Thin-Film Diamond II

411 Pages·2004·27.586 MB·English

by  Christoph E. Nebel and Jürgen Ristein (Eds.)

Thin-Film Diamond II
SEMICONDUCTORS
AND SEMIMETALS
Volume 77
Semiconductors and Semimetals
A Treatise
Edited by R.K. Willardson Eicke R. Weber
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Thin-Film Diamond 11
SEMICONDUCTORS
AND SEMIMETALS
Volume 77
CHRISTOPH E. NEBEL
Physics Department/Walter Schottky Institute
Technische Universit/it Mtinchen
Garching, Germany
JURGEN RISTEIN
Institute for Technical Physics
University of Erlangen-Nuernberg
Erlangen, Germany
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Contents
LIST OF CONTRIBUTORS xi
PREFACE xiii
Chapter 1 Hydrogen Diffusion and Acceptor Passivation
in Diamond
Jacques Chevallier
1. INTRODUCTION 1
2. HYDROGEN INCORPORATION IN DIAMOND AND ANALYSIS 2
2.1. Incorporation 2
2.2. Analysis 3
3. LOCATIONSA ND CHARGE STATES OF HYDROGEN 4
4. DIFFUSION PROPERTIES OF HYDROGEN IN MONOCRYSTALLINE DIAMOND 6
4.1. p-Type Boron-doped 7
4.2. The Case of n-Type 16
5. PASSIVATIONO F BORON ACCEPTORS BY HYDROGEN 17
6. MODEL FOR THE FORMATION OF (B,H) PAIRS 22
7. THERMAL STABILITY OF (B,H) PAIRS AND HYDROGEN 25
8. CONCLUSION 31
ACKNOWLEDGEMENTS 32
REFERENCES 32
Chapter 2 Structural and Electronic Properties 37
of Diamond Surfaces
Jiirgen Ristein
1. INTRODUCTION 37
2. SURFACER ECONSTRUCTIONS AND SURFACE STATES 39
2.1. The Diamond (lO0) Surface 40
2.2. The Diamond (111) Surface 44
2.3. The Diamond (11 O) Surface 48
2.4. Hydrocarbon Contaminants of Diamond Surfaces 50
2.5. Summary of Reconstructions and Surface States 52
vi Contents
3. THE ELECTRON AFFINITY OF DIAMOND SURFACES 52
3.1. The General Concept: Band Bending vs. Electron Affinity Changes 52
3.2. The Influence of Adsorbates on the Electron Affinity
of Diamond Surfaces 55
3.3. Summary: The Electron Affinity of Diamond Surfaces 61
4. SURFACEB AND BENDING 61
4.1. General Concept 61
4.2. Hole Depletion Layers on p-Type Diamond 65
4.3. Hole Accumulation Layers on Intrinsic Diamond 75
4.4. Summary: Surface Band Bending 81
5. HYDROGEN-INDUCEDS URFACE CONDUCTIVITY 82
5.1. Experimental Observations 82
5.2. The Electrochemical Surface Transfer Doping Model 87
5.3. Summary: Hydrogen-induced Surface Conductivity 92
ACKNOWLEDGEMENTS 93
REFERENCES 93
Chapter 3 Electrochemistry of Diamond
97
John C. Angus, Yuri V. Pleskov and Sally C. Eaton
1. HISTORYO F ELECTROCHEMISTRY ON DIAMOND 97
2. GENERALP ROPERTIES OF DIAMOND ELECTRODES 98
2.1. Surface Termination 98
2.2. Reactivity 100
2.3. Doping 101
2.4. Related Materials 102
3. SEMICONDUCTINGE LECTRODES 102
3.1. Basic Principles 102
3.2. Surface Conductivity 105
4. ELECTROCHEMICALC HARACTERIZATION OF DIAMOND FILMS 106
4.1. Electrical Double Layer Structure and Differential Capacitance:
Mott-Schottky Plots 106
4.2. Photoelectrochemical Characterization 109
4.3. Impedance-Spectroscopy Characterization 112
5. SUMMARY 114
ACKNOWLEDGEMENTS 115
REFERENCES 115
Chapter 4 Electroanalytical Applications
121
of Diamond Electrodes
Greg M. Swain
1. INTRODUCTION 121
2. BASICSO F ELECTROCHEMICAL MEASUREMENTS 121
3. DIAMONDE LECTRODE ARCHITECTURES, SUBSTRATE MATERIALS,
AND ELECTROCHEMICAL CELLS 123
4. BASICE LECTROCHEMICALP ROPERTIES OF MICROCRYSTALLINE
DIAMOND THIN-FILM ELECTRODES 128
Contents vii
5. BASIC ELECTROCHEMICAL PROPERTIES OF NANOCRYSTALLINE
DIAMOND THIN-FILM ELECTRODES 133
6. SPECTROELECTROCHEMISTRY 136
7. ELECTROANALYTICALA PPLICATIONS 137
7.1. Azide Detection 138
7.2. Aliphatic Polyamine Detection 139
7.3. Trace Metal Ion Analysis 140
7.4. Nitrite Detection 141
7.5. NADH Detection 141
7.6. Uric Acid Detection 142
7.7. Histamine and Serotonin Detection 142
7.8. Direct Electron Transfer to Heme Peptide and Peroxidase 143
7.9. Carbamate Pesticide Detection 144
8. CONCLUSIONS 144
ACKNOWLEDGEMENTS 145
REFERENCES 145
Chapter 5 Industrial Applications of Diamond Electrodes 149
Werner Haenni, Philippe Rychen, Matthyas Fryda
and Christos Comninellis
