SVC - 42nd Annual Technical Conference Proceedings

12 Pages·1999·0.218 MB·English

S of
OCIETY
V
ACUUM
C
OATERS
42 Annual
ND
Technical Conference
Proceedings
April 17-22, 1999
Chicago, Illinois
Copyright © 1999 by Society of Vacuum Coaters
71 Pinon Hill Place NE· Albuquerque, NM 87122-1914 USA
Telephone [phone]· FAX [phone]
E-mail <[email protected]>
Web Site <www.svc.org>
Executive Director: Vivienne Harwood Mattox
Technical Director: Donald M. Mattox
k
Annual Technical
Conference Proceedings
Proceedings available in print:
19th Annual Technical Conference Proceedings (1976) ISBN 1-878068-00-8
20th Annual Technical Conference Proceedings (1977) ISBN 1-878068-01-6
21st Annual Technical Conference Proceedings (1978) ISBN 1-878068-02-4
22nd Annual Technical Conference Proceedings (1979) ISBN 1-878066-03-2
24th Annual Technical Conference Proceedings (1981) ISBN 1-878068-04-0
28th Annual Technical Conference Proceedings (1985) ISBN 1-876068-05-9
30th Annual Technical Conference Proceedings (1987) ISBN 1-878068-06-7
31st Annual Technical Conference Proceedings (1988) ISBN 1-878068-07-5
32nd Annual Technical Conference Proceedings (1989) ISBN 1-878068-08-3
33rd Annual Technical Conference Proceedings (1990) ISBN 1-878068-09-1
34th Annual Technical Conference Proceedings (1991) ISBN 1-878068-10-5
35th Annual Technical Conference Proceedings (1992) ISBN 1-878068-11 -3
36th Annual Technical Conference Proceedings (1993) ISBN 1-878068-12-1
37th Annual Technical Conference Proceedings (1994) ISBN 1-878068-13-X
38th Annual Technical Conference Proceedings (1995) ISSN 0737-5921
39th Annual Technical Conference Proceedings (1996) ISSN 0737-5921
40th Annual Technical Conference Proceedings (1997) ISSN 0737-5921
41st Annual Technical Conference Proceedings (1998) ISSN 0737-5921
Proceedings available on CD-ROM:
40th Annual Technical Conference Proceedings (1991-1997) ISSN 1099-4718
(Includes abstracts for 1957-1990 Proceedings; full manuscripts of 1991-1997 Proceedings)
41st Annual Technical Conference Proceedings (1991-1998) ISSN 1099-4718
(Includes abstracts for 1957-1990 Proceedings; full manuscripts of 1991-1998 Proceedings)
Copyright © 1999 by Society of Vacuum Coaters
All rights reserved. No part of this book may be used or reproduced in any manner without written permission except in the
case of brief quotations embodied in critical articles and reviews. For information, contact the publisher.
Society of Vacuum Coaters
42nd Annual Technical Conference Proceedings
Published by:
Society of Vacuum Coaters
71 Pinon Hill Place NE
Albuquerque, NM 87122-1914 USA
Telephone [phone]
FAX [phone]
E-mail <[email protected]>
Web Site <www.svc.org>
ISSN 0737-5921
Printed in the United States of America
1999 Conference
Program Committee
Conference Program Chairs
Dale E. Morton, Denton Vacuum, Inc., and
Gary Phillips, Innovative Specialty Films, LLC
Director of TACs
Clark Bright, Delta V Technologies, Inc.
Optical Coating Committee Chair
Peter Martin, Battelle Pacific Northwest Laboratory
Vacuum Web Coating Committee Chair
Geoff Ringer, Dynapro Thin Film Products, Inc.
Decorative & Functional Coating Committee Chair
John Carlotto, Tanury Industries
Large Area Coating Committee Chair
Dan Castilleja, Academy Precision Materials
Emerging Technologies Committee Chair
Hana Báranková, Uppsala University, Sweden
Process Control & Instrumentation Committee Chair
J. Grant Armstrong, Granville-Phillips, Division of Helix Technology Corporation
Plasma Processing Committee Chair
John Felts, Nano Scale Surface Systems, Inc.
Tribological and Wear Coating Committee Chair
Donald M. Mattox, SVC Technical Director
Vendor Session Committee Chair
Elizabeth Josephson, Leybold Systems, Inc.
