Table Of Content

Thin Solid Films 305 (1997) 359 Author Index of Volume 305 Aarik, J. 270 Hofman, W. 66 McDevitt, N.T. 130 Scharmann, A. 61 Abdel-Latif, R.M. 336 Hong, C.K. 30 Meghdadi, F. 232 Schell, N. 172 Abdel Malik, T.G. 336 Hong, W. 266 Mehta, G.K. 88 Shivashankar, S.A. 52 Abelmann, L. | Huang, D. 110 Mertig, M. 248 Silva-Gonzilez, R. 345 Aidla, A. 270 Huang, N.-P. 110 Mishina, E.D. 341 Séderholm, S. 243 Aiyer, R.C. 330 Hussain, O.M. 219 Miyashita, T. 316 Sood, A.K. 191 Aktsipetrov, O.A. 341 Mohan, S. 191 Srinivas, S. 259 Al-Ajili, A.N.H. 116 lonov, R. 309 Mohanchandra, K.P. 124 Srinivasulu Naidu, B. 219 Anathakrishna, G. 52 Itabashi, O. 316 Mohan Rao, K. 196 Su, Q.X. 227 Angelova, A. 309 lyer, S.B. 259 Moiseev, Yu.N. 341 Sugioka, K. 74 Ansari, Z.A. 330 Miller, W. 172 Avasthi, D.K. 88 Jergel, M. 158, 210, 210 Moss, $.C. 227 Tcheliebou, F. 30 Jiménez, C. 185 Murzina, T.V. 341 Tomaszewski, H. 358 Baek, J.-T. 103 Torres, Sh. 345 Baik, S. 30 Kabiraj, D. 88 Niessner, W. 61 Uchil, J. 124, 196 BBaayxleinsdsa,l eS,. C.M . 11365,1 274 KKaapnialk,a rRa.j u,8 8 S. 191 Nowak, R. 297 UUnmaelm,u rBa. , 274K. 74 Bernhardt, A.F. 26 Karekar, R.N. 330 Oh, S. 304 Unger, E. 248 Beyer, D. 74 Karlsson, U.O. 243 Oh, Y.-J. 321 Unzog, W. 232 Bianchi, L. 35 Kersten, H. 164 Ohki, Y. 351 Uustare, T. 270 Bohm, KJ. 248 Kiisler, A.-A. 270 Ota, E. 351 Bultman, J.E. 130 Kikuchi, R. 351 Ozer, N. 80 Vankar, V.D. 88 Burch, E. 95 Kim, C.-E, 321 Vardelle, A. 35 Pal, U. 345 Vardelle, M. 35 Canseco, M.A. 158 Kim, D.-W. 254 Panov, V.I. 341 Vazquez, L. 185 Cesarano Ill, J. 95 Kim, H.-w. 280 Park, C.-O. 254 Vidal, M.A. 345 Chen, C.W. 327 Kim, J.-S. 103 Park, K.C. 201 Vook, R.W. 286 Chen, G.-h. 22 Kim, J.H. 304 Park, W.S. 30 Chiaia, G. 243 Kim, K.H. 201 Parker, E.H.C. 274 Wahl, R. 248 Conde-Gallardo, A. 158, 210 Kim, S.-H. 321 Pattabi, M. 196 Walck, S.D. 130 DDDeeen uGRlro,yo s,Je ., N 3.5R .83 5385 8 KKKKoniolorcilshtlc,s,h c ,h NW,.R . . A2.732 424 81 72 PPPeéénrrgee,zz --RCCia.gs-uJe.er ior,1o 4,4 R . J. 18158 5 WWWeaursule,ir n,g S,.R G.. M .6 362 671 Dilawar, N. 88 Krupanidhi, S.B. 144 Phillips, P. 274 Xiao, Z.-D. 110 Dorfman, V.F. 341 Pipkin, B.N. 341 Xiaogin, H. 266 Lee, E.-J. 103 Plass, M.F. 172 Xiong, J.X.Z. 227 Eggs, C. 164 Lee, K.Y. 327 Plesch, G. 158 Xu, X. 95 Falcony, C. 158, 210 Lee, S.-Y. 254 Pompe, W. 248 Xue, Q. 292 Fang, Y.K. 327 Lee, W.-J. 103, 254 Qian, P. 316 Yang, P. 48 Fauchais, P. 35 Leger, A.C. 35 Yao, J.-h. 22 Felde, B. 61 Leising, G. 232 Rabson, T.A. 227 Yaowu, M. 266 Fernandez, M. 185 Li, C.L. 297 Ramana, C.V. 219 Yiben, X. 266 Fukarek, W. 172 Liang, M.S. 327 Reddy, PJ. 219 Yokoyama, T. 316 Garcia, M. 158, 210 Liberman, V. 26 Reichmann, K. 232 Yoshimura, S. 351 Goswami, J. 52 Lin, C. 48 Reif, R. 280 Youm, D. 304 Goto, T. 316 Lodder, C. 1 Resel, R. 232 Yuan, C.-W. 110 Gracia-Jiménez, M. 345 Lopez, G.P. 95 Rha, S.-K. 254 Yudasaka, M. 351 Gu, J.-H. 110 Robert, M. 227 Gutberlet, T. 309 Ma, D.Y. 201 Rohde, D. 164 Zabinski, J.S. 130 Malba, V. 26 Ryu, H.S. 30 Haemers, J. 358 Martinez-Duart, J.M. 185 Hippler, R. 164 Martinez-Montes, G. 345 Sadowski, G. 248 Hirschauer, B. 243 Matsui, T. 351 Sammelselg, V. 270 Hoffmann, S. 66 Matsuzawa, M. 74 Schaich, D. 61 Elsevier Science S.A. Thin Solid Films 305 (1997) 361-365 Subject Index of Volume 305 Adhesion Chemical vapor deposition (CVD) Vapor deposition of polyimide: segregation of partially reacted species Eitect of the prussme on the chemical vapor depesition of capper at the polyimid/eS i (100) interface, 26 from copper hex yl trimethylvinylsilane, 254 a-Al,O, film Chemical vapour deposition Highly oriented a-alumina films grown by pulsed laser deposition, Diamond deposition on as-anodized porous silicon: some nucleation 243 aspects, 259 Aluminium oxide Chemical vapour deposition (CVD) Dielectric properties of diamond film /alumina composites, 266 Dielectric properties of diamond film /alumina composites, 266 Amorphous materials Effects of deposition