1. DIAMONDE LECTRODES: SPECIFICATION 149
1.1. Introduction 149
1.2. Substrates for Diamond Electrodes 150
1.3. Active Electrode Layer 155
2. FABRICATIONM ETHOD 159
2.1. Large-scale Fabrication of BDD Electrodes 159
2.2. Characterization, Testing and Quality Control 162
3. MICROANALYSISW ITH DIAMOND ELECTRODES 164
3.1. Introduction 164
3.2. Microelectrodes for Trace Material Analysis 164
3.3. Electrodes for Electric Field Measurements in Geophysical
Environments 166
4. ELECTROCHEMICALR EACTORS FOR SYNTHESIS AND WATER TREATMENT 167
4.1. Introduction 167
4.2. Monopolar Mesh Reactor 167
4.3. Modular Electrochemical Reactor: DiaCell | 168
5. ELECTROSYNTHESISO F ORGANICS AND OXIDANTS 171
5.1. Introduction 171
5.2. Electroorganic Synthesis Using BDD Anode 171
5.3. Preparation of Powerful Oxidants 174
5.4. Other Potential Applications 179
6. APPLICATIONO F BDD ELECTRODES IN WATER TREATMENT 182
6.1. Introduction 182
6.2. Electrochemical Treating of Waste Water Containing Organic Pollutants 182
6.3. Electrochemical Treatment of Waste Water Containing Cyanides 191
6.4. Disinfection of Swimming Pool Water 192
ACKNOWLEDGEMENTS 194
REFERENCES 194
viii Contents
Chapter 6 Diamond-based Radiation and Photon Detectors 197
Philippe Bergonzo and Richard B. Jackman
1. INTRODUCTION 197
1.1. Properties of Diamond for Radiation Detection 197
1.2. Resilience of Diamond to Harsh Environments 199
1.3. Applications for Diamond-based Detectors 200
2. FUNDAMENTALS 203
2.1. Charge Generation Principles 203
2.2. Detection Modes 205
2.3. Device Fabrication 207
2.4. An Example of a Diamond-based Structure: Alpha-detection 208
2.5. Problems in the Use of Natural Diamond 210
2.6. CVD Thin Film Diamond for Detector Applications 217
3. INFLUENCEO F DEFECTS ON DETECTOR PERFORMANCE 221
3.1. Nature of Defects in Diamond 221
3.2. Intrinsic and Extrinsic Photoconductivity 225
3.3. Passivating Defects Within CVD Diamond Films for UV Detector Applications 227
3.4. Improved CVD Films for Other Detector Applications 242
4. THE EFFECT OF THE POLYCRYSTALLINE NATURE OF CVD DIAMOND 246
4.1. Mapping Device Sensitivity 246
4.2. Large Grain CVD Films 247
5. APPLICATIONT O PHOTODETECTION 250
5.1. Principles of Detection 250
5.2. Photoconductive Devices 252
5.3. Imaging Arrays 261
5.4. Photodiodes 267
5.5. Phototransistors 271
5.6. Application to Deep UV Laser-based Stepper Tools for Photolithography 276
5.7. Photoconductive Device Tolerance to High Deep UV Flux Levels 281
5.8. Application to X-ray and Synchrotron Beam Metrology 290
5.9. Fast Pulse Metrology 292
6. APPLICATIONT O RADIATION DETECTION 294
6.1. Diamond Resilience 294
6.2. Applications Addressing Detection in the Nuclear Industry 295
7. CONCLUDINGR EMARKS 300
ACKNOWLEDGEMENTS 302
REFERENCES 303
Chapter 7 Diamond Field Effect Transistors Using 311
H-Terminated Surfaces
Hiroshi Kawarada
l. INTRODUCTION--DIAMONDE LECTRONICS 311
2. SURFACE ELECTRIC PROPERTIES OF DIAMOND AND THE STRUCTURE OF
SURFACE CHANNEL FETs 312
3. Low SCHOTTKY BARRIER HEIGHTS ON H-TERMINATED DIAMOND 316
4. ACCEPTORA ND CARRIER DISTRIBUTIONS UNDER THE H-TERMINATED SURFACES 320
5. HIGH-FREQUENCYO PERATION OF DIAMOND FETs 323
Contents ix
6. ELECTROLYTE-SOLUTION-GATED IAMOND FIELD EFFECT TRANSISTOR 328
7. NANODEVICEF ORMATION BY LOCAL OXIDATION OF DIAMOND 332
8. SUMMARY 335
REFERENCES 336
Chapter 8 Diamond Surface Acoustic Wave Device 339
Shinichi Shikata and Hideaki Nakahata
1. INTRODUCTION 339
2. SAW DEVICE AND DIAMOND SAW 339
3. BASIC SAW PARAMETERS 340
3.1. SA W Parameters and Their Evaluation 340
3.2. SAW Parameters in Layered Structures with Diamond 342
4. CHARACTERISTICSO F DIAMOND SAW DEVICES 346
5. DIAMONDW AFER TECHNOLOGY AND FABRICATION PROCESS 348
5.1. Diamond Wafer Technology 348
5.2. Fabrication Process 350
6. APPLICATIONS 352
6.1. Narrow Band Filters and Resonators 352
6.2. Wireless Applications 356
6.3. Reliability 357
7. SUMMARY 357
REFERENCES 358
INDEX 359
CONTENTS OF VOLUMES IN THIS SERIES 373