Table Of Content

ELSEVIER Author Index of Volume 355-356 Ahmed, W., 134, 162 Chen, K.H., 112, 205, 417 Fujimoto, T., 385 Kassing, R., 406 Ahn, J.. 174 Chen, L.C., 112 Kato, Y., 337 Aldinger, F., 96 Chen, LC... 205, 417 Garces, Y., 487 Khabari, A., 513 Ali, N., 134, 162 Chen, L.J., 412 Gopinathan, N., 401 Khalifa, F.A., 343 Allen, P.B., 295 Chen, Y.F., 205 Gould, R.D., 456 Khan, M.A., 139 Andritschky, M., 465 Cheng, L.W., 412 Gravano, S., 456 Khvostov, V., 96 Arnell, R.D., 263 Cheng, S.L., 412 Griffiths, P., 513 Kichambare, P.D., 112 Augereau, F., 347 Chi; EJ.,223 Grill, A., 189 Kim, C.,.252 Awan, S.A., 456 Chitty, J., 480, 487 Grovenor, C.R.M., 500 Kim, D.-H., 525 Chowdhury, A.K.M.S., 79, 85 Guiot, E., 89 Kim, I.K., 239 Babaev, V., 96 Chrisey, D.B., 536 Guo, Y.P., 174 Kim, J.-W., 423 Baik, H.K., 55, 223, 239 Christou, C., 117 Guseva, M., 96 Kim, S.-M., 461 Baranauskas, V., 60, 157. Chudoba, T., 284 Kim, T., 353 184, 233, 446 Chung, R., 536 Ha, S.M., 525, 531 Kim, T.S Barber, Z.H., 117 Cockeram, B.V., 17 Hale, J.S., 26 Kim, : Barkley, R., 79 Collins, M., 79 Hamelin, P., 270 Kirchhoff, J.F., 363 Baumgartner, K.M., 96 Contreras, G., 480 Hassan, I.U., 134, 162 Klemberg-Sapieha, J.E Baunack, S., 316 Cremer, R., 127 Hayes, J., 194 Kojima, I., 385, 390 Ben el Mekki, M., 89 Cunha, L., 465 He, X.M., 167 Kolesar, E.S., 295 Kolosov, O.V., 500 Bendavid, A., 6 Henry, B.M., 500 Konyashin, I., 96 Berrios, J.A., 480, 487 Dahl, S., 290 Hintermann, H., 480, 487 Koo Baik, H., 199 Bhushan, B., 330 Dariel, M.P., 380 Ho, W.Y., 246 Kreissig, U., 64 Bica de Moraes, M.A., 184 David, K., 322 Hofmann, S., 390 Kulisch, W., 406 Bin Li, B., 184 Descamps, J.-C., 35 Hosseini-Tehrani, A., 513 Kumar, R.S., 500 Bobzin, K., 367 DeVries, M., 26 Howard, J.T., 295 Kuo, C.T., 112, 417 Bodart, F., 357 Dillon, R.O., | Howson, R.P., 500 Kuo, P.F., 205 Bouchet, J., 270 Dinelli, F., 500 Huan, A.C.H., , 174 Kusano, Y., 117 Bouzakis, K.D., 322 Djouadi, M.A., 89 Huang, J.H., 440 Boydston, N., 295 Dorner, A., 214 Huang, L.J., 353 Laukaitis, G., 430 Brickner, W., 316 Durrant, S.F., 157, 184, 233 Huang, Q.F., 174 Bregadze, A., 96 Dyrda, K., 277 Huang, Y.S., 205 Le Huu, T., 122 Lee, D.Y., 239 Briggs, G.A.D., 500 Hung Wu, C., 179 Lee, S.-h., 229 Brown, W.D., 139, 343 Eggimann, F., 49 Hung, Y., 353 Lee, S.-r., 229 Bucaro, M.A., 536 Erdmann, J., 41 Hutchings, I.M., 117 Lee, S.T., 167 Byon, E.-s., 229 Esteve, J., 210 Hwa, L.G., 417 Lee, S.Y., 151, 461 Eun Kim, C., 531 Hwan Kim, Y., 199 Lemmer, O., 127 Callahan, J.H., 536 Evetts, J.E., 117 Leonhardt, D., 536 Cameron, D.C., 79, 85 Jamting, A., 6 LeskelaM., 430 Castro, G., 472 Fajardo, C., 480 Jankowski, A., 194 Lewis, D.B., 472 Castro, S.G., 157, 184 Faller, C., 49 Jeong, S.M., 55 Leyendecker, T., 127 Chang, C.L.. 246 Fan, C.W., 205 Joon Chi, E., 199 Leys, ¥., 357 Chang, C.Y., 451 Fan, Q.H., 162 Jun Choi, D., 199 L1,:- Bs 385 Chang, T.C., 451 Fernandez, G., 513 Jung, H.S., 151 L, B,.157, 233 Chen, H.Y., 374 Ferreira, J., 194 Li, G., 353 Chen, J.Y., 412 Frank, M., 127 Kang, M.G., 423, 435 Li, X., 330 PII: S0040-6090(99)00866-4 ELSEVIER Author Index of Volume 355-356 Ahmed, W., 134, 162 Chen, K.H., 112, 205, 417 Fujimoto, T., 385 Kassing, R., 406 Ahn, J.. 174 Chen, L.C., 112 Kato, Y., 337 Aldinger, F., 96 Chen, LC... 205, 417 Garces, Y., 487 Khabari, A., 513 Ali, N., 134, 162 Chen, L.J., 412 Gopinathan, N., 401 Khalifa, F.A., 343 Allen, P.B., 295 Chen, Y.F., 205 Gould, R.D., 456 Khan, M.A., 139 Andritschky, M., 465 Cheng, L.W., 412 Gravano, S., 456 Khvostov, V., 96 Arnell, R.D., 263 Cheng, S.L., 412 Griffiths, P., 513 Kichambare, P.D., 112 Augereau, F., 347 Chi; EJ.,223 Grill, A., 189 Kim, C.,.252 Awan, S.A., 456 Chitty, J., 480, 487 Grovenor, C.R.M., 500 Kim, D.-H., 525 Chowdhury, A.K.M.S., 79, 85 Guiot, E., 89 Kim, I.K., 239 Babaev, V., 96 Chrisey, D.B., 536 Guo, Y.P., 174 Kim, J.-W., 423 Baik, H.K., 55, 223, 239 Christou, C., 117 Guseva, M., 96 Kim, S.-M., 461 Baranauskas, V., 60, 157. Chudoba, T., 284 Kim, T., 353 184, 233, 446 Chung, R., 536 Ha, S.M., 525, 531 Kim, T.S Barber, Z.H., 117 Cockeram, B.V., 17 Hale, J.S., 26 Kim, : Barkley, R., 79 Collins, M., 79 Hamelin, P., 270 Kirchhoff, J.F., 363 Baumgartner, K.M., 96 Contreras, G., 480 Hassan, I.U., 134, 162 Klemberg-Sapieha, J.E Baunack, S., 316 Cremer, R., 127 Hayes, J., 194 Kojima, I., 385, 390 Ben el Mekki, M., 89 Cunha, L., 465 He, X.M., 167 Kolesar, E.S., 295 Kolosov, O.V., 500 Bendavid, A., 6 Henry, B.M., 500 Konyashin, I., 96 Berrios, J.A., 480, 487 Dahl, S., 290 Hintermann, H., 480, 487 Koo Baik, H., 199 Bhushan, B., 330 Dariel, M.P., 380 Ho, W.Y., 246 Kreissig, U., 64 Bica de Moraes, M.A., 184 David, K., 322 Hofmann, S., 390 Kulisch, W., 406 Bin Li, B., 184 Descamps, J.