Education Committee Chair
David Glocker, lsoflux Incorporated
Equipment Exhibit Committee Chair
Traci Langevin, Soleras Ltd.
“Meet the Experts Corner”
Donald M. Mattox, SVC Technical Director
Nathaniel H. Sugerman Memorial Award
The Nathaniel H. Sugerman Memorial Award has been established to commemorate
the enduring efforts of Nat Sugerman in founding, nurturing and supporting the Society
of Vacuum Coaters.
The purpose of this award is to encourage and recognize distinguished achievement in
one or more of the following endeavors.
For distinguished services to the SVC
For outstanding technical achievement
For noteworthy educational contributions to the vacuum industry
For creative innovation in the development of a product or a process pertaining to
the vacuum industry.
The Nathaniel H. Sugerman Memorial Award has honored the following individuals:
1993-Hugh R. Smith, Jr., Industrial Vacuum Engineering
1994-Marsbed Hablanian, Varian Vacuum Products, Inc.
1995-Richard A. Denton, Denton Vacuum, Inc.
1996-Dale Missimer, Polycold Systems International
1997-Alan Plaisted, Soleras Ltd.
1998-Peter J. Clarke, Sputtered Films, Inc.
1999-Ernst Hartwig, EKH Consulting
1999
42nd SVC Technical
Conference Proceedings
Plenary Session
1 Ion Beam Sources, Past, Present and Future
P.D. Reader, Ion Tech Inc., Fort Collins, CO..............................................................................................................3
Process Control and Instrumentation
2 Mechanical Booster Vacuum Pumps
P.D. Vibert, Tuthill Corporation/Kinney Vacuum Division, Canton, MA....................................................................11
3 Atomic Absorption Spectroscopy for Monitoring Evaporation Processes
D.G. Jensen, C.L. Beall, T.N. Gaidzik and C.K. Carniglia, Optical Coating Laboratory, Inc., Santa Rosa, CA........17
4 Modeling of Production Scale Reactive Deposition
P. Greene and R. Dannenberg, BOC Coating Technology, Fairfield, CA.................................................................23
5 In-Line Monitoring of Sputter Deposited Soft-Magnetic Thin Films
H. te Lintelo, Innovative Sputtering Technology N.V. (I.S.T.), Belgium; and D. Van Wassenhove,
Innovative Specialty Films LLC (ISF), Research Triangle Park, NC........................................................................29
6 Recent Developments on Optical Coatings Sputtered by Dual Magnetron Using a
Process Regulation System
U. Heister, J. Bruch, T. Willms, C. Braatz, A. Kastner and G. Bräuer, Leybold Systems GmbH, Germany.............34
7 Zinc and Magnesium Vapor Generators in a Steel Strip Coating System
E. Yadin and Y. Andreev, J/S Co. Sidrabe, Latvia....................................................................................................39
Decorative and Functional Coating
8 Racking for PVD Applications
D. Bauer, Associated Rack Corporation, Chicago, IL..............................................................................................45
9 Precision Cleaning Prior to Vacuum Deposition
B.T. Nevill and F.J. Fuchs, CAE Cleaning Technologies, Cincinnati, OH.................................................................48
10 Selection of Materials and Techniques for Performance Coatings
G. Vergason and S. Gaur, Vergason Technology, Inc., Van Etten, NY....................................................................53
11 Setting Up Mass Production of Decorative Coatings on Consumer Goods
T. Hurkmans, G.J. van der Kolk, M. Eerden, T. Trinh and W. Fleischer,
Hauzer Techno Coating Europe B.V., The Netherlands...........................................................................................58
12 A Study of Corrosion Resistant Decorative Coatings Produced in a New In-Line
Physical Vapor Deposition (IPVD) System
R. Wilberg, M. Falz, T. Lunow, B. Gebhardt and J. Schulte, VTD Vakuumtechnik Dresden GmbH, Germany........64
13 Process and Equipment for Large Scale Electromagnetic Interference (EMI) Coating on Plastic
H.R. Powell and S.G. Galperin, Stokes Vacuum Inc., Philadelphia, PA ..................................................................69
14 A Low-Cost Industrial Process to Produce Hard-Coatings by PE-CVD on Optical Plastic Substrates
S. Mengali, C. Misiano and E. Simonetti, CETEV, Italy; and R. Aimo and K. Pischow, Surfcoat, Finland...............75
