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Sensors and Microsystems [Procs, 8th Italian Conf.] PDF

616 Pages·2004·31.453 MB·English
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SENSORS AND MICROSYSTEMS Also published by World Scientific: 1s t Italian Conference on Sensors and Microsystems Edited by C. Di Natale and A. D’Amico ISBN: 981- 02-2808-2 2nd Italian Conference on Sensors and Microsystems ARTIFICIAL AND NATURAL PERCEPTION Edited by C. Di Natale, A. D’Amico and F. Davide ISBN: 981 -02-3299-3 3rd Italian Conference on Sensors and Microsystems Edited by C. Di Natale, A. D’Amico and G. Sberveglieri ISBN: 981- 02-3759-6 4th Italian Conference on Sensors and Microsystems Edited by C. Di Natale, A. D’Amico and F. Davide ISBN: 981- 02-419 9-2 5th Italian Conference on Sensors and Microsystems Extended to Mediterranean Countries Edited by C. Di Natale, A. D’Amico and P. Siciliano ISBN: 981- 02-4487-8 6th Italian Conference on Sensors and Microsystems Edited by C. Di Natale, A. D’Amico and P. Dario ISBN: 981 -02-4895-4 7th Italian Conference on Sensors and Microsystems Edited by C. Di Natale, A. D’Amico , L. Dori, G. C. Cardinali and S. Nicoletti ISBN: 981- 238-18 1 -3 Proceedings of the 8th Italian Conference SENSORS AND MICROSYSTEMS Trento, Italy 12 - 14 February 2003 Editors C. Di N a d e A. D'Amico University ofRome //TorV mgtatta" and CNR-IMM, Ittaly G. Soncini University of Trento, Ittaly I,. Ferraxio M. Zen ITC-irst, Ittaly \: World Scientific - - NEW JERSEY * LONDON SINGAPORE * SHANGHAI HONG KONG TAIPEI * BANGALORE Published by World Scientific Publishing Co. Re. Ltd. 5 Toh Tuck Link, Singapore 596224 USA oflce: Suite 202,1060 Main Street, River Edge, NJ 07661 UK office: 57 Shelton Street, Covent Garden, London WC2H 9I-E British Library Cataloguing-in-PublicationD ata A catalogue record for this book is available from the British Library. SENSORS AND MICROSYSTEMS Proceedings of the 8th Italian Conference Copyright 0 2004 by World Scientific Publishing Co. Re. Ltd. All rights reserved. This book, or parts thereof; may not be reproduced in any form or by any means, electronic or mechanical, includingphotocopying, recording or any information storage and retrieval system now known or to be invented, without written permissionfrom the Publisher. For photocopying of material in this volume, please pay a copying fee through the Copyright Clearance Center, Inc., 222 Rosewood Drive, Danvers, MA 01923, USA. In this case permission to photocopy is not required from the publisher. ISBN 981-238-747-1 Printed in Singapore CONFERENCE SPONSORS The following sponsorships of the Conference are gratefully acknowledged: Agilent Technologies, Milano Associazione Artigiani della Provincia Autonoma di Trento Associazione Industriali di Trento Electron-Mec s,~lM. ilano Camera di Cornrnercio, Industria, Artigianato e Agricoltura di Trento CCEII Centri Europei d’lmpresa e Innovazione, Trento APT-Azienda di Promozione Turistica, Trento Agenzia per lo Sviluppo di Trento Provincia Autonoma di Trento Progetto PAT/CNR “fonnazione e ricerca in rnicrosisterni” This page intentionally left blank Conference Chair Giovanni Soncini, Universita’ di Trento Mario Zen, ITC-irst Trento Steering Commitee A. D’Amico Universitci di Roma “Tor Vergata” , Chairperson of AISEM G. Martinelli Universith di Ferrara G. Sberveglieri Universith di Brescia L. Campanella Universitci di Roma “La Sapienza” U. Mastromatteo STMicroelectronics P. Siciliano CNR-IMM-IME Lecce P. De Gasperis CNR-IMM-PSM Roma A. Mignani IROE-CNR Firenze G. Soncini Universitci di Trento C. Mari Universitci di Milano M. Prudenziati Universitci di Modena Scientific Committee F. Davide Telecom Italia, Roma A. Diligenti Universitci di Pisa C. Di Natale Universitd di Roma “Tor Vergata” L. Dori CNR-IMM Bologna G. Faglia Universith di Brescia C. Malvicino CRF Orbassano M. Mascini Universitci di Firenze B. Morten Universitci di Modena G. Palleschi Universitci di Roma “Tor Vergata ” F. Villa STMicroelectronics M. Zen ITC-irst Trento Local Organisation Lorenza Ferrario ITC-irst Secretariat Loredana Panato, Marzia Lucianer, ITC, Univ. Trento Chiara Cereghini vii This page intentionally left blank FOREWORD This book gathers the proceedings of the papers presented and discussed at the 8th italian conference on Sensors and Microsystems held in Trento, from. 12 to 14 February 2003, and sponsored by the AISEM (Associazione Italiana Sensori e Microsistemi), the University of Trento, the ITC-irst and a number of companies and organization listed in the next page. As it happened in previous editions, the conference has been designed to show the pluridisciplinary character of the Italian research in the always evolving field of sensors, microsystems and actuators. In fact, aspects of chemistry, biology, electronics, material science, actuators, specials sensor applications of industrial interest were covered with a spontaneous homogeneity. In particular, the presentation of aspects of sensing actions in living cells has opened a new research direction which looks promising indeed. The conference has represented a unique forum, at national level, for fkuitful interactions among participants, as evidenced by the numerous research initiatives which have taken off during the threee days meeting. Also the AISEM school organized by the University of Trento and ITC-irst on MEMS design has had a sound success and due to this a similar experience will be reconsidered the next year. The editors would like to thank the numerous participants who have kept the conference pretty alive and all the collaborators of the local organizers for their superb job in organizing a pleasant conference. The Steering Committee, the ScientiJc Committee and the Local Organizing Committee would like to express their appreciation to Dr. P. Siciliano, who has addressed felt thoughts toward the missing of our friend and colleague Pro$ A. Rizzo, a splendid person who has supported, since its beginning, our Association. We dedicate this book to his memory as a little human touch, thinking to his extraordinary human and scientijk qualities. Arnaldo D’Amico Corrado Di Natale Giovanni Soncini Lorenza Ferrario Mario Zen IX

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