parameters on composition, structure, resistivity High performance polysilicon thin film transistors by H,O plasma and step coverage of TiN thin films deposited by electron cy- hydrogenation, 327 clotron resonance plasma-enhanced chemical vapor deposition, Anodization 103 Intense visible photoluminescence from molecular beam epitaxy Effects of reaction kinetics on the microstructure of chemical vapour porous Si,_ ,Ge, grown on Si, 274 deposited copper films: experiment and simulation, 52 Atomic force microscopy Radiation hardness of polycrystalline diamond thin films irradiated Growth and preferred crystallographic orientation of hexapheny! thin with 100 MeV I’* ions, 88 films, 232 Composition TiO, thin films formation on industrial glass through self-assembly Spectroscopic characterization of electron-beam evaporated V,O, thin processing, 110 films, 219 Atomic force microscopy (AFM) Conductivity Influence of the initial nitrogen content in titanium films on the Dopant influence on dielectric losses, leakage behaviour, and resis- nitridation and silicidation processes, 185 tance degradation of SrTiO, thin films, 66 Ohmic and space-charge limited conduction in cobalt phthalocyanine thin films, 336 Band structure A study of the optical, electrical and structural properties of reactively Copper sputtered InO, and ITO, thin films, 116 Effect of the pressure on the chemical vapor deposition of copper from copper hexafl etylac trimethylvinylsilane, 254 Barium oxide Growth of (211) BaTiO, thin films on Pt-coated Si(100) substrates by Effects of reaction kinetics on the microstructure of chemical vapour deposited copper films: experiment and simulation, 52 radio frequency magnetron sputtering, 227 Electrical control of surface electromigration damage, 286 Barium strontium titanate Copper(I) hexafluoroacetylacetonate trimethylvinylsilane [Cu(hfac Xtmvs)] On the microstructure and optical properties of Bay ;Sr, ;TiO, films, Effect of the pressure on the chemical vapor deposition of copper 30 from copper hexafl etylac trimethylvinylsilane, 254 Studies on structural and electrical properties of barium strontium titanate thin films developed by metallo-organic decomposition, Deposition 144 Eiect of the poossuse on the chemical vaper dopesition of copper Buffer and seed layer from copper hex etylac trimethylvinylsilane, 254 Influence of Al,O, diffusion barrier and PbTiO, seed layer on Deposition pressure microstructural and ferroelectric characteristics of PZT thin films Effect of the pressure on the chemical vapor deposition of copper by sol-gel spin coating method, 321 from copper hexafl etylac trimethylvinylsilane, 254 Deposition process Cadmium selenide Growth of (211) BaTiO, thin films on Pt-coated Si(100) substrates by Thermoelectric power of CdS and CdSe films deposited on vibrating radio frequency magnetron sputtering, 227 substrates, 124 Metal oxide Co and Co—Fe-—Cr films deposited on glass substrates Cadmium sulphide from a metal-organic aerosol atomised by means of ultrasonic Optical characterization of vacuum evaporated cadmium sulfide films, excitations, 210 345 Preliminary studies of thin metal oxide films prepared by deposition Template-assisted electrochemical deposition of ultrathin films of of an aerosol generated ultrasonically from aqueous nitrate solu- cadmium sulfide, 95 tions, 158 Thermoelectric power of CdS and CdSe films deposited on vibrating Pulsed laser deposition preparation and properties of SrBi,Ta,O, thin substrates, 124 films, 48 Chemical vapor deposition Template-assisted electrochemical deposition of ultrathin films of Graphite formation on Ni film by chemical vapor deposition, 351 cadmium sulfide, 95 Elsevier Science S.A. 362 Subject Index of Volume 305 Vapor deposition of polyimide: segregation of partially reacted species Fullerene at the polyimid/eS i (100) interface, 26 The (111) oriented growth of C,, films on GaAs(100) substrates, 22 Diamond Diamond deposition