15 Short Cycle Decorative Hard Coating of Door Hardware and Plumbing Fixtures for
Brass, Zinc Diecast and Plastic Parts
D. Hofmann, H. Maidhof and H. Schüssler, Leybold Systems GmbH, Germany ....................................................78
16 The Combination of “Gold Plating” and High Wear Resistance of PVD
M.H. Bouix, Ionitec S.A., France..............................................................................................................................83
Emerging Technologies
17 An Estimate of the Potentials Developed on Coated Anodes During Pulsed DC Reactive Sputtering
D.A. Glocker, Isoflux Incorporated, Rush, NY..........................................................................................................87
18 Ion-Assisted Filtered Cathodic Arc Deposition (IFCAD) System for Volume Production of Thin-Film Coatings
M.L. Fulton, Ion Arc Corporation, Torrance, CA.......................................................................................................91
19 Enhanced Reactively Sputtered AlO Deposition by Addition of Activated Reactive Oxygen
2 3
D. Carter and G. McDonough, Advanced Energy Industries, Inc., Fort Collins, CO................................................96
20 A New Hybrid Deposition Process, Combining PML and PECVD, for High Rate Plasma Polymerization
of Low Vapor Pressure, and Solid, Monomer Precursors
J.D. Affinito, G.L. Graff, M.-K. Shi, M.E. Gross, P.A. Mounier and M.G. Hall, Battelle Pacific Northwest National
Laboratory, Richland, WA......................................................................................................................................102
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1999 continued . . .
21 High Rate Deposition of Functional Coatings in an Electron Cyclotron Resonance Discharge
C.-T. Lin, F. Li and T. D. Mantei, University of Cincinnati, Cincinnati, OH..............................................................108
22 Effective Low Power Microwave Plasma CVD of Carbon Nitride Films
L. Bárdo√ and H. Báranková, Uppsala University, Sweden; and Y.A. Lebedev,
Russian Academy of Science, Russia...................................................................................................................111
23 Low Energy Ion and Plasma Beam Sources on the Step to Industrial Applications
J. Waldorf, Ionen-und Plasmatechnik GmbH (IPT), Gemany................................................................................116
24 Improvements in Equipment for the Evaporation of Subliming Materials in Reactive Gas Conditions
P. Chang, W.K. Halnan and R.J. Hill, BOC Coating Technology, Fairfield, CA......................................................122
25 IVD Aluminum
B.T. Nevill, CAE Cleaning Technologies, Cincinnati, OH.......................................................................................129
26 Protective Properties of Silicon Nitride, Deposited by Bias Reactive Sputtering
Y. Lipin, and E. Machevski, J/S Co. Sidrabe, Latvia..............................................................................................133
27 New Magnets-in-Motion (M-M) Plasma Sources
H. Baránková and L. Bárdo√, Uppsala University, Sweden...................................................................................136
Large Area Coating
28 Temperable Low Emissivity Coating Based on Twin Magnetron Sputtered TiO and SiN Layers
2 3 4
J. Szczyrbowski, G. Bräuer, M. Ruske, H. Schilling and A. Zmelty, Leybold Systems GmbH, Germany;
and H. Johnson, AFG Industries Inc., Kingsport, TN.............................................................................................141
29 MF Sputtering—A Powerful Process Tool for Large Area Coating
T. Rettich and P. Wiedemuth, Hüttinger Elektronik GmbH + Co. KG, Germany....................................................147
30 Bi-Directional Linear Magnetron Arc Cathode
R.P. Welty, Vapor Technologies, Inc., Boulder, CO................................................................................................152
31 Advances in Cylindrical Magnetrons
W. De Bosscher and D. Cnockaert, Sinvaco, Belgium; and H. Lievens, I.S.F., Belgium.......................................156
32 Industrial Scale Manufacture of Solar Absorbent Multilayers by MF-Pulsed Plasma Technology
