OTHER TITLES IN THE SERIES IN THE SCIENCE OF THE SOLID STATE VOL. 1. GREENAWAY AND HARBEKE—Optical Properties and Band Structures of Semiconductors. VOL. 2. RAY—II-VI Compounds. VOL. 3. NAG—Theory of Electrical Transport in Semiconductors. VOL. 4. JARZEBSKI—Oxide Semiconductors. VOL. 5. SHARMA and PUROHIT—Semiconductor Heterojunctions. VOL. 6. PAMPLIN—Crystal growth. TERNARY CHALCOPYRITE SEMICONDUCTORS: GROWTH, ELECTRONIC PROPERTIES, AND APPLICATIONS J. L SHAY BELL TELEPHONE LABORATORIES, INCORPORATED HOLMDEL, NEW JERSEY 07733 AND J. H. WERNICK BELL TELEPHONE LABORATORIES, INCORPORATED MURRAY HILL, NEW JERSEY 07974 P E R G A M ON P R E SS OXFORD · NEW YORK · TORONTO · SYDNEY · PARIS · BRAUNSCHWEIG U.K. Pergamon Press Ltd., Headington Hill Hall, Oxford OX3 OBW, England U.S.A. Pergamon Press Inc., Maxwell House, Fairview Park, Elmsford, New York 10523, U.S.A. CANADA Pergamon of Canada Ltd., 207 Queen's Quay West, Toronto 1, Canada AUSTRALIA Pergamon Press (Aust.) Pty. Ltd., 19a Boundary Street, Rushcutters Bay, N.S.W. 2011, Australia FRANCE Pergamon Press SARL, 24 rue des Ecoles, 75240 Paris, Cedex 05, France WEST GERMANY Pergamon Press GmbH-3300 Braunschweig, Postfach 2923, Burgplatz 1, West Germany Copyright © 1975 Bell Telephone Laboratories Incorporated All Rights Reserved. No part of this publication may be reproduced, stored in a retrieval system or transmitted in any form or by any means: electronic, electrostatic, magnetic tape, mechanical, photocopying, recording or otherwise, without permission in writing from the publishers First edition 1975 Library of Congress Cataloging in Publication Data Shay, Joseph Leo, 1942- Ternary chalcopyrite semiconductors growth, electronic properties, and applications. (International series of monographs in the science of the solid state, v. 7) Includes bibliographies. 1. Semiconductors. 2. Chalcopyrite crystals. 3. Crystals-Growth. 4. Energy-band theory of solids. I. Wernick, Jack Harry, 1923-joint author. Π. Title. QC611.8.C45S52 1975 537.6'22 74-5763 ISBN 0-08-017883-9 Printed in Great Britain by A.Wheaton & Co., Exeter ACKNOWLEDGMENTS This book probably would never have been written without the efforts of several indi- viduals over the last few years. P. A. Wolff, A. G. Chynoweth and C. Κ. N. Patel have encouraged and supported our own research, and provided helpful suggestions and ad- vice. Our colleagues, K. Bachmann, Ε. Buehler, G. Boyd, H. Kasper and Β. Tell, have contributed enormously to our understanding of ternary chalcopyrite semiconductors. The cooperation of our secretaries, Miss Susan Feyerabend and Miss M. P. Reitter, in typing the several drafts of the manuscript is gratefully appreciated. EDITORS PREFACE THE diamond structure is one of the simplest and most symmetrical arrangements of atoms known in crystallography. Only the two important semiconducting elements, Si and Ge, habitually crystallize in this structure and their commercial importance can be traced back to this fact. The four electron per site rule, which can be deduced from the Grimm-Sommerfeld rule of chemical bonding, can account for their semiconducting and doping properties and the strength of the bonding down from diamond through Si and Ge to grey Sn can account for the change in energy gap and thermal conductivity. The rule can also be used to predict semiconductivity in a vast family of compounds related to diamond which is variously called the tetrahedral or adamantine or simply diamond-like family. The latter name does not strictly include the structures derived from wurtzite which I feel are in this family, because every anion is bonded tetrahedrally to four cations and every cation to four anions. As one proceeds from the group IV elements to the III-V and II-VI compounds new properties become available for study and exploitation. A wider choice of energy gaps and band structure enables devices depending on larger and sometimes direct energy gaps (like light-emitting diodes and heterojunction lasers) or on high mobilities (like Hall effect and magnetoresistance devices) to be made which cannot be made with the elements. Some completely new devices like those based on the Gunn Effect also become possible. Moving on to ternary compounds the choice becomes wider still and the drop in symmetry due to superlattice formation opens the way for non-linear devices and inter- esting optical