-C., 35 Hosseini-Tehrani, A., 513 Kumar, R.S., 500 Bobzin, K., 367 DeVries, M., 26 Howard, J.T., 295 Kuo, C.T., 112, 417 Bodart, F., 357 Dillon, R.O., | Howson, R.P., 500 Kuo, P.F., 205 Bouchet, J., 270 Dinelli, F., 500 Huan, A.C.H., , 174 Kusano, Y., 117 Bouzakis, K.D., 322 Djouadi, M.A., 89 Huang, J.H., 440 Boydston, N., 295 Dorner, A., 214 Huang, L.J., 353 Laukaitis, G., 430 Brickner, W., 316 Durrant, S.F., 157, 184, 233 Huang, Q.F., 174 Bregadze, A., 96 Dyrda, K., 277 Huang, Y.S., 205 Le Huu, T., 122 Lee, D.Y., 239 Briggs, G.A.D., 500 Hung Wu, C., 179 Lee, S.-h., 229 Brown, W.D., 139, 343 Eggimann, F., 49 Hung, Y., 353 Lee, S.-r., 229 Bucaro, M.A., 536 Erdmann, J., 41 Hutchings, I.M., 117 Lee, S.T., 167 Byon, E.-s., 229 Esteve, J., 210 Hwa, L.G., 417 Lee, S.Y., 151, 461 Eun Kim, C., 531 Hwan Kim, Y., 199 Lemmer, O., 127 Callahan, J.H., 536 Evetts, J.E., 117 Leonhardt, D., 536 Cameron, D.C., 79, 85 Jamting, A., 6 LeskelaM., 430 Castro, G., 472 Fajardo, C., 480 Jankowski, A., 194 Lewis, D.B., 472 Castro, S.G., 157, 184 Faller, C., 49 Jeong, S.M., 55 Leyendecker, T., 127 Chang, C.L.. 246 Fan, C.W., 205 Joon Chi, E., 199 Leys, ¥., 357 Chang, C.Y., 451 Fan, Q.H., 162 Jun Choi, D., 199 L1,:- Bs 385 Chang, T.C., 451 Fernandez, G., 513 Jung, H.S., 151 L, B,.157, 233 Chen, H.Y., 374 Ferreira, J., 194 Li, G., 353 Chen, J.Y., 412 Frank, M., 127 Kang, M.G., 423, 435 Li, X., 330 PII: S0040-6090(99)00866-4 Author index Liao, Y.C., 417 Sanchez-Pascual, A., 506 Valkonen, M.P., 430 Lindroos, S., 430 Pang, S.S., 151 Saleh, A.A., 363 Valles-Gonzalez, M.P SUD Ling, K.J., 417 Park H.-H., 151, Sayer, M., 277 VandenBrande, P., 357 Liu, C., 41 Schiirer, C., 214 Vasi, C., 219 Liu, E., 146 Park, S.G., 252 Schmitt, M., 122 Vidakis, N., 322 Liu, P.T., 451 Pascual, E., 210 Schwarzer, N., 284 Vitlina, R.Z., 60, 446 Lousa, A., 210 Paulmier, D., 122 Shaik, A.A., 139 Lu, F.H., 374 Pelleg, J., 380 Sharma, P.C., 12 von Stebut, J., 290, 347 Eu; T-R., 192, 417 Pertuz, A., 480, 487 Shi, X., 146 Lugscheider, E., 367 Peterlevitz, A., 184 Shih, Y.Z., 3: Walter, K.C., 167 Peterlevitz, A.C., 233 Shim, J.Y., Wang, D.Y., 246 Moller, M., 367 Peterlevitz, C., 157 Shultz, J.L., Wang, J., 184 Ma, X., 229 Pietrzko, S., 49 Sik Kim, W., 5: Wang, Z., 465 Macrander, A., 41 Pinkas, M., 380 Snyder, P.G., Ward, D.J., 311 Martin, P.J., 6 Pique Song, Weber, F.R., 73 Martinez, E., 210 Song Pischow, K., 465 Wee, A.T.S., 174 MMacrGtiilnlu,, RL..A,. ,2 9503 6 Pita-Larranaga, A., 506 SSopaueztah,, RC..M,. .,6 4 Wei, S.L., 112 Measures, D.P., 17 Plass, M.F., 406 Spargo, B.J., 536 Weissmantel, S., 105 56 Popov, C., 406 Mehregany, M., 179, 518 Staia, M.H., 472 Wen, C.Y., 205 Poulet, A., 357 Mertens, R., 127 Steffen, H., 395 Wielage, B Puchi, E.S., 472, 480, 487 Mestres, N., 89 Sun, X.S., 167 Wilken, J.M., 295 Minami, T., 35 Sun, Y., 229 Williams, A.F., 311 Miyata, T., 35 Quaas, M., 395 Sun, Z., 146 Won Han, D., 199 Mo, Y.G., | Quade, A., 494 Surdutovich, G.1., 60, 446 Woollam, J.A., 26 Monclus, M.A., 79, 85 Sze, S.M., 451 Wu, C.-T., 417 Moon, D.W., 390 Rauchle, E., 96 Wu, J.J., 112, 205, 41 Moore, J.J., 303 Ramirez, F.O., 472 Takeda, N., 337 Mor, Y.S., 451 Rangel, E.C., 184 Takikawa, H., 6 Wulff, H., 395, 494 Morse, J., 194 Rar, A., 390 Tamulevicius, S.., Mortet, V., 89 Rats, D., 290, 347 Tang, K.C., 263 Xia, L., 229 Moser, E.M., 49 Rego, C.A., 134, 162 Teo, E.J., 174 Xu, W., 353 MslIna, T.E., 536 Reisse, G., 105 Thompson, D.W., 2 Mueller, A.J., 17 Reisse, G., 256 Tian, J., 229 anaka, M-a., 337 Mustoe, G.G.W., 303 Reyes-Gasga, J., 506 Tiwald, T.E., 1, 26 ang, C.Y., 174 Rho, S.J., 55 Tosin, M.C., 157, 184, Yang, H., 174 Naseem, H.A., 139, 343 Richter, F., 64, 284 rrimble, C., 26 Yang, Y.L., 451] Nastasi, M., 167 Roberts, A.P., 500 Trusso, S., 219 Yoon, S.F., | Neri, F., 219 Robinson, C., 401 Tsai, M.S., 451 Y ota, J., 363 Neuschiitz, D., 127 Roche, A.A., 270 Tsai, Y.P., 440 Nguyen, C., 363 Roquiny, Ph., 35 4 Tsui, B.Y., 412 Young Yoon, W., 199 Nouet, G., 89 Rothman, J.B., 363 Tsukahara, Y., 337 Yu, G.P., 440 Rusli, , 174 O’Hare, I.P., 134, 162 Ryan, F., 401 Urban III, F.K., 512 Zhang, Q., 174 ©; Bik. 252 Zhao, K.Y., 500 Oechsner, H., 73 Sanchez, H., 487 Vachet R.W., 536 Zorman, C.A., | Thin Solid Films 355 356 (1999) 544-552 Subject Index of Volume 355-356 Absorption the controlled atmosphere, 374 Simple reflectometric method for measurement of weakly Antireflective coatings absorbing films, 446 Characterization of SiO,N, anti-reflective coatings using SIMS \coustic microscopy and RBS/HFS, 364 High frequency scanning acoustic microscopy: a novel non- As poly-sulfide destructive surface analytical tool for assessment of coat- Inveessttiiggaatitoino n ¢ on th e surrffaa ce chhaarraacctteerriisstt ics off GaGaAAss aftafteer r sul-su l ing-specific elastic moduli and tomographic study of subsur- furic-vapor treatment, 423 face defects, 347 Atmospheric pressure