F. Milde and M. Dimer, Von Ardenne Anlagentechnik GmbH, Germany; P. Gantenbein, SPF Ingenieurschule
Rapperswil ITR, Switzerland; Ch. Hecht, Von Ardenne Anlagentechnik GmbH, Germany; D. Pavic,
Ikarus Coatings, Germany; and D. Schulze, Von Ardenne Anlagentechnik GmbH, Germany ..............................163
33 Anode Problems in Pulsed Power Reactive Sputtering of Dielectrics
R. Scholl, Advanced Energy Industries, Fort Collins, CO; and A. Belkind and Z. Zhao,
Stevens Institute of Technology, Hoboken, NJ.......................................................................................................169
34 A Simple Model of Oxygen Permeation Through Defects in Transparent Coatings
G. Czeremuszkin and M. Latrèche, Polyplasma Inc., Canada; and A. S. da Silva Sobrinho and M. R. Wertheimer,
École Polytechnique Montréal, Canada.................................................................................................................176
35 Uniformity Control of Rate Enhanced Reactive AC Sputtering
R. Dannenberg, R. Newcomb and A. Ryan, BOC Coating Technology, Fairfield, CA ...........................................181
36 A New Plant Generation for Large Area Vacuum Coating of Architectural and Automotive Glass
H. Schilling, Leybold Systems GmbH, Germany...................................................................................................186
37 The Effects of Bonding Sputtering Targets for Large Area Coaters
W.R. Simpson and R.A. Scatena, Thermal Conductive Bonding, Inc., San Jose, CA...........................................191
Optical Coating
38 The State-of-the-Art of Switchable Glazing and Related Electronic Products
C.M. Lampert, Star Science, Santa Clara, CA.......................................................................................................197
39 Silicon-Carbon Alloys Synthesized by Electron Cyclotron Resonance Chemical Vapor Deposition
M.B. Moran and L.F. Johnson, Naval Air Warfare Center, China Lake, CA...........................................................204
40 On-Line Inspection of Randomly Oriented Metallized Sheets and Panels
T.A. Potts, Dark Field Technologies, Inc., Shelton, CT ..........................................................................................211
41 Bipolar Pulsed DC Sputtering of Optical Films
D. Konopka, D.E. Morton and F.T. Zimone, Denton Vacuum, LLC, Moorestown, NJ............................................217
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1999 continued . . .
42 Ultrathick Silicon Coatings for Infrared Mirror Applications
P.M. Martin, J.W. Johnston, W.D. Bennett, and D.C. Stewart, Battelle Pacific Northwest National Laboratory,
Richland, WA; and J. Robichaud, S. Daignault and A. Raudenbush, SSG, Inc., Wilmington, MA ........................223
43 Electrically Conductive Anti-Reflection Coating for Display Applications
P. Persoone, Innovative Specialty Films (ISF), Belgium; and P. Lippens, N.V. Bekaert,B elgium .........................227
44 Assessing Contamination Sensitivity in Optical Coatings
H.A. Macleod and C. Clark, Thin Film Center Inc., Tucson, AZ.............................................................................232
45 Optical Coating Process Simulation and Reverse Engineering
C. Clark, Thin Film Center, Inc., Tucson, AZ..........................................................................................................237
46 Refractive Index as a Construction Parameter in Thin Film Design by Computer Optimization
P.W. Baumeister, Sholem Consultants, Sebastopol, CA........................................................................................243
47 Design of Antireflection Coating Using Indium Tin Oxide (ITO) Film Prepared by
Ion Assisted Deposition (IAD)
R. Wang, Advanced Link Photonics Inc., Irvine, CA; and C.-C. Lee, Institute of Optics Sciences, National Central
University, Taiwan..................................................................................................................................................246
48 Ion-Assisted Deposition of E-Gun Evaporated ITO Films at Low Substrate Temperatures
D.E. Morton and A. Dinca, Denton Vacuum, LLC, Moorestown, NJ......................................................................250