properties. This book deals with the two most interesting ternary cousins of the tetrahedral family. The I-III-VI and the II-IV-V compounds, when they form, usually have the chal- 2 2 copyrite structure and fifty such compounds are now known. It is interesting to note that no antichalcopyrite compounds (e. g. of the families III -IV-VI II -V-VII) have been 2 2 found to exist in spite of many attempts to make them. These materials are now perhaps in the same state that the III-V compounds reached ten years ago. The preliminary work has been done on many of them and the door is open for applications, but a great deal of scientific and technological development particularly in crystal growth, characteri- zation, detailed band structure studies and device exploitation remains to be done. I welcome this book which provides a timely and thorough summary of the work done and pointers to the future. Chalcopyrite itself was known many years before semiconduction in the elements was discovered. Its crystal structure was the subject of an early controversy in crystallography. Burdick and Ellis (1917) proposed a unit cell based on a tetragonally distorted diamond unit cell. Fifteen years later Pauling and Brockway using single crystals confirmed the now generally accepted body centred tetragonal structure with a unit cell twice the size. The Burdick and Ellis structure is a possible superlattice structure for a tetrahedral A-B-C compound and may yet be found to exist if people will look for it. Chalcopyrite 2 is antiferromagnetic and is one of only a very small number of magnetic tetrahedral semiconductors. la OXS ix Early work on these compounds was performed out of purely scientific interest, this was spurred on in the early sixties by the hope of thermoelectric applications. These materials have very low lattice thermal conductivities, which for many devices is a disadvantage. Some, like CdSnAs, have remarkably high mobilities. It was hoped that 2 one member of the family would be found, chemically stable and cheap to produce, which might have a sufficiently high figure of merit to enable it to be developed for the one-in-every-home or one-in-every-cav mass market for refrigerators or battery chargers. However it soon became clear that this dream was not be be realized and some steam went out of the drive for new compounds. Careful scientific work continued and application-minded scientists watched the devel- opment of work in the III-V and II-VI compounds on light-emitting junctions and heterojunctions, Gunn effect devices and acoustooptical effects, and on magnetic semi- conductors and amorphous materials. As this book reports, all these topics can be studied in the ternary compounds. But pessimists will argue that such studies are admirable topics to amuse academic workers and PhD students but unlikely to prove of commercial interest because of the technological difficulties inherent in three element semiconduc- tors. They said the same about GaAs-AlAs alloys ten years ago ! The authors have drawn out the present state of possible applications of these com- pounds for optical communications systems as infrared- or visible light-emitting materials and for use with other lasers as pumps or up convertors. There may be a break-through in the far infrared by down conversion or spin flip action or in the blue or ultraviolet region using some of the newly discovered nitrides. Again the peculiar non-linear pro- perties of these compounds may have an application round the corner in some electrical device—who knows what hot electron effects may be found in tetragonal materials with pseudo-direct gaps or how phonon interactions may be affected. The First International Conference on Ternary Chalcopyrite Semiconductors was held at Bath in November 1973. Over seventy participants from eight countries reported on and discussed these compounds and their properties. I hope this book will be available for participants at the Second Conference in Strasbourg in 1975.1 am writing these notes a few days after returning from a six-week lecture and study tour of Japanese semicon- ductor laboratories under the auspices of the Royal Society. I can report great interest in these materials both in Japan and at the international conference and school on crystal growth held there this spring. I am sure that this admirable book by two eminent workers in