chemical vapor deposition Adhesion Growth of polycrystalline SiC films on SiO, and Si;Ny by Characterization of hydrogen-free diamond-like carbon films APCVD, 179 deposited by pulsed plasma technology, 246 Atomic force microscopy Critical loads and effective frictional force measurements in the Interesting optical properties of films composed of very small industrial scratch testing of TiN on M2 tool steel, 277 grains formed from a high-rate nanoparticle beam, 513 \l-films Investigation of oxidation process on plasma treated thin Boron carbide films by GIXR and GIXRD, 494 Effect of ion bombardment on the properties of B,C thin films Alloys deposited by RF sputtering, 210 Stress and oxidation in CuNi thin films, 316 Boron nitride Aluminum coating Characterization of interface of c-BN film deposited on Si(100) A microstructural study of transparent metal oxide gas barrier substrate, 229 films, 500 Brewster angle Aluminum enhanced crystallization Simple reflectometric method for measurement of weakly In situ analysis of aluminum enhanced crystallization of hydro- absorbing films, 446 genated amorphous silicon (a-Si:H) using X-ray diffraction, Brewster window 343 Unique Brewster-angle window transparent to both polariza- Aluminum oxide tions, 60 \ microstructural study of transparent metal oxide gas barrier c-axis orientation films, 500 Characterization of YBCO superconducting films fabricated by Amorphous carbon coatings pulsed laser deposition, 461 Evaluation of fracture toughness of ultra-thin amorphous carbon coatings deposited by different deposition techniques, ‘arbon nitride 330 Investigation of the valence band states of reactively sputtered Amorphous carbon films carbon nitride films, 79 Investigation of tungsten incorporated amorphous carbon film, Deposition of carbon nitride films by ionised magnetron sput- 174 tering, 117 Field emission characteristics of cesiated amorphous carbon arbon nitride films films by negative carbon ion, 199 Nitrogenated diamond produced by introducing ammonia into Amorphous silicon nitride the gas feed in hot-filament CVD, 157 lhe effects of substrates on carbon nitride thin films prepared CN, thin fiims grown by pulsed laser deposition: Raman, infra- by direct dual ion beam deposition, 22 39 red and X-ray photoelectron spectroscopy study, 219 Angle-resolved X-ray photon spectrometry arbon nitride layers Substrate induced DLC film thickness variations, 35: Low-energy plasma beam deposition of carbon nitride layers Anisotropy with -C,N,-like fractions, 73 Unique Brewster-angle window transparent to both polariza- Carbon nitride thin films tions, 60 Effect of substrate bias on the bonding structure of carbon Annealing nitride thin films, 85 XPS analyses of TiN films on Cu substrates after annealing in The effects of substrates on carbon nitride thin films prepared PII: S0040-6090(99)000851-2 th of organic thin films | evaporation (MAPLE) | vapor deposition ystalline SiCN a hard material rivals to cu 112 ffect of early methane introduction on the properties of nano- seeded MPCVD-diamond films, 139 High rate deposition of diamond-like carbon films by magneti- cally enhanced plasma CVD, 146 Nitrogenation of diamond by glow discharge plasma treatment. 184 Wide band gap silicon carbon nitride films deposited by electron cyclotron resonance plasma chemical vapor deposition, copper. 205 agnetron sputtering Cl, gas mparative study Stability and sensing mechanism of high sensitivity chlorine deposited by D¢ gas sensors using transparent conducting oxide thin films, 35 less than 100°C on mono B-C.N ]l innee irr ona ) suwibh Dstrattees . Low-energy plasma beam deposition of carbon nitride layers Defect chemistry with B-( N,-like fractions, 73 The effects of cation-substituti B-CIN, crystalline films of sol Effect of substrate bias on the bonding structure of carbon Deposition nitride thin films, 85 Deposition of silicon carbon n Coatings ing. 417 The development and testing of emissivity enhancement coat- Diamond films ings for themophotovoltaic (TPV) radiator applications, 17 Field emission characteristic of diamond fil: rhe concept of an advanced impact tester supported by evalua- tron assisted chemical vapor deposit tion software for the fatigue strength characterization of Structure and properties of diamond films ¢ hard layered media, 322 silicon, >> 43* Co-evaporation Diamond Composition dependent structural properties of Pb, ,Eu,Se thin Formation of intermetallic cobalt films, 12 region of cemented carbides f Color range deposition, 127 Comparative study of thin film physical properties for TiN An investigation of the structural properties of dian deposited by DC magnetron sputtering under temperatures deposited by pulsed bias enhanced hot filament C' less than 100°C on monocrystalline