Site Characterization and Aggregation of Implanted Atoms in Materials PDF
Preview Site Characterization and Aggregation of Implanted Atoms in Materials
Site Characterization and Aggregation of Implanted Atoms in Materials A series of edited volumes comprising multifaceted studies of contem- porary scientific issues by some of the best scientific minds in the world, assembled in cooperation with NATO Scientific Affairs Division. Series B: Physics RECENT VOLUMES IN THIS SERIES Volume 39 - Hadron Structure and Lepton-Hadron Interactions - Cargese 1977 edited by Maurice Levy, Jean-Louis Basdevant, David Speiser, Jacques Weyers, Raymond Gastmans, and Jean Zinn-Justin Volume 40 - Kinetics of Ion -Molecule Reactions edited by Pierre Ausloos Volume 41 - Fiber and Integrated Optics edited by D. B. Ostrowsky Volume 42 - Electrons in Disordered Metals and at Metallic Surfaces edited by P. Phariseau, B. L. Gyorffy, and L. Scheire Volume 43 - Recent Advances in Group Theory and Their Application to Spectroscopy edited by John C. Donini Volume 44 - Recent Developments in Gravitation - Cargese 1978 edited by Maurice Levy and S. Deser Volume 45 - Common Problems in Low- and Medium-Energy Nuclear Physics edited by B. Castel, B. Goulard, and F. C. Khanna Volume 46 - Nondestructive Evaluation of Semiconductor Materials and Devices edited by Jay N. Zemel Volume 47 - Site Characterization and Aggregation of Implanted Atoms in Materials edited by A. Perez and R. Coussement Volume 48 - Electron and Magnetization Densities in Molecules and Crystals edited by P. Becker Volume 49 - New Phenomena in Lepton-Hadron Physics edited by Dietrich E. C. Fries and Julius Wess This series is published by an international board of publishers in con- junction with NATO Scientific Affairs Division A Life Sciences Plenum Publishing Corporation B Physics London and New York C Mathematical and D. Reidel Publishing Company Physical Sciences Dordrecht and Boston D Behavioral and Sijthoff International Publishing Company Social Sciences Lcidcn E Applied Sciences Noordhoff International Publishing Leiden Site Characterization and Aggregation of Implanted Atoms in Materials Edited by A. Perez Universite Claude Bernard Lyon I Villeurbanne, France and R. Coussement University of Leuven Leuven, Belgium PLENUM PRESS. NEW YORK AND LONDON Published in cooperation with NATO Scientific Affairs Division Library of Congress Cataloging in Publication Data Nato Advanced Study Institute, Aleria, France, 1978. Site characterization and aggregation of implanted atoms in materials. (Nato advanced study institutes series: Series B, Physics; v. 47) "Lectures presented at the NATO Advanced Study Institute, held in Aleria, Corsica, September 10-23, 1978." Includes index. 1. Ion implantation-Congresses. 1. Perez A. II. Coussement, Romain. III. Title. IV. Series. QC702.7.I55N37 1978 301.31 79-19008 ISBN-13: 978-1-4684-1017-4 e-ISBN-13: 978-1-4684-1015-0 DOl: 10.1007/978-1-4684-1015-0 Lectures presented at the NATO Advanced Study Institute, held in Aleria, Corsica, September 10-23, 1978 © 1980 Plenum Press, New York Softcover reprint of the hardcover 1st edition 1980 A Division of Plenum Publishing Corporation 227 West 17th Street, New York, N.Y. 10011 All rights reserved No part of this book may be reproduced, stored in a retrieval system, or transmitted, in any form or by any means, electronic, mechanical, photocopying, microfilming, recording, or otherwise, without written permission from the publisher ACKNOWLEDGMENTS This Advanced Study Institute was sponsored by NATO and co-sponsored by FEBS (Advanced Course No. 63). The Course Directors also acknow- ledge the financial assistance of the following companies: Astra Likemede1 AR, S8derta1je, Sweden Bayer Aktiengese11schaft, Leverkusen, West Germany Beecham Pharmaceuticals, Betchwortn, United Kingdom Boehringer GmbH, Mannheim, West Germany Ca1biochem-Behring Corporation, La Jolla, California, U.S.A. Grunentha1 GmbH, Stolberg. West Germany International Enzymes, Windsor, United Kingdom E. Merck, Darmstadt, West Germany Ortho Pharmaceutical (Canada) Ltd., Ontario, Canada Roche Products Ltd., We1wyn Garden City, United Kingdom Sandoz Forschungsinstitut GmbH, Wien, Austria Schering AC, Berlin, West Germany Searle & Co., Ltd., High Wycombe, United Kingdom v A.S.I.M.S. ACTIVITIES The Advanced Study Institute on Materials Science was created in 1973 in the Departement de Physique de Materiaux of the University of Lyon. The aim of this Institute was to organize specialized doctoral level courses on materials science in Lyon and Interna- tional Summer Schools on the same subject at a post-doctoral level in Corsica. Summer Schools published with NATO as the main sponsor are: Radiation Damage Processes in Electrode Processes in Solid State Materials Ionics: Theory and Application September 1-15, 1973 to Energy Conversion and Storage Director: C.H.S. Dupuy August 28 - September 9, 1975 Proceedings edited by Director: M. Kleitz C.H.S. Dupuy Proceedings edited by M. Kleitz (Noordhoff International and J. Dupuy Publishing Company) (D. Reidel Publishing Company) Physics of Nonmetallic Thin Films Materials Characterization Using August 29 - September 12, 1974 Ion Beams Director: C.H.S. Dupuy August 29 - September 12, 1976 Proceedings edited by Director: J.P. Thomas C.H.S. Dupuy and A. Cachard Proceedings edited by J.P. Thomas (Plenum Publishing Company) and A. Cachard (Plenum Publishing Company) Microscopic Structure and Dynamics of Liquids August 28 - September 10, 1977 Director: J. Dupuy Proceedings edited by J. Dupuy and A.J. Dianoux (Plenum Publishing Company) PREFACE