiments and they are compared with simulations calculated with the than the one in vacuum@footnote 2@ by three to five orders of
FEM program Ansys. A constant heat power has been added to one chip at magnitude. The diffusion coefficients did not follow the Arrhenius relations
a time and temperature response has been measured in every chip. In this for 1000-1100°C in the higher-pressure region above 100Torr, suggesting
study, thermal responses, maximum temperatures, and chip-to-chip that more than one rate-limiting processes are involved in the temperature
thermal interactions are achieved. In addition, differences between range. @FootnoteText@ @footnote [email protected], J.Appl.Phys.28,
boundary conditions are discussed and certain design rules for chip 333(1957).@footnote [email protected]. Yang, Elain S. Fu, and Ellen D. Williams, Surf.
placement are given. Sci. 356,101(1996) .
10:00am MS-MoM6 Advanced Clean Process by Supercritical Carbon 11:00am MS-MoM9 Development of a Continuous Generation/Supply
Dioxide, H.-J. Tu, P. Chuang, C.-Y. Wang, Y.-L. Lin, H. Lo, M.-S. Zhou, M.-S. System of Highly-concentrated Ozone Gas for Low-temperature Oxidation
Liang, Taiwan Semiconductor Manufacturing Company, Ltd., Taiwan, R.O.C. Process, S. Ichimura, H. Nonaka, National Institute of Advanced Industrial
As device approaching nano-scale, it is more difficult to extend aqueous- Science and Technology (AIST), Japan; Y. Morikawa, T. Noyori, T. Nishiguchi,
based clean processes to future generations due to its high surface tension M. Kekura, Meidensha Corporation, Japan
characteristics. An advanced clean process by supercritical carbon dioxide Ozone has various superior characteristics compared to oxygen molecules
(SCCO@sub 2@) becomes a potential enabling technology in in ultrathin oxide film formation on silicon. It realizes rapid oxidation rate
semiconductor industries for its specific capabilities of low surface tension, at low substrate temperature, very thin transition layer in the oxide film,
chemical inertness, and more friendly ESH (environment, safety, and high electrical quality of the oxide film, etc. Those characteristics have been
health) which can overcome future wafer clean challenges. In the present proved using a highly concentrated (HC) ozone generator, which supplies
work, we show that using SCCO@sub 2@ can successfully remove almost 100% ozone gas at pressure lower than 1000 Pa. The generator
residue/polymer for advanced sub 100 nano-meter copper low-k utilizes vaporization of pure liquid ozone accumulated in an ozone vessel.
interconnect fabrication. In addition, it appears that the low-k dielectric Since the liquid ozone accumulation is limited to 5 ml because of safety,
Monday Morning, November 3, 2003 9 8:20 AM
Monday Morning, November 3, 2003
the generator can supply only about 360 l ozone gas at the pressure. Nanometer Structures
Considering future need in practical low-temperature oxidation process, Room 316 - Session NS-MoM
we have developed a new system which continuously generate/supply HC
ozone gas. The system is equipped with 4 ozone-vessels, and each vessel Quantum Dots and Nanoscale Devices
temperature can be controlled separately. During continuous operation, Moderator: E.T. Yu, University of California, San Diego
the condition of each ozone vessel changes stepwise with the same time
8:20am NS-MoM1 Conductance and Stability of Atom-sized Al Contacts
interval along the following mode sequence; 1) cooling the vessel from
under High Biases, J. Mizobata, Toshiba Corp., Japan; A. Fujii, S. Kurokawa,
120K to 90K, 2) accumulation of liquid ozone by distillation of
A. Sakai, Kyoto University, Japan
ozone/oxygen mixture gas at 90K, 3) heating the vessel from 90K to 113K
and vaporization of pure liquid ozone, and 4) heating the vessel from 113K Single-atom contacts (SACs) of metals are known to exhibit various unique
to 120 K and evacuation of the vessel. Allocating one of the 4 modes to properties and considered to be a candidate of interconnects in
each of the 4 ozone vessels so as to cover all the modes simultaneously, nanoelectronics. In our previous experiments, we studied high-bias
the system can supply constant flow of HC ozone gas. The maximum flow conductance of Au and Au-alloy SACs and showed that they can be
rate of the gas is 60 sccm, being enough for single wafer processing, and observed up to 2 V. In order to know the maximum rating of other metal
the ozone concentration is over 99 vol.% at the output of the system. The SACs, we carried out conductance measurements of Al SACs for biases from
characteristics of the system in the formation of ultrathin oxide on 4 inch 0.1 to 0.8 V and investigated the formation and the lifetime of Al SACs as a
silicon wafer is examined, together with the effect in low temperature function of the bias voltage. All measurements were made in UHV at room
oxidation of excited state atomic oxygen which can be generated/supplied temperature on breaking Al pin-plate contacts, where SACs were observed
by photo-dissociation of ozone at sample position. just before their complete breakage. We found that the formation
@FootnoteText@@footnote 1@T. Nishiguchi et al. Appl. Phys. Lett. 81, probability p@sub Al@ of Al SACs decreases with increasing the bias and
2190 (2002). leads to the suppression of the first peak in the conductance histogram.