silicon and polycrystal- Effect of early methane introduction on the properties line iron substrates, 357 seeded MPCVD-diamond films, 139 Combustion flame synthesis Role of surface pre-treatment in the CVD of diamond f Combustion flame synthesis: a promising technique to obtain copper, 162 diamond single crystal, 122 Nitrogenation of diamond by glow discharge plasm Compressive stress 184 Structural and optical properties of titanium oxide thin films Diamond-like carbon deposited by filtered arc deposition, 6 High rate deposition of diamond-like carbon films by mag Conductivity cally enhanced plasma CVD, 146 Thermally-actuated cantilever beam for achieving large in- The structural and electron field emission characteristi'c s +f plane mechanical deflections, 295 pulsed laser deposited diamond-like carbon films with t hHeirl Copper mal treatment, 151 Subject index Optical and tribological properties of diamond-like carbon crystalline approximants in in situ heated thin films of the films synthesized by plasma immersion ion processing, 167 Al-Co-—Cr—Fe-—O system, 506 Electrical and optical properties of diamond-like carbon, 189 Ellipsometry Improvement of the corrosion resistance of C/Al-composites by Interesting optical properties of films composed of very small diamond-like carbon coatings, 214 grains formed from a high-rate nanoparticle beam, 513 Characterization of hydrogen-free diamond-like carbon films Emissivity enhancement deposited by pulsed plasma technology, 246 The development and testing of emissivity enhancement coat- Substrate induced DLC film thickness variations ings for themophotovoltaic (TPV) radiator applications, 17 Diamond-like carbon coatings Energy release Characterization and properties of diamond-like carbon films Evaluation of fracture toughness of ultra-thin amorphous car- for magnetic recording application, 401 bon coatings deposited by different deposition techniques, Diamond single crystal 330 Combustion flame synthesis: a promising technique to obtain Evaluation software diamond single crystal, 122 The concept of an advanced impact tester supported by evalua- Direct dual ion beam deposition tion software for the fatigue strength characterization of The effects of substrates on carbon nitride thin films prepared hard layered media, 322 by direct dual ion beam deposition, 239 Excess Pb and O Elastic modulus High frequency scanning acoustic microscopy: a novel non- destructive surface analytical tool for assessment of coat- Fatigue ing-specific elastic moduli and tomographic study of subsur- The concept ofa n advanced impact tester supported by evalua- face defects, 347 tion software for the fatigue strength characterization of Elastic recoil detection hard layered media, 322 Sputtering and chemical erosion during CN, synthesis by ion Fatigue behavior beam assisted filtered cathodic arc evaporation, 64 Fatigue properties of an AISI 1045 steel coated with an electro- Elastic-plastic aluminum substrates less Ni-P deposit, 480 Finite-element modeling of the stresses and fracture during the Fatigue behavior of a quenched and tempered AISI 4340 steel indentation of hard elastic films on elastic-plastic aluminum coated with an electroless Ni-P deposit, 487 substrates, 303 Fatigue cracks Elecroless Ni-P deposits Fatigue properties of an AISI 1045 steel coated with an electro- Fatigue properties of an AISI 1045 steel coated with an electroless Ni-P deposit, 480 less Ni-P deposit, 480 Fatigue behavior of a quenched and tempered AISI 4340 steel Electrical properties coated with an electroless Ni-P deposit, 487 Nitrogenation of diamond by glow discharge plasma treatment, Fatigue critical stresses 184 The concept of an advanced impact tester supported by evalua- Electrical and optical properties of diamond-like carbon, 189 tion software for the fatigue strength characterization of Electrical conduction processes in silicon nitride thin films pre- hard layered media, 322 pared by r.f. magnetron sputtering using nitrogen gas, 456 Ferroelectric properties Electrochemical corrosion Crystallization and ferroelectric behavior of sputter deposited Improvement of the corrosion resistance of C/Al-composites by PZT using a target containing excess Pb and O contents, 525 diamond-like carbon coatings, 214 The effects of cation-substitution on the ferroelectric properties Electroless nickel of sol-gel derived PZT thin film for FRAM application Res) Effect of thermal history on the microhardness of electroless Field emission cathodes Ni-P, 472 Large area deposition of field emission cathodes for flat panel Electroless Ni-P deposits displays, 194 Fatigue behavior of a quenched and tempered AISI 4340 steel Field emission characteristics coated with an electroless Ni-P deposit, 487 Field emission characteristic