49 Accurate and Rapid Determination of Thickness, n and k Spectra, and Resistivity of ITO Films
K. Zhang, EG&G Amorphous Silicon, Santa Clara, CA; and A.R. Forouhi and D.V. Likhachev,
n&k Technology, Inc., Santa Clara, CA..................................................................................................................255
50 The Characteristics of Indium Tin Oxide (ITO) Film Prepared by Ion-Assisted Deposition
C.-C. Lee and S.-C. Shiau, National Central University, Taiwan; and Y. Yang,
Darly Custom Technology, Inc., Bloomfield, CT.....................................................................................................261
51 Heating of a Chamber During Vacuum Deposition—A Review
P.W. Baumeister, Sholem Consultants, Sebastopol, CA........................................................................................265
52 Ion Bombardment Characteristics During the Growth of Optical Films Using a Cold Cathode Ion Source
O. Zabeida, J.E. Klemberg-Sapieha, and L. Martinu, École Polytechnique Montréal, Canada; and D.E. Morton,
Denton Vacuum LLC, Moorestown, NJ..................................................................................................................267
53 High Rate EB-PVD Processes for Optical Coating and Their Applicability for Long Time
Deposition Cycles in Production Coaters
E. Reinhold, J. Richter, O. Gawer and E. Zschieschang, Von Ardenne Anlagentechnik GmbH, Germany...........273
54 In-Situ Optical Measurements of Transmittance, and Reflectance by Ellipsometry on Glass, Strips and
Webs in Large Area Coating Plants
J. Struempfel, C. Melde, E. Reinhold and J. Richter, Von Ardenne Anlagentechnik GmbH, Germany .................280
55 High Rate Sputter Deposition of TiO from TiO Target
2 2-X
Y. Tachibana, H. Ohsaki, A. Hayashi, A. Mitsui and Y. Hayashi, Asahi Glass Co., Ltd., Japan..............................286
56 Estimating the Reflection Losses in the Passband of Edge Filters
R.R. Willey, Raytheon Optical Systems, Inc., Danbury, CT...................................................................................290
57 Broad Beam Ion Assisted Deposition of Titania and Alumina Films
K. Narasimha Rao, M. Adinarayana Murthy, H.S. Vijaya and S. Mohan, Indian Institute of Science, India...........295
Plasma Processing
58 Plasma Treatment of Polymer Films
S.A. Pirzada, A. Yializis, W. Decker and R.E. Ellwanger, Sigma Technologies International, Inc., Tucson, AZ.....301
59 Plasma Surface Modification of Acrylic-Based Polymer Multilayer for Enhanced Ag Adhesion
M.K. Shi, G.L. Graff, J.D. Affinito, M.E. Gross, G. Dunham, P. Mounier and M. Hall, Battelle Pacific Northwest
National Laboratory, Richland, WA........................................................................................................................307
60 Mass Resolved Ion Energy Distributions in Dual-Mode Microwave/Radio Frequency Plasma
A. Hallil, O. Zabeida, J.E. Klemberg-Sapieha, M.R. Wertheimer and L. Martinu,
École Polytechnique Montréal, Canada.................................................................................................................311
61 Detection and Characterization of Defects in Transparent Barrier Coatings
A.S. da Silva Sobrinho, École Polytechnique Montréal, Canada; G. Czeremuszkin and M. Latrèche,
Polyplasma Inc., Canada; and M.R. Wertheimer, École Polytechnique Montréal, Canada...................................316
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1999 continued . . .
62 An Alternate Wear Treatment to Replace Chrome Plating
W. Kovacs and K. Kovacs, Elatec Technology Corportation, Wilmington, MA.......................................................320
63 Controlling Vacuum Pump Induced Contamination in Media Manufacturing
A.N. Patil, BOC Edwards Vacuum Technology, Santa Clara, CA..........................................................................326
64 Fluorocarbon Based Anti-Smudge Coating Prepared by a Planar R.F. ICP Plasma Source for
Display Applications
A. Vanhulsel, E. Dekempeneer, W. Wegener, J. Meneve and J. Smeets, Vlaamse Instelling voor Technologisch
Onderzoek (VITO), Belgium; P. Lippens, Innovative Specialty Films (I.S.F.), Belgium; and J.P. Celis,