on as-anodized porous silicon: some nucleation Glass aspects, 259 Micropatterning of neurons using organic substrates in culture, 74 Dielectric properties of diamond film /alumina composites, 266 Grain size strengthening Radiation hardness of polycrystalline diamond thin films irradiated Tribological properties of nickel—copper multilayer film on beryllium with 100 MeV I’* ions, 88 bronze substrate, 292 Dielectric properties Graphite Dielectric properties of diamond film /alumina composites, 266 Graphite formation on Ni film by chemical vapor deposition, 351 Dopant influence on dielectric losses, leakage behaviour, and resis- Growth mechanism tance degradation of SrTiO, thin films, 66 Growth conditions of c-axis normal Y,Ba,Cu,O,, films on 20° Pulsed laser deposition preparation and properties of SrBi,Ta,O, thin tilted crystalline substrates, 304 films, 48 Dielectrics Humidity sensor On the microstructure and optical properties of Bay ;Srp ;TiO, films, Humidity sensor using planar optical waveguides with claddings of 30 various oxide materials, 330 Diffusion Evaluation of HfN thin films considered as diffusion barriers in the Indium oxide Al /HfN /Si system, 297 A study of the optical, electrical and structural properties of reactively sputtered InO, and ITO, thin films, 116 Electrical properties lon bombardment Ohmic and space-charge limited conduction in cobalt phthalocyanine Radiation hardness of polycrystalline diamond thin films irradiated thin films, 336 with 100 MeV I’* ions, 88 Electrical properties and measurements lon-exchange waveguide Dopant influence on dielectric losses, leakage behaviour, and resis- Humidity sensor using planar optical waveguides with claddings of tance degradation of SrTiO, thin films, 66 various oxide materials, 330 Pulsed laser deposition preparation and properties of SrBi,Ta,O, thin films, 48 Kinetic study Electrical resistivity Effect of the pressure on the chemical vapor deposition of copper Effect of the pressure on the chemical vapor deposition of copper from copper hexafluoroacetylacetonate trimethylvinylsilane, 254 from copper hexafluoroacetylacetonate trimethylvinylsilane, 254 Electrochemistry Langmuir—Blodgett films Electrochemical properties of sol-gel deposited vanadium pentoxide films, 80 Does the tail-to-head molecular arrangement exist in asymmetrically deposited fatty acid alkylester Langmuir—Blodgett multilayers?, Template-assisted electrochemical deposition of ultrathin films of 309 cadmium sulfide, 95 Template-assisted electrochemical deposition of ultrathin films of Electrodeposition cadmium sulfide, 95 Tribological properties of nickel—copper multilayer film on beryllium Langmuir—Blodgett films (LB films) bronze substrate, 292 Ag” ion sensing by the polymer Langmuir—Blodgett films containing Electromigration l-aza-15-crown 5-ether group, 316 Electrical control of surface electromigration damage, 286 Laser ablation Electron microscopy Characterization of air-annealed, pulsed laser deposited ZnO—-WS, Growth and preferred crystallographic orientation of hexapheny! thin films, 232 solid film lubricants by transmission electron microscopy, 130 Epitaxy Highly oriented a-alumina films grown by pulsed laser deposition, 243 Ex situ wafer surface cleaning by HF dipping for low temperature On the microstructure and optical properties of Bay ;Sr, ;TiO, films, silicon epitaxy, 280 30 Growth conditions of c-axis normal Y,Ba,Cu,O,; films on 20° Pulsed laser deposition preparation and properties of SrBi,Ta,O, thin tilted crystalline substrates, 304 films, 48 Evaporation Lattice match Optical characterization of vacuum evaporated cadmium sulfide films, The (111) oriented growth of C, films on GaAs(100) substrates, 22 345 Fatigue behavior MBE-SiGe Influence of Al,O, diffusion barrier and PbTiO, seed layer on Intense visible photoluminescence from molecular beam epitaxy microstructural and ferroelectric characteristics of PZT thin films porous Si,_ Ge, grown on Si, 274 by sol-gel spin coating method, 321 Metallo-organic decomposition Ferroelectrics Studies on structural and electrical properties of barium strontium Influence of Al,O, diffusion barrier and PbTiO, seed layer on titanate thin films developed by metallo-organic decomposition, microstructural and ferroelectric characteristics of PZT thin films |44 by sol-gel spin coating method, 321 Microstructure Fourier transform infrared spectroscopy Effect of the pressure on the chemical vapor deposition of copper Vapor deposition of polyimide: segregation of partially reacted species from copper hexafluoroacetylacetonate trimethylvinylsilane, 254 at the polyimid/eS i (100) interface, 26 Effects of reaction kinetics on the microstructure of chemical vapour Friction and wear deposited copper films: experiment and simulation, 52 Tribological properties of nickel—copper multilayer film on beryllium On the microstructure and optical properties of Bay ;Sr, ;TiO, films, bronze substrate, 292 30 Subject Index of Volume 305 Mobility coalescence Oxidation The effect of substrate vibration on mobility coalescence in silver Characterization of air-annealed, pulsed laser deposited ZnO-WS, island films, 196 solid film lubricants by transmission electron microscopy, 130 Monolayers Oxide cladding Micropatterning of neurons using organic substrates in culture, 74 Humidity sensor using planar optical waveguides with claddings of Monte Carlo simulation various oxide materials, 330 Effects of reaction kinetics on the microstructure of chemical vapour Oxides deposited copper films: experiment and simulation, 52 Dopant influence on dielectric losses, leakage behaviour, and resis- Multilayer film tance degradation of SrTiO, thin films, 66 Tribological properties of nickel—copper multilayer film on beryllium On the microstructure and optical properties of Bay <Srp ;TiO, films, bronze substrate, 292 30 Multilayer interface Tribological properties of nickel—copper multilayer film on beryllium P-E hysteresis bronze substrate, 292 Influence of Al,O, diffusion barrier and PbTiO, seed layer on Multilayers microstructural and ferroelectric characteristics of PZT thin films Does the tail-to-head molecular arrangement exist in asymmetrically by sol-gel spin coating method, 321 deposited fatty acid alkylester Langmuir—Blodgett multilayers”, Phase transitions 309 Second harmonic generation and scanning tunnelling /atomic-force Evaluation of HfN thin films considered as diffusion barriers in the microscopy studies of tungsten-doped, amorphous-carbon films, Al/HfN /Si system, 297 341 Photoluminescence Nickel Intense visible photoluminescence from molecular beam epitaxy Graphite formation on Ni film by chemical vapor deposition, 351 porous Si,_ ,Ge, grown on Si, 274 Nitrides Physical vapour deposition Evaluation of HfN thin films considered as diffusion barriers in the Growth and preferred crystallographic orientation of hexaphenyl thin Al/HEN /Si system, 297 films, 232 Nucleation Thermoelectric power of CdS and CdSe films deposited on vibrating Diamond deposition on as-anodized porous silicon: some nucleation substrates, 124 aspects, 259 Plasma processing and deposition Effects of deposition parameters on composition, structure, resistivity Oblique evaporation and step coverage of TiN thin films deposited by electron cy- Oblique evaporation and surface diffusion, | clotron resonance plasma-enhanced chemical vapor deposition, Optical coatings 103 A study of the optical, electrical and structural properties of reactively High performance polysilicon thin film transistors by H,O plasma sputtered InO, and ITO, thin films, 116 hydrogenation, 327 Metal oxide Co and Co—Fe—Cr films deposited on glass substrates Plasma spraying from a metal-organic aerosol atomised by means of ultrasonic Splat formation and cooling of plasma-sprayed zirconia, 35 excitations, 210 Plasmons Preliminary studies of thin metal oxide films prepared