of diamond films grown by elec- Electron assisted chemical vapor deposition tron assisted chemical vapor deposition, 223 Field emission characteristic of diamond films grown by elec- Field emission characteristics of cesiated amorphous carbon tron assisted chemical vapor deposition, 223 films by negative carbon ion, 199 Electron cyclotron resonance chemical vapour deposition Film formation Investigation of tungsten incorporated amorphous carbon film, Investigation of plasma-deposited ITO films by GIXR and 174 GIXRD, 395 Electron field emission Film growth The structural and electron field emission characteristics of Deposition of silicon carbon nitride films by ion beam sputter- pulsed laser deposited diamond-like carbon films with ther- ing, 417 mal treatment, 151 Film stress Electron microscopy Characterization and properties of diamond-like carbon films Observation of a decagonal quasicrystalline phase and quasi- for magnetic recording application, 401 Subject index Filtered arc deposition Growth mode Structural and optical properties of titanium oxide thin films In situ spectroscopic ellipsometry as a surface-sensitive tool to deposited by filtered arc deposition, 6 probe thin film growth, 41 Finite elements Stress and surface studies of SILAR grown CdS thin films on Determination of coating mechanical properties using spherical GaAs(100), 430 indenters, 263 Finite element simulation of the development of residual stress Hard coatings in IAPVD films, 311 Effect of ion bombardment on the properties of B,C thin films Finite-element modeling deposited by RF sputtering, 210 Finite-element modeling of the stresses and fracture during the Structural analysis of (Ti, ,Al,)N graded coatings deposited by indentation of hard elastic films on elastic-plastic aluminum reactive magnetron sputtering, 380 substrates, 303 Hard elastic films Flat panel displays Finite-element modeling of the stresses and fracture during the Large area deposition of field emission cathodes for flat panel indentation of hard elastic films on elastic-plastic aluminum displays, 194 substrates, 303 Fourier transform infrared spectroscopy Hardness Deposition of carbon nitride films by ionised magnetron sput- Structural and optical properties of titanium oxide thin films tering, 117 deposited by filtered arc deposition, 6 Fracture toughness Microstructure of CrN coatings produced by PVD techniques, Evaluation of fracture toughness of ultra-thin amorphous car- 465 bon coatings deposited by different deposition techniques, Hardness modeling 330 Effect of thermal history on the microhardness of electroless Frictional force measurements Ni-P, 472 Critical loads and effective frictional force measurements in the Harsh environments industrial scratch testing of TiN on M2 tool steel, 277 SiC MEMS: opportunities and challenges for applications Functionally graded materials harsh environments, 518 Structural analysis of (Ti, ,Al,)N graded coatings deposited by High-rate deposition reactive magnetron sputtering, 380 Interesting optical properties of films composed of very small grains formed from a high-rate nanoparticle beam, 513 GaAs Hollow cathode discharge Investigation on the surface characteristics of GaAs after sul- Effect of processing parameters on the microstructure and furic-vapor treatment, 423 mechanical properties of TiN film on stainless steel by Bonding and structural changes of natively oxidized GaAs sur- HCD ion plating, 440 face during ion induced deposition of Au, 435 Hot filament Gas barrier film Formation of intermetallic cobalt phases in the near surface A microstructural study of transparent metal oxide gas barrier region of cemented carbides for improved diamond layer films, 500 deposition, 12 Gas sensor Hot-filament chemical vapor deposition Stability and sensing mechanism of high sensitivity chlorine An investigation of the structural properties of diamond films gas sensors using transparent conducting oxide thin films, 35 deposited by pulsed bias enhanced hot filament CVD, | GIXR and GIXRD Nitrogenated diamond produced by introducing ammonia into Investigation of oxidation process on plasma treated thin Al- the gas feed in hot-filament CVD, 157 films by GIXR and GIXRD, 494 Role of surface pre-treatment in the CVD of diamond films on Glow discharge plasma treatment copper, 162 Nitrogenation of diamond by glow discharge plasma treatment, Structure and properties of diamond films deposited on porous 184 silicon, 233 Graphite Hydrocarbon coatings Effect of early methane introduction on the properties of nano- Modeling the functional performance of plasma polymerized seeded MPCVD-diamond films, 139 thin films, 49 Characterization of hydrogen-free diamond-like carbon films Hydrogen plasmas deposited by pulsed plasma technology, 246 The