Silicon, germanium, and their alloys : growth, defects, impurities, and nanocrystals

424 Pages·2014·77.12 MB·English

by  Gudrun Kissinger

Materials Science
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interaction of intrinsic and extrinsic point defects in Si, Ge, and SiGe ,m

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comparing the peculiar behavior of Si, Ge, and related alloys under one pa
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“This book is organized well and written by experts with high international ,
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State Key Lab of Silicon Materials, Zhejiang University, Hangzhou, China ad
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Despite the vast knowledge accumulated on silicon, germanium, and their alloys,
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these materials still demand research, eminently in view of the improvement of r
knowledge on silicon–germanium alloys and the potentialities of silicon as a ye
substrate for high-efficiency solar cells and for compound semiconductors and si
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the ongoing development of nanodevices based on nanowires and nanodots. a
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Silicon, Germanium, and Their Alloys: Growth, Defects, Impurities, and
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Nanocrystals covers the entire spectrum of R&D activities in silicon, germa- l
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nium, and their alloys, presenting the latest achievements in the field of crystal
growth, point defects, extended defects, and impurities of silicon and germanium y
nanocrystals. s
World-recognized experts are the authors of the book’s chapters, which span
bulk, thin film, and nanostructured materials growth and characterization prob-
lems, theoretical modeling, crystal defects, diffusion, and issues of key appli-
Kissinger
cative value, including chemical etching as a defect delineation technique, the
spectroscopic analysis of impurities, and the use of devices as tools for the Pizzini
measurement of materials quality.
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CAT#K20303 cover.indd 1 11/3/14 9:22 AM

Silicon, Germanium,
and Their Alloys
Growth, Defects, ImpurItIes,
anD nanocrystals

Silicon, Germanium,
and Their Alloys
Growth, Defects, ImpurItIes,
anD nanocrystals
Edited by
Gudrun Kissinger
Sergio Pizzini
Boca Raton London New York
CRC Press is an imprint of the
Taylor & Francis Group, an informa business
CRC Press
Taylor & Francis Group
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Boca Raton, FL 33487-2742
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Contents
Preface.......................................................................................................................ix
Editors .......................................................................................................................xi
Contributors ...........................................................................................................xiii
Chapter 1 Modern Aspects of Czochralski and Multicrystalline Silicon
Crystal Growth .....................................................................................1
Koichi Kakimoto and Bing Gao
Chapter 2 Growth and Characterization of Silicon–Germanium Alloys ...........23
Ichiro Yonenaga
Chapter 3 Germanium on Silicon: Epitaxy and Applications ............................61
Daniel Chrastina
Chapter 4 Self-Interstitials in Silicon and Germanium ......................................87
Alexandra Carvalho and Robert Jones
Chapter 5 Vacancies in Si and Ge .....................................................................119
Eiji Kamiyama, Koji Sueoka, and Jan Vanhellemont
Chapter 6 Self- and Dopant Diffusion in Silicon, Germanium, and Their
Alloys ...............................................................................................159
Hartmut Bracht
Chapter 7 Hydrogen in Si and Ge .....................................................................217
Stefan K. Estreicher, Michael Stavola, and Jörg Weber
Chapter 8 Point Defect Complexes in Silicon ...................................................255
Edouard V. Monakhov and Bengt G. Svensson
Chapter 9 Defect Delineation in Silicon Materials by Chemical Etching
Techniques ........................................................................................289
Bernd O. Kolbesen
vii
viii Contents
Chapter 10 Investigation of Defects and Impurities in Silicon by Infrared
and Photoluminescence Spectroscopies ...........................................323
Simona Binetti and Adele Sassella
Chapter 11 Device Operation as Crystal Quality Probe .....................................353
Erich Kasper and Wogong Zhang
Chapter 12 Silicon and Germanium Nanocrystals .............................................377
Corrado Spinella and Salvo Mirabella