by deposition Plasmon excitation in vanadium dioxide films, 61 of an aerosol generated ultrasonically from aqueous nitrate solu- Polymers tions, 158 Ag” ion sensing by the polymer Langmuir—Blodgett films containing Optical properties |-aza-15-crown 5-ether group, 316 Effect of crystal structure on optical properties of TiO, films grown Vapor deposition of polyimide: segregation of partially reacted species by atomic layer deposition, 270 at the polyimid/eS i (100) interface, 26 Metal oxide Co and Co—Fe—Cr films deposited on glass substrates Porous SiGe from a metal-organic aerosol atomised by means of ultrasonic Intense visible photoluminescence from molecular beam epitaxy excitations, 210 porous Si,_ ,Ge, grown on Si, 274 On the microstructure and optical properties of Bay <Sr, <TiO, films, Pulsed laser deposition 30 Highly oriented a-alumina films grown by pulsed laser deposition, Optical and structural properties of reactive ion beam sputter de- 243 posited CeO, films, 191 On the microstructure and optical properties of Bay <Sr, ;TiO, films, Optical characterization of vacuum evaporated cadmium sulfide films, #» 345 Pyrolysis Preliminary studies of thin metal oxide films prepared by deposition Metal oxide Co and Co—Fe—Cr films deposited on glass substrates of an aerosol generated ultrasonically from aqueous nitrate solu- from a metal-organic aerosol atomised by means of ultrasonic tions, 158 excitations, 210 Optical spectroscopy Preliminary studies of thin metal oxide films prepared by deposition Electrochemical properties of sol-gel deposited vanadium pentoxide of an aerosol generated ultrasonically from aqueous nitrate solu- films, 80 tions, 158 Organic substances PZT Growth and preferred crystallographic orientation of hexapheny! thin Influence of Al,O, diffusion barrier and PbTiO, seed layer on films, 232 microstructural and ferroelectric characteristics of PZT thin films Micropatterning of neurons using organic substrates in culture, 74 by sol-gel spin coating method, 321 Ohmic and space-charge limited conduction in cobalt phthalocyanine thin films, 336 Radiation damage Oriented growth Radiation hardness of polycrystalline diamond thin films irradiated The (111) oriented growth of C, films on GaAs(100) substrates, 22 with 100 MeV I’* ions, 88 364 Subject Index of Volume 305 Raman scattering Surface morphology Optical and structural properties of reactive ion beam sputter de- Second harmonic generation and scanning tunnelling /atomic-force posited CeO, films, 191 microscopy studies of tungsten-doped, amorphous-carbon films, 341 Temperature dependence Highly oriented a-alumina films grown by pulsed laser deposition, Scanning tunnelling microscopy (STM) 243 Second harmonic generation and scanning tunnelling /atomic-force Thin film deposition microscopy studies of tungsten-doped, amorphous-carbon films, Thin film deposition by reactive magnetron sputtering: On the influ- 341 ence of target oxidation and its effect on surface properties, 164 Second harmonic generation (nth HG) Titanium nitride Second harmonic generation and scanning tunnelling /atomic-force Effects of deposition parameters on composition, structure, resistivity microscopy studies of tungsten-doped, amorphous-carbon films, and step coverage of TiN thin films deposited by electron cy- 341 clotron resonance plasma-enhanced chemical vapor deposition, Sensors 103 Ag* ion sensing by the polymer Langmuir—Blodgett films containing Influence of the initial nitrogen content in titanium films on the l-aza-15-crown 5-ether group, 316 nitridation and silicidation processes, 185 Silicides Titanium oxide Influence of the initial nitrogen content in titanium films on the Effect of crystal structure on optical properties of TiO, films grown nitridation and silicidation processes, 185 by atomic layer deposition, 270 Silicon Transmission electron microscopy Ex situ wafer surface cleaning by HF dipping for low temperature Characterization