mechanism of cubic boron nitride deposition in hydrogen Grazing incidence X-ray diffractometry plasmas, 96 Investigation of plasma-deposited ITO films by GIXR and Hydrogenated amorphous silicon GIXRD, 395 In situ analysis of aluminum enhanced crystallization of hydro- Grazing incidence X-ray reflectometry genated amorphous silicon (a-Si:H) using X-ray diffraction, Investigation of plasma-deposited ITO films by GIXR and 343 GLXRD, 395 Hydroxylamine sulfate Growth and mechanical properties The novel precleaning treatment for selective tungsten chemi- Crystalline SiCN: a hard material rivals to cubic BN, 112 cal vapor deposition, 451 Subject index lon beam sputtering Impact test Deposition of silicon carbon nitride films by ion beam sputter- The concept of an advanced impact tester supported by evalua- ing, 417 tion software for the fatigue strength characterization of lon bombardment hard layered media, 3 ale) Effect of ion bombardment on the properties of B,C thin films In situ heating deposited by RF sputtering, 210 Observation of a decagonal quasicrystalline phase and quasi- lonised magnetron sputtering crystalline approximants in in situ heated thin films of the Deposition of carbon nitride films by ionised magnetron sput- Ai—-Co—Cr—Fe—O system, 506 tering, 117 Indentation Micromechanical characterisation of plasma treated polymer Large area deposition surfaces, 290 Large area deposition of field emission cathodes for flat panel Indentation measurements displays, 194 New possibilities of mechanical surface characterization with Laser deposition spherical indenters by comparison of experimental and the- Characterization of YBCO superconducting films fabricated by oretical results, 284 pulsed laser deposition, 461 Indentation test Layer adhesion Determination of coating mechanical properties using spherical The effect of PVD layer constitution on surface free energy, 367 indenters, 263 Lead salt alloys Indium tin oxide Composition dependent structural properties of Pb, ,Eu,Se thin Investigation of plasma-deposited ITO films by GIXR and films, 12 GIXRD, 395 Low-energy plasma beam deposition Inductively coupled plasma sources Low-energy plasma beam deposition of carbon nitride layers An array of inductively coupled plasma sources for large area with -C,N,-like fractions, 73 plasma, 252 Infrared emittance Magnetic field Infrared emittance modulation devices using electrochromic High rate deposition of diamond-like carbon films by magneti- crystalline tungsten oxide, polymer conductor, and nickel cally enhanced plasma CVD, 146 oxide, 26 Magnetron sputtering Infrared spectroscopy Stability and sensing mechanism of high sensitivity chlorine CN, thin films grown by pulsed laser deposition: Raman, infra- gas sensors using transparent conducting oxide thin films, 35 red and X-ray photoelectron spectroscopy study, 219 Investigation of the valence band states of reactively sputtered Characterization of ion-assisted pulsed laser deposited cubic carbon nitride films, 79 boron nitride films, 256 Effect of substrate bias on the bonding structure of carbon Interface nitride thin films, 85 Characterization and properties of diamond-like carbon films Effect of ion bombardment on the properties of B,C thin films for magnetic recording application, 401 deposited by RF sputtering, 210 Interface roughness Matrix assisted pulsed laser evaporation High resolution thickness and interface roughness characteriza- Growth of organic thin films by the matrix assisted pulsed laser tion in multilayer thin films by grazing incidence X-ray evaporation (MAPLE) technique, 536 reflectivity, 385 Mechanical deflections Interfacial reaction Thermally-actuated cantilever beam for achieving large in- Bonding and structural changes of natively oxidized GaAs sur- plane mechanical deflections, 295 face during ion induced deposition of Au, 435 Mechanical properties Intermetallic phases Characterization of pulsed laser deposited h-BN films and h- Formation of intermetallic cobalt phases in the near surface BN/c-BN layer systems, 105 region of cemented carbides for improved diamond layer Determination of coating mechanical properties using spherical deposition, 127 indenters, 263 Interphase New possibilities of mechanical surface characterization with Micromechanical characterisation of plasma treated polymer spherical indenters by comparison of experimental and the- surfaces, 290 oretical results, 284 lon assisted physical vapour deposition Metal matrix composites Finite element simulation of the development of residual stress Improvement of the corrosion resistance of C/Al-composites by in IAPVD films, 311 diamond-like carbon coatings, 214 lon beam assisted deposition MgO The structural, optical and secondary electron emission proper- The structural, optical