KU Leuven, Belgium..............................................................................................................................................332
65 Industrial Ion Sources and Their Application for DLC Coating
A. Shabalin, M. Amann, M. Kishinevsky, K. Nauman and C. Quinn,
Advanced Energy Industries, Fort Collins, CO......................................................................................................338
Tribological and Wear Coating
66 Hard Coating Technology Update
D.T. Quinto, Balzers Ltd., Principality of Liechtenstein..........................................................................................345
67 Wear Resistant PVD Coatings for High Temperature (950°) Applications
W.-D. Münz, Bodycote-SHU Coatings Ltd., United Kingdom; and I.J. Smith, Sheffield Hallam University,
United Kingdom.....................................................................................................................................................350
68 Self Lubricating Coatings for the Protection of Cutting and Forming Tools and Mechanical Components
D.G. Teer, D. Camino. V. Fox, A. Jones and N. Renevier, Teer Coatings Ltd., United Kingdom ...........................357
69 Perspective for Replacement of Hard Chrome by PVD
T. Hurkmans, J. Kubinski, T. Trinh, W. Fleischer and G.J. van der Kolk, Hauzer Techno Coating,
The Netherlands....................................................................................................................................................364
70 Growth of SiC Protective Coating Layers on Graphite Using Single Molecular Precursors
S.-J. Park, J.-G. Han and J.-H. Boo, Sungkyunkwan University, Korea................................................................368
71 Ultra Hard TiBN Coatings Obtained by New Plasma Enhanced Reactive Sputter Deposition
P. Maurin Perrier, HEF USA, Columbus, OH; C. Heau and F. Vaux, HEF R&D, France; and J.M. Poirson,
TS Developpement/HEF R&D, France..................................................................................................................373
72 Deposition and Characterization of Nanoscale CNX/HfN Multilayers
A. Madan, M. Graham and J. Wessling, Northwestern University, Evanston, IL...................................................379
Vacuum Web Coating
73 Vacuum Web Coating of Polymers: An Update on European Collaborative R&D Activities
U. Moosheimer and H.-C. Langowski, Fraunhofer Institute for Process Engineering and Packaging, Germany .....387
74 Transparent Oxide Coatings on Plastic Webs for Emerging Applications
N. Schiller, H. Morgner, M. Fahland, S. Straach, M. Räbisch and C. Charton, Fraunhofer Institut
Elektronenstrahl-und Plasmatechnik (FEP), Germany..........................................................................................392
75 Wet Chemistry: Coatings Based on Inorganic-Organic Polymers
K.-H. Haas, S. Amberg-Schwab, K. Rose and G. Schottner, Fraunhofer-Institut für Silicatforschung, Germany......397
76 Characterization of Oxide Gas Barrier Films
B.M. Henry, F. Dinelli, K.-Y. Zhao, A.G. Erlat, C.R.M. Grovenor and G.A.D. Briggs, University of Oxford, United
Kingdom; and R.S. Kumar and R.P. Howson, Loughborough University, United Kingdom...................................403
77 Permeation of Oxygen and Moisture Through Vacuum Web Coated Films
U. Moosheimer and H.-C. Langowski, Fraunhofer Institute for Process Engineering
and Packaging, Germany......................................................................................................................................408
78 Clear Barrier Coatings
F. Casey, A.W. Smith and G. Ellis, General Vacuum Equipment Ltd., United Kingdom.........................................415
79 A New Ceramic-Coated Barrier Film by Dual Element Electron Beam Evaporation
S. Yokoyama, K. Iseki, T. Ohya, S. Komeda, Y. Yamada and H. Ishihara, Toyobo Co., Ltd., Research Center,
Japan.....................................................................................................................................................................420
80 Electron Beam Web Coating—Technology and Applications
G. Hoffmann, R. Kukla, G. Löbig, R. Ludwig, P. Seserko and G. Steiniger, Leybold Systems GmbH, Germany .....425
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1999 continued . . .