the field, who make such a splendid matched pair in their diverse yet overlapping interests, and who work at the leading semiconductor research laboratory in the world, will be read with close interest by a wide variety of scientific workers and used as a Bible by workers in the fields of ternary compounds and non-linear optics. I am sure it will stimulate much further work. B.R.P. CHAPTER 1 I N T R O D U C T I ON ALTHOUGH many binary and ternary naturally occurring compounds were known to exhibit behavior now associated with semiconductors long before the invention of the transistor, it was this development that stimulatedsystematic searches for new semiconduc- tors in the early 1950s. The first materials investigated in this manner were the III-V compounds which exhibit the diamond structure. Blum et al. (1950) and Goryunova and Obukhov (1950) reported InSb to be a semiconductor, but it appears that Welker (1952) was the first to appreciate the importance of the III-V compounds as a class of new semiconductors. High carrier mobilities and the ability to dope n- and /?-type were properties investigators strived for. A natural extension in the search for new semiconductors was to examine ternary compounds exhibiting diamond-like or tetrahedral coordination, and Goodman and Douglas (1954) discussed the possibility of semiconductivity in the I-III-VI compounds 2 synthesized a year earlier by Hahn et al (1953). Goodman (1957) further showed that by ordered substitution of Groups II and IV atoms for the Group III atoms in the III-V compounds, new ordered semiconducting II-IV-V compounds could be pre- 2 pared. Although only two or three of the II-IV-V compounds exhibited electron mobilities 2 of a few thousand, the II-IV-V and I-III-VI compounds, and in particular, solid 2 2 solutions of them with their III-V and II-VI analogs, were investigated from the thermo- electric standpoint. For utility as practical thermoelectric materials, high-quality single crystals generally are not required. The discovery of the laser and the interest in light-emitting materials in the late 1950s and early 1960s stimulated renewed effort in these materials, particularly by the Russian workers. Studies aimed towards understanding the electronic structure and elucidating the nonlinear optical properties of these materials, with the hope of produc- ing a technological material, require high quality single crystals. Many of these materials are difficult to grow in the form of large, high quality crystals, and it has only been within the past few years that researchers have been successful in this effort. Ternary chalcopyrite crystals are currently of technological interest since they show promise for application in the areas of visible and infrared light-emitting diodes, infrared detectors, optical parametric oscillators, upconverters, and far infrared generation. It has been discovered that several ternary compounds can be obtained both p- and «-type. In addition it has been found that two of them, CuGaS and CuAlS, can be made 2 2 /7-type and have direct bandgaps in the visible and ultraviolet respectively. They are unique in this respect, and have generated activity in the area of heterojunctions with large bandgap II-VI compounds, which can only be obtained «-type. Infrared light- emitting diodes have been prepared by epitaxial growth of CdSnP on InP. 2 By virtue of the noncubic crystal structure, these compounds are optically biré- fringent, and therefore nonlinear optical interactions can be phase-matched. Further- la* 1 TERNARY CHALCOPYRITE SEMICONDUCTORS more, these compounds are covalently bonded to a large extent, so that they have large nonlinear coefficients, a measure of their usefulness as nonlinear optical materials. These compounds are also of interest from a fundamental point of view since the chalcopyrite structure is the simplest, noncubic ternary analog of the well-understood binary zincblende structure. It has been found that the energy band structure of ternary crystals differs from that of binary compounds in several nontrivial ways by virtue of the noncubic structure. Degeneracies are lifted, and forbidden electronic transitions become allowed. Whereas the valence bands of most zincblende crystals are composed of s- and /?-like orbitals, the noble metal ^-levels in I-III-VI compounds hybridize 2 with the otherwise s- and /?