and secondary electron emission properties of MgO and Mg—O-Cs thin films prepared by ion beam ties of MgO and Mg—O-Cs thin films prepared by ion beam assisted deposition, 55 assisted deposition, 55 Synthesis and characterization of c-BN films prepared by ion Mg—O-Cs beam assisted deposition and triode sputtering, 89 The structural, optical and secondary electron emission proper- Subject index ties of MgO and Mg—O-Cs thin films prepared by ion beam oxide, 26 assisted deposition, 55 Nickel silicide Microelectrochemical systems Effects of nitrogen ion implantation on the formation of nicke SiC MEMS: opportunities and challenges for applications in silicide contacts on shallow junctions, 412 harsh environments, 518 Nitrogen content Microelectromechanical systems Comparative study of thin film physical properties for TiN Thermally-actuated cantilever beam for achieving large in- deposited by DC magnetron sputtering under temperatures plane mechanical deflections, 295 less than 100°C on monocrystalline silicon and polycrystal- Microhardness line iron substrates, 357 Comparative study of thin film physical properties for TiN Nitrogen ion implantation deposited by DC magnetron sputtering under temperatures Effects of nitrogen ion implantation on the formation of nickel less than 100°C on monocrystalline silicon and polycrystal- silicide contacts on shallow junctions, 412 line iron substrates, 357 Nitrogenated diamond Effect of processing parameters on the microstructure and Nitrogenated diamond produced by introducing ammonia into mechanical properties of TiN film on stainless steel by the gas feed in hot-filament CVD, 15 HCD ion plating, 440 Nucleation Microhardness measurements An investigation of the structural properties of diamond films Effect of thermal history on the microhardness of electroless deposited by pulsed bias enhanced hot filament CVD, 134 Ni-P, 472 Microstructure Optical band gap Characterization of pulsed laser deposited h-BN films and h- Structural and optical properties of titanium oxide thin films BN/c-BN layer systems, 105 deposited by filtered arc deposition, 6 Effect of processing parameters on the microstructure and Optical emission spectroscopy mechanical properties of TiN film on stainless steel by Deposition of carbon nitride films by ionised magnetron sput- HCD ion plating, 440 tering, 117 Microstructure of CrN coatings produced by PVD techniques, Optical functions 465 Optical properties of photochromic organic—inorganic compo- A microstructural study of transparent metal oxide gas barrier sites, | films, 500 Optical properties Mixing-Roughness-Information model Optical and tribological properties of diamond-like carbon Original and sputtering induced interface roughness in AES films synthesized by plasma immersion ion processing, 167 sputter depth profiling of Si0,/Ta,O; multilayers, 390 Electrical and optical properties of diamond-like carbon, 189 Multiple cracking Interesting optical properties of films composed of very small Effects of temperature on the multiple cracking progress of sub- grains formed from a high-rate nanoparticle beam, 513 micron thick glass films deposited on a polymer substrate, Organic thin films 323 7 Growth of organic thin films by the matrix assisted pulsed laser evaporation (MAPLE) technique, 536 Nanoindentation Oxidation Evaluation of fracture toughness of ultra-thin amorphous car- Stress and oxidation in CuNi thin films, 316 bon coatings deposited by different deposition techniques, Oxidation process 330 Investigation of oxidation process on plasma treated thin Nanoparticle beams films by GIXR and GIXRD, 494 Interesting optical properties of films composed of very small grains formed from a high-rate nanoparticle beam, 513 Passivation Nanoparticle films The novel precleaning treatment for selective tungsten chemi- Interesting optical properties of films composed of very small cal vapor deposition, 451 grains formed from a high-rate nanoparticle beam, 513 Photochromic composite film Negative carbon ions Optical properties of photochromic organic—inorganic compo- Field emission characteristics of cesiated amorphous carbon sites, | films by negative carbon ion, 199 Photoelectron spectroscopy Negative substrate-bias effects Nitrogenation of diamond by glow discharge plasma treatment, S Combustion flame synthesis: a promising technique to obtain 184 diamond single crystal, 122 Plain carbon steels (NH,))S, Fatigue properties of an AISI 1045 steel coated with an ele Investigation on the surface characteristics of GaAs after sul- less Ni-P deposit, 480 furic-vapor treatment, 423 Fatigue behavior of a quenched and tempered AISI 4340 steel Nickel oxide coated with an electroless Ni-P deposit, 487 Infrared emittance modulation devices using electrochromic Plasma