Both p@sub Al@ and the first peak vanish at around 0.8 V. On the other
11:20am MS-MoM10 Profile Control for Deep Silicon Etch by Sidewall hand, the average lifetime of Al SACs, <@tau@@sub Al@>, decreases
Passivation in High Density Plasma, M. Khbeis, G. Metze, Laboratory for almost linearly with increasing the bias but remains finite at 0.8 V. For
Physical Sciences; K. Powell, D. Thomas, A. Pentland, J. Hutchings, Trikon comparison, we re-measured the high-bias conductance of Au SACs and
Technologies, Ltd. found that p@sub Au@ and <@tau@@sub Au@> show similar bias
Deep silicon etching of micron-sized structures is a critical step in high- dependence to that of p@sub Al@ and <@tau@@sub Al@>, respectively,
aspect ratio via fabrication. This paper shows that m=0 Resonant Induction though the relevant bias range is much higher for Au SAC: p@sub Au@, for
(M0RI) plasma technology coupled with the use of both etch and example, survives up to 2.4 V. We consider that the reduction of p@sub
passivation gases produced deep via holes with unscalloped sidewalls at Au@ and p@sub Al@ is due to a contact instability induced by
non-cryogenic temperatures. Process development, operational electromigration, which fractures contacts in the middle of their
parameters, and potential applications are discussed. Wafer level deformation and hence reduces the chance of forming SACs. On the other
packaging of high density, complex systems-on-chip is of great interest to hand, we found it difficult to explain the observed linear bias dependence
the microelectronics industry for the production of compact devices and of <@tau@@sub Al@> and <@tau@@sub Au@> by a simple rate theory
electronic components.@footnote 1@ Vertical integration of various since we know little about the effective contact temperature under high
unpackaged integrated circuits can be accomplished through die biases.
attachment, wafer-to-wafer bonding, thinning, and lastly high-aspect ratio
8:40am NS-MoM2 In-situ Monitoring of Quantum Conductance in
backside interconnects for signal communication. During the fabrication of
Electrodeposited Magnetic Point Contacts@footnote 1@, C.-S. Yang, J.
these 3-D systems there is a need to provide high-aspect ratio backside
Thiltges, B. Doudin, University of Nebraska, Lincoln; M. Johnson, Naval
metal interconnects at a depth of at least 20µm. The fabrication of
Research Laboratory
interconnect via holes dictate that the following etches be performed;
oxide mask etch, bulk silicon etch, and buried oxide layer etch. Other The goal of our research is to investigate the magnetoresistance properties
potential applications for deep silicon etch include bulk micromachining for of magnetic quantum point contacts. A two-steps fabrication process is
MEMS, ground/power plane connections, or re-routing of signal lines for used. First, a 50 nm gap between two planar Au electrodes of 1-2 microns
novel packaging. In this paper, development of the deep bulk silicon etch is widths is patterned using focused ion beam milling. Second, a metallic film
emphasized. To accommodate subsequent dielectric passivation and is slowly electrodeposited over the electrodes. In-situ measurements of the
metallization steps, via holes were specified to have a profile angle of 89 to inter-electrodes impedance monitors the contact resistance during the
90 degrees with absolutely no sidewall scalloping. Sidewall scalloping will growth. Keeping electrochemical control of the electrodes ensures
impede metal transport during a high-pressure reflow process. Since deep optimum purity of the nanocontact, as well as the absence of oxides.
reactive ion etch (DRIE) processes, such as Bosch, induce scalloping, Experiments are performed under sweeping magnetic field reaching 1600
alternative etch technologies that do not require switching of etchants and Oe amplitude. Quantum conductance steps in Au and Ni point contacts are
passivants are mandatory. @FootnoteText@@footnote 1@ J. Reche E. observed. For Ni, we find that an external field is helpful to observe
Korczynski, High-Density Thru-Silicon Interconnects, HDI Expo quantum conductance in multiples of e@super 2@/h, lifting the spin
Proceedings,(2000). degeneracy. Opening and closure of nanocontacts seldomly occur during
the magnetic field sweeping. No significant magnetoresistance was
11:40am MS-MoM11 The Study on Deformation of ArF Photo Resist in observed for samples of conductance values smaller than 50 e@super
Dry Etching, C.-H. Shin, G.J. Min, C.J. Kang, J.T. Moon, Samsung Electronics 2@/h. Optimizing the measurement speed, we show that no
Co., Ltd., Korea magnetoresistance values larger than 10 % occur when the resistance is
193nm ArF lithography has been introduced in DRAM industry for sub- stabilized at quantum plateau values during a few magnetic field sweeps.
90nm patterning. However, it has several issues in the substrate fabrication @FootnoteText@ @footnote 1@This research is supported by ONR and
of sub-90nm patterning. First, the physical thickness of resist has been NSF MRSEC.
decreased less than 3000Å, which is critical point for stable pattern
9:00am NS-MoM3 Quantum Dot Nucleation and Growth in a Microfluidic
transfer. Second, durability of resist in the plasma was reduced due to the
Reactor, T.L. Sounart, J.A. Voigt, T.A. Michalske, Sandia National
increase of Ohnish parameter. Third, resist is subjected to deformation
Laboratories
when it is exposed to the plasma due to its soft chemical structure. All
these factors limit the application of ArF lithography. Etching was Semiconductor quantum dots have the potential to transform important
performed in the commercially available dual frequency plasma based on technologies including (bio-)chemical sensors, efficient light sources,
O2, Ar, CO and C4F6 single gas chemistry, respectively. It was found that catalysts, and supercapacitors. The current ability to control nanoparticle
supply of bias power in the argon gas system led to the severe deformation properties, however, is at a state of infancy. Quantum dots are synthesized
of ArF photo resist. Novel techniques for the formation of protective layer in batch operations with no feedback and poor control of thermal,
will be discussed in this paper in order to suppress resist deformation with chemical, and fluid transport, resulting in a distribution of particle size and
enhanced etch selectivity. batch-to-batch variations. Microfluidic technology, which has
revolutionized analytical chemistry and only more recently has been
applied to chemical synthesis, offers numerous potential advantages over
existing techniques. It is expected that laminar flow, high heat transfer
rates, and short mixing lengths can be exploited to precisely control crystal
Monday Morning, November 3, 2003 10 8:20 AM