of air-annealed, pulsed laser deposited ZnO-WS, silicon epitaxy, 280 solid film lubricants by transmission electron microscopy, 130 High performance polysilicon thin film transistors by H,O plasma Ex situ wafer surface cleaning by HF dipping for low temperature hydrogenation, 327 silicon epitaxy, 280 Silver Tribology Ag” ion sensing by the polymer Langmuir—Blodgett films containing Characterization of air-annealed, pulsed laser deposited ZnO-WS, 1-aza-15-crown 5-ether group, 316 solid film lubricants by transmission electron microscopy, 130 Silver island films The effect of substrate vibration on mobility coalescence in silver Vanadium dioxide island films, 196 Plasmon excitation in vanadium dioxide films, 61 Sol-gel Vanadium oxide Influence of Al,O, diffusion barrier and PbTiO, seed layer on Electrochemical properties of sol-gel deposited vanadium pentoxide microstructural and ferroelectric characteristics of PZT thin films films, 80 by sol-gel spin coating method, 321 V,0O, thin films Splat formation Spectroscopic characterization of electron-beam evaporated V,O, thin Splat formation and cooling of plasma-sprayed zirconia, 35 films, 219 Sputtering Evaluation of HfN thin films considered as diffusion barriers in the Al/HfN /Si system, 297 Water Growth of( 211) BaTiO, thin films on Pt-coated Si(100) substrates by High performance polysilicon thin film transistors by H,O plasma radio frequency magnetron sputtering, 227 hydrogenation, 327 Optical and structural properties of reactive ion beam sputter deposited CeO, films, 191 XPS Structural properties Highly oriented a-alumina films grown by pulsed laser deposition, A study of the optical, electrical and structural properties of reactively 243 sputtered InO, and ITO, thin films, 116 X-ray photoelectron spectroscopy (XPS) Does the tail-to-head molecular arrangement exist in asymmetrically Thin film deposition by reactive magnetron sputtering: On the influ- deposited fatty acid alkylester Langmuir—Blodgett multilayers?, ence of target oxidation and its effect on surface properties, 164 309 X-ray diffraction Effect of crystal structure on optical properties of TiO, films grown Does the tail-to-head molecular arrangement exist in asymmetrically by atomic layer deposition, 270 deposited fatty acid alkylester Langmuir—Blodgett multilayers?, Optical and structural properties of reactive ion beam sputter de- 309 posited CeO, films, 191 Growth and preferred crystallographic orientation of hexapheny! thin Structure and optical properties films, 232 Spectroscopic characterization of electron-beam evaporated V,O, thin Growth conditions of c-axis normal Y,Ba,Cu,O,., films on 20° films, 219 tilted crystalline substrates, 304 Superconductivity Growth of (211) BaTiO, thin films on Pt-coated Si(100) substrates by Growth conditions of c-axis normal Y,Ba,Cu,0,_, films on 20° radio frequency magnetron sputtering, 227 tilted crystalline substrates, 304 Highly oriented a-alumina films grown by pulsed laser deposition, Surface and interface states 243 Ex situ wafer surface cleaning by HF dipping for low temperature Influence of the initial nitrogen content in titanium films on the silicon epitaxy, 280 nitridation and silicidation processes, 185 Surface diffusion Optical and structural properties of reactive ion beam sputter de- Electrical control of surface electromigration damage, 286 posited CeO, films, 191 Oblique evaporation and surface diffusion, | The (111) oriented growth of C, films on GaAs(100) substrates, 22 Subject Index of Volume 305 365 Thermoelectric power of CdS and CdSe films deposited on vibrating Micropatterning of neurons using organic substrates in culture, 74 substrates, 124 TiO, thin films formatioonn industrial glass through self-assembly X-ray photoelectron spectroscopy processing1,1 0 Electrochemical properotf isoel-sge l deposited vanadium pentoxide Zirconia films,8 0 Splat formation and cooling of plasma-spzriracoyniea,d 3 5