crystalline tungsten oxide, polymer conductor, and nickel High rate deposition of diamond-like carbon films by ma Subject index cally enhanced plasma CVD, 146 Bonding and structural changes of natively oxidized GaAs sur- Plasma chemical vapor deposition face during ion induced deposition of Au, 435 Plasma chemical vapor deposition of thin carbon nitride films Quartz dielectric window utilizing transport reactions, 406 An array of inductively coupled plasma sources for large area Plasma immersion ion processing plasma, 252 Optical and tribological properties of diamond-like carbon Quasicrystal films synthesized by plasma immersion ion processing, 167 Observation of a decagonal quasicrystalline phase and quasi- Plasma polymerized thin films crystalline approximants in in situ heated thin films of the Modeling the functional performance of plasma polymerized Al—Co-—Cr—Fe-O system, 506 thin films, 49 Polycrystalline films r.f. Sputtering Composition dependent structural properties of Pb, _,Eu,Se thin Electrical conduction processes in silicon nitride thin films pre- films, 12 pared by r.f. magnetron sputtering using nitrogen gas, 456 Polymer conductor Raman spectroscopy Infrared emittance modulation devices using electrochromic CN, thin films grown by pulsed laser deposition: Raman, infra- crystalline tungsten oxide, polymer conductor, and nickel red and X-ray photoelectron spectroscopy study, 219 oxide, 26 Characterization and properties of diamond-like carbon films Polymer substrate for magnetic recording application, 401 Effects of temperature on the multiple cracking progress of sub- Raman transmission electron microscopy micron thick glass films deposited on a polymer substrate, Synthesis and characterization of c-BN films prepared by ion 357 beam assisted deposition and triode sputtering, 89 Polymer thin films Reaction layer Growth of organic thin films by the matrix assisted pulsed laser The effect of PVD layer constitution on surface free energy, 367 evaporation (MAPLE) technique, 536 Reactive ion etching Polymer/metal interphase An array of inductively coupled plasma sources for large area Internal stresses, Young’s modulus and practical adhesion of plasma, 252 organic coatings applied onto 5754 aluminium alloy, 270 Reactive magnetron sputtering Poly-SiC films Modeling the functional performance of plasma polymerized Growth of polycrystalline SiC films on SiO, and Si;N, by thin films, 49 APCVD, 179 Reactive sputtering Porous silicon Structural analysis of (Ti, ,Al,)N graded coatings deposited by Structure and properties of diamond films deposited on porous reactive magnetron sputtering, 380 silicon, 233 Residual stresses Practical adhesion Internal stresses, Young’s modulus and practical adhesion of Internal stresses, Young’s modulus and practical adhesion of organic coatings applied onto 5754 aluminium alloy, 270 organic coatings applied onto 5754 aluminium alloy, 270 Finite element simulation of the development of residual stress Precleaning in IAPVD films, 311 The novel precleaning treatment for selective tungsten chemi- Stress and surface studies of SILAR grown CdS thin films on cal vapor deposition, 451 GaAs(100), 430 Protective coatings Resistivity Unique Brewster-angle window transparent to both polariza- Investigation of the valence band states of reactively sputtered tions, 60 carbon nitride films, 79 Pulsed bias Characterization and properties of diamond-like carbon films An investigation of the structural properties of diamond films for magnetic recording application, 401 deposited by pulsed bias enhanced hot filament CVD, 134 Ring resonator Characterization of hydrogen-free diamond-like carbon films Characterization of YBCO superconducting films fabricated by deposited by pulsed plasma technology, 246 pulsed laser deposition, 461 Pulsed laser deposition Characterization of pulsed laser deposited h-BN films and h- Scanning electron microscopy BN/c-BN layer systems, 105 Combustion flame synthesis: a promising technique to obtain The structural and electron field emission characteristics of diamond single crystal, 122 pulsed laser deposited diamond-like carbon films with ther- Scratch hardness mal treatment, 151] Micromechanical characterisation of plasma treated polymer Characterization of ion-assisted pulsed laser deposited cubic surfaces, 290 boron nitride films, 256 Scratch testing PZT Critical loads and effective frictional force measurements in the Crystallization and ferroelectric behavior of sputter deposited industrial scratch testing of TiN on M2 tool steel, 277 PZT using a target containing excess Pb and O contents, 525 Secondary electron emission The structural, optical and secondary electron emission proper- Quantitative simulation ties of MgO and Mg—O-Cs thin films prepared by ion beam