Explosive developments in microelectronics, interest in nuclear metallurgy, and widespread applications in surface science have all produced many advances in the field of ion implantation. The research activity has become so intensive and so broad that the field has become divided into many specialized subfields. An Advanced Study Institute, covering the basic and common phenomena of aggregation, seems opportune for initiating interested scientists and engineers into these various active subfields since aggregation usually follows ion implantation. As a consequence, Drs. Perez, Coussement, Marest, Cachard and I submitted such a pro- posal to the Scientific Affairs Division of NATO, the approval of which resulted in the present volume. For the physicist studying nuclear hyperfine interactions, the consequences of aggregation of implanted atoms, even at low doses, need to be taken into account if the results are to be correctly interpreted. For materials scientists and device engineers, under- standing aggregation mechanisms and methods of control is clearly essential in the tailoring of the end products. The present Institute, the 7th Advanced Study Institute in Materials Science and Technology, organized under the direction of my laboratory in the Department de Physique des Materiaux de Lyon, was managed in collaboration with a group from Louvain and the Hyperfine Interaction Group at Lyon. It was a more challenging one because of the necessity of bringing together a group of people having little or no previous interactions with each other - physi- cists, chemists, materials scientists, and engineers. In view of this, the lecturers and the organizing and scientific committees necessarily played a more active role in order to insure the success of this Institute. The task was made easier by the site of Casa- bianda Village at Corsica because of its excellent facilities and relative isolation. Living in the same village and having the same comforts and recreation led to the creation of a common language and the development of fruitful contacts and discussions. Overall I believe our efforts achieved the aim of providing the participants vii v~i PREFACE with a broader perspective of the field of ion implantation and a greater awareness of its diverse applications. In an undertaking such as the present one, the help and sup- port of many groups and people are required, and their contribu- tions are acknowledged with thanks. Special credits go to Messrs. Talberg and Bonaldi, managers of V.I.V.E. Association, and Mr. Caprili, the Director of the Centre Agricole de Gasabianda. The support and assistance of Mr. Carlotti, Maire d'Aleria, and Mr. V. Carlotti, Conseiller General de Moita Verde deserve special mention. A party given by Mr. Angelini, Maire de Talone, was a timely diversion and we thank him for his hospitality. The most important contribution to the success of the Insti- tute is of course the financial support of the Scientific Affairs Division of NATO, the Haute Corse Authority and the U.E.R. de Physique of the University Lyon I. It is also fair to say that without the help and consideration of Dr. Kester, manager of the A.S.I. in the NATO Scientific Affairs Division, the 7th ASIMST would not have materialized. He has since taken on a new job and we wish him success in his new undertaking. In particular, we will fully cooperate with and actively participate in his new program of International Transfer in Science and Technology. We also express great confidence in Dr. Di Lullo wno is taking over the A.S.I. program. Finally, the contributions of the lecturers, the scientific committee and the managers, and Drs. Perez, Coussement, Marest, and Cachard, are equally important. To them, the participants and I owe a special gratitude. C.H.S. Dupuy Professeur de Physique a l'Universite Claude Bernard Lyon I CONTENTS General Introduction 1 Ao Cachard PART I BASIC NOTIONS ON IMPLANTATION Basic Implantation Processes • 7 J .A. Davies and LoMo Howe Ion Implantation Procedure 33 G. Dearnaley Radiation Damage as Probed by Impurities 0 0 0 0 • 0 • 65 Ro Coussement PART II CHARACTERIZATION BY NUCLEAR METHODS OF ISOLATED IMPLANTED ATOM SITES Magnetic Hyperfine Interactions in Implanted Systems ••••••.•••••••••••• 73 N.J. Stone Quadrupole Interaction 95 Eo Recknagel Isomer Shift and Recoilless Fraction • 0 • 0 0 0 • • • 111 H. de Waard Time Dependent Hyperfine Interactions 139 D. Quitmann Directional Distribution of Nuclear Gamma Radiation 157 I. Berkes ix x CONTENTS Nuclear Orientation 175 I. Berkes NMR Detected by Nuclear Radiation: NMR/ON • • • • • • • 189 N.J. Stone Mossbauer Spectroscopy 205 H. de Waard Perturbed Angular Correlation • • • • • • • • • • • • • 223 E. Recknagel Atom Site Characterization in Metals Using Channeling Techniques • • • • • • • 241 L.M. Howe and J.A. Davies PART III IMPLANTATION EFFECTS AT HIGHER CONCENTRATIONS, AGGREGATION PHENOMENA Radiation Effects in Metals 265 J. Leteurtre Precipitation Processes in Iuplanted Materials 295 J .A. Borders Equilibrium Phase Formation by Ion Implantation • • • • • • • 307 S.T. Picraux Formation of Nonequilibrium Systems by Ion Implantation • • • • • • • • 325 S.T. Picraux Perturbations of the Sputtering Yield • • • • • • • • • 339 P.D. Townsend PART IV APPLICABILITY OF SOLID STATE AND NUCLEAR METHODS Introduction to Some Solid State Methods for the Study of Isolated Implanted Atom Sites in Metals • • • • • • • • 357 L.M. Stals An Introduction to Several Solid State Techniques for the Study of Ion Implanted Materials • • • • • • 399 J.A. Borders
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