81 Vacuum Coater Thread Path Design Using Basic Web Handling Principles and Techniques
W.E. Hawkins, Film Handling Solutions, Ltd., Circleville, OH................................................................................430
82 Worldwide Authentication Market for Holograms: Past, Present, Ensuring the Future
L.T. Kontnik, International Hologram Manufacturers Association, Cherry Hills Village, CO...................................433
83 Making Holographic Packaging Work on Shelf
D.C. Beeching, Spectratek Technologies, Inc., Los Angeles, CA..........................................................................437
84 The Evolution of Security Holograms—They’re Not Just for Credit Cards Anymore
T. Anagnostis, Van Leer Metallized Products (USA) Ltd., Franklin, MA.................................................................440
85 Hardcoats in the World of the Vacuum Coater
P. Moulds, Tekra - Advanced Technologies Group, New Berlin, WI.......................................................................442
86 A Low-Cost Flexible Circuit on a Polyester Substrate
D.J. McClure, D.S. Dunn, G.M. Jellum and A.J. Ouderkirk, 3M Corporate Process Technology Center,
St. Paul, MN...........................................................................................................................................................445
87 A Decade of Depositing Copper on Polymer Webs
R.L. Swisher, Sheldahl Inc., Northfield, MN...........................................................................................................448
88 Patterned Metallized Films Used for Higher Energy Density Capacitor Components
G.J. Walters, A.D. Tech, Inc., Taunton, MA............................................................................................................453
89 Requirements of Flexible Substrates for Organic Light Emitting Devices
in Flat Panel Display Applications
J.K. Mahon, J.J. Brown and T.X. Zhou, Universal Display Corporation, Princeton, NJ; and P.E. Burrows and
S.R. Forrest, Princeton University, Princeton, NJ..................................................................................................456
90 High Speed In-Line Treatment of Plastic Webs for Vacuum Coating
H. Morgner, R. Rank, J. Reschke and N. Schiller, Fraunhofer-Institut Elektronenstrahl-und
Plasmatechnik (FEP), Germany ............................................................................................................................460
91 Plasma Pre-Treatment in Aluminum Web Coating: A Converter Experience
V. Cassio, Neograf S.R.L., Italy; and F. Rimediotti, Galileo Vacuum Systems, Italy..............................................465
92 Surface Functionalization of Polymer Films
A.Yializis, M.G. Mikhael and R.E. Ellwanger, Sigma Technologies International, Inc., Tucson, AZ; and
E.M. Mount III, Mobil Chemical Company, Macedon, NY......................................................................................469
93 Engineering Solutions Enabling a New Family of Expandable, Multi-Process, Multi-Chamber
Vacuum Roll Coaters
M.G. Langlois, M.G. Langlois & Associates, Inc., Atlanta GA; and M. McEuen, Delta V Technologies, Inc.,
Tucson AZ..............................................................................................................................................................475
94 Properties of Metallized Film in a Free Span Web Metallizer
F. Casey, N.A.G. Ahmed and G. Ellis, General Vacuum Equipment Ltd., United Kingdom...................................480
95 Positioning Technology for Profits
A. Comer, MarTech, Covington, VA ......................................................................................................................484
96 Chemometrics—A Holistic Approach to Troubleshooting
M.J. McCann, McCann Science, Chadds Ford, PA; and C.A. Bishop, C.A. Bishop Consulting Ltd.,
United Kingdom.....................................................................................................................................................487
97 Colors by Chemistry or by Physics?
R.W. Phillips and M. Nofi, Flex Products, Inc., Santa Rosa, CA............................................................................494
Vendor Session
98 NeoVac, the Company and its Capabilities
J.B. Fenn Jr., NeoVac, Santa Rosa, CA ................................................................................................................503
99 The Virtual Technology Center—A Cost-Effective Approach to Process and Product Development
K. Legg, Rowan Technology Group, Libertyville, IL...............................................................................................504
100 MarTech: Successfully Connecting Technology to the Marketplace
A. Comer, MarTech, Covington, VA .......................................................................................................................505
101 SKY™ Ceramic Capacitance Diaphragm Gauges
P. Roth, Leybold Inficon, East Syracuse, NY.........................................................................................................506
vii
1999 continued . . .
102 Advances in Process Vacuum Measurements
R. Traverso, P. Blackborow and L. Hinkle, MKS Instruments, Inc., Andover, MA..................................................507
103 The Leader in Magnetics—Dexter Magnetic Technologies
G.-L. Wang, Dexter Magnetic Technologies, Fremont, CA....................................................................................510
104 Hostaphan® RHB 12—Further Developments and Commercial Applications
R. Davis and H. Peiffer, Mitsubishi Polyester Film GmbH, Germany.....................................................................511
105 Simultaneous Optical Emission Control of Two Electron Beam Sources for (TiAl)N
B. Garside, Tecvac Ltd, United Kingdom...............................................................................................................513
106 Swift-Kote Rapid Cycle 3-Dimensional Metallizer
Y. Yang, Darly Custom Technology, Inc., Bloomfield, CT.......................................................................................515
107 Rapid Cycle, Small Batch Titanium Nitride Coater
D. Glocker, Isoflux Incorporated, Rush, NY; and D. Cook and J. Davis,
Ion Tech Inc., Fort Collins CO................................................................................................................................517
108 A New Cathodic Arc Source
R.I. Christy, Tribo Coating, Malibu, CA ..................................................................................................................520
109 Choosing the Best Crystal for Your Coating Process
P. Becker, Fil-Tech Inc., Boston, MA......................................................................................................................522
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