Second Edition Silicon Earth Introduction to Microelectronics and Nanotechnology © 2016 by Taylor & Francis Group, LLC Description of the Cover Art Curious about the slick cover art? Starting from NASA's famous ªEarth at Nightº image (Figure 15.42), we played some games with Adobe to introduce curvature and atmo- sphere to the Earth and then added silicon integrated circuit oceans (read: Silicon Earth). The original concept of showing the Earth with an integrated circuit overlay was mine, but Peter Gordon of Cambridge University Press led me to NASA's night view, and Poornima Ozarkar, the artistic wife of one of my PhD students, executed a large number of design iterations to get it right. For the second edition, John Gandour of CRC Press massaged the original colors and added in the background of stars and interstellar gas. Final result? Pretty slick! The ªEarth at Nightº (courtesy of NASA, 2000) is actually a composite of images cre- ated from data gathered by satellites which are a part of the U.S. Air Force's Defense Meteorological Satellite Program (DMSP), and which reside at about 800 km above the Earth's surface, in Sun-synchronous, near-polar orbits (99 degree inclination). The night view of the Earth clearly shows evidence of human civilization, speaking volumes about our reliance on electricity, and also suggests why it's awfully tough to get a great view of the Milky Way when you live in big cities! The brightest areas are obviously not the most populated, but rather the most urbanized (read: light pollution?!). The integrated circuit spanning the oceans of this Silicon Earth is actually a SiGe radar chip designed by my Georgia Tech research team. © 2016 by Taylor & Francis Group, LLC Second Edition Silicon Earth Introduction to Microelectronics and Nanotechnology John D. Cressler Georgia Institute of Technology, Atlanta, USA Boca Raton London New York CRC Press is an imprint of the Taylor & Francis Group, an informa business © 2016 by Taylor & Francis Group, LLC CRC Press Taylor & Francis Group 6000 Broken Sound Parkway NW, Suite 300 Boca Raton, FL 33487-2742 © 2016 by Taylor & Francis Group, LLC CRC Press is an imprint of Taylor & Francis Group, an Informa business No claim to original U.S. Government works Version Date: 20151030 International Standard Book Number-13: 978-1-4987-0827-2 (eBook - PDF) This book contains information obtained from authentic and highly regarded sources. Reasonable efforts have been made to publish reliable data and information, but the author and publisher cannot assume responsibility for the valid- ity of all materials or the consequences of their use. 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CCC is a not-for-profit organization that provides licenses and registration for a variety of users. For organizations that have been granted a photocopy license by the CCC, a separate system of payment has been arranged. Trademark Notice: Product or corporate names may be trademarks or registered trademarks, and are used only for identification and explanation without intent to infringe. Visit the Taylor & Francis Web site at http://www.taylorandfrancis.com and the CRC Press Web site at http://www.crcpress.com © 2016 by Taylor & Francis Group, LLC To the many aspiring students of microelectronics and nanotechnology: May your imaginings be bold, your vision keen, and may your re-creation of our new world blossom with hope and promise. And ¼ For my Maria: My beautiful wife, my best friend, and my soul mate for these 33 years. For Matthew John (and Mary Ellen, and now Elena and Moira), Christina Elizabeth (and Michael, and now Owen and Amelia), and Joanna Marie (and Eric): God's awesome creations, and our precious gifts. May your journeys of discovery endure forever. © 2016 by Taylor & Francis Group, LLC © 2016 by Taylor & Francis Group, LLC People Like You And Me, Though Mortal, Of Course, Like Everyone Else, Do Not Grow Old No Matter How Long We Live. What I Mean Is That We Never Cease To Stand Like Curious Children Before The Great Mystery Into Which We Were Born. This Interposes A Distance Between Us And All That Is Unsatisfactory In The Human Sphere. Albert Einstein vii © 2016 by Taylor & Francis Group, LLC © 2016 by Taylor & Francis Group, LLC Contents Preface to the Second Edition ......................................................................................................xv Preface to the First Edition ........................................................................................................xvii Author ...........................................................................................................................................xxi 1. The Communications Revolution .......................................................................................1 The Big Picture .........................................................................................................................1 The Evolution of Human Communications .........................................................................5 Doomsday Scenarios ...............................................................................................................8 Global Information Flow ......................................................................................................14 Evolutionary Trends: Moore's Law.....................................................................................18 Silicon: The Master Enabler ..................................................................................................24 Micro/Nanoelectronics at the State of the Art: Nanoscale CMOS .................................28 A Parting Shot ........................................................................................................................33 Time Out: Gut Check on Your Comprehension ................................................................33 References and Notes ............................................................................................................34 2. A Matter of Scale ..................................................................................................................35 The Tyranny of Numbers......................................................................................................35 ªSeeingº versus ªImagingº the Infinitesimal ....................................................................36 The Distance Scale of the Universe .....................................................................................41 The Micro/Nanoelectronics Distance Scale .......................................................................43 The Time and Frequency Scales of Micro/Nanoelectronics ...........................................46 The Temperature and Energy Scales of Micro/Nanoelectronics ....................................53 Seeing Is Believing? ...............................................................................................................58 Time Out: Gut Check on Your Comprehension ................................................................59 References and Notes ............................................................................................................60 3. Innumerable Biographies: A Brief History of the Field ...............................................61 