-like orbitals, and lead to several anomalous features of the energy band structure. In Chapter 2 we review the crystal growth of II-IV-V and I-III-VI single crystals. 2 2 In Chapters 3 and 4 we review studies of the electronic structure of II-IV-V and 2 I-III-VI compounds respectively. And in Chapters 5-8 we review the luminescence, 2 nonlinear optical, electrical properties, and miscellaneous physical properties of chalco- pyrite crystals. References BLUM, A. N., MOKROVSKI, N. P., and REGEL, A. R. (1950) Seventh All-union Conference on the Pro- perties of Semiconductors, Kiev. GOODMAN, C. H. L. (1957) Nature 179, 828. GOODMAN, C. H. L., and DOUGLAS, R. W. (1954) Physica 20, 1107. GORYUNOVA, Ν. Α., and OBUKHOV, A. P. (1950) Seventh All-union Conference on the Properties of Semi- conductors, Kiev. HAHN, Η., FRANK, G., KINGLER, W., MEYER, Α., and STORGER, G. (1953) Z. anorg. Chem. 271, 153. WELKER, Η. (1952) Z. Naturforsch. 11, 744. 2 CHAPTER 2 THE CHALCOPYRITE STRUCTURE A ND CRYSTAL G R O W TH 2.1 The Chalcopyrite Structure The I-III-VI and II-IV-V (ABC ) phases possess the tetragonal El structure-type 2 2 2 x space group ÏAld, with four formula units per cell.f The known phases exhibiting this structure are tabulated in Tables 2.1 and 2.2. Each A- and B-atom is tetrahedrally co- ordinated to four C-atoms, while each C-atom is tetrahedrally coordinated to two A- and two B-atoms in an ordered manner (Fig. 2.1). The atomic distribution is as follows: equivalent position j 000 ; 4A in (a) positions, 000; 0 4B in (b) positions, 00 — ; 0 8C in (d) positions, χ ; χ ; — χ — ; — χ — w F 48 48 4 8 3 8 If the cations A and Β were distributed at random, the cubic zincblende structure would result. Thus the chalcopyrite structure is a superlattice of the zincblende structure with the c\a ratio approximately equal to 2. The tetrahedral coordination implies that the bonding is primarily covalent with sp3 hybrid bonds prevalent, although there is some ionic character present because the atoms are different. The I-III-VI and II-IV-V compounds can be regarded as the ternary analogs of 2 2 the II-VI and III-V binary compounds respectively. They can be derived from the binary phases by ordered substitution of other group atoms so as to maintain an elec- tron-to-atom ratio of 4. The derivation of these phases from the pure covalent crystals, Si and Ge, is schematically illustrated in Fig. 2.2. The ordered arrangement of the metal atoms (or cations) leads to the formation of the tetragonal superlattice. The quantity 2—c\a is a measure of the tetragonal distortion which may occur as a result of ordering. The x-parameter which precisely locates the C-atom position, depends on the difference between the A-C and B-C interactions. Since 2—cja is greater than zero for most II-IV-V compounds, χ greater than 0.25 (the value for the 2 cubic zincblende structure) represents a motion of the V-atom toward the IV-atom and away from the column II atom. t The prototype phase is the mineral chalcopyrite, CuFeS. 2 J Add the coordinates of the equivalent positions to the coordinates of the a, b, and d sites to obtain the coordinates of all of the atoms. 3 TERNARY CHALCOPYRITE SEMICONDUCTORS TABLE 2.1. Lattice Parameters for I-HI-VI2 Compounds β (A) c(A) c/a References CuAlS 5.323 10.44 1.96 a 2 5.312 10.42 1.96 b 5.31 10.41 1.96 e 5.336 10.444 1.958 1 CuAlSe 5.617 10.92 1.94 a 2 5.60 10.90 1.95 b 5.60 10.86 1.94 e 5.6035 10.977 1.959 m CuAlTe 5.967 11.80 1.97 a 2 5.96 11.74 1.97 e CuGaS2 5.34741 10.47429 1.9588 j 5.360 10.49 1.96 a 5.35 10.48 1.96 c 5.34 10.47 1.96 e 5.351 10.484 1.959 f,g 5.328 10.462 1.964 f,h 5.349 10.480 1.959 i CuGaSe 5.618 11.01 1.96 a 2 5.602 11.00 1.964 d 5.60 10.98 1.96 e 5.6159 11.0182 1.962 m CuGaTe 6.006 11.93 1.98 a 2 5.99 11.92 1.99 e 6.025 11.948 1.983 k CuInS 5.528 11.08 2.00 a 2 5.51 11.02 2.00 e 5.524 11.13 2.01 f 5.52279 11.13295 2.0158 j CuInSe 5.785 11.57 2.00 a 2 5.77 11.54 2.00 e CuInTe 6.179 12.36 2.00 a 2 6.16 12.32 2.00 e CuTlS 5.58 11.16 2.00 e 2 CuTlSe 5.83 11.60 1.99 e 2 AgAlS 5.707 10.28 1.80 a 2 5.69 10.24 1.80 e AgAlSe 5.968 10.77 1.80 a 2 5.95 10.71 1.89 e AgAlTe 6.309 11.85 1.88 a 2 6.29 11.83 1.88 e AgGaS 5.755 10.28 1.79 a 2 5.74 10.27 1.79 e 5.75 10.305 1.79 f 5.75722 10.3036 1.7897 j AgGaSe 5.985 10.90 1.82 a 2 5.97 10.87 1.82 e 5.9920 10.8863 1.817 m AgGaTe 6.301 11.96 1.90 a 2 6.29 11.95 1.90 e 4