What History Can Teach Us .................................................................................................62 The Uniqueness of Microelectronics...................................................................................63 The Shoulders We Stand On: Some Giants of Electrical Engineering ...........................65 The Invention/Discovery of the Transistor ........................................................................77 Newsflash! ...............................................................................................................................86 How the West Was Won ........................................................................................................87 The Integrated Circuit ...........................................................................................................90 Not Invented Here .................................................................................................................92 The Rest of the Story ..............................................................................................................93 Time Out: Gut Check on Your Comprehension ................................................................97 References and Notes ............................................................................................................97 4. Widget Deconstruction #1: Smartphone ..........................................................................99 With a Broad Brush ................................................................................................................99 Nuts and Bolts ......................................................................................................................103 ix © 2016 by Taylor & Francis Group, LLC x Contents Where Are the Integrated Circuits and What Do They Do? .........................................111 Time Out: Gut Check on Your Comprehension ..............................................................118 References and Notes ..........................................................................................................118 5. Semiconductors: Lite! .........................................................................................................119 What Are Semiconductors? ................................................................................................119 What Makes Semiconductors So Special? ........................................................................121 Types of Semiconductors ....................................................................................................121 Crystal Structure ..................................................................................................................123 Energy Bands ........................................................................................................................125 Electrons and Holes in Semiconductors ...........................................................................133 Doping ...................................................................................................................................141 Drift and Diffusion Transport ...........................................................................................144 Carrier Drift .....................................................................................................................144 Carrier Diffusion .............................................................................................................148 Generation and Recombination .........................................................................................151 The Semiconductor Equations of State .............................................................................154 Time Out: Gut Check on Your Comprehension ..............................................................155 References .............................................................................................................................156 6. Widget Deconstruction #2: USB Flash Drive ................................................................157 With a Broad Brush ..............................................................................................................159 Nuts and Bolts ......................................................................................................................164 Hard Disk Drives ............................................................................................................164 RAM ..................................................................................................................................167 ROM ..................................................................................................................................172 Flash Memory ..................................................................................................................174 Where Are Integrated Circuits and What Do They Do? ................................................177 Time Out: Gut Check on Your Comprehension ...............................................................181 References and Notes ..........................................................................................................181 7. Bricks and Mortar: Micro/Nanoelectronics Fabrication .............................................183 The IC Fabrication Facility (aka ªthe Cleanroomº) .........................................................185 Crystal Growth and Epitaxy ..............................................................................................190 Semiconductor Crystals .................................................................................................191 Epitaxy ..............................................................................................................................194 Doping: Diffusion, Implantation, and Annealing ..........................................................198 Oxidation and Film Deposition .........................................................................................204 Etching and Polishing .........................................................................................................208 Photolithography .................................................................................................................213 Metalization and Interconnects .........................................................................................218 Building a Transistor ...........................................................................................................222 IC Packaging: Wirebonds, Cans, DIPs, and Flip-Chips .................................................227 3D ICs, TSVs, and SoPs ........................................................................................................233 Reliability ..............................................................................................................................237 Time Out: Gut Check on Your Comprehension ..............................................................239 References .............................................................................................................................240 © 2016 by Taylor & Francis Group, LLC